Reduction power supply water immersion detection device

Abstract

According to the water immersion detection device for the reduction power source, the bottom of a movable plate is fixedly connected with a connecting plate, the bottom of the connecting plate is fixedly connected with a ball nut, a ball screw penetrates through and is movably installed in the ball nut, and a servo motor is fixedly installed at the end of the ball screw; a water receiving tray positioned below the connecting plate at a preset distance is mounted on the fixing frame, and an inclined included angle is formed between the water receiving tray and the external polycrystalline silicon reduction power supply cabinet; a first water immersion sensor and a second water immersion sensor are fixedly installed on the inner wall of one side of the low-lying position of the water receiving tray at a preset interval, and a first water immersion relay and a second water immersion relay are installed on the other side of the low-lying position of the water receiving tray. The first water immersion sensor is electrically connected with the first water immersion relay, and the second water immersion sensor is electrically connected with the second water immersion relay. Therefore, the continuous and reliable operation of the reduction power supply is ensured.

Description

Technical Field

[0001] The utility model relates to the field of machinery, in particular to a reduction power supply water immersion detection device. Background Art

[0002] Electronic-grade polysilicon is the most basic raw material in the semiconductor industry, and the reduction power supply is one of the most important equipment in the production process of electronic-grade polysilicon. The polysilicon reduction power supply system is designed specifically for heating polysilicon reduction furnaces. It is an extremely important equipment in the polysilicon production process. It has advantages such as high power factor, high conversion efficiency, and low harmonics. It plays a vital role in ensuring the smooth progress of production and meeting the process requirements of the product. The reduction power supply cabinet contains many components, and the heat generated inside the cabinet is relatively high. In particular, the thyristor components generate a lot of heat, and generally use circulating water for cooling. Due to the large number of cooling pipe interfaces, water leaks occasionally occur in the cabinet, which can have a great impact on the safe production of electronic-grade polysilicon. Therefore, it is very necessary to provide a safe and reliable method for detecting water immersion in the reduction power supply cabinet.

[0003] In the process of implementing the present invention, it was found that the existing water immersion detection unit's false alarm would lead to the interruption of polysilicon production and the failure to produce qualified products, while the actual presence of water leakage could not promptly alarm. Utility Model Content

[0004] In view of this, an embodiment of the present invention provides a reduction power supply water immersion detection device, which can ensure the continuous and reliable operation of the reduction power supply, and when the reduction power supply leaks, it will promptly alarm and safely stop operation.

[0005] To achieve the above-mentioned object, according to an embodiment of the present invention, a reduction power supply water immersion detection device is provided, comprising a fixing frame, a movable plate, a connecting plate, a ball screw, a ball nut, a servo motor, a water receiving tray, a first water immersion relay, a second water immersion relay, a first water immersion sensor, and a second water immersion sensor;

[0006] Among them, the bottom of the movable plate is fixedly connected to a connecting plate, the bottom of the connecting plate is fixedly connected to the ball nut, and the ball screw passes through and is movably installed in the ball nut, the end of the ball screw is fixedly installed with a servo motor, and the servo motor is installed on a fixed frame in the external polysilicon reduction power supply cabinet; the water receiving tray located at a preset distance below the connecting plate is installed on the fixed frame, and there is an inclined angle between the water receiving tray and the external polysilicon reduction power supply cabinet; the first water immersion sensor and the second water immersion sensor are fixedly installed on the inner wall of one side of the low-lying part of the water receiving tray at a preset distance, and the first water immersion relay and the second water immersion relay are respectively installed on the other side of the low-lying part of the water receiving tray, the first water immersion sensor is electrically connected to the first water immersion relay, the second water immersion sensor is electrically connected to the second water immersion relay, and the first water immersion relay and the second water immersion relay are respectively electrically connected to the external reduction power supply system.

[0007] Optionally, the method includes installing a third water immersion sensor on an inner wall of a high depression of the water receiving tray, and the third water immersion sensor is electrically connected to an external reduction power supply system.

[0008] Optionally, it includes: a limiting slider is fixedly installed on the bottom of the movable plate, a limiting rod is movably installed on the bottom of the limiting slider, and fixed blocks are fixedly installed on both ends of the limiting rod.

[0009] Optionally, the bottom of the fixed block is connected to a baffle installed on the fixed frame, and a servo motor is fixedly installed on the baffle.

[0010] Optionally, the method includes: a bell cover being movably mounted on the movable plate.

[0011] Optionally, the fixing frame includes a shell fixedly mounted around the fixing frame.

[0012] One embodiment of the above-mentioned utility model has the following advantages or beneficial effects: the restoration power supply water leakage detection device provided by the utility model can detect and alarm in the early stage as long as there is water leakage in the equipment, and adopts two sets of water leakage detection in parallel, so that unnecessary production interruptions will not be caused by false alarms of a single water leakage detection.

[0013] The further effects of the above-mentioned non-conventional optional manner will be described below in conjunction with specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings are provided to facilitate a better understanding of the present invention and do not constitute an undue limitation of the present invention.

[0015] Figure 1 This is a schematic diagram of the external structure of a polysilicon reduction power supply cabinet according to an embodiment of the present utility model;

[0016] Figure 2 This is a schematic diagram of the overall structure of a reduction power supply water immersion detection device according to an embodiment of the present utility model;

[0017] Figure 3 This is a partial enlarged view of the water receiving tray according to an embodiment of the present utility model;

[0018] Figure 4 This is an exploded view of the structure of the reduction power supply water immersion detection device according to an embodiment of the present utility model without marking the water receiving tray;

[0019] Figure 5 According to the embodiment of the present utility model Figure 4 A partial enlarged view of point A in the middle. DETAILED DESCRIPTION

[0020] The following description of exemplary embodiments of the present invention is made in conjunction with the accompanying drawings, which include various details of the embodiments of the present invention to facilitate understanding. These details should be considered as merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present invention. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0021] At least one embodiment of the present invention provides a device for detecting water immersion in a reduction power supply, such as Figure 1-5 As shown, the reduction power supply water immersion detection device may include a water receiving tray 3, a fixing frame 5, a first water immersion sensor 7, a second water immersion sensor 8, a first water immersion relay 9, a second water immersion relay 10, a movable plate 13, a connecting plate 14, a ball screw 15, a ball nut 16, and a servo motor 17. In an embodiment, the water receiving tray 3 is mounted on the fixing frame 5 at a predetermined distance below the connecting plate 14 (for example, the height of the water receiving tray 21 is 1-2 cm), and an angle is formed between the water receiving tray 3 and the external polysilicon reduction power supply cabinet 1. Preferably, the angle between the water receiving tray 3 and the external polysilicon reduction power supply cabinet 1 is approximately 5 degrees.

[0022] A first water immersion sensor 7 and a second water immersion sensor 8 are fixedly installed on the inner wall of one side of the low-lying part of the water receiving tray 3 at a preset distance, and a first water immersion relay 9 and a second water immersion relay 10 are respectively installed on the other side of the low-lying part of the water receiving tray 3. The first water immersion sensor 7 is electrically connected to the first water immersion relay 9, and the second water immersion sensor 8 is electrically connected to the second water immersion relay 10, and the first water immersion relay 9 and the second water immersion relay 10 are respectively electrically connected to the external reduction power supply system (for example: the first water immersion relay 9 and the second water immersion relay 10 are respectively electrically connected to the PLC control system 2). Therefore, when the reduction power supply water immersion detection device is working, the leaked liquid of the water cooling system of the polysilicon reduction power supply cabinet 1 is collected through the water receiving tray 21. The oblique angle structure of the water receiving tray 21 is conducive to allowing the liquid to move along the angle and contact the first water immersion sensor 7 and the second water immersion sensor 8. The first water immersion sensor 7 and the second water immersion sensor 8 use the principle of liquid conductivity. When the detector contacts the liquid, the first water immersion relay 9 and the second water immersion relay 10 generate an alarm signal and send the alarm signal to the PLC control system 2 through the line. The setting of the first water immersion sensor 7 and the second water immersion sensor 8 can prevent false alarms from occurring in a single water immersion sensor.

[0023] The bottom of movable plate 13 is fixedly connected to connecting plate 14, which is also fixedly connected to ball nut 16. A ball screw 15 extends through and is movably mounted in ball nut 16. A servo motor 17 is fixedly mounted at the end of ball screw 15. Servo motor 17 is mounted on mounting bracket 5 within external polysilicon reduction power supply cabinet 1. Thus, the rotational motion of ball screw 15 is converted into linear motion of ball nut 16. Connecting plate 14 at the top of ball nut 16 drives movable plate 13 to move synchronously with ball nut 1.

[0024] As some preferred embodiments of the present invention, Figure 1-5 As shown, the restoration power supply water immersion detection device described in the present invention also includes a third water immersion sensor 11, wherein the third water immersion sensor 11 is installed on the inner wall of one side of the high and low part of the water receiving tray 3, and the third water immersion sensor 11 is electrically connected to the external restoration power supply system (for example: the third water immersion sensor 11 is electrically connected to the PLC control system 2).

[0025] Therefore, the restoration power supply water immersion detection device described in the present invention can avoid mutual failure between the first water immersion sensor 7 and the second water immersion sensor 8. By installing the third water immersion sensor 11 at the top of the water receiving tray 3 at an oblique angle, it is helpful to improve the limitations of water immersion monitoring.

[0026] As other preferred embodiments of the present invention, Figure 1-5 As shown, the restoration power supply water immersion detection device described in the present invention can also include a limit slider 18, a limit rod 19 and a fixed block 20, wherein the limit slider 18 is fixedly installed at the bottom of the movable plate 13, the limit rod 19 is movably installed at the bottom of the limit slider 18, and fixed blocks 20 are respectively fixedly installed at both ends of the limit rod 19.

[0027] In the preferred embodiment, the movable plate 13 and connecting plate 14 are supported by a single ball nut 16, which may cause them to wobble. Four limit sliders 18 are fixedly mounted on the bottom of the movable plate 13 of the present invention's water-reduction power supply detection device. Two limit rods 19 are movably mounted on the bottoms of each of the four limit sliders 18. Fixing blocks 20 are fixedly mounted at each end of each of the two limit rods 19. Therefore, during operation, the movable plate 13 is secured to the limit sliders 18 at its bottom, and the limit rods 19 constrain the movable plate 13, preventing it from wobble.

[0028] In a further embodiment, the bottom of the fixed block 20 is connected to the retaining net 12 mounted on the fixed frame 5, and a servo motor 17 is fixedly mounted on the retaining net 2. Therefore, when the reduction power supply water immersion detection device described in the utility model is in operation, it is supported and fixed by the retaining net 12, which facilitates the transportation of electronic-grade polysilicon. In addition, when the water flow system leaks during the production of electronic-grade polysilicon, the retaining net 12 helps to allow liquid to fall into the water receiving tray 3.

[0029] As some more preferred embodiments of the present invention, Figure 1-5 As shown, the reduction power supply water immersion detection device of the present invention may further include a bell jar 3, wherein the bell jar 3 is movably mounted on the movable plate 13. Therefore, when the reduction power supply water immersion detection device of the present invention is in operation, the movable plate 13 and the connecting plate 14 on the ball nut 16 are displaced by the rotation of the ball screw 15, thereby realizing the production and unloading of electronic-grade polysilicon inside the bell jar 3.

[0030] In addition, the housing 6 can be fixedly mounted around the fixing frame of the reduction power source water immersion detection device of the present invention, so that a certain protection effect can be achieved through the housing 6.

[0031] It can be seen that in the event of water leakage in the water cooling system of the external polysilicon reduction power supply cabinet 1, the liquid can leak downward through the baffle 12 until the liquid flows into the inside of the water receiving tray 3. When the first water immersion sensor 7 and the second water immersion sensor 8 (the two-pole probes are insulated by air during normal operation) contact the liquid, detection is performed using the liquid conductivity principle. When the probe is immersed in water, it is turned on and a dry contact signal is output. When the probe is immersed in water, an alarm signal is generated. The output ends of the first water immersion relay 9 and the second water immersion relay 10 are connected in parallel to the PLC control system 2 of the reduction power supply system. By using two groups in parallel, unnecessary production interruptions caused by false alarms of a single water immersion detection are prevented. The ball screw 15 is rotated by the servo motor 17, and the rotational motion of the ball screw 15 is converted into linear motion of the ball nut 16, which in turn drives the connecting plate 14 to drive the movable plate 13 to move synchronously with the ball nut 16, so that the bell cover 3 is transported by the movable plate 13, so that the electronic-grade polysilicon inside the bell cover 3 enters the interior of the polysilicon reduction power supply cabinet 1 for production work. After the production is completed, the movable plate 13 is moved relative to the above to complete the unloading of the polysilicon product.

[0032] Therefore, the reduction power supply water immersion detection device described in the present invention can detect and alarm in the early stage as long as there is water leakage in the equipment, preventing false alarms from a single water immersion sensor, and realizing the function of using two sets of water immersion detection in parallel, solving the problem that false alarms of the water immersion detection unit will cause interruption of polysilicon production, and improving the adaptability of production work.

[0033] It should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" in this utility model may refer to fixed connection, detachable connection, or integral connection. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0034] The above specific embodiments do not limit the scope of protection of this utility model. Those skilled in the art will understand that various modifications, combinations, sub-combinations, and substitutions may occur depending on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model shall be included in the scope of protection of this utility model.

Claims

1. A reduction power source water immersion detection device, characterized in that: It includes a fixing frame, a movable plate, a connecting plate, a ball screw, a ball nut, a servo motor, a water receiving tray, a first water immersion relay, a second water immersion relay, a first water immersion sensor and a second water immersion sensor; The bottom of the movable plate is fixedly connected to a connecting plate, the bottom of the connecting plate is fixedly connected to a ball nut, and a ball screw is passed through and movably installed in the ball nut. A servo motor is fixedly installed at the end of the ball screw, and the servo motor is installed on a fixed frame in the external polysilicon reduction power supply cabinet. A water receiving tray located at a preset distance below the connecting plate is installed on a fixed frame, and there is an inclined angle between the water receiving tray and the external polysilicon reduction power supply cabinet; a first water immersion sensor and a second water immersion sensor are fixedly installed on the inner wall of one side of the low-lying part of the water receiving tray at a preset distance, and a first water immersion relay and a second water immersion relay are respectively installed on the other side of the low-lying part of the water receiving tray. The first water immersion sensor is electrically connected to the first water immersion relay, and the second water immersion sensor is electrically connected to the second water immersion relay, and the first water immersion relay and the second water immersion relay are respectively electrically connected to the external reduction power supply system.

2. The reduction power source water immersion detection device according to claim 1, characterized in that: include: A third water immersion sensor is installed on one side inner wall of the high depression of the water receiving tray, and the third water immersion sensor is electrically connected to the external restoration power supply system.

3. The reduction power source water immersion detection device according to claim 1, characterized in that: include: A limit slider is fixedly installed at the bottom of the movable plate, a limit rod is movably installed at the bottom of the limit slider, and fixed blocks are fixedly installed at both ends of the limit rod.

4. The reduction power source water immersion detection device according to claim 3, characterized in that: include: The bottom of the fixed block is connected to a baffle installed on the fixed frame, and a servo motor is fixedly installed on the baffle.

5. The reduction power source water immersion detection device according to claim 1, characterized in that: include: A bell cover is movably installed on the movable plate.

6. The reduction power supply water immersion detection device according to any one of claims 1 to 5, characterized in that: include: The fixing frame is fixedly provided with a shell body around it.

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