Device for detecting lens wave aberration through deflection angle

Abstract

The utility model provides a device for detecting the wave aberration of a lens by a deflection angle, belongs to the technical field of optical detection, and solves the problem that the existing optical detection system cannot meet the optical index that a specific angle is formed between the light of a detection light path and an objective lens to be detected for detection, and is characterized in that a laser interferometer is fixedly arranged on an optical platform; the height adjusting table is fixedly arranged on the optical platform, and the first reflecting mirror is arranged on the height adjusting table; the second reflecting mirror is arranged on the main supporting frame through an angle adjusting structure; the first six-dimensional adjusting platform is fixedly arranged on the main supporting frame, and the third reflecting mirror is arranged on the first six-dimensional adjusting platform; the five-dimensional adjusting table is fixedly arranged on the optical platform, and the objective lens to be measured is arranged on the five-dimensional adjusting table; the reflecting ball bowl is arranged on the second six-dimensional adjusting platform; a light beam emitted by the laser interferometer sequentially passes through the first reflector, the second reflector, the third reflector, the objective lens to be measured and the reflecting spherical bowl and finally returns to the laser interferometer. The angle between the optical axis of the detection optical path and the optical axis of the to-be-detected objective can be adjusted.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical detection, in particular to a device for detecting the wave aberration of a lens by using a deflection angle. Background Art

[0002] Waveform aberration detection devices are used in various optical systems and play an important role. In most cases, the optical path of the optical detection system is horizontal and vertical to detect the optical indicators of the lens. After fine-tuning and alignment, the detection optical path does not need to be adjusted again. However, in special cases, the optical axis of the detection light path needs to be incident at a certain angle with the optical axis of the objective lens to perform optical indicator detection. However, existing optical detection systems cannot meet the requirement of detecting optical indicators at a specific angle between the detection light path and the objective lens. Utility Model Content

[0003] In view of this, in order to solve the problem that the existing optical detection system cannot meet the requirements of detecting optical indicators when the light in the detection light path and the objective lens to be tested form a specific angle, the utility model proposes a device for detecting lens wave aberration at an offset angle.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A device for detecting lens wave aberration at an angle, comprising:

[0006] Optical platform;

[0007] The main support frame is fixed on the optical platform;

[0008] Laser interferometer, fixedly set on the optical platform;

[0009] A height adjustment platform and a first reflecting mirror, wherein the height adjustment platform is fixedly arranged on the optical platform, and the first reflecting mirror is arranged on the height adjustment platform;

[0010] a second reflector, which is arranged on the main support frame through an angle adjustment structure, and is located above the first reflector;

[0011] a first six-dimensional adjustment platform and a third reflector, wherein the first six-dimensional adjustment platform is fixedly arranged on the main support frame, and the third reflector is arranged on the first six-dimensional adjustment platform;

[0012] A five-dimensional adjustment platform and an objective lens to be tested, wherein the five-dimensional adjustment platform is fixedly arranged on the optical platform, and the objective lens to be tested is provided with the five-dimensional adjustment platform, and the objective lens to be tested is located below the third reflecting mirror;

[0013] A second six-dimensional adjustment platform and a reflection ball bowl, wherein the second six-dimensional adjustment platform is arranged on the five-dimensional adjustment platform, and the reflection ball bowl is arranged on the second six-dimensional adjustment platform, and the reflection ball bowl is located below the objective lens to be measured;

[0014] The light beam emitted by the laser interferometer passes through the first reflector, the second reflector, the third reflector, the objective lens to be measured, the reflective bowl, and finally returns to the laser interferometer.

[0015] As a preferred solution of the above-mentioned device for detecting lens wave aberration at an angle, the five-dimensional adjustment platform includes a first screw drive structure, a second screw drive structure, a manual telescopic rod, a base, a first support plate, a second support plate, a third support plate, a fourth support plate and a fifth support plate. The base is fixedly arranged on the optical platform, the first screw drive structure is arranged on the base, and can drive the first support plate to move along the X-axis, the second screw drive structure is arranged on the first support plate, and can drive the second support plate to move along the Y-axis. Multiple manual telescopic rods are arranged in parallel, one end of the manual telescopic rod is fixedly arranged on the second support plate, and the other end is fixedly arranged on the third support plate, and can drive the third support plate to move along the Z-axis. The fourth support plate is rotatably arranged with the third support plate on one side along the X-axis direction, and a first threaded matching adjustment structure is provided on the other side to adjust the angle of rotation of the fourth support plate around the X-axis. The fifth support plate is rotatably arranged with the fourth support plate on one side along the Y-axis direction, and a second threaded matching adjustment structure is provided on the other side to adjust the angle of rotation of the fifth support plate around the Y-axis. The objective lens to be measured is fixedly arranged on the fifth support plate.

[0016] As a preferred solution of the above-mentioned device for detecting lens wave aberration at a deflection angle, the first threaded matching adjustment structure includes a first adjustment plate, a first threaded rod and a first locking nut. The first adjustment plate is fixedly arranged on the fourth support plate, the first adjustment plate is provided with a first elongated hole, the first threaded rod is fixedly arranged on the third support plate, the first threaded rod is passed through the first elongated hole, the first locking nut is threadedly connected to the first threaded rod, and the first adjustment plate is located between the first locking nut and the third support plate.

[0017] As a preferred solution of the above-mentioned device for detecting the wave aberration of a lens at a deflection angle, the second threaded matching adjustment structure includes a second adjustment plate, a second threaded rod and a second locking nut. The second adjustment plate is fixedly arranged on the fifth support plate, the second adjustment plate is provided with a second elongated hole, the second threaded rod is fixedly arranged on the fourth support plate, the second threaded rod is passed through the second elongated hole, the second locking nut is threadedly connected to the second threaded rod, and the second adjustment plate is located between the second locking nut and the fourth support plate.

[0018] As a preferred solution of the above-mentioned device for detecting lens wave aberration at a deflection angle, the first screw drive structure includes a first handwheel, a first screw and a first transmission nut. The first screw is rotatably arranged on the base, the first handwheel is fixedly connected to one end of the first screw, the first transmission nut is fixedly arranged on the first support plate, the first transmission nut is threadedly connected to the first screw, and the first screw extends along the X-axis.

[0019] As a preferred solution of the above-mentioned device for detecting lens wave aberration at a deflection angle, the second screw drive structure includes a second handwheel, a second screw and a second transmission nut. The second screw is rotatably arranged on the first support plate, the second handwheel is fixedly connected to one end of the second screw, the second transmission nut is fixedly connected to the second support plate, the second transmission nut is threadedly connected to the second screw, and the second screw extends along the Y-axis.

[0020] As a preferred solution of the above-mentioned device for detecting lens wave aberration at a deflection angle, a first slide rail is provided on the base, a first slider is provided below the first support plate, and the first slider is slidably arranged on the first slide rail.

[0021] As a preferred solution of the above-mentioned device for detecting lens wavefront aberration by deflection angle, a second slide rail is provided on the first support plate, a second slider is provided below the second support plate, and the second slider is slidably arranged on the second slide rail.

[0022] As a preferred solution of the above-mentioned device for detecting lens wave aberration at an angle, the first six-dimensional adjustment platform includes a first support platform, a second support platform and a plurality of first electric cylinders, the plurality of first electric cylinders are located between the first support platform and the second support platform, the two ends of the first electric cylinders are rotatably connected to the first support platform and the second support platform respectively, the plurality of first electric cylinders are arranged to be inclined relative to each other, the first support platform is fixedly arranged on the main support frame, and the third reflector is fixedly arranged on the second support platform.

[0023] As a preferred solution of the above-mentioned device for detecting lens wave aberration at an angle, the second six-dimensional adjustment platform includes a third support platform, a fourth support platform and multiple second electric cylinders, the multiple second electric cylinders are located between the third support platform and the fourth support platform, the two ends of the second electric cylinders are rotatably connected to the third support platform and the fourth support platform respectively, the multiple second electric cylinders are arranged to be inclined relative to each other, the third support platform is fixedly set on the five-dimensional adjustment platform, and the reflection ball bowl is fixedly set on the fourth support platform.

[0024] Compared with the prior art, the device for detecting lens wave aberration at an angle provided by the present invention has the following beneficial effects:

[0025] The utility model provides a device for detecting lens wavefront aberration at an angle. The device comprises optical path energy emitted from a laser interferometer, passing through a first reflector, a second reflector, a third reflector, an objective lens to be measured, and a reflective bowl, and finally returning energy from the reflective bowl to the laser interferometer. The optical wavefront aberration index is detected through image feedback from the laser interferometer. To align the optical path, the angles of the first reflector, the second reflector, and the third reflector are all adjustable. Furthermore, a first six-dimensional adjustment platform is capable of adjusting the position of the third reflector in the X-axis, Y-axis, and Z-axis directions, as well as the angle of rotation around the X-axis, the Y-axis, and the Z-axis. A five-dimensional adjustment platform is capable of adjusting the position of the objective lens to be measured in the X-axis, Y-axis, and Z-axis directions, as well as the angle of rotation around the X-axis and the Y-axis. A second six-dimensional adjustment platform is capable of adjusting the position of the reflective bowl in the X-axis, Y-axis, and Z-axis directions, as well as the angle of rotation around the X-axis, the Y-axis, and the Z-axis. According to the detection requirements, for example, the initial state detection needs to meet the requirement that the optical axis of the detection light path coincides with the optical axis of the objective lens to be tested, or, in special cases, it needs to meet the requirement that the optical axis of the detection light path and the optical axis of the objective lens to be tested are at a specific angle. Simply by controlling the first six-dimensional adjustment platform, the five-dimensional adjustment platform and the second six-dimensional adjustment platform, and adjusting the position and angle of the third reflector, the objective lens to be tested and the reflection ball bowl, the angle of the optical axis of the detection light path and the optical axis of the objective lens to be tested can be controlled to meet the detection requirements. By adopting the first six-dimensional adjustment platform and the second six-dimensional adjustment platform, the deflection angle of the optical axis can be automatically controlled, which is recoverable and extremely practical. The device for detecting the wave aberration of the lens by deflection angle has a compact structure, simple operation, smooth and steady movement, can arbitrarily control the angle, has high adjustment accuracy, can adjust the angle by ±5°, has good stability, high operating efficiency and good applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0027] Figure 1 1 is a schematic structural diagram of a device for detecting wavefront aberration of a lens at an angle provided by a specific embodiment of the present utility model;

[0028] Figure 2 This is an exploded view of a device for detecting wavefront aberration of a lens at an angle provided by a specific embodiment of the utility model;

[0029] Figure 3 This is a schematic structural diagram of a first six-dimensional adjustment platform of a device for detecting wavefront aberration of a lens at an angle provided by a specific embodiment of the utility model;

[0030] Figure 4 It is a structural schematic diagram of a five-dimensional adjustment platform of a device for detecting wavefront aberration of a lens at an angle provided by a specific embodiment of the utility model.

[0031] In the picture:

[0032] 1. Optical platform; 2. Main support frame; 3. Laser interferometer; 4. Height adjustment platform; 5. First reflector; 6. Second reflector; 7. First six-dimensional adjustment platform; 8. Third reflector; 9. Five-dimensional adjustment platform; 10. Objective lens to be measured; 11. Reflection bowl; 12. Second six-dimensional adjustment platform; 901. Base; 902. First support plate; 903. Second support plate; 904. Third support plate; 905. Fourth support plate; 906. Fifth support plate; 907. Second lead screw drive structure; 908. First lead screw drive structure; 909. Manual telescopic rod; 910. First thread matching adjustment structure; 911. Second thread matching adjustment structure; 701. First support platform; 702. Second support platform; 703. First electric cylinder. DETAILED DESCRIPTION

[0033] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely explain the technical solutions in the embodiments of the present invention. It should be noted that the embodiments and features in the embodiments of the present invention can be combined with each other in the absence of conflict, and the embodiments described are only part of the embodiments of the present invention, not all of the embodiments.

[0034] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0035] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0036] In the description of this embodiment, terms such as "upper," "lower," and "right" are used to refer to positions or locations based on the positions or locations shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0037] See also Figure 1-4 Description of this embodiment: The utility model provides a device for detecting the wave aberration of a lens at an angle, and the device for detecting the wave aberration of a lens at an angle comprises an optical platform 1, a main support frame 2, a laser interferometer 3, a height adjustment platform 4, a first reflector 5, a second reflector 6, a first six-dimensional adjustment platform 7, a third reflector 8, a five-dimensional adjustment platform 9, an objective lens to be measured 10, a second six-dimensional adjustment platform 12 and a reflection bowl 11. The main support frame 2 is fixedly arranged on the optical platform 1; the laser interferometer 3 is fixedly arranged on the optical platform 1; the height adjustment platform 4 is fixedly arranged on the optical platform 1, the first reflector 5 is arranged on the height adjustment platform 4; the second reflector 6 is arranged on the main support frame 2 through an angle adjustment structure. , the second reflecting mirror 6 is located above the first reflecting mirror 5; the first six-dimensional adjustment platform 7 is fixedly set on the main supporting frame 2, and the third reflecting mirror 8 is set on the first six-dimensional adjustment platform 7; the five-dimensional adjustment platform 9 is fixedly set on the optical platform 1, and the objective lens 10 to be measured is set on the five-dimensional adjustment platform 9, and the objective lens 10 to be measured is located below the third reflecting mirror 8; the second six-dimensional adjustment platform 12 is set on the five-dimensional adjustment platform 9, and the reflecting ball bowl 11 is set on the second six-dimensional adjustment platform 12, and the reflecting ball bowl 11 is located below the objective lens 10 to be measured; the light beam emitted by the laser interferometer 3 passes through the first reflecting mirror 5, the second reflecting mirror 6, the third reflecting mirror 8, the objective lens 10 to be measured, and the reflecting ball bowl 11 in sequence, and finally returns to the laser interferometer 3.

[0038] In the device for detecting the wavefront aberration of a lens by using an angle, the optical path energy is emitted from the laser interferometer 3, passes through the first reflector 5, the second reflector 6, the third reflector 8, the objective lens 10 to be tested, and the reflective bowl 11, and finally returns the energy from the reflective bowl 11 to the laser interferometer 3. The optical wavefront aberration index is detected through the image feedback of the laser interferometer 3. In order to align the optical path, the angles of the first reflector 5, the second reflector 6, and the third reflector 8 can all be adjusted, and the first six-dimensional adjustment platform 7 can adjust the position of the third reflector 8 in the X-axis direction, the Y-axis direction, the Z-axis direction, the angle of rotation around the X-axis, the Y-axis direction, and the Z-axis direction; the five-dimensional adjustment platform 9 can adjust the position of the objective lens 10 to be tested in the X-axis direction, the Y-axis direction, the Z-axis direction, the angle of rotation around the X-axis, and the Y-axis direction. The second six-dimensional adjustment platform 12 can adjust the position of the reflective bowl 11 in the X-axis direction, the Y-axis direction, the Z-axis direction, the angle of rotation around the X-axis, the Y-axis and the Z-axis. According to the detection requirements, for example, the initial state detection needs to meet the requirement that the optical axis of the detection light path coincides with the optical axis of the objective lens 10 to be tested, or, in special cases, needs to meet the requirement that the optical axis of the detection light path and the optical axis of the objective lens 10 to be tested form a specific angle. Simply by controlling the first six-dimensional adjustment platform 7, the five-dimensional adjustment platform 9 and the second six-dimensional adjustment platform 12, and adjusting the position and angle of the third reflector 8, the objective lens 10 to be tested and the reflective bowl 11, the angle of the optical axis of the detection light path and the optical axis of the objective lens 10 to be tested can be controlled to meet the detection requirements. By adopting the first six-dimensional adjustment platform 7 and the second six-dimensional adjustment platform 12, the optical axis deflection angle can be automatically controlled, which is recoverable and extremely practical. The device for detecting the wave aberration of a lens by deflection angle has a compact structure, simple operation, smooth movement, automatic control, arbitrary angle control, high adjustment accuracy, adjustable angle of ±5°, good stability, high operating efficiency and good applicability.

[0039] The specific method of detecting the optical wave aberration index through the image feedback of the laser interferometer 3 belongs to the existing technology and will not be described in detail here.

[0040] Specifically, the five-dimensional adjustment platform 9 includes a first screw drive structure 908, a second screw drive structure 907, a manual telescopic rod 909, a base 901, a first support plate 902, a second support plate 903, a third support plate 904, a fourth support plate 905 and a fifth support plate 906. The base 901 is fixedly arranged on the optical platform 1. The first screw drive structure 908 is arranged on the base 901 and can drive the first support plate 902 to move along the X axis. The second screw drive structure 907 is arranged on the first support plate 902 and can drive the second support plate 903 to move along the Y axis. A plurality of manual telescopic rods 909 are arranged in parallel. The manual telescopic rods One end of 909 is fixedly set on the second support plate 903, and the other end is fixedly set on the third support plate 904, which can drive the third support plate 904 to move along the Z axis. The fourth support plate 905 is rotatably set with the third support plate 904 on one side along the X axis, and a first thread matching adjustment structure 910 is provided on the other side, which can adjust the angle of rotation of the fourth support plate 905 around the X axis. The fifth support plate 906 is rotatably set with the fourth support plate 905 on one side along the Y axis, and a second thread matching adjustment structure 911 is provided on the other side, which can adjust the angle of rotation of the fifth support plate 906 around the Y axis. The objective lens 10 to be measured is fixedly set on the fifth support plate 906.

[0041] Specifically, the first threaded fitting adjustment structure 910 includes a first adjustment plate, a first threaded rod and a first locking nut. The first adjustment plate is fixedly arranged on the fourth support plate 905. The first adjustment plate is provided with a first long hole. The first threaded rod is fixedly arranged on the third support plate 904. The first threaded rod is passed through the first long hole. The first locking nut is threadedly connected to the first threaded rod. The first adjustment plate is located between the first locking nut and the third support plate 904.

[0042] By loosening the first locking nut, the first threaded rod can slide in the first elongated hole, and the fourth support plate 905 can now rotate relative to the third support plate 904. After determining the rotation angle of the fourth support plate 905, tighten the first locking nut again to adjust the rotation angle of the fourth support plate 905 around the X-axis. The extension direction of the first elongated hole is designed based on the rotation trajectory of the fourth support plate 905.

[0043] In this embodiment, there are two first thread fitting adjustment structures 910 , which are respectively located on both sides of the third support plate 904 along the Y-axis direction, and both can adjust the rotation angle of the fourth support plate 905 around the X-axis.

[0044] Specifically, the second threaded fitting adjustment structure 911 includes a second adjustment plate, a second threaded rod and a second locking nut. The second adjustment plate is fixedly arranged on the fifth support plate 906. The second adjustment plate is provided with a second long hole. The second threaded rod is fixedly arranged on the fourth support plate 905. The second threaded rod is passed through the second long hole. The second locking nut is threadedly connected to the second threaded rod. The second adjustment plate is located between the second locking nut and the fourth support plate 905.

[0045] By loosening the second locking nut, the second threaded rod can slide in the second elongated hole, and the fifth support plate 906 can now rotate relative to the fourth support plate 905. After determining the rotation angle of the fifth support plate 906, tighten the second locking nut to adjust the rotation angle of the fifth support plate 906 about the Y axis. The extension direction of the second elongated hole is designed based on the rotation trajectory of the fifth support plate 906.

[0046] In this embodiment, there are two second thread fitting adjustment structures 911 , which are respectively located on both sides of the fourth support plate 905 along the X-axis direction, and both can adjust the rotation angle of the fifth support plate 906 around the Y-axis.

[0047] Specifically, the first screw drive structure 908 includes a first handwheel, a first screw, and a first drive nut. The first screw is rotatably mounted on the base 901. The first handwheel is fixedly connected to one end of the first screw. The first drive nut is fixedly mounted on the first support plate 902 and is threadedly engaged with the first screw, which extends along the X-axis. Rotating the first handwheel drives the first screw to rotate, and the first drive nut moves along the extension direction of the first screw, thereby causing the first drive nut to move the first support plate 902 along the X-axis.

[0048] Specifically, the second lead screw drive structure 907 includes a second handwheel, a second lead screw, and a second drive nut. The second lead screw is rotatably mounted on the first support plate 902. The second handwheel is fixedly connected to one end of the second lead screw. The second drive nut is fixedly connected to the second support plate 903. The second drive nut is threadedly engaged with the second lead screw, which extends along the Y-axis. Rotating the second handwheel drives the second lead screw to rotate, and the second drive nut moves along the extension direction of the second lead screw, thereby causing the second drive nut to move the second support plate 903 along the Y-axis.

[0049] Specifically, the base 901 is provided with a first slide rail extending along the X-axis direction, and a first slider is provided below the first support plate 902 and slidably disposed on the first slide rail to assist the first support plate 902 in moving along the X-axis direction.

[0050] Specifically, a second slide rail is provided on the first support plate 902, and the second slide rail extends along the Y-axis direction. A second slider is provided below the second support plate 903, and the second slider slides on the second slide rail to assist the second support plate 903 in moving along the Y-axis direction.

[0051] Specifically, the first six-dimensional adjustment platform 7 includes a first support platform 701, a second support platform 702, and a plurality of first electric cylinders 703. The plurality of first electric cylinders 703 are located between the first support platform 701 and the second support platform 702. The ends of the first electric cylinders 703 are rotatably connected to the first support platform 701 and the second support platform 702, respectively. The plurality of first electric cylinders 703 are arranged to be tilted relative to each other. The first support platform 701 is fixed to the main support frame 2, and the third reflector 8 is fixed to the second support platform 702. The plurality of first electric cylinders 703 cooperate with each other to control the position of the second support platform 702 relative to the first support platform 701 along the X-axis, the Y-axis, the Z-axis, the rotation angle around the X-axis, the rotation angle around the Y-axis, and the rotation angle around the Z-axis.

[0052] Specifically, the second six-dimensional adjustment platform 12 includes a third support platform, a fourth support platform, and a plurality of second electric cylinders. The plurality of second electric cylinders are located between the third and fourth support platforms, with their ends pivotally connected to the third and fourth support platforms, respectively. The plurality of second electric cylinders are arranged at an angle relative to each other. The third support platform is fixedly mounted on the five-dimensional adjustment platform 9, and the reflection bowl 11 is fixedly mounted on the fourth support platform. The plurality of second electric cylinders cooperate to control the fourth support platform's position relative to the third support platform along the X-axis, the Y-axis, the Z-axis, and the X-axis, Y-axis, and Z-axis rotation angles.

[0053] Obviously, the embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These embodiments do not exhaustively describe all details, nor do they limit the present invention to the specific embodiments described. Numerous modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. An exhaustive list of all possible embodiments is unnecessary and impossible.

Claims

1. A device for detecting the wavefront aberration of a lens by deflection angle, characterized in that: include: Optical platform (1); A main support frame (2) is fixedly mounted on the optical platform (1); A laser interferometer (3) is fixedly mounted on the optical platform (1); A height adjustment platform (4) and a first reflector (5), wherein the height adjustment platform (4) is fixedly arranged on the optical platform (1), and the first reflector (5) is arranged on the height adjustment platform (4); A second reflector (6) is arranged on the main support frame (2) via an angle adjustment structure, and the second reflector (6) is located above the first reflector (5); a first six-dimensional adjustment platform (7) and a third reflector (8), wherein the first six-dimensional adjustment platform (7) is fixedly arranged on the main support frame (2), and the third reflector (8) is arranged on the first six-dimensional adjustment platform (7); A five-dimensional adjustment platform (9) and an objective lens to be measured (10), wherein the five-dimensional adjustment platform (9) is fixedly arranged on the optical platform (1), the objective lens to be measured (10) is provided with the five-dimensional adjustment platform (9), and the objective lens to be measured (10) is located below the third reflecting mirror (8); A second six-dimensional adjustment platform (12) and a reflection ball bowl (11), wherein the second six-dimensional adjustment platform (12) is arranged on the five-dimensional adjustment platform (9), and the reflection ball bowl (11) is arranged on the second six-dimensional adjustment platform (12), and the reflection ball bowl (11) is located below the object lens (10) to be measured; The light beam emitted by the laser interferometer (3) passes through the first reflector (5), the second reflector (6), the third reflector (8), the object lens to be measured (10), the reflection ball bowl (11) in sequence, and finally returns to the laser interferometer (3).

2. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 1, characterized in that: The five-dimensional adjustment platform (9) comprises a first lead screw drive structure (908), a second lead screw drive structure (907), a manual telescopic rod (909), a base (901), a first support plate (902), a second support plate (903), a third support plate (904), a fourth support plate (905) and a fifth support plate (906), wherein the base (901) is fixedly arranged on the optical platform (1), the first lead screw drive structure (908) is arranged on the base (901) and can drive the first support plate (902) to move along the X axis, the second lead screw drive structure (907) is arranged on the first support plate (902) and can drive the second support plate (903) to move along the Y axis, a plurality of manual telescopic rods (909) are arranged in parallel, and the manual One end of the telescopic rod (909) is fixedly arranged on the second support plate (903), and the other end is fixedly arranged on the third support plate (904), and can drive the third support plate (904) to move along the Z axis. A fourth support plate (905) is rotatably arranged with the third support plate (904) on one side along the X axis, and a first thread matching adjustment structure (910) is provided on the other side, and can adjust the angle of rotation of the fourth support plate (905) around the X axis. A fifth support plate (906) is rotatably arranged with the fourth support plate (905) on one side along the Y axis, and a second thread matching adjustment structure (911) is provided on the other side, and can adjust the angle of rotation of the fifth support plate (906) around the Y axis. The objective lens (10) to be measured is fixedly arranged on the fifth support plate (906).

3. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 2, wherein: The first threaded fitting adjustment structure (910) includes a first adjustment plate, a first threaded rod and a first locking nut. The first adjustment plate is fixedly arranged on the fourth support plate (905). The first adjustment plate is provided with a first elongated hole. The first threaded rod is fixedly arranged on the third support plate (904). The first threaded rod is passed through the first elongated hole. The first locking nut is threadedly connected to the first threaded rod. The first adjustment plate is located between the first locking nut and the third support plate (904).

4. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 2, wherein: The second threaded fitting adjustment structure (911) includes a second adjustment plate, a second threaded rod and a second locking nut. The second adjustment plate is fixedly arranged on the fifth support plate (906). The second adjustment plate is provided with a second elongated hole. The second threaded rod is fixedly arranged on the fourth support plate (905). The second threaded rod is passed through the second elongated hole. The second locking nut is threadedly connected to the second threaded rod. The second adjustment plate is located between the second locking nut and the fourth support plate (905).

5. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 2, wherein: The first screw drive structure (908) includes a first hand wheel, a first screw and a first transmission nut. The first screw is rotatably arranged on the base (901). The first hand wheel is fixedly connected to one end of the first screw. The first transmission nut is fixedly arranged on the first support plate (902). The first transmission nut is threadedly connected to the first screw. The first screw extends along the X-axis.

6. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 2, wherein: The second screw drive structure (907) includes a second hand wheel, a second screw and a second transmission nut. The second screw is rotatably arranged on the first support plate (902). The second hand wheel is fixedly connected to one end of the second screw. The second transmission nut is fixedly connected to the second support plate (903). The second transmission nut is threadedly connected to the second screw. The second screw extends along the Y axis.

7. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 2, wherein: The base (901) is provided with a first slide rail, the first slide rail extending along the X-axis direction, and a first slider is provided below the first support plate (902), the first slider being slidably arranged on the first slide rail.

8. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 2, wherein: A second slide rail is provided on the first support plate (902), and the second slide rail extends along the Y-axis direction. A second slider is provided below the second support plate (903), and the second slider is slidably arranged on the second slide rail.

9. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 1, wherein: The first six-dimensional adjustment platform (7) comprises a first supporting platform (701), a second supporting platform (702) and a plurality of first electric cylinders (703), wherein the plurality of first electric cylinders (703) are located between the first supporting platform (701) and the second supporting platform (702), and the two ends of the first electric cylinders (703) are rotatably connected to the first supporting platform (701) and the second supporting platform (702), respectively, and the plurality of first electric cylinders (703) are arranged to be inclined relative to each other, the first supporting platform (701) is fixedly arranged on the main supporting frame (2), and the third reflector (8) is fixedly arranged on the second supporting platform (702).

10. The device for detecting wavefront aberration of a lens according to a deflection angle according to claim 1, characterized in that: The second six-dimensional adjustment platform (12) includes a third support platform, a fourth support platform and a plurality of second electric cylinders, wherein the plurality of second electric cylinders are located between the third support platform and the fourth support platform, and the two ends of the second electric cylinders are rotatably connected to the third support platform and the fourth support platform respectively, and the plurality of second electric cylinders are arranged to be inclined relative to each other, the third support platform is fixedly arranged on the five-dimensional adjustment platform (9), and the reflection bowl (11) is fixedly arranged on the fourth support platform.

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