Wafer film expanding device

Abstract

The utility model relates to the technical field of wafer processing and production equipment, and discloses a wafer film expanding device, which comprises a base, an operating table and a connecting plate, a feeding motor is fixedly mounted on the operating table, a driving gear is fixedly connected onto a transmission rod, the driving gear is meshed with a driven gear, and the driven gear is meshed with the base. The driven gear is fixedly connected with a feeding roll shaft, the operation table is rotationally connected with a material conveying shaft, the material conveying shaft is fixedly connected with a driven belt wheel, and the material conveying shaft is fixedly connected with a material conveying roller. According to the wafer film expanding device, when the wafer film expanding device is used, the feeding motor is started, so that the blue film on the conveying roller is conveyed out of the discharging port and covers the wafer, manual feeding is not needed, the potential safety hazard that workers are accidentally pinched by equipment is reduced, the electric push rod is started, the circular protrusion can exert upward acting force on the blue film, and the blue film is prevented from being damaged. Therefore, the blue film can be expanded, the operation is convenient, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing production equipment, in particular to a wafer film expansion device. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. During the wafer production process, in order to ensure the quality of the grains, it is usually necessary to use a wafer expansion device to expand the wafer to increase the gap between adjacent grains.

[0003] However, the current common wafer film expansion device requires manual placement of the film on the upper surface of the wafer before expanding the wafer. The operation is cumbersome, and the manual placement of the film cannot be well controlled, which is not conducive to subsequent production needs. At the same time, since the wafer film expansion device is generally placed directly on the ground for use, the bottom of the equipment is easily affected by moisture and corrosion, which affects its service life, and the height cannot be flexibly adjusted, which is inconvenient for users of different heights to use. Therefore, a wafer film expansion device is proposed. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a wafer film expansion device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a wafer film expansion device, including a base, an operating table, and a connecting plate, a feeding motor is fixedly installed on the operating table, the output end of the feeding motor is fixedly connected to a transmission rod, the transmission rod is fixedly connected to a driving gear, the driving gear is meshedly connected to a driven gear, the driven gear is fixedly connected to a feeding roller shaft, the feeding roller shaft is fixedly connected to a driving pulley, the operating table is rotatably connected to a feeding shaft, the feeding shaft is fixedly connected to a driven pulley, the transmission belt is connected to the driven pulley, the feeding roller is fixedly connected to the transmission rod, the feeding roller is fixedly connected to the feeding shaft, the operating table is fixedly connected to a storage box, and the storage box is provided with a discharge port.

[0006] As a further description of the above technical solution:

[0007] An electric push rod is fixedly connected to the bottom of the operating table, a slider is fixedly connected to the output end of the electric push rod, a slide rod is fixedly connected to the slide rod, a slide groove is provided on the connecting plate, the slide rod is slidably connected in the slide groove, a film expansion boss is fixedly connected to the connecting plate, a circular protrusion is fixedly connected to the top of the film expansion boss, and a slide rail is fixedly connected to the operating table.

[0008] As a further description of the above technical solution:

[0009] A driving motor is fixedly installed on the top of the operating table, and the output end of the driving motor is fixedly connected to the first threaded rod, the first threaded rod is threadedly connected to the first threaded sleeve, and the first threaded sleeve is fixedly connected to the clamping plate. A guide rod is fixedly connected to the operating table, and the clamping plate is slidably connected to the guide rod. A through hole is opened on the clamping plate.

[0010] As a further description of the above technical solution:

[0011] A cylinder is fixedly installed on the top of the operating table, an output end of the cylinder is fixedly connected to a lifting platform, a slice is fixedly connected to the bottom of the lifting platform, and the lifting platform is slidably connected to the through hole.

[0012] As a further description of the above technical solution:

[0013] The base is rotatably connected to a connecting rod, the connecting rod is fixedly connected to a worm, the worm is meshed with a worm wheel, the worm wheel is fixedly connected to a connecting block, the connecting block is fixedly connected to a second threaded rod, the second threaded rod is threadedly connected to a second threaded sleeve, the base is fixedly connected to a telescopic rod, and one end of the connecting rod is fixedly connected to a handle.

[0014] As a further description of the above technical solution:

[0015] The driven gears and feed roller shafts are each provided with two groups, the two groups of driven gears are meshed and connected, the two groups of feed roller shafts are rotatably connected to the operating table, the transmission rods are rotatably connected to the operating table, and the feed rollers rotate in the storage box.

[0016] As a further description of the above technical solution:

[0017] The inner diameter of the slice is larger than the outer diameter of the circular protrusion, the membrane expansion boss passes through and is slidably connected to the operating table, the telescopic end of the telescopic rod is fixedly connected to the operating table, and the worm, worm wheel, second threaded rod, and second threaded sleeve are each provided in two groups and are symmetrically distributed on the base.

[0018] The utility model has the following beneficial effects:

[0019] 1. In the utility model, when the wafer film expansion device is used, the feeding motor is started to rotate the feeding roller and the delivery roller, thereby conveying the blue film on the delivery roller from the discharge port and covering the wafer. No manual feeding is required, which reduces the safety hazard of workers being accidentally clamped by the equipment. The driving motor is started, and the film is pressed against the operating table by the pressing plate. The electric push rod is started so that the circular protrusion supports the blue film on the wafer. At this time, the circular protrusion will exert an upward force on the blue film to expand the blue film, thereby achieving film expansion. The operation is convenient, the work efficiency is improved, and it is beneficial to wafer processing.

[0020] 2. In the utility model, when using the wafer expansion device, the operator manually turns the handle, and the handle drives the worm to rotate through the connecting rod, so that the second threaded sleeve and the operating table move up and down, thereby realizing the lifting and lowering of the operating table. The operator can adjust the height of the operating table according to different usage requirements. It is easy to use, flexible to adjust, and has good practicality, which is conducive to improving the work efficiency of the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a structural schematic diagram of a wafer expansion device proposed by the present invention;

[0022] Figure 2 A schematic diagram of the partial structure of a wafer expansion device proposed in this utility model Figure 1 ;

[0023] Figure 3 This is a partial structural cross-sectional view of a wafer expansion device proposed by the present invention;

[0024] Figure 4 A schematic diagram of the partial structure of a wafer expansion device proposed in this utility model Figure 2 ;

[0025] Figure 5 A schematic diagram of the partial structure of a wafer expansion device proposed in this utility model Figure 3 ;

[0026] Figure 6 A schematic diagram of the partial structure of a wafer expansion device proposed in this utility model Figure 4 .

[0027] Legend:

[0028] 1. Base; 2. Operation table; 3. Feed motor; 4. Transmission rod; 5. Driving gear; 6. Driven gear; 7. Feed roller shaft; 8. Driving pulley; 9. Transmission belt; 10. Driven pulley; 11. Feed shaft; 12. Feed roller; 13. Storage box; 14. Feed roller; 15. Discharge port; 16. Electric push rod; 17. Slider; 18. Slide rod; 19. Slide rail; 20. Connecting plate; 21. Slide groove; 22. Film expansion boss; 23. Circular protrusion; 24. Drive motor; 25. First threaded rod; 26. First threaded sleeve; 27. Pressing plate; 28. Guide rod; 29. Cylinder; 30. Lifting platform; 31. Slicer; 32. Through hole; 33. Connecting rod; 34. Worm; 35. Worm gear; 36. Connecting block; 37. Second threaded rod; 38. Second threaded sleeve; 39. Telescopic rod; 40. Handle. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] Reference Figures 1-6, the utility model provides an embodiment: a wafer film expansion device, including a base 1, an operating table 2, and a connecting plate 20. A feeding motor 3 is fixedly installed on the operating table 2, and the output end of the feeding motor 3 is fixedly connected to a transmission rod 4, and the transmission rod 4 is fixedly connected to a driving gear 5, and the driving gear 5 is meshed with a driven gear 6, and the driven gear 6 is fixedly connected to a feeding roller shaft 7, and the feeding roller shaft 7 is fixedly connected to a driving pulley 8. The operating table 2 is rotatably connected to a feeding shaft 11, and the feeding shaft 11 is fixedly connected to a driven pulley 10. The driving pulley 8 and the driven pulley 10 are connected to a transmission belt 9, a feeding roller 12 is fixedly connected to the transmission rod 4, and a feeding roller 14 is fixedly connected to the feeding shaft 11. The operating table 2 is fixedly connected to a storage box 13, a storage box A discharge port 15 is provided on the storage box 13. The wafer is placed on the circular protrusion 23. The blue film is pulled out from the discharge port 15 on the storage box 13. One end of the blue film is fixed on the feed roller 14 and the other end is placed between the two sets of feed rollers 12. The feeding motor 3 is started. The feeding motor 3 drives the driving gear 5 to rotate through the transmission rod 4. The driving gear 5 drives the feed roller shaft 7 to rotate through the transmission rod 4. The feed roller shaft 7 drives the driving pulley 8 to rotate. The driving pulley 8 drives the driven pulley 10 and the feed shaft 11 to rotate through the transmission belt 9. The feed shaft 11 drives the feed roller 14 to rotate, so that the blue film on the feed roller 14 is transported out from the discharge port 15 and covered on the wafer. No manual feeding is required, which reduces the safety hazard of staff being accidentally clamped by the equipment.

[0031] In addition, the bottom of the operating table 2 is fixedly connected to an electric push rod 16, the output end of the electric push rod 16 is fixedly connected to a slider 17, the slider 17 is fixedly connected to a slide rod 18, a slide groove 21 is provided on the connecting plate 20, the slide rod 18 is slidably connected to the slide groove 21, the connecting plate 20 is fixedly connected to a film expansion boss 22, the top of the film expansion boss 22 is fixedly connected to a circular protrusion 23, and the operating table 2 is fixedly connected to a slide rail 19. When the electric push rod 16 is started, the electric push rod 16 drives the slider 17 to move along the slide rail 19 in the direction away from the electric push rod 16. At this time, the slide rod 18 slides in the slide groove 21, thereby driving the connecting plate 20 to move upward, driving the film expansion boss 22 and the circular protrusion 23 through the connecting plate 20. The protrusion 23 moves upward, and the circular protrusion 23 will exert an upward force on the blue film to expand the blue film, thereby realizing the expansion process of the blue film. A driving motor 24 is fixedly installed on the top of the operating table 2. The output end of the driving motor 24 is fixedly connected to the first threaded rod 25. The first threaded rod 25 is threadedly connected to the first threaded sleeve 26. The first threaded sleeve 26 is fixedly connected to the clamping plate 27. The operating table 2 is fixedly connected to the guide rod 28. The clamping plate 27 is slidably connected to the guide rod 28. A through hole 32 is provided on the clamping plate 27. A cylinder 29 is fixedly installed on the top of the operating table 2. The output end of the cylinder 29 is fixedly connected to the lifting platform 30. The bottom of the lifting platform 30 is fixedly connected to the slice 31. The lifting platform 30 is slidably connected to the through hole 32, and the base 1 is rotatably connected to a connecting rod 33, and a worm 34 is fixedly connected to the connecting rod 33, and the worm 34 is meshedly connected to a worm gear 35, and a connecting block 36 is fixedly connected to the worm gear 35, and a second threaded rod 37 is fixedly connected to the connecting block 36, and a second threaded sleeve 38 is threadedly connected to the second threaded rod 37. The base 1 is fixedly connected to a telescopic rod 39, and one end of the connecting rod 33 is fixedly connected to a handle 40. There are two groups of driven gears 6 and feed roller shafts 7. The two groups of driven gears 6 are meshed and connected. The two groups of feed roller shafts 7 are rotatably connected to the operating table 2, and the transmission rod 4 is rotatably connected to the operating table 2. The feed roller 14 rotates in the storage box 13, and the slices are cut. The inner diameter of 31 is larger than the outer diameter of the circular protrusion 23. The membrane expansion boss 22 passes through and is slidably connected to the operating table 2. The telescopic end of the telescopic rod 39 is fixedly connected to the operating table 2. The worm 34, the worm wheel 35, the second threaded rod 37, and the second threaded sleeve 38 are all provided with two groups and are symmetrically distributed on the base 1. The operator manually turns the handle 40, and the handle 40 drives the worm 34 to rotate through the connecting rod 33. The worm 34 drives the connecting block 36 to rotate through the worm wheel 35, and the connecting block 36 drives the second threaded rod 37 to rotate, so that the second threaded sleeve 38 and the operating table 2 move up and down, thereby realizing the lifting of the operating table 2. The height of the operating table 2 can be adjusted according to different usage requirements. The adjustment is flexible and practical.

[0032] Working principle: When using the wafer expansion device, the operator manually turns the handle 40, and the handle 40 drives the worm 34 to rotate through the connecting rod 33, and the worm 34 drives the connecting block 36 to rotate through the worm gear 35, and the connecting block 36 drives the second threaded rod 37 to rotate, so that the second threaded sleeve 38 and the operating table 2 move up and down. At this time, the telescopic rod 39 will also stretch and play a guiding role, thereby realizing the lifting and lowering of the operating table 2. When the operator adjusts the operating table 2 to a suitable height, the wafer is placed on the circular protrusion 23, and the blue film is discharged from the storage box 13. Pull out the opening 15, fix one end of the blue film on the feed roller 14, and place the other end between the two sets of feed rollers 12, start the feed motor 3, and the feed motor 3 drives the driving gear 5 to rotate through the transmission rod 4, and the driving gear 5 drives the feed roller shaft 7 to rotate through the transmission rod 4. At the same time, the driving gear 5 drives the driven gear 6 to rotate, and the driven gear 6 drives the driving pulley 8 to rotate through the feed roller shaft 7, and the driving pulley 8 drives the driven pulley 10 and the feed shaft 11 to rotate through the transmission belt 9, and the feed shaft 11 drives the feed roller 14 to rotate. 6 are meshed with each other, so that the two sets of feeding rollers 12 rotate in opposite directions, thereby conveying the blue film on the feeding roller 14 out of the discharge port 15 and covering the wafer. At this time, the drive motor 24 is started, and the drive motor 24 drives the first threaded rod 25 to rotate, so that the first threaded sleeve 26 and the pressing plate 27 move downward along the guide rod 28, and the pressing plate 27 is used to press the film onto the operating table 2. At this time, the electric push rod 16 is started, and the electric push rod 16 drives the slider 17 to move along the slide rail 19 in the direction away from the electric push rod 16. At this time, the slide rod 1 on the slider 17 8 slides in the slide groove 21, thereby driving the connecting plate 20 to move upward, and driving the film expansion boss 22 and the circular protrusion 23 to move upward through the connecting plate 20, and waits until the circular protrusion 23 supports the blue film on the wafer. At this time, the circular protrusion 23 will exert an upward force on the blue film to expand the blue film, thereby realizing the film expansion processing of the blue film. At this time, the cylinder 29 is started, and the cylinder 29 pushes the lifting platform 30 to move downward. The lifting platform 30 and the slice 31 pass through the through hole 32 and rest on the top of the blue film. The blue film is cut off by the slice 31, thereby completing the film expansion processing, which is easy to operate.

[0033] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A wafer expansion device, comprising a base (1), an operating table (2), and a connecting plate (20), characterized in that: A feeding motor (3) is fixedly mounted on the operating table (2); an output end of the feeding motor (3) is fixedly connected to a transmission rod (4); a driving gear (5) is fixedly connected to the transmission rod (4); the driving gear (5) is meshedly connected to a driven gear (6); a feeding roller shaft (7) is fixedly connected to the driven gear (6); a driving pulley (8) is fixedly connected to the feeding roller shaft (7); a feeding shaft (11) is rotatably connected to the operating table (2); a driven pulley (10) is fixedly connected to the feeding shaft (11); a transmission belt (9) is connected to the driving pulley (8) and the driven pulley (10); a feeding roller (12) is fixedly connected to the transmission rod (4); a feeding roller (14) is fixedly connected to the feeding shaft (11); a storage box (13) is fixedly connected to the operating table (2); a discharge port (15) is provided on the storage box (13).

2. The wafer expansion device according to claim 1, wherein: The bottom of the operating table (2) is fixedly connected to an electric push rod (16), the output end of the electric push rod (16) is fixedly connected to a slider (17), the slider (17) is fixedly connected to a slide rod (18), a sliding groove (21) is provided on the connecting plate (20), the slide rod (18) is slidably connected in the sliding groove (21), a film expansion boss (22) is fixedly connected to the connecting plate (20), the top of the film expansion boss (22) is fixedly connected to a circular protrusion (23), and a slide rail (19) is fixedly connected to the operating table (2).

3. The wafer expansion device according to claim 2, wherein: A driving motor (24) is fixedly mounted on the top of the operating table (2), an output end of the driving motor (24) is fixedly connected to a first threaded rod (25), a first threaded sleeve (26) is threadedly connected to the first threaded rod (25), a pressing plate (27) is fixedly connected to the first threaded sleeve (26), a guide rod (28) is fixedly connected to the operating table (2), the pressing plate (27) is slidably connected to the guide rod (28), and a through hole (32) is provided on the pressing plate (27).

4. The wafer expansion device according to claim 3, wherein: A cylinder (29) is fixedly installed on the top of the operating table (2), an output end of the cylinder (29) is fixedly connected to a lifting platform (30), a slice (31) is fixedly connected to the bottom of the lifting platform (30), and the lifting platform (30) is slidably connected to a through hole (32).

5. The wafer expansion device according to claim 4, characterized in that: The base (1) is rotatably connected to a connecting rod (33), the connecting rod (33) is fixedly connected to a worm (34), the worm (34) is meshedly connected to a worm wheel (35), the worm wheel (35) is fixedly connected to a connecting block (36), the connecting block (36) is fixedly connected to a second threaded rod (37), the second threaded rod (37) is threadedly connected to a second threaded sleeve (38), the base (1) is fixedly connected to a telescopic rod (39), and one end of the connecting rod (33) is fixedly connected to a handle (40).

6. The wafer expansion device according to claim 5, characterized in that: The driven gear (6) and the feeding roller shaft (7) are each provided with two groups, the two groups of the driven gear (6) are meshed and connected, the two groups of the feeding roller shaft (7) are rotatably connected to the operating table (2), the transmission rod (4) is rotatably connected to the operating table (2), and the feeding roller (14) rotates in the storage box (13).

7. The wafer expansion device according to claim 6, characterized in that: The inner diameter of the slice (31) is larger than the outer diameter of the circular protrusion (23); the membrane expansion boss (22) passes through and is slidably connected to the operating table (2); the telescopic end of the telescopic rod (39) is fixedly connected to the operating table (2); the worm (34), the worm wheel (35), the second threaded rod (37), and the second threaded sleeve (38) are each provided in two groups and are symmetrically distributed on the base (1).

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