Filtering device for producing high-purity reagent sulfuric acid

Abstract

The utility model relates to the technical field of filtration, and particularly discloses a filtering device for high-purity reagent sulfuric acid production, which comprises a filter cartridge, a grinding component is arranged in the filter cartridge, and the grinding component comprises a coarse filter disc fixedly mounted in the filter cartridge; a tooth groove is fixedly formed in the edge of the lower end surface of the coarse filtering disc; a transmission shaft is rotatably mounted from the upper end face to the interior of the filter cartridge, a grinding shaft is rotatably mounted on the circumferential surface of the transmission shaft and located below the coarse filter disc, a gear is fixedly mounted at the end, away from the transmission shaft, of the grinding shaft, and the gear is meshed with the tooth groove. And secondly, when the sulfuric acid enters the fine filtering disc after coarse filtering, the high-purity sulfuric acid is damaged again under the action of a plurality of structures such as a tooth groove and a grinding shaft, so that the sulfuric acid can be further prevented from being gathered.

Description

Technical Field

[0001] The utility model relates to the technical field of filtration, in particular to a filtration device for producing high-purity reagent sulfuric acid. Background Art

[0002] Filtration equipment for the production of high-purity sulfuric acid is specifically designed to improve sulfuric acid purity and remove impurities. It is widely used in the preparation of high-purity chemicals in the semiconductor and large-scale integrated circuit industries. In microelectronics manufacturing, high-purity sulfuric acid is used for cleaning and etching the surfaces of chips and silicon wafers. Its purity and cleanliness have a crucial impact on the performance and reliability of integrated circuits.

[0003] However, high-purity sulfuric acid is inherently sticky during the filtration process. Therefore, when using conventional filtration devices, sulfuric acid may stick to the inside of the filter holes, thereby affecting the final filtration effect of the filtration device.

[0004] For example, a Chinese patent (publication number: CN114832463B) discloses a filtering device for producing high-grade sulfuric acid, which relates to the field of sulfuric acid production equipment and includes a base, a filter box fixedly connected to one side of the top of the base, and a liquid inlet pipe fixedly connected to the top of one side of the filter box. This patent, through the action of multiple structures, can clean the filter plate inside the filter box and filter the gas, but ignores the most important problem. Due to the adhesion of high-grade sulfuric acid, the filter holes on the filter plate will be gradually blocked by sulfuric acid during the filtration process, resulting in a gradual decline in its filtering effect until it is completely unable to filter.

[0005] Therefore, we propose a filtering device for producing high-purity reagent sulfuric acid. Summary of the Invention

[0006] The purpose of the utility model is to provide a filtering device for the production of high-purity reagent sulfuric acid, which can clean the upper and lower end surfaces of the coarse filter disc in real time under the action of a cleaning scraper, so as to avoid the sulfuric acid from gathering together. Secondly, when entering the fine filter disc after coarse filtration, the high-purity sulfuric acid will be destroyed again under the action of multiple structures such as tooth grooves and crushing shafts, so as to further prevent the sulfuric acid from gathering, so that the sulfuric acid is filtered by the fine filter disc under the action of its own gravity; finally, the temperature inside the filter cylinder can be guaranteed in real time under the action of a heating tube, so as to avoid the gathering of high-purity sulfuric acid. With the cooperation of the above-mentioned multiple structures, the filtration of sulfuric acid can be added to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above object, the present invention provides the following technical solution: a filtering device for producing high-purity reagent sulfuric acid, comprising a filter cartridge, wherein a crushing assembly is provided inside the filter cartridge, and the crushing assembly comprises a coarse filter disc fixedly mounted inside the filter cartridge;

[0008] The lower end surface edge of the coarse filter disc is fixedly provided with a tooth groove;

[0009] A transmission shaft is rotatably mounted on the upper end surface of the filter cartridge, a crushing shaft is rotatably mounted on the circumferential surface of the transmission shaft below the coarse filter disc, and a gear is fixedly mounted on the end of the crushing shaft away from the transmission shaft, the gear meshing with the tooth groove;

[0010] A fine filter disc is slidably mounted inside the filter cartridge below the coarse filter disc, and the crushing shaft can roll on the upper end surface of the fine filter disc.

[0011] Preferably, fan blades are fixedly mounted on the circumferential surface of the transmission shaft above the coarse filter disc.

[0012] Preferably, U-shaped grooves are fixedly installed on the upper end surface and the lower end surface of the coarse filter disc on the circumferential surface of the transmission shaft, and the first motor is fixedly installed on the outer side surface of the two U-shaped grooves away from the transmission shaft, and a driving wheel is fixedly installed on the output shaft of the first motor.

[0013] Preferably, a cleaning scraper is slidably installed inside the two U-shaped grooves, and a gear groove is formed on the end surface of the two cleaning scrapers that are away from each other, and the driving wheels are engaged with adjacent gear grooves.

[0014] Preferably, a feed cavity is fixedly installed inside the filter cartridge below the fine filter disc, and a heating tube is fixedly installed around the outer surface of the feed cavity inside the filter cartridge. A U-shaped rod is slidably installed on the circumferential surface of the filter cartridge to the inside, and both ends of the opening of the U-shaped rod are parallel to the two adjacent cleaning scrapers.

[0015] Preferably, a filter tube is fixedly mounted on the upper end surface of the filter cartridge, the filter tube is communicated with the interior of the filter cartridge, a main motor is fixedly mounted on the upper end of the filter tube, and the output shaft of the main motor is fixedly connected to the upper end of the transmission shaft.

[0016] Preferably, a mounting seat is fixedly mounted on the circumferential surface of the lower end of the filter cartridge, and a discharge pipe is fixedly mounted at the center position of the lower end surface of the filter cartridge, and the discharge pipe is connected to the lower end of the discharge cavity.

[0017] Preferably, a feed pipe is fixedly mounted on the upper end surface of the filter cartridge, a water spray pipe is fixedly mounted on the upper end surface of the filter cartridge on one side of the feed pipe, and the lower end of the water spray pipe extends to the interior of the filter cartridge.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. Compared with the traditional filtering device, the utility model can clean the upper and lower end surfaces of the coarse filter disc in real time under the action of the cleaning scraper, so as to avoid the accumulation of sulfuric acid. Secondly, when entering the fine filter disc after coarse filtration, the high-purity sulfuric acid will be destroyed again under the action of multiple structures such as the tooth groove and the crushing shaft, so as to further prevent the sulfuric acid from agglomerating, so that the sulfuric acid is filtered by the fine filter disc under the action of its own gravity. Finally, the temperature inside the filter cylinder can be guaranteed in real time under the action of the heating tube, so as to avoid the accumulation of high-purity sulfuric acid. With the cooperation of the above-mentioned multiple structures, the filtration of sulfuric acid can be improved.

[0020] 2. Compared with traditional filtering devices on the market, the utility model can, during use, on the one hand carry out spreading operation with sulfuric acid, and on the other hand carry out cleaning operation of the coarse filter disc, thereby ensuring the filtering effect of the coarse filter disc; secondly, the cleaning scraper can be changed during the cleaning process without replacing the entire coarse filter disc. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is an external view of the filter cartridge of the present utility model;

[0023] Figure 2 This is a diagram showing the internal structure of the filter cartridge of the present utility model;

[0024] Figure 3 This is a schematic diagram of the filter tube of the present utility model;

[0025] Figure 4 This is a schematic diagram of the crushing shaft of the present utility model;

[0026] Figure 5 This is a schematic diagram of a cleaning scraper of the present utility model;

[0027] Figure 6 This is a schematic diagram of a fine filter disc of the present utility model;

[0028] Description of reference numerals:

[0029] 1. Mounting base; 2. Filter cartridge; 21. Feed pipe; 22. Water spray pipe; 23. Discharge pipe; 24. Filter pipe;

[0030] 3. Main motor; 31. Fan blades; 32. Drive shaft;

[0031] 11. Crushing assembly; 4. Coarse filter disc; 41. Tooth groove; 51. U-shaped groove; 52. First motor; 53. Drive wheel; 54. Cleaning scraper; 55. Gear groove; 61. Crushing shaft; 62. Gear; 7. Fine filter disc;

[0032] 8. Feeding cavity; 9. U-shaped insert rod; 10. Heating tube. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] See also Figures 2 to 5 , the utility model provides a technical solution:

[0035] A filtering device for producing high-purity reagent sulfuric acid includes a filter cartridge 2, wherein a crushing assembly 11 is provided inside the filter cartridge 2, and the crushing assembly 11 includes a coarse filter disc 4 fixedly mounted inside the filter cartridge 2, and a tooth groove 41 is fixedly provided at the edge of the lower end surface of the coarse filter disc 4. A transmission shaft 32 is rotatably mounted from the upper end surface of the filter cartridge 2 to the inside, and a crushing shaft 61 is rotatably mounted on the circumferential surface of the transmission shaft 32 below the coarse filter disc 4, and a gear 62 is fixedly mounted on the end of the crushing shaft 61 away from the transmission shaft 32, and the gear 62 is engaged with the tooth groove 41. A fine filter disc 7 is slidably mounted inside the filter cartridge 2 below the coarse filter disc 4, and the crushing shaft 61 can roll on the upper end surface of the fine filter disc 7.

[0036] The fan blades 31 are fixedly installed on the circumferential surface of the transmission shaft 32 above the coarse filter disc 4, and U-shaped grooves 51 are fixedly installed on the upper end surface and the lower end surface of the circumferential surface of the transmission shaft 32 located at the coarse filter disc 4. The first motor 52 is fixedly installed on the outer side surface of the two U-shaped grooves 51 at one end away from the transmission shaft 32, and a driving wheel 53 is fixedly installed on the output shaft of the first motor 52. Cleaning scrapers 54 are slidably installed inside the two U-shaped grooves 51, and a gear groove 55 is provided on the end surface away from the two cleaning scrapers 54, and the driving wheels 53 are meshed with adjacent gear grooves 55.

[0037] By adopting the above technical solution, when in use, the feed pipe 21 is connected to the external plastic pipe, and then the sulfuric acid is allowed to enter the interior of the filter tube 2 through the feed pipe 21 under the action of external pressure pump and other equipment. At this time, the main motor 3 is started, and the output shaft of the main motor 3 will rotate synchronously with the transmission shaft 32, so that the transmission shaft 32 can rotate synchronously with the fan blades 31, allowing the gas in the sulfuric acid to enter the interior of the filter tube 24 under the disturbance of the fan blades 31. A filter gasket is installed inside the filter tube 24 to filter the sulfuric acid gas and prevent the gas from polluting the air.

[0038] Secondly, sulfuric acid enters the interior of the filter cartridge 2 and falls onto the upper end surface of the coarse filter disc 4. At this time, the sulfuric acid will be primarily filtered by the coarse filter disc 4, and the drive shaft 32 will rotate synchronously with the two U-shaped grooves 51, so that the U-shaped grooves 51 can rotate synchronously with the cleaning scraper 54, so that the viscous sulfuric acid can be spread out and filtered.

[0039] Then, the sulfuric acid filtered by the coarse filter disc 4 will fall to the upper end surface of the fine filter disc 7. At this time, the transmission shaft 32 will rotate synchronously with the crushing shaft 61. During the rotation, its tooth groove 41 will drive the gear 62 to rotate synchronously, so that the gear 62 can rotate synchronously with the crushing shaft 61, so that the crushing shaft 61 can destroy the sulfuric acid and prevent the sulfuric acid from gathering together. In addition, during use, the heating tube 10 will operate at the same time to ensure the temperature inside the filter cylinder 2 and further prevent the sulfuric acid from gathering together. Under the action of the above-mentioned multiple structures, the sulfuric acid will not adhere to the surface of the equipment during the filtration process, so as to avoid the failure of the filter device and speed up the filtration speed of the filter device.

[0040] Specifically, such as Figures 1 to 6 As shown, the interior of the filter cartridge 2 is located below the fine filter disc 7 and is fixedly installed with a feed cavity 8. The interior of the filter cartridge 2 is located on the outer surface of the feed cavity 8 and is fixedly installed with a heating tube 10. A U-shaped plug rod 9 is slidably installed on the circumferential surface of the filter cartridge 2 to the interior, and both ends of the opening of the U-shaped plug rod 9 are parallel to the two adjacent cleaning scrapers 54; a filter tube 24 is fixedly installed on the upper end surface of the filter cartridge 2, and the filter tube 24 is connected with the interior of the filter cartridge 2. The upper end of the filter tube 24 is fixedly installed with a main motor 3, and the output shaft of the main motor 3 is fixedly connected to the upper end of the transmission shaft 32.

[0041] A mounting seat 1 is fixedly installed on the circumferential surface of the lower end of the filter cartridge 2, a discharge pipe 23 is fixedly installed at the center position of the lower end surface of the filter cartridge 2, the discharge pipe 23 is connected with the lower end of the discharge cavity 8, a feed pipe 21 is fixedly installed on the upper end surface of the filter cartridge 2, and a water spray pipe 22 is fixedly installed on the upper end surface of the filter cartridge 2 on one side of the feed pipe 21, and the lower end of the water spray pipe 22 extends to the interior of the filter cartridge 2.

[0042] By adopting the above technical solution, when in use, the output shaft of the main motor 3 rotates synchronously with the transmission shaft 32, and the transmission shaft 32 rotates synchronously with the U-shaped groove 51, so that the U-shaped groove 51 can carry the cleaning scraper 54 to clean the coarse filter disc 4.

[0043] Then, after the cleaning is completed, the transmission shaft 32 moves with the U-shaped groove 51 to the position of the U-shaped plug 9, and the user pulls out the U-shaped plug 9. At this time, the first motor 52 is started, and the output shaft of the first motor 52 will rotate synchronously with the driving wheel 53, so that the driving wheel 53 can drive the cleaning scraper 54 to move to the outside of the filter barrel 2. At this time, the operator can replace the cleaning scraper 54, and the external cleaning water can be allowed to enter the interior of the filter barrel 2 through the water spray pipe 22 to meet the cleaning needs.

[0044] Secondly, during use, the user can directly pull out the fine filter disc 7 from the inside of the filter cartridge 2 for fine cleaning or replacement to meet production needs; during use, sulfuric acid can be used for spreading operations on the one hand, and the coarse filter disc 4 can be cleaned on the other hand, so as to ensure the filtering effect of the coarse filter disc 4; secondly, the cleaning scraper 54 can be changed during the cleaning process without replacing the entire coarse filter disc 4.

[0045] Working principle: First, the external sulfuric acid enters the interior of the filter tube 2 through the feed pipe 21. At this time, the main motor 3 is started, and the output shaft of the main motor 3 rotates synchronously with the fan blades 31, so that the gas flows out of the interior of the filter tube 2.

[0046] Secondly, the cleaning scraper 54 is driven to crush the viscous sulfuric acid to speed up the filtration of the sulfuric acid.

[0047] Then, under the action of the driving wheel 53, the crushing shaft 61 is rotated, so that the sulfuric acid can quickly pass through the fine filter disc 7.

[0048] Finally, the upper end surface of the coarse filter disc 4 can be cleaned by the cleaning scraper 54 and other structures, and the fine filter disc 7 can be directly pulled out for cleaning and replacement.

[0049] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A filtration device for producing high-purity reagent sulfuric acid, comprising a filter cartridge (2), characterized in that: A crushing assembly (11) is provided inside the filter cartridge (2), and the crushing assembly (11) comprises a coarse filter disc (4) fixedly mounted inside the filter cartridge (2); A tooth groove (41) is fixedly provided at the edge of the lower end surface of the coarse filter disc (4); A transmission shaft (32) is rotatably mounted on the upper end surface of the filter cartridge (2) and is located below the coarse filter disc (4). A crushing shaft (61) is rotatably mounted on the circumferential surface of the transmission shaft (32). A gear (62) is fixedly mounted on one end of the crushing shaft (61) away from the transmission shaft (32). The gear (62) is meshed with the tooth groove (41). A fine filter disc (7) is slidably mounted inside the filter cartridge (2) below the coarse filter disc (4), and the crushing shaft (61) is capable of rolling on the upper end surface of the fine filter disc (7).

2. A filtering device for producing high-purity sulfuric acid as a reagent according to claim 1, characterized in that: A fan blade (31) is fixedly mounted on the circumferential surface of the transmission shaft (32) above the coarse filter disc (4).

3. A filtering device for producing high-purity reagent sulfuric acid according to claim 1, characterized in that: U-shaped grooves (51) are fixedly mounted on the upper and lower end surfaces of the circumferential surface of the transmission shaft (32), and a first motor (52) is fixedly mounted on the outer side surfaces of the two U-shaped grooves (51) away from the transmission shaft (32). A driving wheel (53) is fixedly mounted on the output shaft of the first motor (52).

4. A filtering device for producing high-purity sulfuric acid as a reagent according to claim 3, characterized in that: A cleaning scraper (54) is slidably mounted inside the two U-shaped grooves (51), and gear grooves (55) are provided on the end surfaces of the two cleaning scrapers (54) that are away from each other, and the driving wheels (53) are meshed with adjacent gear grooves (55).

5. A filtering device for producing high-purity sulfuric acid as a reagent according to claim 1, characterized in that: A feed cavity (8) is fixedly installed inside the filter cartridge (2) below the fine filter disc (7), and a heating tube (10) is fixedly installed around the outer surface of the feed cavity (8) inside the filter cartridge (2). A U-shaped insertion rod (9) is slidably installed on the circumferential surface of the filter cartridge (2) to the inside, and both ends of the opening of the U-shaped insertion rod (9) are parallel to two adjacent cleaning scrapers (54).

6. A filtering device for producing high-purity reagent sulfuric acid according to claim 1, characterized in that: A filter tube (24) is fixedly mounted on the upper end surface of the filter cartridge (2), the filter tube (24) being connected to the interior of the filter cartridge (2), a main motor (3) being fixedly mounted on the upper end of the filter tube (24), and an output shaft of the main motor (3) being fixedly connected to the upper end of the transmission shaft (32).

7. The filtering device for producing high-purity sulfuric acid as a reagent according to claim 5, characterized in that: A mounting seat (1) is fixedly mounted on the circumferential surface of the lower end of the filter cartridge (2), and a discharge pipe (23) is fixedly mounted at the center of the lower end of the filter cartridge (2), wherein the discharge pipe (23) is connected to the lower end of the discharge cavity (8).

8. The filtering device for producing high-purity sulfuric acid as a reagent according to claim 1, characterized in that: A feed pipe (21) is fixedly mounted on the upper end surface of the filter cartridge (2), and a water spray pipe (22) is fixedly mounted on the upper end surface of the filter cartridge (2) on one side of the feed pipe (21), with the lower end of the water spray pipe (22) extending into the interior of the filter cartridge (2).

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