Carrier plate positioning mechanism

Abstract

The utility model relates to the technical field of carrier plate testing, in particular to a carrier plate positioning mechanism which comprises a top plate, a middle plate and a bottom plate. A positioning plate is movably arranged on the top of the top plate in a lifting manner; the positioning plate is provided with a first X-axis positioning rod and a second X-axis positioning rod in the X-axis direction. The positioning plate is provided with a first Y-axis positioning rod and a second Y-axis positioning rod in the Y-axis direction. The X-axis driving mechanism is used for driving the first X-axis positioning rod and the second X-axis positioning rod to synchronously and reversely move; the Y-axis driving mechanism is used for driving the first Y-axis positioning rod and the second Y-axis positioning rod to synchronously and reversely move; the carrier plate positioning mechanism further comprises a lifting driving mechanism used for driving the positioning plate to ascend and descend. By starting the X-axis driving mechanism and the Y-axis driving mechanism, the first X-axis positioning rod and the second X-axis positioning rod are synchronously close to each other, and the first Y-axis positioning rod and the second Y-axis positioning rod are synchronously close to each other, so that the carrier plate can be accurately positioned.

Description

Technical Field

[0001] The utility model relates to the technical field of carrier board testing, in particular to a carrier board positioning mechanism. Background Art

[0002] In the semiconductor manufacturing process, substrates are critical components, and their quality directly impacts the performance and reliability of the final product. To ensure product quality, substrates must undergo rigorous testing. During testing, the positioning accuracy of the substrate is crucial to ensuring accuracy and efficiency.

[0003] Currently, carrier testing equipment on the market typically positions the carrier in the following manner: two X-axis positioning rods are provided in the X-axis direction; two Y-axis positioning rods are provided in the Y-axis direction; and each positioning rod is controlled by a separate drive.

[0004] While this positioning method can achieve a certain degree of precision in carrier positioning, it also has some significant drawbacks. Each positioning rod requires a separate driver, which not only increases the overall cost of the equipment but also complicates maintenance and commissioning. Furthermore, achieving perfect synchronization between multiple drivers is difficult. Especially at high speeds, slight differences between drivers can lead to inaccurate carrier positioning, affecting test results. Utility Model Content

[0005] The purpose of the utility model is to provide a carrier plate positioning mechanism in view of the above-mentioned deficiencies in the prior art.

[0006] The purpose of the utility model is achieved through the following technical solutions: a carrier plate positioning mechanism, comprising a top plate, a middle plate and a bottom plate; the middle plate is fixedly arranged at the bottom of the top plate; the bottom plate is fixedly arranged at the bottom of the middle plate; the top of the top plate is provided with a positioning plate for lifting and lowering;

[0007] The positioning plate is provided with a first X-axis positioning rod and a second X-axis positioning rod along the X-axis direction; the positioning plate is provided with a first Y-axis positioning rod and a second Y-axis positioning rod along the Y-axis direction;

[0008] The carrier plate positioning mechanism further includes an X-axis driving mechanism for driving the first X-axis positioning rod and the second X-axis positioning rod to move synchronously in opposite directions, and a Y-axis driving mechanism for driving the first Y-axis positioning rod and the second Y-axis positioning rod to move synchronously in opposite directions;

[0009] The carrier plate positioning mechanism also includes a lifting drive mechanism for driving the positioning plate to move up and down.

[0010] The present invention is further configured such that the positioning plate is provided with an X-axis strip groove along the X-axis direction; the positioning plate is provided with a Y-axis strip groove along the Y-axis direction; the first X-axis positioning rod and the second X-axis positioning rod are provided through the X-axis strip groove; the first Y-axis positioning rod and the second Y-axis positioning rod are provided through the Y-axis strip groove.

[0011] The utility model is further configured such that the X-axis drive mechanism includes an X-axis motor provided on the middle plate, an X-axis synchronous belt provided at the output end of the X-axis motor, a first X-axis connecting block provided on one side of the X-axis synchronous belt, and a second X-axis connecting block provided on the other side of the X-axis synchronous belt; the X-axis synchronous belt is provided along the X-axis direction;

[0012] The first X-axis connecting block and the second X-axis connecting block are respectively used to drive the first X-axis positioning rod and the second X-axis positioning rod to move.

[0013] The utility model is further configured such that the first X-axis connecting block is connected to a first X-axis connecting rod; the first X-axis connecting rod passes through the top plate and is connected to a first X-axis synchronization rod; the first X-axis positioning rod is connected to the first X-axis synchronization rod;

[0014] The second X-axis connecting block is connected to the second X-axis connecting rod; the second X-axis connecting rod passes through the top plate and is connected to the second X-axis synchronization rod; the second X-axis positioning rod is connected to the second X-axis synchronization rod.

[0015] The present invention is further configured such that the first X-axis synchronization rod is provided with a plurality of first X-axis positioning rods arranged in parallel; and the second X-axis synchronization rod is provided with a plurality of second X-axis positioning rods arranged in parallel.

[0016] The utility model is further configured such that the Y-axis drive mechanism includes a Y-axis motor provided on the top plate, a Y-axis synchronous belt provided at the output end of the Y-axis motor, a first Y-axis connecting block provided on one side of the Y-axis synchronous belt, and a second Y-axis connecting block provided on the other side of the Y-axis synchronous belt; the Y-axis synchronous belt is provided along the Y-axis direction;

[0017] The first Y-axis connecting block and the second Y-axis connecting block are respectively used to drive the first Y-axis positioning rod and the second Y-axis positioning rod to move.

[0018] The utility model is further configured such that the first Y-axis connecting block is connected to a first Y-axis connecting rod; the first Y-axis positioning rod is connected to the first Y-axis connecting rod;

[0019] The second Y-axis connecting block is connected to the second Y-axis connecting rod; the second Y-axis positioning rod is connected to the second Y-axis connecting rod.

[0020] The utility model is further configured as follows: the top plate is provided with a limiting shaft sleeve; the bottom of the positioning plate is provided with a sliding rod; the sliding rod is slidably arranged on the limiting shaft sleeve.

[0021] The utility model is further configured such that the lifting drive mechanism includes a lifting motor arranged on the base plate, a nut rotatably arranged on the base plate, and a lead screw fixedly arranged on the bottom of the positioning plate; the lifting motor is used to drive the nut to rotate; and the nut is sleeved outside the lead screw.

[0022] The present invention is further configured such that the first X-axis positioning rod, the second X-axis positioning rod, the first Y-axis positioning rod and the second Y-axis positioning rod are all provided with distance sensors.

[0023] The beneficial effects of the present invention are as follows: the present invention starts the X-axis drive mechanism and the Y-axis drive mechanism, so that the first X-axis positioning rod and the second X-axis positioning rod are synchronously approached, and the first Y-axis positioning rod and the second Y-axis positioning rod are synchronously approached, thereby accurately positioning the carrier plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The utility model is further described using the accompanying drawings, but the embodiments in the accompanying drawings do not constitute any limitation to the utility model. A person skilled in the art can obtain other drawings based on the following drawings without making any creative effort.

[0025] Figure 1 It is a structural diagram of the utility model;

[0026] Figure 2 It is a structural schematic diagram of the utility model from another perspective;

[0027] Figure 3 This is a schematic diagram of the structure of the utility model after the positioning plate is hidden;

[0028] Figure 4 This is a schematic diagram of the structure of the utility model after the positioning plate and the top plate are hidden;

[0029] : Among them: 1. Top plate; 11. Limiting sleeve; 2. Middle plate; 3. Bottom plate; 4. Positioning plate; 41. X-axis strip groove; 42. Y-axis strip groove; 43. Sliding rod; 51. First X-axis positioning rod; 52. Second X-axis positioning rod; 53. Distance sensor; 61. First Y-axis positioning rod; 62. Second Y-axis positioning rod; 71. X-axis motor; 72. X-axis synchronous belt; 73. First X-axis connecting block; 74. Second X-axis connecting block; 75. First X-axis connecting rod; 76. First X-axis synchronous rod; 77. Second X-axis connecting rod; 78. Second X-axis synchronous rod; 81. Y-axis motor; 82. Y-axis synchronous belt; 83. First Y-axis connecting block; 84. Second Y-axis connecting block; 85. First Y-axis connecting rod; 86. Second Y-axis connecting rod; 91. Lifting motor; 92. Nut; 93. Lead screw. DETAILED DESCRIPTION

[0030] The present invention will be further described with reference to the following embodiments.

[0031] Depend on Figures 1 to 4 It can be seen that the carrier positioning mechanism described in this embodiment includes a top plate 1, a middle plate 2 and a bottom plate 3; the middle plate 2 is fixed to the bottom of the top plate 1; the bottom plate 3 is fixed to the bottom of the middle plate 2; the top of the top plate 1 is provided with a positioning plate 4 for lifting movement;

[0032] The positioning plate 4 is provided with a first X-axis positioning rod 51 and a second X-axis positioning rod 52 along the X-axis direction; the positioning plate 4 is provided with a first Y-axis positioning rod 61 and a second Y-axis positioning rod 62 along the Y-axis direction;

[0033] The carrier positioning mechanism further includes an X-axis driving mechanism for driving the first X-axis positioning rod 51 and the second X-axis positioning rod 52 to move synchronously in opposite directions, and a Y-axis driving mechanism for driving the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 to move synchronously in opposite directions;

[0034] The carrier plate positioning mechanism further includes a lifting drive mechanism for driving the positioning plate 4 to move up and down.

[0035] Specifically, the carrier positioning mechanism described in this embodiment, when in use, is arranged by placing the carrier in the positioning plate 4 so that the carrier is arranged between the first X-axis positioning rod 51, the second X-axis positioning rod 52, the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62; then, by starting the X-axis drive mechanism and the Y-axis drive mechanism, the first X-axis positioning rod 51 and the second X-axis positioning rod 52 are synchronously approached, and the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 are synchronously approached, so that the carrier can be accurately positioned.

[0036] In the carrier positioning mechanism described in this embodiment, the positioning plate 4 is provided with an X-axis strip groove 41 extending along the X-axis direction; the positioning plate 4 is provided with a Y-axis strip groove 42 extending along the Y-axis direction; the first X-axis positioning rod 51 and the second X-axis positioning rod 52 extend through the X-axis strip groove 41; and the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 extend through the Y-axis strip groove 42. Specifically, this arrangement facilitates control of the first X-axis positioning rod 51, the second X-axis positioning rod 52, and the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62.

[0037] The present embodiment describes a carrier positioning mechanism, wherein the X-axis drive mechanism includes an X-axis motor 71 provided on the middle plate 2, an X-axis synchronous belt 72 provided at the output end of the X-axis motor 71, a first X-axis connecting block 73 provided on one side of the X-axis synchronous belt 72, and a second X-axis connecting block 74 provided on the other side of the X-axis synchronous belt 72; the X-axis synchronous belt 72 is arranged along the X-axis direction; the first X-axis connecting block 73 and the second X-axis connecting block 74 are respectively used to drive the first X-axis positioning rod 51 and the second X-axis positioning rod 52 to move. The carrier positioning mechanism described in this embodiment comprises the following: the first X-axis connecting block 73 is connected to the first X-axis connecting rod 75; the first X-axis connecting rod 75 passes through the top plate 1 and is connected to the first X-axis synchronization rod 76; the first X-axis positioning rod 51 is connected to the first X-axis synchronization rod 76; the second X-axis connecting block 74 is connected to the second X-axis connecting rod 77; the second X-axis connecting rod 77 passes through the top plate 1 and is connected to the second X-axis synchronization rod 78; the second X-axis positioning rod 52 is connected to the second X-axis synchronization rod 78.

[0038] Specifically, when it is necessary to position the carrier in the X-axis direction, the X-axis motor 71 is started, and the X-axis motor 71 drives the X-axis synchronous belt 72 to move. Since the first X-axis connecting block 73 and the second X-axis connecting block 74 are respectively arranged on both sides of the X-axis synchronous belt 72, the first X-axis positioning rod 51 and the second X-axis positioning rod 52 can move synchronously. After the first X-axis positioning rod 51 and the second X-axis positioning rod 52 are close to each other, the carrier is accurately positioned in the X-axis direction.

[0039] In this embodiment of the carrier positioning mechanism, the first X-axis synchronization rod 76 is provided with a plurality of parallel first X-axis positioning rods 51, and the second X-axis synchronization rod 78 is provided with a plurality of parallel second X-axis positioning rods 52. Due to the long length of the carrier, the provision of multiple first X-axis positioning rods 51 and multiple second X-axis positioning rods 52 effectively prevents carrier yaw.

[0040] The carrier positioning mechanism described in this embodiment comprises a Y-axis drive mechanism including a Y-axis motor 81 provided on the top plate 1, a Y-axis synchronous belt 82 provided at the output end of the Y-axis motor 81, a first Y-axis connecting block 83 provided on one side of the Y-axis synchronous belt 82, and a second Y-axis connecting block 84 provided on the other side of the Y-axis synchronous belt 82; the Y-axis synchronous belt 82 is arranged along the Y-axis direction; the first Y-axis connecting block 83 and the second Y-axis connecting block 84 are used to drive the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 to move, respectively. The carrier positioning mechanism described in this embodiment comprises the first Y-axis connecting block 83 connected to a first Y-axis connecting rod 85; the first Y-axis positioning rod 61 is connected to the first Y-axis connecting rod 85; the second Y-axis connecting block 84 is connected to a second Y-axis connecting rod 86; and the second Y-axis positioning rod 62 is connected to the second Y-axis connecting rod 86.

[0041] Specifically, when it is necessary to position the carrier plate in the Y-axis direction, the Y-axis motor 81 is started, and the Y-axis motor 81 drives the Y-axis synchronous belt 82 to move. Since the first Y-axis connecting block 83 and the second Y-axis connecting block 84 are respectively arranged on both sides of the Y-axis synchronous belt 82, the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 can move synchronously. After the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 are close to each other, the carrier plate is accurately positioned in the Y-axis direction.

[0042] In the carrier positioning mechanism described in this embodiment, the top plate 1 is provided with a limiting shaft sleeve 11; the bottom of the positioning plate 4 is provided with a slide rod 43; the slide rod 43 is slidably mounted on the limiting shaft sleeve 11. The above arrangement can play a role in positioning the positioning plate 4 when it is raised or lowered.

[0043] The present embodiment describes a carrier positioning mechanism, wherein the lifting drive mechanism includes a lifting motor 91 provided on the base plate 3, a nut 92 rotatably provided on the base plate 3, and a lead screw 93 fixed on the bottom of the positioning plate 4; the lifting motor 91 is used to drive the nut 92 to rotate; the nut 92 is sleeved on the outside of the lead screw 93.

[0044] Specifically, through the above-mentioned setting, when the lifting motor 91 drives the nut 92 to rotate, since the screw 93 is fixedly connected to the positioning plate 4, and the positioning plate 4 is limited by the slide rod 43 and the limiting sleeve 11, the screw 93 can drive the positioning plate 4 to rise and fall during the rotation of the nut 92.

[0045] In the carrier positioning mechanism of this embodiment, the first X-axis positioning rod 51, the second X-axis positioning rod 52, the first Y-axis positioning rod 61 and the second Y-axis positioning rod 62 are all provided with distance sensors 53. The above arrangement can detect the position of the carrier.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit the scope of protection of the utility model. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the utility model.

Claims

1. A carrier plate positioning mechanism, characterized in that: It comprises a top plate (1), a middle plate (2) and a bottom plate (3); the middle plate (2) is fixedly arranged at the bottom of the top plate (1); the bottom plate (3) is fixedly arranged at the bottom of the middle plate (2); a positioning plate (4) is provided at the top of the top plate (1) for lifting movement; The positioning plate (4) is provided with a first X-axis positioning rod (51) and a second X-axis positioning rod (52) along the X-axis direction; the positioning plate (4) is provided with a first Y-axis positioning rod (61) and a second Y-axis positioning rod (62) along the Y-axis direction; The carrier plate positioning mechanism further includes an X-axis driving mechanism for driving the first X-axis positioning rod (51) and the second X-axis positioning rod (52) to move synchronously in opposite directions, and a Y-axis driving mechanism for driving the first Y-axis positioning rod (61) and the second Y-axis positioning rod (62) to move synchronously in opposite directions; The carrier plate positioning mechanism also includes a lifting drive mechanism for driving the positioning plate (4) to move up and down.

2. A carrier plate positioning mechanism according to claim 1, characterized in that: The positioning plate (4) is provided with an X-axis strip groove (41) extending through it along the X-axis direction; the positioning plate (4) is provided with a Y-axis strip groove (42) extending through it along the Y-axis direction; the first X-axis positioning rod (51) and the second X-axis positioning rod (52) are provided through the X-axis strip groove (41); the first Y-axis positioning rod (61) and the second Y-axis positioning rod (62) are provided through the Y-axis strip groove (42).

3. The carrier plate positioning mechanism according to claim 1, characterized in that: The X-axis driving mechanism comprises an X-axis motor (71) provided on the middle plate (2), an X-axis synchronous belt (72) provided at the output end of the X-axis motor (71), a first X-axis connecting block (73) provided on one side of the X-axis synchronous belt (72), and a second X-axis connecting block (74) provided on the other side of the X-axis synchronous belt (72); the X-axis synchronous belt (72) is provided along the X-axis direction; The first X-axis connecting block (73) and the second X-axis connecting block (74) are respectively used to drive the first X-axis positioning rod (51) and the second X-axis positioning rod (52) to move.

4. The carrier plate positioning mechanism according to claim 3, characterized in that: The first X-axis connecting block (73) is connected to a first X-axis connecting rod (75); the first X-axis connecting rod (75) passes through the top plate (1) and is connected to a first X-axis synchronization rod (76); the first X-axis positioning rod (51) is connected to the first X-axis synchronization rod (76); The second X-axis connecting block (74) is connected to a second X-axis connecting rod (77); the second X-axis connecting rod (77) passes through the top plate (1) and is connected to a second X-axis synchronization rod (78); the second X-axis positioning rod (52) is connected to the second X-axis synchronization rod (78).

5. The carrier plate positioning mechanism according to claim 4, characterized in that: The first X-axis synchronization rod (76) is provided with a plurality of first X-axis positioning rods (51) arranged in parallel; the second X-axis synchronization rod (78) is provided with a plurality of second X-axis positioning rods (52) arranged in parallel.

6. The carrier plate positioning mechanism according to claim 1, characterized in that: The Y-axis driving mechanism comprises a Y-axis motor (81) provided on the top plate (1), a Y-axis synchronous belt (82) provided at the output end of the Y-axis motor (81), a first Y-axis connecting block (83) provided on one side of the Y-axis synchronous belt (82), and a second Y-axis connecting block (84) provided on the other side of the Y-axis synchronous belt (82); the Y-axis synchronous belt (82) is provided along the Y-axis direction; The first Y-axis connecting block (83) and the second Y-axis connecting block (84) are respectively used to drive the first Y-axis positioning rod (61) and the second Y-axis positioning rod (62) to move.

7. The carrier plate positioning mechanism according to claim 6, characterized in that: The first Y-axis connecting block (83) is connected to a first Y-axis connecting rod (85); the first Y-axis positioning rod (61) is connected to the first Y-axis connecting rod (85); The second Y-axis connecting block (84) is connected to a second Y-axis connecting rod (86); The second Y-axis positioning rod (62) is connected to the second Y-axis connecting rod (86).

8. The carrier plate positioning mechanism according to claim 1, characterized in that: The top plate (1) is provided with a limiting shaft sleeve (11); the bottom of the positioning plate (4) is provided with a sliding rod (43); the sliding rod (43) is slidably arranged on the limiting shaft sleeve (11).

9. The carrier plate positioning mechanism according to claim 8, characterized in that: The lifting drive mechanism comprises a lifting motor (91) arranged on the base plate (3), a nut (92) rotatably arranged on the base plate (3), and a lead screw (93) fixedly arranged on the bottom of the positioning plate (4); the lifting motor (91) is used to drive the nut (92) to rotate; and the nut (92) is sleeved outside the lead screw (93).

10. The carrier plate positioning mechanism according to claim 1, characterized in that: The first X-axis positioning rod (51), the second X-axis positioning rod (52), the first Y-axis positioning rod (61) and the second Y-axis positioning rod (62) are all provided with distance sensors (53).

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