Valve cover of isolating valve cylinder body

Abstract

The utility model relates to the technical field of semiconductor integrated circuits, in particular to an isolating valve cylinder body valve cover. The isolating valve cylinder body valve cover comprises a front face and a back face which are opposite, and the front face of the isolating valve cylinder body valve cover is smooth. A circle of protruding rib is formed on the back face of the isolating valve cylinder body valve cover, a right-angle-shaped step is formed by the peripheral face of the protruding rib and the back face of the isolating valve cylinder body valve cover, and a sealing ring is arranged on the right-angle-shaped step. And the inner circumferential surfaces of the convex ribs are encircled to form recesses. According to the valve cover of the isolating valve cylinder body, the problems that the sealing effect of the valve cover of the isolating valve cylinder body is easily reduced due to frequent movement of a cavity isolating valve, the cylinder body is easily exposed, and a conveying path cannot be effectively closed in the prior art can be solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor integrated circuit technology, and in particular to a valve cover of an isolation valve cylinder. Background Art

[0002] During the semiconductor integrated circuit manufacturing process, wafers need to be processed in different vacuum processing chambers. A transmission path is connected between the different vacuum processing chambers. A cavity isolation valve is provided in the transmission path. The opening and closing of the cavity isolation valve controls the connection and isolation between the different vacuum processing chambers.

[0003] When a wafer is transferred from one vacuum processing chamber to another vacuum processing chamber, the transfer path between the two vacuum processing chambers needs to be opened or closed by a cavity isolation valve.

[0004] However, the frequent movement of the cavity isolation valve can easily reduce the sealing effect of the isolation valve cylinder valve cover, easily cause leakage outside the cylinder body, and fail to effectively close the transmission path. Summary of the Invention

[0005] The present application provides an isolation valve cylinder valve cover, which can solve the problem in the related art that the frequent movement of the cavity isolation valve easily leads to reduced sealing effect of the isolation valve cylinder valve cover, easily causing leakage outside the cylinder body and failure to effectively close the transmission path.

[0006] In order to solve the technical problem in the background technology, the present application provides an isolation valve cylinder valve cover, wherein the isolation valve cylinder valve cover comprises a front surface and a back surface opposite to each other, and the front surface of the isolation valve cylinder valve cover is smooth;

[0007] A circle of convex ribs is formed on the back of the isolation valve cylinder valve cover, and the outer peripheral surface of the convex ribs forms a right-angled step with the back of the isolation valve cylinder valve cover, and a sealing ring is provided on the right-angled step;

[0008] The inner peripheral surface of the convex rib is surrounded to form a depression.

[0009] Optionally, convex corners are formed at four corners of the valve cover of the isolation valve cylinder.

[0010] Optionally, a fastener is provided at the convex corner position.

[0011] Optionally, the rib is in a circular ring shape.

[0012] Optionally, the isolation valve cylinder valve cover comprises an upper edge portion and a lower edge portion opposite to each other, the upper edge portion extending upward from the upper side of the rib, and the lower edge portion extending downward from the lower side of the rib;

[0013] The upper edge portion includes a first edge and a second edge, wherein the first edge and the second edge intersect to form an upper edge portion in an outwardly convex triangle;

[0014] The lower edge portion includes a third edge and a fourth edge, and the third edge and the fourth edge intersect to form an outwardly convex triangular lower edge portion.

[0015] Optionally, the isolation valve cylinder valve cover includes a left edge portion and a right edge portion opposite to each other, the left edge portion extending leftward from the left side of the rib, and the right edge portion extending rightward from the right side of the rib.

[0016] Optionally, the edges of the left edge portion and the right edge portion are arc surfaces.

[0017] The technical solution of the present application includes at least the following advantages: by forming a circle of ribs on the back of the isolation valve cylinder valve cover, the strength of the isolation valve cylinder valve cover is improved to prevent the isolation valve cylinder valve cover from being damaged by the operation of the isolation valve. The outer peripheral surface of the rib forms a right-angled step with the back of the isolation valve cylinder valve cover, and the sealing ring is arranged on the right-angled step to improve the firmness of the sealing ring attached to the outer peripheral surface of the rib and prevent the sealing ring from falling off. The inner peripheral surface of the rib is surrounded to form a depression to improve the toughness of the isolation valve cylinder valve cover. The isolation valve cylinder valve cover with improved toughness and strength can more effectively resist the impact of gas in the cylinder, improve the reliability of the isolation seal of the isolation valve cylinder valve cover and the service life of the isolation valve cylinder valve cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0019] Figure 1 A schematic diagram of the back structure of the isolation valve cylinder valve cover provided in one embodiment of the present application is shown;

[0020] Figure 2 A schematic diagram of the front structure of the isolation valve cylinder valve cover provided in one embodiment of the present application is shown;

[0021] Figure 3 Shown Figure 1 AA section structure diagram in . DETAILED DESCRIPTION

[0022] The following is a clear and complete description of the technical solutions in this application in conjunction with the accompanying drawings. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this application.

[0023] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal connections between two components; they can refer to wireless connections or wired connections. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0026] Figure 1 The figure shows the back structure of the isolation valve cylinder valve cover provided by one embodiment of the present application. Figure 2 The figure shows the front structure diagram of the isolation valve cylinder valve cover provided by one embodiment of the present application. Figure 3 Shown Figure 1 AA section structure diagram in .

[0027] from Figure 1 and Figure 2 As can be seen in the figure, the isolation valve cylinder valve cover comprises a front face 110 and a back face 120 opposite to each other, and the front face 110 of the isolation valve cylinder valve cover is smooth.

[0028] The back side 120 of the isolation valve cylinder valve cover forms a circle of ribs 130. The outer peripheral surface of the ribs 130 and the back side 110 of the isolation valve cylinder valve cover form a right-angled step 140. A sealing ring 200 is provided on the right-angled step 140.

[0029] The inner circumference of the rib 130 surrounds and forms a recess 150 .

[0030] When in use, the isolation valve cylinder valve cover is installed at the open end of the isolation valve cylinder to seal the opening of the isolation valve cylinder. After the isolation valve cylinder valve cover is installed at the open end of the isolation valve cylinder, the ribs on the isolation valve cylinder valve cover extend into the isolation valve cylinder, and the sealing ring is tightly attached to the edge of the open end to seal the open end.

[0031] This embodiment forms a circle of ribs on the back of the isolation valve cylinder bonnet to increase the strength of the isolation valve cylinder bonnet and prevent damage to the isolation valve cylinder bonnet due to the operation of the isolation valve. The outer circumference of the rib forms a right-angled step with the back of the isolation valve cylinder bonnet. The sealing ring is arranged on the right-angled step to increase the firmness of the sealing ring attached to the outer circumference of the rib and prevent the sealing ring from falling off. The inner circumference of the rib is surrounded to form a depression to increase the toughness of the isolation valve cylinder bonnet. The isolation valve cylinder bonnet with improved toughness and strength can more effectively resist the impact of gas in the cylinder, thereby improving the reliability of the isolation seal of the isolation valve cylinder bonnet and the service life of the isolation valve cylinder bonnet.

[0032] In order to further improve the reliability of the isolation seal of the valve cylinder body valve cover and the service life of the isolation valve cylinder body valve cover, convex corners 300 are formed at the corners of the isolation valve cylinder body valve cover, and fasteners 400 are provided at the convex corners.

[0033] When the isolation valve cylinder bonnet is installed on the open end of the isolation valve cylinder, the convex corner covers the outer periphery of the open end of the isolation valve cylinder, and the isolation valve cylinder bonnet is tightly attached to the open end of the isolation valve cylinder by fasteners.

[0034] In order to improve the strength of the rib and avoid the problem of stress concentration caused by the impact of gas in the cylinder, the rib is annular. The annular rib has no corners, thereby avoiding the problem of stress concentration caused by the impact of gas in the cylinder.

[0035] Illustratively, the isolation valve cylinder bonnet includes an upper edge portion 510 and a lower edge portion 520 opposite to each other, wherein the upper edge portion 510 extends upward from the upper side of the rib 130 , and the lower edge portion 520 extends downward from the lower side of the rib.

[0036] The upper edge portion 510 includes a first edge 511 and a second edge 512 , wherein the first edge 511 and the second edge 512 intersect to form the upper edge portion 510 in an outwardly convex triangle shape;

[0037] The lower edge portion 520 includes a third edge 521 and a fourth edge 522 , and the third edge 521 and the fourth edge 522 intersect to form the lower edge portion 520 in an outwardly convex triangle.

[0038] The upper edge of the outward convex triangle is formed by the intersection of the first edge and the second edge, and the upper edge extends upward from the upper side of the convex rib. The lower edge of the outward convex triangle is formed by the intersection of the third edge and the fourth edge, and the lower edge extends downward from the lower side of the convex rib. This allows the isolation valve cylinder bonnet to withstand stronger impact force when it is installed at the open end of the isolation valve cylinder.

[0039] The isolation valve cylinder valve cover includes a left edge portion and a right edge portion opposite to each other. The left edge portion extends leftward from the left side of the rib, and the right edge portion extends rightward from the right side of the rib.

[0040] The edges of the left edge portion and the right edge portion are arc surfaces.

[0041] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of this application.

Claims

1. An isolation valve cylinder bonnet, characterized in that: The isolation valve cylinder valve cover comprises a front face and a back face opposite to each other, and the front face of the isolation valve cylinder valve cover is smooth; A circle of convex ribs is formed on the back of the isolation valve cylinder valve cover, and the outer peripheral surface of the convex ribs forms a right-angled step with the back of the isolation valve cylinder valve cover, and a sealing ring is provided on the right-angled step; The inner peripheral surface of the convex rib is surrounded to form a depression.

2. The isolation valve cylinder bonnet according to claim 1, wherein: Convex corners are formed on the four corners of the valve cover of the isolation valve cylinder.

3. The isolation valve cylinder bonnet according to claim 2, wherein: A fastener is provided at the convex corner position.

4. The isolation valve cylinder bonnet according to claim 1, wherein: The convex rib is in a circular shape.

5. The isolation valve cylinder bonnet according to claim 1, wherein: The isolation valve cylinder bonnet comprises an upper edge portion and a lower edge portion opposite to each other, wherein the upper edge portion extends upward from the upper side of the rib, and the lower edge portion extends downward from the lower side of the rib; The upper edge portion includes a first edge and a second edge, wherein the first edge and the second edge intersect to form an upper edge portion in an outwardly convex triangle; The lower edge portion includes a third edge and a fourth edge, and the third edge and the fourth edge intersect to form an outwardly convex triangular lower edge portion.

6. The isolation valve cylinder bonnet according to claim 1, wherein: The isolation valve cylinder valve cover includes a left edge portion and a right edge portion opposite to each other. The left edge portion extends leftward from the left side of the rib, and the right edge portion extends rightward from the right side of the rib.

7. The isolation valve cylinder bonnet according to claim 6, wherein: The edges of the left edge portion and the right edge portion are arc surfaces.

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