Fixing tool

Abstract

The utility model relates to a fixing tool which comprises a bottom support, an attachment part arranged on the top of the bottom support, a centering part and / or a positioning target arranged around the attachment part, a clamping face arranged on the peripheral wall of the bottom support and an information carrier arranged on the bottom support. And the centering part and / or the positioning end of the positioning target are / is arranged opposite to the peripheral wall of the workpiece. According to the utility model, the cork base is externally attached to the workpieces such as the crystal ingot and the wafer, and the cheap cork base is used for replacing the workpieces to carry out stress protection and processing information tracing in the processing and transferring processes, so that the problems of high workpiece damage risk, low production efficiency, low yield, complex information tracking management and the like in the prior art are effectively solved; and the machining precision and efficiency can be remarkably improved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a fixing tool. Background Art

[0002] With the booming semiconductor industry, semiconductor materials have evolved from the first generation to the current third generation. Silicon, the representative of the first generation of semiconductor materials, has a power of around 100W but a frequency of only about 3GHz. Gallium arsenide, the representative of the second generation, has a power of less than 100W but a frequency of up to 100GHz. Therefore, the first and second generations of semiconductor materials are more complementary to each other. Gallium nitride and silicon carbide, representatives of the third generation of semiconductors, can achieve power exceeding 1000W and frequencies approaching 100GHz. Their advantages are significant, and therefore they may replace the first and second generations of semiconductor materials in the future. These advantages of third-generation semiconductors are largely due to their wider bandgap compared to the first and second generations. It can even be said that the bandgap is the main distinguishing metric between the three generations of semiconductors. These advantages enable third-generation semiconductor materials to meet the harsh environmental requirements of modern electronics, such as high temperature, high voltage, high power, high frequency, and high radiation. They are therefore widely used in cutting-edge industries such as aviation, aerospace, photovoltaics, automotive manufacturing, communications, and smart grids. Currently, they are primarily used in the manufacture of power semiconductor devices.

[0003] As a typical hard and brittle material, silicon carbide is characterized by high hardness, high brittleness, good wear resistance, and extremely stable chemical properties. This also makes silicon carbide workpieces prone to material breakage or fragmentation due to stress concentration, excessive clamping force or cutting force. Therefore, during processing and transportation, phenomena such as cracking and edge collapse are prone to occur, making it impossible to obtain high-quality wafers, which in turn affects the yield rate and production costs, making the precision processing of silicon carbide ingots to wafers very difficult. In addition, due to the limitations of the wafer front-end manufacturing process and wafer morphology, it is difficult to leave product information marks on the wafer surface, including but not limited to processing batches, processing parameters, processing personnel, etc., and thus it is impossible to trace the processing, which makes the information tracking and management of wafers in the production process complicated, thereby improving production efficiency and yield rate, which needs to be improved. Utility Model Content

[0004] The problem to be solved by the present invention is to provide a fixed tooling in view of the above-mentioned deficiencies in the prior art. By attaching a base to workpieces such as ingots and wafers, and using a cheap base to replace the workpieces for force protection and processing information traceability during processing and transportation, the present invention has the advantages of reducing the risk of workpiece damage, improving production efficiency and yield, and facilitating processing information tracking and management.

[0005] The above-mentioned utility model object of the present invention is achieved through the following technical solutions:

[0006] A fixing tool comprises a base, an attachment portion arranged on the top of the base, a centering portion and / or a positioning target arranged around the attachment portion, a clamping surface arranged on the peripheral wall of the base, and an information carrier arranged on the base, wherein the attachment end of the attachment portion is arranged toward the bottom of the workpiece, and the positioning end of the centering portion and / or the positioning target is arranged relative to the peripheral wall of the workpiece.

[0007] By adopting the above technical solution, in actual use, the workpiece can be installed manually and / or with the assistance of a robot arm, and based on the physical positioning of the centering part and / or the virtual positioning of the positioning target, it can adapt to the workpiece of the corresponding shape, so that the workpiece can be installed on the attachment part according to the predetermined orientation, and then the workpiece is attached and fixed on the top of the base through the attachment part; in the process of workpiece transportation, both the processing equipment and the gripper of the robot arm directly clamp the base instead of the workpiece, which not only eliminates the complicated process of adjusting the gripping force and size of the gripper according to the size and material of the workpiece, but also reduces the damage caused by stress concentration or improper gripping force. damage to the workpiece caused; during the workpiece processing process, the setting of the base can provide a stable support platform for the workpiece, reducing the processing quality problems caused by uneven surface, uneven thickness, or thin thickness of the workpiece; in addition, the setting of the information carrier makes it simple to track and manage the information of workpieces such as ingots and wafers during the production process; in summary, the fixed tooling of the present invention can not only effectively protect the workpiece and reduce the risk of damage, but also improve production efficiency and yield rate, and facilitate the tracking and management of processing information. Through the implementation of the present invention, an efficient and reliable solution can be provided for the wafer manufacturing industry.

[0008] The utility model is further configured as follows: the diameter of the base is 50-500 mm and the thickness is 2-50 mm.

[0009] By adopting the above technical solution, the material of the base is not limited, for example, it can be resin material, alloy material, inorganic non-metallic material, or other injection molding or casting material, as long as it can ensure that the base has sufficient strength and rigidity. The overall weight and load-bearing performance can also be balanced through internal structural design to facilitate operation and transportation.

[0010] The present invention is further configured as follows: the attachment portion includes at least one of an adhesive layer, a temporary bonding layer, and a vacuum suction cup.

[0011] By adopting the above technical solution, the adhesive layer and the temporary bonding layer can be directly attached by solid materials, or by coating and attaching by liquid materials, or by depositing coatings to complete the installation on the top of the base, and the vacuum suction cup can be installed by fasteners or one-piece molding; wherein the adhesive layer can be, for example, a hot melt adhesive sheet, a thermoplastic glue coating, a resin adhesive layer, a light-curing resin layer or other commonly used industrial adhesives, so as to ensure that the attachment part is firmly combined with the bottom of the workpiece by heating, cooling, and illuminating the base and the workpiece, and can be easily removed after use without causing damage to the surface of the workpiece; the temporary bonding layer adopts a material that can be bonded to the workpiece The substrate material for bonding can be, for example, silicon carbide, silicon, sapphire, gallium oxide, diamond, gallium nitride and other substrates, which are subjected to plasma activation treatment and temporary bonding methods such as direct bonding, warm pressure bonding and optical bonding, and then annealing treatment to form a debonding bonding surface between the workpiece and the temporary bonding layer, which is convenient for the recycling of the base; the vacuum suction cup fixes and releases the workpiece on the vacuum adsorption surface by vacuum adsorption. In addition, a valve can be set on the vacuum adsorption circuit of the vacuum suction cup for control; through these attachment methods, it can be ensured that the workpiece is stably fixed on the base during processing and transportation, reducing the displacement or damage of the workpiece caused by vibration or impact.

[0012] The present invention is further configured as follows: the centering portion is provided with an inserting interface engaged with the peripheral wall of the workpiece, and / or an abutting surface abutting against the peripheral wall of the workpiece.

[0013] By adopting the above technical solution, on the one hand, the plug-in interface is a structure that is fully covered or semi-covered along the circumference of the workpiece, which can adapt to the contours of workpieces of various special shapes and sizes. When installing the workpiece, it only needs to be aligned and plugged in, and the installation is simple and quick; on the other hand, the abutment surface can be set in conjunction with the plug-in interface, or several abutment surfaces can be set along the circumference of the workpiece to achieve the purpose of positioning the workpiece and limiting the translation of the workpiece; by adopting the above structure, the centering of the workpiece can be completed, which can ensure that the workpiece maintains precise positioning during the processing and improve the processing accuracy.

[0014] The present invention is further configured as follows: the centering portion includes at least one of a positioning ring, a positioning bent bar, and a positioning terminal.

[0015] By adopting the above technical solution, in the plug interface form, the inner wall of the positioning ring and the side wall of the positioning bent strip are designed to cooperate with the peripheral wall of the workpiece to promote precise docking of the workpiece; while in the abutment surface form, the inner wall of the positioning ring, the side wall of the positioning bent strip and the end wall of the positioning terminal are constructed into a structure with multiple points of contact with the peripheral wall of the workpiece to ensure accurate installation of the workpiece; in addition, the material of the positioning ring can be non-metallic, such as plastic or ceramic, or metal, such as aluminum alloy or stainless steel. The choice of material should be based on actual application requirements and processing environment to ensure that the centering part has sufficient strength and durability.

[0016] The utility model is further configured as follows: the positioning target is provided with a reference line and / or reference point that matches the peripheral wall of the workpiece.

[0017] By adopting the above technical solution, in order to achieve accurate positioning effect, a certain height difference is usually designed between the top surface of the centering part and the bottom surface of the workpiece. For those centering parts with fixed structures, this design has little effect on the ingot processing, but sometimes it will cause mutual interference between the top of the centering part and the processing end of the equipment during the wafer processing; however, this problem can be effectively solved by adopting advanced workpiece positioning technologies such as visual inspection, infrared remote sensing or electromagnetic induction. These technologies use reference lines and reference points as positioning targets, allowing the positioning targets to be set to be recessed in the top of the base, or to be approximately in the same plane as the top surface of the base. Such a design not only eliminates position interference during processing, but also facilitates the sensor to assist in accurately positioning the installation position of the workpiece, ensuring that the installation direction of the workpiece on the base remains consistent, thereby significantly improving processing efficiency.

[0018] The present invention is further configured such that: the positioning target includes at least one of an optical marker and an electromagnetic induction marker.

[0019] By adopting the above technical solutions, optical marking technology can use recognizable patterns, colors, sizes and other marks, and accurately identify and locate them through corresponding sensors; while electromagnetic induction marking technology uses the characteristics of electromagnetic fields to achieve accurate identification and positioning through induction coils or magnetic materials; the setting of these marks can not only assist the robotic arm to accurately align the workpiece and install it on the base, but also ensure the rapid and accurate identification and positioning of the workpiece during processing and transportation, thereby significantly improving production efficiency and processing accuracy.

[0020] The present invention is further configured such that: the centering portion and / or the positioning target are integrally formed with the base, or the position of the centering portion and / or the positioning target on the base is adjustable.

[0021] By adopting the above technical solution, on the one hand, the one-piece centering part and positioning target can be ensured to be tightly integrated with the base, thereby reducing assembly errors and improving the stability and durability of the overall structure. At the same time, the use of precise injection molding or casting processes can achieve complex geometric shapes and high-precision dimensional control to meet the positioning needs of various workpieces; on the other hand, the adjustable position design of the centering part and the positioning target on the base provides greater flexibility. This design allows the user to adjust the position of the centering part and the positioning target according to the specific size and shape of the workpiece to achieve the best positioning effect, and the adjustment mechanism can adopt a variety of detachable connection methods such as threaded connection, sliding rail, snap fastener, inverted L-shaped overlap, etc., to ensure that the adjustment process is simple, fast and reliable.

[0022] The utility model is further configured as follows: the clamping surface includes at least one of a flat cut surface, an annular convex surface, and an annular concave surface.

[0023] By adopting the above technical solution, the design of the clamping surface is intended to ensure the stability and safety of the workpiece during processing and transportation; among them, the design of the flat cut surface can provide a flat contact surface, so that the base can be evenly stressed when clamped by the fixture, avoiding easy twisting or detachment; both the annular convex surface and the annular concave surface can provide a support structure surrounding the base, increasing the contact area between the fixture and the base, thereby improving the stability of clamping.

[0024] The present invention is further configured as follows: the information carrier is configured as at least one of an RFID electronic tag, a QR code tag, a barcode tag, an NFC chip, and a paper label.

[0025] By adopting the above technical solutions, information carriers can conveniently record and store workpiece processing information, such as processing batches, processing parameters, processing personnel, etc., to facilitate information tracking and management during the production process; among them, barcodes and QR codes can be quickly read by scanning devices, while RFID tags can realize non-contact information reading through wireless radio frequency identification technology, and paper labels can directly record processing information by printing, thereby improving the efficiency and accuracy of information management.

[0026] To sum up, the beneficial technical effects of the present invention are as follows: by attaching a bottom support to workpieces such as ingots and wafers, and using a cheap bottom support to replace the workpiece for force protection and processing information traceability during processing and transportation, the problems existing in the prior art, such as high risk of workpiece damage, low production efficiency, low yield, and complex information tracking and management, are effectively solved; by adopting the fixed tooling of the present invention, the accuracy and efficiency of semiconductor material processing can be significantly improved, production costs can be reduced, and strong technical support can be provided for the widespread application of third-generation semiconductor materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the fixing tool of Example 1 of the present utility model.

[0028] Figure 2 It is a schematic diagram of the connection relationship between the base and the centering part of Example 1 of the utility model.

[0029] Figure 3 It is a schematic diagram of the connection relationship between the base and the information carrier in Example 1 of the utility model.

[0030] Figure 4 It is a structural schematic diagram of the base of Example 2 of the present utility model.

[0031] Figure 5 It is a structural schematic diagram of the fixing tool of Example 7 of the present utility model.

[0032] Figure 6 It is a structural schematic diagram of the fixing tool of Example 8 of the present utility model.

[0033] Figure 7 It is a schematic diagram of the connection relationship between the base and the centering part of Example 9 of the present utility model.

[0034] Figure 8 It is a schematic diagram of the connection relationship between the base and the centering part of Example 10 of the utility model.

[0035] Figure 9 It is a structural schematic diagram of the base of Example 11 of the present utility model.

[0036] Figure 10 It is a structural schematic diagram of the base of Example 12 of the present utility model.

[0037] Figure 11 It is a schematic diagram of the connection relationship between the base and the centering target of Example 13 of the present utility model.

[0038] Figure 12 It is a schematic diagram of the connection relationship between the base and the centering target of Example 14 of the utility model.

[0039] In the figure, 1, base; 2, attachment part; 3, centering part; 4, clamping surface; 5, information carrier; 6, positioning target. DETAILED DESCRIPTION

[0040] In order to make the technical means, creative features, objectives and functions achieved by the present invention clearer and easier to understand, the present invention is further explained below with reference to the accompanying drawings and specific implementation methods.

[0041] Example 1: Reference Figure 1, a fixing tool disclosed in the present invention, comprises a base 1, an attachment portion 2 disposed on the top of the base 1, a centering portion 3 arranged around the attachment portion 2, a clamping surface 4 disposed on the peripheral wall of the base 1, and an information carrier 5 disposed on the base 1. The attachment end of the attachment portion 2 is disposed toward the bottom of the workpiece, and the positioning end of the centering portion 3 is disposed relative to the peripheral wall of the workpiece.

[0042] During actual use, the workpiece can be installed manually and / or with the assistance of a robot arm, and based on the physical positioning of the centering portion 3 and / or the virtual positioning of the positioning target 6, the workpiece can be adapted to the corresponding morphology, so that the workpiece can be installed on the attachment portion 2 according to the predetermined orientation, and then the workpiece is attached and fixed on the top of the base 1 through the attachment portion 2. During the workpiece transportation process, both the processing equipment and the gripper of the robot arm directly clamp the base 1 instead of the workpiece, which not only eliminates the complicated process of adjusting the gripping force and size of the gripper according to the size and material of the workpiece, but also reduces damage to the workpiece caused by stress concentration or improper gripping force; during the workpiece processing process, the setting of the base 1 can provide a stable support platform for the workpiece, reducing processing quality problems caused by uneven surface, uneven thickness, or thin thickness of the workpiece. In addition, the setting of the information carrier 5 makes it simple to track and manage the information of workpieces such as ingots and wafers during the production process. In summary, the fixed tooling of the present invention can not only effectively protect the workpiece and reduce the risk of damage, but also improve production efficiency and yield rate, and facilitate the tracking and management of processing information. Through the implementation of the present invention, an efficient and reliable solution can be provided for the wafer manufacturing industry.

[0043] The attachment portion 2 is configured as an adhesive layer. The adhesive layer is evenly coated with liquid paraffin. This ensures a secure bond between the base 1 and the workpiece through heating, cooling, and illumination. This ensures that the attachment portion 2 is securely attached to the workpiece base. After use, the attachment portion 2 can be easily removed without damaging the workpiece surface. This attachment method ensures that the workpiece remains stably fixed to the base 1 during processing and transportation, minimizing workpiece displacement or damage due to vibration or impact.

[0044] The centering portion 3 is configured as a positioning ring, which is integrally formed with the base 1 and has an insertion interface that engages with the peripheral wall of the workpiece. The integrally formed positioning ring can ensure that it is tightly integrated with the base 1, thereby reducing assembly errors and improving the stability and durability of the overall structure. At the same time, using precision injection molding or casting processes, complex geometric shapes and high-precision dimensional control can be achieved to meet the positioning requirements of various workpieces. At the same time, the inner wall of the positioning ring is designed to match the peripheral wall of the workpiece, and its insertion interface corresponds to a structure that is fully covered along the circumference of the workpiece, which can adapt to the contours of various workpieces of different shapes and sizes. When installing the workpiece, only alignment and insertion are required, and installation is simple and quick to promote precise docking of the workpiece. In addition, the material of the positioning ring can be non-metallic, such as plastic or ceramic, or metal, such as aluminum alloy or stainless steel. The choice of material should be based on the actual application requirements and processing environment to ensure that the centering portion 3 has sufficient strength and durability.

[0045] The clamping surface 4 is configured as an annular convex surface. The design of the clamping surface 4 is intended to ensure the stability and safety of the workpiece during processing and transportation. The flat cut surface design provides a flat contact surface, allowing the base 1 to be evenly stressed when clamped by the fixture, preventing it from twisting or detaching easily. Both the annular convex surface and the annular concave surface provide a support structure surrounding the base 1, increasing the contact area between the fixture and the base 1, thereby improving clamping stability.

[0046] The information carrier 5 is configured as an RFID electronic tag and a paper label. The information carrier 5 can conveniently record and store workpiece processing information, such as processing batches, processing parameters, and processing personnel, facilitating information tracking and management during the production process. The RFID tag uses radio frequency identification technology to enable contactless information reading, facilitating real-time recording of processing information. The paper label directly records processing information through printing, facilitating manual reading and improving the efficiency and accuracy of information management.

[0047] Examples 2 to 6: Reference Figure 4 , which is a fixed tool disclosed in the present utility model. The difference from Example 1 is that the diameter D of the base 1 is 50, 100, 250, 400, and 500 mm, and the thickness H is 2, 10, 25, 40, and 50 mm respectively.

[0048] The material of the base 1 is not limited, for example, it can be resin material, alloy material, inorganic non-metallic material, or other injection molding or casting material, as long as it can ensure that the base 1 has sufficient strength and rigidity. The overall weight and load-bearing performance can also be balanced through internal structural design to facilitate operation and transportation.

[0049] Example 7: Reference Figure 5, a fixing fixture disclosed in the present invention, differs from Example 1 in that the attachment portion 2 is configured as a temporary bonding layer. The temporary bonding layer is made of a substrate material capable of bonding to the workpiece, such as, but not limited to, silicon carbide, silicon, sapphire, gallium oxide, diamond, gallium nitride, and the like. After plasma activation treatment, temporary bonding methods such as direct bonding, warm pressure bonding, and optical bonding are used, followed by annealing treatment, to form a releasable bonding surface between the workpiece and the temporary bonding layer, facilitating the recycling of the base 1.

[0050] Example 8: Reference Figure 6 , a fixing fixture disclosed in the present invention, differs from Example 1 in that the attachment portion 2 is configured as a vacuum suction cup. Furthermore, a valve can be provided on the vacuum suction circuit of the vacuum suction cup for control. The vacuum suction cup secures and releases the workpiece from the vacuum suction surface through vacuum suction.

[0051] Example 9: Reference Figure 7 , a fixing fixture disclosed in the present invention, differs from Example 1 in that the centering portion 3 is configured as a positioning bar, which is integrally formed with the base 1 and has an insertion port that engages with the peripheral wall of the workpiece. The sidewalls of the positioning curved bar are designed to match the peripheral wall of the workpiece, and the insertion port is a semi-enclosed structure along the circumference of the workpiece, which can adapt to the contours of various workpieces of different shapes and sizes. When installing the workpiece, only alignment and insertion are required, making installation simple and quick.

[0052] Example 10: Reference Figure 8 , is a fixing fixture disclosed in the present invention. It differs from Example 1 in that the centering portion 3 is configured as a positioning terminal, and the positioning terminal is configured as a plurality of inverted L-shaped bars, and these inverted L-shaped bars are overlapped on the base 1 and are adjustable in position on the base 1. The adjustable position design of the positioning terminal on the base 1 provides greater flexibility. This design allows the user to adjust the position of the positioning terminal according to the specific size and shape of the workpiece to achieve the best positioning effect. The adjustment mechanism can also adopt a variety of detachable connection methods such as threaded connection, sliding rails, and snap fasteners to ensure that the adjustment process is simple, fast, and reliable.

[0053] Example 11: Reference Figure 9 , is a fixing tool disclosed in the present utility model, which is different from Example 1 in that the clamping surface 4 is set as a flat section, and multiple flat sections are set along the peripheral wall of the base 1.

[0054] Example 12: Reference Figure 10 , is a fixing tool disclosed in the present utility model, which is different from Example 1 in that the clamping surface 4 is set as an annular convex surface.

[0055] Example 13: Reference Figure 11 , is a fixed tool disclosed in the present utility model, which is different from Example 1 in that it includes a base 1, an attachment part 2 arranged on the top of the base 1, a positioning target 6 arranged around the attachment part 2, a clamping surface 4 arranged on the peripheral wall of the base 1, and an information carrier 5 arranged on the base 1, the attachment end of the attachment part 2 is arranged toward the bottom of the workpiece, and the positioning end of the positioning target 6 is arranged relative to the peripheral wall of the workpiece. In order to achieve a precise positioning effect, a certain height difference is usually designed between the top surface of the centering part 3 and the bottom surface of the workpiece. For those centering parts 3 with fixed structures, this design sometimes causes mutual interference between the top of the centering part 3 and the processing end of the equipment during the workpiece processing. However, this problem can be effectively solved by arranging the positioning target 6 on the base 1, supplemented by the use of advanced workpiece positioning technologies such as visual detection, infrared remote sensing or electromagnetic induction.

[0056] The positioning target 6 is set as an optical mark, which has a reference line that matches the peripheral wall of the workpiece. The above technology uses the reference line as the positioning target 6, allowing the positioning target 6 to be set to be recessed in the top of the base 1, or to be approximately maintained on the same plane as the top surface of the base 1. Such a design not only eliminates position interference during processing, but also facilitates the sensor to assist in accurately positioning the installation position of the workpiece, ensuring that the installation direction of the workpiece on the base 1 remains consistent, thereby significantly improving processing efficiency. Optical marking technology can use recognizable patterns, colors, sizes and other marks, and accurately identify and locate them through corresponding sensors. The setting of these marks can not only assist the robotic arm to accurately align and install the workpiece on the base 1, but also ensure the rapid and accurate identification and positioning of the workpiece during processing and transportation, thereby significantly improving production efficiency and processing accuracy.

[0057] Example 14: Reference Figure 12 , a fixed fixture disclosed in the present invention, differs from Example 13 in that the positioning target 6 is configured as an electromagnetic induction marker. This optical marker has multiple reference points that align with the workpiece wall. Electromagnetic induction marking technology utilizes the characteristics of the electromagnetic field to achieve precise identification and positioning by forming reference points with magnetic materials.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and are not limiting. Although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the purpose and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. A fixed tool, characterized in that: The invention comprises a base (1), an attachment portion (2) arranged on the top of the base (1), a centering portion (3) and / or a positioning target (6) arranged around the attachment portion (2), a clamping surface (4) arranged on the peripheral wall of the base (1), and an information carrier (5) arranged on the base (1), wherein the attachment end of the attachment portion (2) is arranged toward the bottom of the workpiece, and the positioning end of the centering portion (3) and / or the positioning target (6) is arranged relative to the peripheral wall of the workpiece.

2. A fixing tool according to claim 1, characterized in that: The base (1) has a diameter of 50-500 mm and a thickness of 2-50 mm.

3. A fixing tool according to claim 1, characterized in that: The attachment portion (2) includes at least one of an adhesive layer, a temporary bonding layer, and a vacuum suction cup.

4. A fixing tool according to claim 1, characterized in that: The centering portion (3) is provided with an inserting interface for engaging with the peripheral wall of the workpiece and / or a contact surface for contacting with the peripheral wall of the workpiece.

5. A fixing tool according to claim 4, characterized in that: The centering portion (3) comprises at least one of a positioning ring, a positioning bent bar, and a positioning terminal.

6. A fixing tool according to claim 1, characterized in that: The positioning target (6) has a reference line and / or reference point that matches the peripheral wall of the workpiece.

7. A fixing tool according to claim 6, characterized in that: The positioning target (6) includes at least one of an optical marker and an electromagnetic induction marker.

8. A fixing tool according to any one of claims 4 to 7, characterized in that: The centering portion (3) and / or the positioning target (6) are integrally formed with the base (1), or the position of the centering portion (3) and / or the positioning target (6) on the base (1) is adjustable.

9. The fixing tool according to claim 1, characterized in that: The clamping surface (4) includes at least one of a flat cut surface, an annular convex surface, and an annular concave surface.

10. The fixing tool according to claim 1, characterized in that: The information carrier (5) is configured as at least one of an RFID electronic tag, a QR code tag, a barcode tag, an NFC chip, and a paper label.

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