Epitaxial process chamber fireproof alarm system and epitaxial process device

Abstract

The utility model provides an epitaxial process chamber fireproof alarm system and an epitaxial process device.The fireproof alarm system comprises a closed cavity, epitaxial machine table equipment and an air cooling motor, the epitaxial machine table equipment and the air cooling motor are arranged in the closed cavity, the air cooling motor drives an impeller to rotate, and the impeller is arranged in a circulating air duct. The system further comprises a temperature probe, a contactor, a contactor start-stop device, a temperature controller, a wind pressure sensor and a main controller. And the temperature controller receives a temperature signal of the temperature probe and obtains a real-time temperature value. When the temperature controller judges that the real-time temperature value is larger than or equal to the first temperature threshold value, a closing signal is sent to the contactor starting and stopping device so as to control the contactor to be released. And the main controller receives a wind pressure signal of the wind pressure sensor to obtain a real-time wind pressure value, and when the main controller judges that the real-time wind pressure value is smaller than a wind pressure threshold value, the extension machine equipment is controlled to be shut down. The temperature of the air-cooled motor can be monitored, the air-cooled motor is shut down and cooled in time when the temperature is too high, the motor is prevented from being heated and burnt, and serious safety accidents are avoided.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and more particularly, to a fire alarm system for an epitaxial process chamber and an epitaxial process device. Background Art

[0002] The epitaxial technology is a key step in achieving high-quality crystal growth. As an important part of this technology, the performance and stability of the epitaxial machine directly affect the quality of the final product and the production efficiency.

[0003] The epitaxial machine is in a closed environment, and the equipment process temperature is as high as 1230 degrees. In addition to water cooling, the machine also has powerful air cooling. The air cooling is achieved by the cooperation of a high-power motor and an impeller. When the equipment is in the process of the process, the air flow generated by the high-power motor driving the impeller cools the process chamber. Since the process needs to maintain a constant temperature, the cooling air is not directly discharged into the power pipeline. Only a small part of the hot air is discharged each time, and a part of the cold air is replenished. Most of the air still circulates in the machine cavity. After the hot air is cooled by the heat exchanger, it is driven by the impeller to cool the process chamber.

[0004] In such a working environment, the high-power motor runs for a long time, and its own electric work generates heat. Coupled with the heat conduction of the hot air in the circulating air, a large amount of heat will be generated during the long-term operation. Coupled with the heat conduction of the hot air in the circulating air, the temperature of the motor will continue to rise, posing risks of overheating, short circuit, and even combustion.

[0005] In the prior art, the temperature of the high-power motor for air-cooling operation is not effectively monitored, and only a unified smoke sensor is used for fire monitoring. Therefore, in the prior art, when the high-power motor for air-cooling operation generates smoke, it may only be detected by the system. At this time, the motor has probably burned, and even spread to other equipment, not only causing the high-power motor to be damaged and scrapped, but also possibly causing damage to other components and equipment, seriously delaying production, and bringing serious cost losses. Summary of the Utility Model

[0006] The purpose of the embodiments of this application is to provide a fire alarm system for an epitaxial process chamber and an epitaxial process device, which can monitor the temperature of the air-cooled motor, and when the temperature is too high, timely stop the air-cooled motor to cool down, prevent the motor from overheating and catching fire, and avoid causing serious safety accidents.

[0007] In a first aspect, a fire alarm system for an epitaxial process chamber is provided, which includes an enclosed cavity, an epitaxial machine tool device and an air-cooled motor placed in the enclosed cavity. The air-cooled motor drives an impeller to rotate, and the impeller is arranged in a circulation air duct. It also includes a temperature probe, a contactor, a contactor start-stop device, a temperature controller, a wind pressure sensor and a main controller. The temperature probe is installed on the metal shell of the air-cooled motor. The contactor is placed outside the enclosed cavity, one end of which is connected to an AC power supply and the other end is connected to the air-cooled motor. The contactor start-stop device is connected to the coil of the contactor and is used to control the closing or releasing of the contactor. The temperature controller is placed outside the enclosed cavity and is circuit-connected to the temperature probe and the contactor start-stop device. The wind pressure sensor is arranged in the circulation air duct. The main controller is circuit-connected to the wind pressure sensor and the epitaxial machine tool device.

[0008] Among them, a first temperature threshold is set in the temperature controller. The temperature controller receives the temperature signal of the temperature probe and obtains a real-time temperature value. When the temperature controller determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a shutdown signal to the contactor start-stop device to control the contactor to release. A wind pressure threshold is set in the main controller. The main controller receives the wind pressure signal of the wind pressure sensor and obtains a real-time wind pressure value. When the main controller determines that the real-time wind pressure value is less than the wind pressure threshold, it controls the epitaxial machine tool device to stop.

[0009] In an implementable solution, the air-cooled motor is provided with side bearings, and the temperature probe is arranged near the side bearings.

[0010] In an implementable solution, there are multiple temperature probes, which are circumferentially distributed around the shell near the side bearings.

[0011] In an implementable solution, there are multiple temperature probes, which are arranged at various places on the shell of the air-cooled motor.

[0012] In an implementable solution, a water-cooling pipeline is arranged inside the body of the air-cooled motor. The water-cooling pipeline includes a water inlet and a water outlet, and both the water inlet and the water outlet are arranged outside the enclosed cavity.

[0013] In an implementable solution, the fire alarm system for the epitaxial process chamber includes a cooling medium circulation device, which is placed outside the enclosed cavity and is connected to the water inlet and the water outlet;

[0014] The temperature controller receives the temperature signal of the temperature probe and obtains a real-time temperature value. When the temperature controller determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a start signal to the cooling medium circulation device to control the cooling medium circulation device to work and cool down the air-cooled motor;

[0015] When the temperature controller determines that the real-time temperature value is less than the first temperature threshold, it sends a shutdown signal to the cooling medium circulation device to control the cooling medium circulation device to stop working.

[0016] In an implementable solution, the fire alarm system for the epitaxial process chamber includes a temperature display device, which is circuit-connected to a temperature probe and is used to display the real-time temperature measured by the temperature probe, and the temperature display device is arranged outside the closed cavity.

[0017] In an implementable solution, the fire alarm system for the epitaxial process chamber further includes a smoke sensor and a smoke alarm. The smoke sensor is arranged inside the closed cavity, and the smoke alarm is arranged outside the closed cavity. Both the smoke sensor and the smoke alarm are circuit-connected to a main controller;

[0018] A smoke concentration threshold is set in the main controller. The main controller obtains the real-time value of the smoke concentration inside the closed cavity through the smoke sensor; if the real-time value of the smoke concentration is greater than or equal to the smoke concentration threshold, the main controller controls the smoke alarm to send out an alarm message.

[0019] In an implementable solution, the fire alarm system for the epitaxial process chamber further includes a temperature alarm. The temperature alarm is circuit-connected to the main controller, and a temperature controller is circuit-connected to the main controller. The temperature controller sends the real-time temperature value obtained through the temperature probe to the main controller;

[0020] A second temperature threshold is set in the main controller, and the second temperature threshold is greater than the first temperature threshold. The main controller receives the real-time temperature value sent by the temperature controller; when the main controller determines that the real-time temperature value is greater than or equal to the second temperature threshold, the main controller controls the temperature alarm to send out an alarm signal.

[0021] In a second aspect, the present application further provides an epitaxial process device, including the fire alarm system for the epitaxial process chamber in the foregoing solution.

[0022] Compared with the prior art, the beneficial effects of the present application at least include:

[0023] In the fire alarm system for the epitaxial process chamber of the present application, the temperature of the air-cooled motor can be monitored through a temperature probe, and the temperature signal is transmitted to the temperature controller in real time. The temperature controller obtains the real-time temperature value by analyzing the temperature signal. When the temperature controller determines that the real-time temperature value is greater than or equal to the first temperature threshold, a shutdown signal is sent to the contactor starter to control the contactor to release, so that the air-cooled motor loses power and the air-cooled motor stops running, and its own temperature drops, thereby preventing the motor from overheating and catching fire and avoiding triggering a safety accident.

[0024] Meanwhile, after the air-cooled motor loses power and stops running, the air pressure in the circulation air duct drops or even disappears. The air pressure sensor can monitor the air pressure signal in the circulation air duct and transmit it to the main controller. The main controller converts the air pressure signal into a real-time air pressure value. When the main controller determines that the real-time air pressure value is less than the air pressure threshold, it indicates that normal air-cooled temperature control operation cannot be carried out in the enclosed cavity. Therefore, the main controller controls the external machine to stop, to ensure the subsequent processing quality, avoid further damage to the equipment, and reduce the risk of safety accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] To more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required for the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 FIG. 1 is a schematic diagram showing the composition of a first fire alarm system for an epitaxial process chamber according to an embodiment of the present application;

[0027] Figure 2 FIG. 2 is a schematic diagram showing the composition of a second fire alarm system for an epitaxial process chamber according to an embodiment of the present application;

[0028] Figure 3 FIG. 3 is a schematic diagram showing the composition of a third fire alarm system for an epitaxial process chamber according to an embodiment of the present application.

[0029] In the figures: 1, enclosed cavity; 2, air-cooled motor; 21, circulation air duct; 22, side bearing; 23, water-cooled pipeline; 231, water inlet; 232, water outlet; 3, temperature probe; 4, contactor; 5, contactor starter; 6, temperature controller; 7, air pressure sensor; 8, main controller; 9, cooling medium circulation device; 10, temperature display device; 11, smoke sensor; 12, smoke alarm; 13, temperature alarm. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0031] Accordingly, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.

[0032] As Figure 1 shown, an embodiment of the present application provides a fire alarm system for an epitaxial process chamber, including a closed cavity 1, an epitaxial machine device (not shown in the figure) placed in the closed cavity 1, and an air-cooled motor 2. The air-cooled motor 2 drives the impeller to rotate, and the impeller is arranged in the circulation air duct 21.

[0033] The fire alarm system for the epitaxial process chamber further includes a temperature probe 3, a contactor 4, a contactor starter 5, a temperature controller 6, a wind pressure sensor 7, and a main controller 8. Among them, the temperature probe 3 is installed on the metal shell of the air-cooled motor 2. The contactor 4 is placed outside the closed cavity 1, one end of which is connected to an AC power supply, and the other end is connected to the air-cooled motor 2. The contactor 4 is generally an AC contactor.

[0034] The contactor starter 5 is connected to the coil of the contactor 4 and is used to control the contactor 4 to close or release. The contactor starter 5 is an electric switch. When the contactor starter 5 is closed, it is used to connect the starting voltage to the contactor 4 so that the contactor 4 can be smoothly closed, thereby connecting the air-cooled motor 2 to the power supply. When the contactor starter 5 is disconnected, the coil of the contactor 4 loses power, so that the contactor 4 is released, disconnecting the air-cooled motor 2 from the power supply and stopping the air-cooled motor 2.

[0035] The temperature controller 6 is placed outside the closed cavity 1 and is electrically connected to the temperature probe 3 and the contactor starter 5. The wind pressure sensor 7 is arranged in the circulation air duct 21. The main controller 8 is electrically connected to the wind pressure sensor 7 and the epitaxial machine device.

[0036] Among them, a first temperature threshold is set in the temperature controller 6. The temperature controller 6 receives the temperature signal of the temperature probe 3 and obtains the real-time temperature value. When the temperature controller 6 determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a shutdown signal to the contactor starter 5 to control the contactor 4 to release. A wind pressure threshold is set in the main controller 8. The main controller 8 receives the wind pressure signal of the wind pressure sensor 7 and obtains the real-time wind pressure value. When the main controller 8 determines that the real-time wind pressure value is less than the wind pressure threshold, it controls the epitaxial machine device to stop.

[0037] In summary, in the fire alarm system for the epitaxial process chamber of the present application, the temperature of the air-cooled motor 2 can be monitored by the temperature probe 3, and the temperature signal is transmitted to the temperature controller 6 in real time. The temperature controller 6 analyzes the temperature signal to obtain the real-time temperature value. When the temperature controller 6 determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a shutdown signal to the contactor starter 5 to control the release of the contactor 4, so that the air-cooled motor 2 loses power, the air-cooled motor 2 stops running, and its own temperature drops, thereby preventing the motor from overheating and catching fire, and avoiding safety accidents.

[0038] At the same time, after the air-cooled motor 2 loses power and stops running, the air pressure in the circulation air duct 21 drops or even disappears. The air pressure sensor 7 can monitor the air pressure signal in the circulation air duct 21 and transmit it to the main controller 8. The main controller 8 converts the air pressure signal into a real-time air pressure value. When the main controller 8 determines that the real-time air pressure value is less than the air pressure threshold, it means that normal air-cooled temperature control operation cannot be carried out in the closed cavity 1 at this time. Therefore, the main controller 8 controls the epitaxial machine tool equipment to stop running to ensure the subsequent processing quality, avoid further damage to the equipment, and reduce the risk of safety accidents.

[0039] In addition, when the temperature controller 6 determines that the real-time temperature value is less than the temperature threshold, it sends a start signal to the contactor starter 5 to keep the contactor 4 closed, so as to restart the air-cooled motor 2 and restart the air-cooled circulation. After reaching the standard, the main controller 8 controls the epitaxial machine tool equipment to start again.

[0040] In this embodiment, as Figure 1 shown, the air-cooled motor 2 is provided with a side bearing 22, and the temperature probe 3 can be arranged near the side bearing 22. The bearing wears here, causing the rotor to wag and rub, which is most likely to generate heat. Arranging the temperature probe 3 here can obtain the relatively highest temperature of the air-cooled motor 2.

[0041] In this embodiment, the number of temperature probes 3 can be multiple and can be arranged at various places on the housing of the air-cooled motor 2. Preferably, it can be circumferentially distributed around the housing near the side bearing 22.

[0042] The temperature controller 6 can simultaneously monitor the temperature signals collected by multiple temperature probes 3, and obtain multiple real-time temperature values by simultaneously acquiring the temperature signals of multiple temperature probes 3. Among the numerous temperature values, the maximum value of the real-time temperature value is taken as the final current real-time temperature value. This design not only improves the fault tolerance of the system, but also significantly reduces the risk of misjudgment caused by a single probe failure or error, ensuring the accuracy and reliability of temperature monitoring. In this way, the temperature controller 6 provides a more accurate and safe temperature monitoring solution.

[0043] In this embodiment, as Figure 2As shown in the figure, a water cooling pipeline 23 can be arranged inside the body of the air-cooled motor 2. The water cooling pipeline 23 includes a water inlet 231 and a water outlet 232, and both the water inlet 231 and the water outlet 232 are arranged outside the closed cavity 1. The fire alarm system for the epitaxial process chamber further includes a cooling medium circulation device 9, which is placed outside the closed cavity 1 and is connected to the water inlet 231 and the water outlet 232.

[0044] During operation, the temperature controller 6 receives the temperature signal from the temperature probe 3 and obtains the real-time temperature value. When the temperature controller 6 determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a start signal to the cooling medium circulation device 9 to control the cooling medium circulation device 9 to work and cool down the air-cooled motor 2. When the temperature controller 6 determines that the real-time temperature value is less than the first temperature threshold, it sends a shutdown signal to the cooling medium circulation device 9 to control the cooling medium circulation device 9 to stop working.

[0045] In this embodiment, as Figure 3 shown, the fire alarm system for the epitaxial process chamber can include a temperature display device 10, which is electrically connected to the temperature probe 3 and is used to display the real-time temperature measured by the temperature probe 3, and the temperature display device 10 is arranged outside the closed cavity 1.

[0046] In this embodiment, as Figure 3 shown, the fire alarm system for the epitaxial process chamber can further include a smoke sensor 11 and a smoke alarm 12. The smoke sensor 11 is arranged inside the closed cavity 1, the smoke alarm 12 is arranged outside the closed cavity 1, and both the smoke sensor 11 and the smoke alarm 12 are electrically connected to the main controller 8. A smoke concentration threshold is set in the main controller 8. The main controller 8 obtains the real-time value of the smoke concentration inside the closed cavity 1 through the smoke sensor 11; if the real-time value of the smoke concentration is greater than or equal to the smoke concentration threshold, the main controller 8 controls the smoke alarm 12 to send out an alarm message.

[0047] Since the circuit has a faster induction transmission speed than the gas, the temperature probe 3 can obtain the temperature state of the air-cooled motor 2 faster, so as to perform timely shutdown processing on the air-cooled motor 2 with too high temperature. However, if the air-cooled motor 2 heats up too fast and has already produced an open flame, or the temperature probe 3 and the temperature controller 6 and other components fail to work, the system of this embodiment can still send out an alarm message in time through the cooperation of the smoke sensor 11 and the main controller 8. The combination of temperature monitoring and smoke monitoring plays a complementary role.

[0048] In this embodiment, as Figure 3As shown, the fire alarm system for the epitaxial process chamber may further include a temperature alarm 13. The temperature alarm 13 is electrically connected to the main controller 8, and the temperature controller 6 is electrically connected to the main controller 8. The temperature controller 6 sends the real-time temperature value obtained through the temperature probe 3 to the main controller 8. A second temperature threshold is set in the main controller 8, and the second temperature threshold is greater than the first temperature threshold. The main controller 8 receives the real-time temperature value sent by the temperature controller 6. When the main controller 8 determines that the real-time temperature value is greater than or equal to the second temperature threshold, the main controller 8 controls the temperature alarm 13 to issue an alarm signal.

[0049] When the temperature of the air-cooled motor 2 reaches the first temperature threshold, the air-cooled motor 2 has stopped running. However, it is possible that the temperature of the air-cooled motor 2 continues to rise. At this time, it is possible that the air-cooled motor 2 has not stopped running or has already caught fire, resulting in a continuous increase in temperature. At this time, by means of the main controller 8 determining that the real-time temperature value is greater than or equal to the second temperature threshold, the main controller 8 controls the temperature alarm 13 to issue an alarm signal to timely remind the staff to conduct an inspection to avoid more serious accidents and losses.

[0050] In addition, the present application also provides an epitaxial process device, including the fire alarm system for the epitaxial process chamber in the foregoing solution.

[0051] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, the present application may have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. An epitaxial process chamber fire alarm system, characterized in that, It includes a closed cavity (1), an epitaxial machine equipment and an air-cooled motor (2) placed in the closed cavity (1). The air-cooled motor (2) drives the impeller to rotate, and the impeller is arranged in the circulation air duct (21). It further includes: A temperature probe (3), which is installed on the metal shell of the air-cooled motor (2). A contactor (4), which is placed outside the closed cavity (1). One end of it is connected to an AC power supply, and the other end is connected to the air-cooled motor (2). A contactor starter (5), which is connected to the coil of the contactor (4) and is used to control the contactor (4) to close or release. A temperature controller (6), which is placed outside the closed cavity (1) and is circuit-connected to the temperature probe (3) and the contactor starter (5). An air pressure sensor (7), which is arranged in the circulation air duct (21). A main controller (8), which is circuit-connected to the air pressure sensor (7) and the epitaxial machine equipment. Among them, a first temperature threshold is set in the temperature controller (6). The temperature controller (6) receives the temperature signal of the temperature probe (3) and obtains the real-time temperature value. When the temperature controller (6) determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a shutdown signal to the contactor starter (5) to control the contactor (4) to release. A wind pressure threshold is set in the main controller (8). The main controller (8) receives the wind pressure signal of the wind pressure sensor (7) to obtain the real-time wind pressure value. When the main controller (8) determines that the real-time wind pressure value is less than the wind pressure threshold, it controls the epitaxial machine equipment to stop.

2. The fire alarm system for an epitaxial process chamber according to claim 1, wherein The air-cooled motor (2) is provided with a side bearing (22), and the temperature probe (3) is arranged near the side bearing (22).

3. The fire alarm system for the epitaxial process chamber according to claim 2, wherein The number of the temperature probes (3) is multiple, and they are distributed circumferentially around the shell near the side bearing (22).

4. The fire alarm system for an epitaxial process chamber according to claim 1, wherein The number of the temperature probes (3) is multiple, and they are arranged at various places on the shell of the air-cooled motor (2).

5. The fire alarm system for an epitaxial process chamber according to claim 1, wherein A water-cooling pipeline (23) is arranged inside the body of the air-cooled motor (2). The water-cooling pipeline (23) includes a water inlet (231) and a water outlet (232), and both the water inlet (231) and the water outlet (232) are arranged outside the closed cavity (1).

6. The fire alarm system for an epitaxial process chamber according to claim 5, wherein The epitaxial process chamber fire alarm system includes a cooling medium circulation device (9). The cooling medium circulation device (9) is placed outside the closed cavity (1) and is connected to the water inlet (231) and the water outlet (232). The temperature controller (6) receives the temperature signal of the temperature probe (3) and obtains the real-time temperature value. When the temperature controller (6) determines that the real-time temperature value is greater than or equal to the first temperature threshold, it sends a start signal to the cooling medium circulation device (9) to control the cooling medium circulation device (9) to work and cool down the air-cooled motor (2). When the temperature controller (6) determines that the real-time temperature value is less than the first temperature threshold, it sends a shutdown signal to the cooling medium circulation device (9) to control the cooling medium circulation device (9) to stop working.

7. The fire alarm system for an epitaxial process chamber according to claim 1, characterized in that, The fire alarm system for the epitaxial process chamber includes a temperature display device (10), which is electrically connected to the temperature probe (3) and is used to display the real-time temperature measured by the temperature probe (3), and the temperature display device (10) is arranged outside the closed cavity (1).

8. The fire alarm system for an epitaxial process chamber according to claim 1, wherein The fire alarm system for the epitaxial process chamber further includes a smoke sensor (11) and a smoke alarm (12). The smoke sensor (11) is arranged inside the closed cavity (1), and the smoke alarm (12) is arranged outside the closed cavity (1). Both the smoke sensor (11) and the smoke alarm (12) are electrically connected to the main controller (8); A smoke concentration threshold is set in the main controller (8). The main controller (8) obtains the real-time value of the smoke concentration inside the closed cavity (1) through the smoke sensor (11); if the real-time value of the smoke concentration is greater than or equal to the smoke concentration threshold, the main controller (8) controls the smoke alarm (12) to send out an alarm message.

9. The fire alarm system for an epitaxial process chamber according to claim 1, wherein The fire alarm system for the epitaxial process chamber further includes a temperature alarm (13). The temperature alarm (13) is electrically connected to the main controller (8), and the temperature controller (6) is electrically connected to the main controller (8). The temperature controller (6) sends the real-time temperature value obtained through the temperature probe (3) to the main controller (8); A second temperature threshold is set in the main controller (8), and the second temperature threshold is greater than the first temperature threshold. The main controller (8) receives the real-time temperature value sent by the temperature controller (6); when the main controller (8) determines that the real-time temperature value is greater than or equal to the second temperature threshold, the main controller (8) controls the temperature alarm (13) to send out an alarm signal.

10. An epitaxial process device, characterized in that, It includes the fire alarm system for the epitaxial process chamber according to any one of claims 1-8.

Images