XPS heating sample table device

Abstract

An XPS heating sample table device comprises a containing table and a base. The accommodating table is composed of at least one crucible; or, a containing groove is formed in the containing table, and the groove opening of the containing groove faces upwards and is used for containing the sample. The base is detachably connected with the containing table. Wherein the base comprises a guide structure and a positioning structure, the guide structure is used for being in sliding connection with the containing table, and the positioning structure is used for limiting the position of the containing table on the guide structure; or, the base comprises a threaded connection structure or a spring buckle structure which is used for enabling the base to be connected with the containing table in a positioning mode. According to the XPS heating sample table device, solid-phase and liquid-phase coupling for observing valence change through in-situ heating can be achieved, chemical component and valence analysis of solid-phase and liquid-phase materials can be accelerated, and heating in a pre-pumping cavity or outside is not needed, so that the detection characterization efficiency is greatly improved, and the experiment cost is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of in-situ experiments, and in particular to an XPS heating sample stage device. Background Art

[0002] With the growing demand for high-performance materials, surface engineering is becoming increasingly important. Physical and chemical interactions at material surfaces and interfaces govern many issues related to modern materials. After modification and treatment, the properties of materials and the resulting modifications vary with depth or thickness, and their chemical properties can be analyzed using XPS (X-ray Photoelectron Spectroscopy). XPS is a highly sensitive surface analysis technique that analyzes the composition and chemical state of a sample by irradiating the sample surface and measuring its electron energy spectrum. XPS has a wide range of applications in materials science, chemistry, surface physics, semiconductors, electronic materials, catalysis, and other fields.

[0003] The chemical valence transition of modified and treated materials at critical temperatures is extremely important. Currently, the mainstream XPS heating stages on the market are ceramic wafer stages heated by electric heating wires. The sample is attached to the stage surface with carbon or copper adhesive, and the temperature is controlled by adjusting the current and voltage applied to the heating wires. However, these ceramic wafer stages are only suitable for heating solid samples within the solid phase and cannot monitor chemical valence states during solid-liquid phase transitions.

[0004] Based on this, how to design a solid-phase and liquid-phase combined XPS heating sample stage device that can be used for in-situ heating to observe valence state changes has become a technical problem that needs to be solved urgently in the industry. Summary of the Invention

[0005] In order to solve at least one problem existing in the prior art, the purpose of the present application is to provide an XPS heating sample stage device that can realize the in-situ heating and observation of valence changes in solid phase and liquid phase. It can not only accelerate the chemical composition and valence state analysis of solid phase and liquid phase materials, but also does not require pre-evacuation chamber or external heating, thereby greatly improving the detection and characterization efficiency and helping to reduce experimental costs.

[0006] To achieve the above objectives, the XPS heated sample stage device provided in this application includes:

[0007] A containing platform, consisting of at least one crucible; or, a containing groove is provided on the containing platform, with the groove opening facing upwards, for containing the sample; and,

[0008] The base is detachably connected to the accommodating table.

[0009] Optionally, the base includes a guide structure and a positioning structure; the guide structure is used to be slidably connected to the accommodating platform; and the positioning structure is used to limit the position of the accommodating platform on the guide structure.

[0010] Optionally, the base includes a threaded connection structure or a spring snap structure for positioning and connecting the base to the accommodating platform.

[0011] Optionally, the guide structure is a guide rail structure, and the base includes at least one guide rail structure; the positioning structure is a positioning groove, and the positioning groove is opened at the bottom of the guide rail groove of the guide rail structure.

[0012] Further optionally, the crucible comprises:

[0013] a crucible body, for accommodating the sample;

[0014] a first connecting portion provided at the bottom of the crucible body, slidably fitted with the guide rail structure; and

[0015] The positioning portion protruding from the bottom of the first connecting portion can be inserted and matched with the positioning groove of the guide rail groove.

[0016] Optionally, the guide structure is in the shape of a U-shaped guide rail, and the positioning structure is a plug structure at one end of the guide structure along the guide.

[0017] Further optionally, the accommodating platform includes:

[0018] a receiving platform body; and

[0019] The second connecting portion is arranged at the bottom of the accommodating platform body and is slidably matched with the U-shaped guide rail of the guide structure.

[0020] Optionally, the base is made of ceramic.

[0021] Optionally, the accommodating platform is made of tantalum or aluminum oxide.

[0022] Optionally, at least two sockets are provided on a side surface of the base for plugging the base into a corresponding XPS heating sample stage device.

[0023] The present application discloses an XPS heated sample stage device, which places samples by forming a receiving stage with at least one crucible, or by providing a receiving groove on the receiving stage; and the receiving stage is detachably connected to the base. This allows the receiving structure to be free from the restrictions of the solid and liquid phases of the sample, and enables in-situ heating and observation of valence changes in the solid and liquid phases. This not only speeds up the chemical composition and valence analysis of solid and liquid phase materials, but also eliminates the need for pre-evacuation chamber or external heating, thereby greatly improving the efficiency of detection and characterization, and helping to reduce experimental costs. In addition, the use of multiple crucibles to form a receiving stage can accommodate different samples, which can improve the applicability and flexibility of the sample stage device.

[0024] Other features and advantages of the present application will be set forth in the following description, and in part will be apparent from the description, or may be understood by practicing the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are used to provide a further understanding of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings:

[0026] Figure 1 Schematic diagram of the structure of the XPS heating sample stage device according to an embodiment of the present application;

[0027] Figure 2 Schematic diagram of the structure of an XPS heating sample stage device according to another embodiment of the present application;

[0028] Figure 3 for Figure 1 AA cross-section of the XPS heated sample stage device;

[0029] Figure 4 for Figure 2 Schematic diagram of the structure of the middle base;

[0030] Figure 5 for Figure 2 a bottom view of the middle storage platform;

[0031] Figure 6 for Figure 2 BB cross-section of the XPS heated sample stage device;

[0032] Figure 7 for Figure 2 A schematic diagram of the structure of another base;

[0033] Figure 8 for Figure 7 Top view of the middle base;

[0034] Figure 9 for Figure 2BB cross-section of another XPS heated sample stage device.

[0035] Specifically, the following reference numerals are included:

[0036] XPS heated sample stage device 1000;

[0037] Accommodation table 100; crucible 110; crucible body 111; first connection portion 112; positioning portion 113; accommodation groove 120; accommodation table body 130; second connection portion 131; fixing portion 132; threaded hole 133;

[0038] Base 200 ; guide structure 211 ; positioning structure 212 ; fixing groove 220 ; threaded through hole 230 ; insertion hole 240 . DETAILED DESCRIPTION

[0039] The following describes embodiments of the present application in more detail with reference to the accompanying drawings. Although certain embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be construed as limited to the embodiments described herein. Instead, these embodiments are provided to provide a more thorough and complete understanding of the present application. It should be understood that the drawings and embodiments of the present application are for illustrative purposes only and are not intended to limit the scope of protection of the present application.

[0040] As used herein, the term "including" and its variations are open-ended, i.e., "including but not limited to." The term "based on" means "based, at least in part, on." The term "one embodiment" means "at least one embodiment," the term "another embodiment" means "at least one additional embodiment," and the term "some embodiments" means "at least some embodiments." Other terms are defined in the following description.

[0041] Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings.

[0042] like Figures 1-9 As shown, the XPS heated sample stage device 1000 includes a receiving stage 100 and a base 200. The base 200 is detachably connected to the receiving stage 100.

[0043] For the receiving platform 100, as an embodiment, Figure 1 As shown, the receiving platform 100 is composed of at least one crucible 110. As another embodiment, Figure 2 As shown, a receiving groove 120 is provided on the receiving platform 100, with the notch of the receiving groove 120 facing upwards for receiving the sample. In a specific example, the material of the base 200 is preferably ceramic.

[0044] For the base 200, as an embodiment, Figure 3 and Figure 4As shown, the base 200 includes a guide structure 211 and a positioning structure 212. The guide structure 211 is configured to be slidably connected to the receiving platform 100, while the positioning structure 212 is configured to define the position of the receiving platform 100 on the guide structure 211. Alternatively, the base 200 includes a threaded connection structure or a spring-loaded locking structure for securing the base 200 to the receiving platform 100. In a specific example, the receiving platform 100 is preferably made of tantalum or aluminum oxide.

[0045] It is understood that the XPS heated sample stage device 1000 can be a combination of a crucible 110 and a base 200 provided with a guide structure 211 and a positioning structure 212, or a combination of a crucible 110 and a base 200 provided with a threaded connection structure or a spring-locking structure, or a combination of a receiving platform 100 with a receiving groove 120 and a base 200 provided with a guide structure 211 and a positioning structure 212, or a combination of a receiving platform 100 with a receiving groove 120 and a base 200 provided with a threaded connection structure or a spring-locking structure. This application does not impose any specific restrictions on this.

[0046] When the XPS heating sample stage device 1000 of the embodiment of the present application is used, the accommodating table 100 is first slid and positioned to a preset position by the guide structure 211 and the positioning structure 212 of the base 200; alternatively, the accommodating table 100 is fixed to the base 200 by a threaded connection structure or a spring buckle structure. This ensures that the base 200 and the accommodating table 100 are easy to assemble and disassemble. Then, the sample can be placed in the accommodating tank 120 or the crucible 110. The accommodating structure is not restricted by the solid and liquid phases of the sample, and can realize the in-situ heating and observation of valence state changes in the solid phase and liquid phase. It can not only speed up the chemical composition and valence state analysis of the solid phase and liquid phase materials, but also eliminates the need for pre-evacuation cavity or external heating, thereby greatly improving the detection and characterization efficiency and helping to reduce experimental costs.

[0047] In addition, when a plurality of crucibles are used to form a storage stage, different samples can be stored, thereby improving the applicability and flexibility of the sample stage device.

[0048] In one embodiment, Figure 1 and Figure 3 As shown, the base 200 includes a guide structure 211 and a positioning structure 212; the guide structure 211 is specifically a guide rail structure, and the base 200 includes at least one guide rail structure; the positioning structure 212 is a positioning groove, which is opened at the bottom of the guide rail groove of the guide rail structure.

[0049] Further optionally, the accommodating platform 100 is composed of at least one crucible 110; the crucible 110 includes: a crucible body 111, a first connecting portion 112, and a positioning portion 113. The crucible body 111 is used to accommodate the sample; the first connecting portion 112 is provided at the bottom of the crucible body 111 and is slidably engaged with the guide rail groove of the guide rail structure; the positioning portion 113 is protruded from the bottom of the first connecting portion 112 and is insertably engaged with the positioning groove of the guide rail groove. Thus, the guide rail structure can be used to match multiple crucibles 110, and on the basis of realizing the solid-phase and liquid-phase combination of in-situ heating to observe valence state changes, it has high applicability and flexibility, and the structure is easy to implement and easy to assemble and disassemble.

[0050] Preferably, the outline of the crucible body 111 is a rectangular parallelepiped or a cube, and a plurality of crucibles 110 can be spliced together to form the accommodating platform 100, which is beneficial for space arrangement.

[0051] It should be noted that the concepts of "first" and "second" mentioned in this application are only used to distinguish different structures, and are not used to limit the order, interdependence or relative importance of the functions performed by these structures.

[0052] In one embodiment, Figures 4 to 6 As shown, the base 200 includes a guide structure 211 and a positioning structure 212 ; the guide structure 211 is in the shape of a U-shaped guide rail, and the positioning structure 212 is a plug structure at one end of the guide structure 211 along the guide.

[0053] Optionally, the storage platform 100 includes a storage platform body 130 and a second connecting portion 131. The storage platform body 130 includes a storage groove 120 for accommodating the sample. The second connecting portion 131 is located at the bottom of the storage platform body 130 and slidably engages with a U-shaped guide rail structure 211. This structure is easy to implement and highly convenient for assembly and disassembly.

[0054] In one embodiment, Figures 7 to 9 As shown, a fixing groove 220 is formed on the upper surface of the base 200 , and a protruding fixing portion 132 is formed on the bottom of the accommodating platform body 130 , and the fixing portion 132 and the fixing groove 220 can be inserted and matched.

[0055] Regarding the specific connection structure, as an example, at least one threaded through-hole 230 is defined on the sidewall of the fixing groove 220; at least one threaded hole 133 is defined on the sidewall of the fixing portion 132, and is provided in a one-to-one correspondence with the at least one threaded through-hole 230, for engaging with a threaded member to form a threaded connection. As another example, at least one through-hole is defined on the sidewall of the fixing groove 220; at least one hole is defined on the sidewall of the fixing portion 132, and is provided in a one-to-one correspondence with the at least one through-hole, for engaging with a spring clip to form a spring clip connection. The connection structure in this embodiment is easy to implement, highly convenient for assembly and disassembly, and highly stable.

[0056] It is understandable that the hole or threaded hole on the side wall of the fixing portion can be a blind hole or a through hole, and this application does not impose any specific limitation on this.

[0057] In the embodiment of the present application, at least two insertion holes 240 are further provided on the side of the base 200 for inserting the base 200 into the corresponding XPS heating sample stage device. The insertion structure is simple and convenient for assembly and disassembly.

[0058] In summary, according to the XPS heated sample stage device of the embodiment of the present application, the accommodating stage is slid and positioned to a preset position by the guiding structure and positioning structure of the base; or the accommodating stage is fixed to the base by a threaded connection structure or a spring buckle structure. The sample is placed by forming the accommodating stage with at least one crucible, or by providing a accommodating groove on the accommodating stage. The accommodating structure is not restricted by the solid and liquid phases of the sample, and can realize the in-situ heating and liquid phase combination of observing the valence state change. It can not only accelerate the chemical composition and valence state analysis of solid and liquid phase materials, but also eliminate the need for pre-evacuation chamber or external heating, thereby greatly improving the detection and characterization efficiency and helping to reduce experimental costs.

[0059] It should be noted that the modifications of "one" and "plurality" mentioned in this application are illustrative rather than restrictive. Those skilled in the art should understand that, unless otherwise clearly indicated in the context, it should be understood as "one or more"; "plurality" should be understood as two or more.

[0060] In the description of this application, it should be noted that the relationship between structures should be understood in a broad sense. For example, the orientation or position relationship indicated by "upper", "lower", "inside", "outside", etc. is based on the orientation or position relationship shown in the accompanying drawings. It is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on this application.

[0061] Furthermore, unless otherwise expressly specified or limited, the terms “connected” and “connection” may refer to a fixed connection or a detachable connection; a direct connection or an indirect connection through an intermediate medium; or internal communication between two elements.

[0062] It should be noted that in the drawings, the sizes of layers, regions, and components, as well as their relative sizes, may be exaggerated for clarity. The same or similar reference numerals throughout represent the same or similar components or components with the same or similar functions.

[0063] It will be understood that when a structure or layer is referred to as being “on” or “connected to” another component or layer, it can be directly on or connected to the other component or layer or intervening components or structures may be present.

[0064] Those skilled in the art will understand that the above are merely preferred embodiments of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. An XPS heated sample stage device, characterized in that: include: A receiving platform, consisting of at least one crucible; Alternatively, a receiving groove is provided on the receiving platform, with the notch of the receiving groove facing upwards, for receiving the sample; and, The base is detachably connected to the accommodating table.

2. The XPS heated sample stage device according to claim 1, characterized in that The base includes a guide structure and a positioning structure; the guide structure is used to be slidably connected to the accommodating platform; and the positioning structure is used to limit the position of the accommodating platform on the guide structure.

3. The XPS heated sample stage device according to claim 1, wherein: The base includes a threaded connection structure or a spring buckle structure for positioning and connecting the base with the accommodating platform.

4. The XPS heated sample stage device according to claim 2, characterized in that: The guiding structure is a guide rail structure, and the base includes at least one guide rail structure; the positioning structure is a positioning groove, and the positioning groove is opened at the groove bottom of the guide rail groove of the guide rail structure.

5. The XPS heated sample stage device according to claim 4, characterized in that: The crucible comprises: a crucible body, for accommodating the sample; a first connecting portion provided at the bottom of the crucible body, slidably fitted with the guide rail structure; and The positioning portion protruding from the bottom of the first connecting portion can be inserted and matched with the positioning groove of the guide rail groove.

6. The XPS heated sample stage device according to claim 2, characterized in that: The guide structure is in the shape of a U-shaped guide rail, and the positioning structure is a plug structure at one end of the guide structure along the guide.

7. The XPS heated sample stage device according to claim 6, characterized in that: The accommodating platform includes: a receiving platform body; and The second connecting portion is arranged at the bottom of the accommodating platform body and is slidably matched with the U-shaped guide rail of the guide structure.

8. The XPS heated sample stage device according to claim 1, characterized in that: The base is made of ceramic.

9. The XPS heated sample stage device according to claim 1, characterized in that: The material of the accommodating platform is tantalum or aluminum oxide.

10. The XPS heated sample stage device according to any one of claims 1 to 9, characterized in that: At least two insertion holes are provided on the side of the base for inserting the base into a corresponding XPS heating sample stage device.

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