Gate valve and semiconductor processing device

Abstract

The utility model belongs to the technical field of vacuum cavity sealing, and particularly relates to a gate valve and a semiconductor processing device. The gate valve comprises a valve body, a driving part, a valve rod, a sealing plate, a connecting part and a deflection part, and the valve rod is arranged in the valve body and extends out of the valve body through an outlet of the valve body; the sealing plate is arranged at one end of the valve rod; the valve rod can be driven to slide under the matching action of the driving part and the connecting part, so that the sealing plate can move to the position right opposite to the opening, when the valve rod is located at the stroke tail end, under the action of the deflection part, the end, connected with the deflection part, of the valve rod can deflect in the direction away from the opening at the stroke tail end of the valve rod, and at the moment, the valve rod can be driven to slide. The sealing plate can deflect towards the direction of the opening under the action of the deflection part, so that the sealing performance between the sealing plate and the opening is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum cavity sealing, in particular to a gate valve and a semiconductor processing device. Background Art

[0002] Gate valves are mainly used in semiconductor vacuum processing to isolate the vacuum chamber from the external environment so as to maintain the vacuum state of the vacuum chamber between different processing steps.

[0003] Currently, most gate valves include a cylinder and a sealing plate. The sealing plate is arranged at the end of the piston rod of the cylinder. The sealing plate can seal the opening of the vacuum chamber under the action of the cylinder. However, in order to save the space occupied by the entire gate valve, the cylinder and the opening are often offset. As a result, when the sealing plate seals the opening, the force on the entire sealing plate is uneven, which easily causes a gap between the sealing plate and the opening, which easily affects the vacuum degree of the vacuum chamber.

[0004] Therefore, the above problems need to be solved urgently. Utility Model Content

[0005] The utility model aims to provide a gate valve and a semiconductor processing device to improve the sealing performance between a sealing plate and an opening.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A gate valve for sealing an opening of a vacuum chamber, comprising:

[0008] The valve body is provided with an outlet;

[0009] A driving part is arranged inside the valve body;

[0010] a valve stem disposed inside the valve body and extending to the outside of the valve body through the outlet, with a gap between the outlet and the valve stem;

[0011] a sealing plate, disposed at one end of the valve stem;

[0012] a connecting portion, disposed between the driving portion and the valve stem, so as to enable the valve stem to slide along its own axial direction and move the sealing plate to a position facing the opening;

[0013] The deflection portion is located at one end of the valve stem away from the sealing plate, so that the end of the valve stem connected to the deflection portion deflects in a direction away from the opening at the end of the stroke of the valve stem.

[0014] Preferably, the deflection portion comprises:

[0015] a deflection plate, disposed between the driving portion and the connecting portion, so that the deflection plate can move along the axial direction of the valve stem, the deflection plate having a linear slide and a deflection slide connected to the linear slide, wherein the extension direction of the linear slide is consistent with the axial direction of the valve stem, and the extension direction of the deflection slide is consistent with the deflection direction of the valve stem;

[0016] The deflection member is arranged at one end of the valve stem and is slidably connected to the linear slide and the deflection slide.

[0017] Preferably, one deflection plate and one deflection member form a set of deflection components, two sets of deflection components are provided, and the two sets of deflection components are respectively provided on both sides of the deflection direction of the valve stem.

[0018] Preferably, the connecting portion comprises:

[0019] a connecting member disposed at a driving end of the driving portion, wherein a movement stroke of the connecting member is greater than a movement stroke of the valve stem, and a connecting slot is formed on the connecting member, wherein an extension direction of the connecting slot is consistent with an axial direction of the valve stem;

[0020] a connecting terminal, disposed on the valve stem and extending into the connecting slot, wherein the width of the connecting terminal is smaller than the width of the connecting slot;

[0021] The rubber member is provided on the connecting member and is compressed between the valve stem and the connecting member so as to enable the connecting member and the valve stem to move synchronously.

[0022] Preferably, the connecting portion further includes a first limiting member, which is located at the end of the stroke of the valve stem.

[0023] Preferably, the connecting portion further includes a second limiting member, which is arranged at an end of the connecting member away from the first limiting member, and the second limiting member can abut against the deflection member.

[0024] Preferably, the valve stem comprises:

[0025] a housing connected to the deflection member;

[0026] The rod body is fixedly arranged inside the shell and extends to the outside of the valve body through the outlet.

[0027] Preferably, the driving unit includes:

[0028] Two cylinders, the extension and contraction directions of the piston rods of the two cylinders are opposite to the sliding direction of the valve stem;

[0029] The connecting plate is connected to the piston rods of the two cylinders at the same time, and the deflection plate is arranged on the connecting plate.

[0030] Preferably, the driving part further includes a compression spring, and the compression spring is arranged between the valve body and the housing.

[0031] A semiconductor processing device comprising:

[0032] A vacuum chamber having an opening, wherein a mounting groove is formed on a wall of the vacuum chamber, and a notch of the mounting groove is in communication with the opening;

[0033] The gate valve as described above is arranged in the installation groove, and the sealing plate can extend to the opening through the groove.

[0034] Beneficial effects of the utility model:

[0035] The gate valve of the present invention can drive the valve stem to slide under the cooperation of the driving part and the connecting part, so that the sealing plate can be moved to a position opposite to the opening. When the valve stem is at the end of its stroke, under the action of the deflection part, the end of the valve stem connected to the deflection part can be deflected in the direction away from the opening at the end of the stroke of the valve stem. At this time, the sealing plate can be deflected toward the direction of the opening under the action of the deflection part to increase the sealing between the sealing plate and the opening.

[0036] The semiconductor processing device of the present invention arranges the gate valve in the installation groove of the vacuum chamber, which not only reduces the space occupied by the gate valve but also ensures the sealing between the sealing plate and the opening under the action of the gate valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 This is a schematic diagram of the connection structure between the gate valve and the vacuum chamber in the embodiment of the present utility model;

[0038] Figure 2 yes Figure 1 sectional view of

[0039] Figure 3 This is a schematic structural diagram of a gate valve in an embodiment of the present utility model;

[0040] Figure 4 yes Figure 3 side view.

[0041] In the picture:

[0042] 100, vacuum chamber; 110, opening; 120, mounting slot;

[0043] 1. Valve body; 11. Outlet;

[0044] 2. Driving unit; 21. Cylinder; 22. Connecting plate; 23. Compression spring;

[0045] 3. Valve stem; 31. Housing; 32. Rod body;

[0046] 4. Sealing plate;

[0047] 5. Connecting part; 51. Connecting member; 511. Connecting slide; 52. Connecting terminal; 53. Rubber member; 54. First limiting member; 541. Limiting platform; 542. Limiting roller; 55. Second limiting member;

[0048] 6. Deflection part; 61. Deflection plate; 611. Linear slide; 612. Deflection slide; 62. Deflection member. DETAILED DESCRIPTION

[0049] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0050] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0051] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0052] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are used to refer to positions or locations based on the positions or locations shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0053] See also Figures 1 to 4 In this embodiment, a gate valve for sealing the opening 110 of the vacuum chamber 100 is proposed, which includes a valve body 1, a driving part 2, a valve stem 3, a connecting part 5, a deflection part 6 and a sealing plate 4. The valve body 1 is provided with an outlet 11; the driving part 2 is arranged inside the valve body 1; the valve stem 3 is arranged inside the valve body 1 and extends to the outside of the valve body 1 through the outlet 11, and there is a gap between the outlet 11 and the valve stem 3; the sealing plate 4 is arranged at one end of the valve stem 3; the connecting part 5 is arranged between the driving part 2 and the valve stem 3, so that the valve stem 3 can slide along its own axial direction and move the sealing plate 4 to a position facing the opening 110; the deflection part 6 and the end of the valve stem 3 away from the sealing plate 4, so that the end of the valve stem 3 connected to the deflection part 6 deflects in a direction away from the outlet 110 at the end of the stroke of the valve stem 3.

[0054] It can be understood that, under the cooperation of the driving part 2 and the connecting part 5, the valve stem 3 can be driven to slide, so that the sealing plate 4 can be moved to a position opposite to the opening 110. When the valve stem 3 is at the end of its stroke, under the action of the deflection part 6, the end of the valve stem 3 connected to the deflection part 6 can be deflected in a direction away from the opening 110 at the end of the stroke of the valve stem 3. At this time, the sealing plate 4 can be deflected toward the direction of the opening 110 under the action of the deflection part 6 to increase the sealing between the sealing plate 4 and the opening 110.

[0055] In this embodiment, the deflection part 6 includes a deflection plate 61 and a deflection member 62. The deflection plate 61 is arranged between the driving part 2 and the connecting part 5 so that the deflection plate 61 can move along the axial direction of the valve stem 3, and the movement stroke of the deflection plate 61 is greater than the movement stroke of the valve stem 3. The deflection plate 61 has a linear slide 611 and a deflection slide 612 connected to the linear slide 611, and the extension direction of the linear slide 611 is consistent with the axial direction of the valve stem 3, and the extension direction of the deflection slide 612 is consistent with the deflection direction of the valve stem 3; the deflection member 62 is arranged at one end of the valve stem 3 and is slidably connected to the linear slide 611 and the deflection slide 612. It can be understood that when the deflection member 62 is slidably connected to the linear slide 611, the valve stem 3 moves along its own axial direction. When the valve stem 3 is at the end of the stroke, the deflection member 62 can continue to move under the continuous action of the drive part 2, thereby enabling the deflection member 62 to move from the linear slide 611 to the deflection slide 612, thereby enabling the valve stem 3 to deflect.

[0056] Furthermore, a deflection plate 61 and a deflection member 62 form a deflection assembly, and two sets of deflection assemblies are provided, and the two sets of deflection assemblies are respectively provided on both sides of the deflection direction of the valve stem 3. It can be understood that the provision of two sets of deflection assemblies can make the force applied to the valve stem 3 more uniform during deflection, thereby further improving the sealing effect of the sealing plate 4.

[0057] In this embodiment, the connecting part 5 includes a connecting member 51, a connecting terminal 52 and a rubber member 53. The connecting member 51 is arranged at the driving end of the driving part 2. A connecting groove 511 is provided on the connecting member 51. The extension direction of the connecting groove 511 is consistent with the axial direction of the valve stem 3; the connecting terminal 52 is arranged on the valve stem 3 and extends to the inside of the connecting groove 511. The width of the connecting terminal 52 is smaller than the width of the connecting groove 511; the rubber member 53 is arranged on the connecting member 51 and is compressed between the valve stem 3 and the connecting member 51 so that the connecting member 51 and the valve stem 3 move synchronously. It can be understood that the connecting groove 511 is divided into a forward end and a backward end at both ends along the moving direction of the connecting member 51. When the sealing plate 4 seals the opening 110, the connecting member 51 is moving, and the connecting terminal 52 is at the forward end, so that the connecting member 51 can move synchronously with the valve stem 3. After the valve stem 3 moves to the end of the stroke, the connecting member 51 continues to move, so that the connecting terminal 52 can approach the backward end and can achieve deflection under the action of the deflection part 6. The rubber part 53 can rely on friction to prevent the valve stem 3 from moving freely before reaching the end of the stroke.

[0058] Furthermore, the connecting portion 5 further includes a first stopper 54, which is located at the end of the travel of the valve stem 3. It is understood that when the valve stem 3 moves to the end of the travel, it will be blocked by the first stopper 54, thereby preventing the valve stem 3 from continuing to move with the connecting member 51, thereby ensuring that the sealing plate 4 can move to a position directly opposite the opening 110.

[0059] Exemplarily, the first limiting member 54 includes a limiting platform 541 and a limiting roller 542. The limiting platform 541 is arranged inside the valve body 1, and the limiting roller 542 is arranged on the valve stem 3. When the valve stem 3 moves, the limiting roller 542 can be limited by the limiting platform 541, so that the valve stem 3 can be at the end of the stroke, and can remain at the end of the stroke while the connecting member 51 continues to move.

[0060] Furthermore, the connecting portion 5 further includes a second stopper 55, which is disposed at an end of the connecting member 51 facing away from the first stopper 54, and is capable of abutting against the deflection member 62. It is understood that during the return stroke of the valve stem 3, the connecting member 51 can return to its initial position under the action of the driving portion 2. During this process, the connecting terminal 52 can first slide from the deflection slot 612 to the linear slot 611, thereby returning the valve stem 3 from the deflection state to the initial state. Subsequently, the deflection member 62 abuts against the second stopper 55, thereby enabling the connecting member 51 to move synchronously with the valve stem 3, thereby disengaging the sealing plate 4 from the opening 110.

[0061] Exemplarily, the second limiting member 55 is preferably provided on a lug of the connecting member 51 . During the return stroke of the connecting member 51 , the lug can abut against the deflection member 62 , thereby enabling the connecting member 51 to drive the valve stem 3 to move synchronously.

[0062] In this embodiment, the valve stem 3 comprises a housing 31 and a rod body 32. The housing 31 is connected to a deflection member 62. The rod body 32 is fixedly mounted within the housing 31 and extends to the exterior of the valve body 1 through the outlet 11. It is understood that a drive unit 2 is disposed between the housing 31 and the connecting member 51, comprising two cylinders 21 and a connecting plate 22. The piston rods of the two cylinders 21 extend and retract in directions opposite to the sliding direction of the valve stem 3. The connecting plate 22 is connected to the piston rods of both cylinders 21, and the deflection plate 61 is disposed on the connecting plate 22. The two deflection units 6 are disposed at either end of the connecting plate 22 and are able to move smoothly under the action of the two cylinders 21, thereby further improving the sealing performance of the sealing plate 4.

[0063] Furthermore, the driving unit 2 further includes a compression spring 23, which is disposed between the valve body 1 and the housing 31. It is understood that the compression spring 23 can always be compressed and disposed between the valve body 1 and the housing 31, thereby always applying a force to the valve stem 3 to prevent the cylinder 21 from failing while still ensuring the sealing performance of the sealing plate 4.

[0064] This embodiment also provides a semiconductor processing device, comprising a vacuum chamber 100 and the aforementioned gate valve. The vacuum chamber 100 has an opening 110. A mounting groove 120 is defined in the wall of the vacuum chamber 100, and the notch of the mounting groove 120 is in communication with the opening 110. The gate valve is disposed in the mounting groove 120, and the sealing plate 4 can extend through the notch to the opening 110. It will be appreciated that disposing the gate valve in the mounting groove 120 of the vacuum chamber 100 not only reduces the space occupied by the gate valve, but also ensures a tight seal between the sealing plate 4 and the opening 110.

[0065] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A gate valve for sealing an opening (110) of a vacuum chamber (100), characterized in that: include: The valve body (1) is provided with an outlet (11); A driving part (2) is arranged inside the valve body (1); A valve stem (3) is arranged inside the valve body (1) and extends to the outside of the valve body (1) through the outlet (11), with a gap between the outlet (11) and the valve stem (3); A sealing plate (4) is provided at one end of the valve stem (3); a connecting portion (5) disposed between the driving portion (2) and the valve stem (3) to enable the valve stem (3) to slide along its own axial direction and move the sealing plate (4) to a position facing the opening (110); The deflection portion (6) is connected to the end of the valve stem (3) facing away from the sealing plate (4), so that the end of the valve stem (3) connected to the deflection portion (6) deflects in a direction away from the opening (110) at the end of the stroke of the valve stem (3).

2. The gate valve according to claim 1, characterized in that The deflection portion (6) comprises: A deflection plate (61) is arranged between the driving portion (2) and the connecting portion (5) so that the deflection plate (61) can move along the axial direction of the valve stem (3), and the movement stroke of the deflection plate (61) is greater than the movement stroke of the valve stem (3); the deflection plate (61) has a linear slide (611) and a deflection slide (612) connected to the linear slide (611), and the extension direction of the linear slide (611) is consistent with the axial direction of the valve stem (3), and the extension direction of the deflection slide (612) is consistent with the deflection direction of the valve stem (3); The deflection member (62) is arranged at one end of the valve stem (3) and is slidably connected to the linear slide groove (611) and the deflection slide groove (612).

3. The gate valve according to claim 2, characterized in that One deflection plate (61) and one deflection member (62) form a set of deflection components. Two sets of deflection components are provided, and the two sets of deflection components are respectively provided on both sides of the deflection direction of the valve stem (3).

4. The gate valve according to claim 2, characterized in that The connecting portion (5) comprises: A connecting member (51) is provided at the driving end of the driving portion (2), and a connecting slot (511) is provided on the connecting member (51), wherein the extending direction of the connecting slot (511) is consistent with the axial direction of the valve stem (3); a connecting terminal (52) disposed on the valve stem (3) and extending into the interior of the connecting chute (511), wherein the width of the connecting terminal (52) is smaller than the width of the connecting chute (511); A rubber member (53) is provided on the connecting member (51) and is compressed between the valve stem (3) and the connecting member (51) so as to enable the connecting member (51) and the valve stem (3) to move synchronously.

5. The gate valve according to claim 4, characterized in that The connecting portion (5) further comprises a first limiting member (54), wherein the first limiting member (54) is located at the end of the travel of the valve stem (3).

6. The gate valve according to claim 5, characterized in that The connecting portion (5) further comprises a second limiting member (55), the second limiting member (55) being arranged at an end of the connecting member (51) away from the first limiting member (54), and the second limiting member (55) being capable of abutting against the deflection member (62).

7. The gate valve according to claim 4, characterized in that The valve stem (3) comprises: A housing (31) connected to the deflection member (62); The rod (32) is fixedly arranged inside the housing (31) and extends to the outside of the valve body (1) through the outlet (11).

8. The gate valve according to claim 7, characterized in that The driving unit (2) comprises: Two cylinders (21), the expansion and contraction directions of the piston rods of the two cylinders (21) are opposite to the sliding direction of the valve stem (3); The connecting plate (22) is connected to the piston rods of the two cylinders (21) at the same time, and the deflection plate (61) is arranged on the connecting plate (22).

9. The gate valve according to claim 8, characterized in that The driving part (2) further includes a compression spring (23), and the compression spring (23) is arranged between the valve body (1) and the housing (31).

10. A semiconductor processing device, characterized in that: include: A vacuum chamber (100) has an opening (110); a mounting groove (120) is provided on a wall of the vacuum chamber (100); and a notch of the mounting groove (120) is in communication with the opening (110); The gate valve according to any one of claims 1 to 9 is arranged in the mounting groove (120), and the sealing plate (4) can extend through the groove to the opening (110).

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