Mask replacing device

Abstract

The utility model relates to the field of battery production, and discloses a mask replacement device which comprises a shell with a cavity. The rotary clamping assembly is fixedly mounted on the inner top wall of the cavity, and the rotary clamping assembly is used for driving the battery substrate to rotate; the transferring assembly is located on one side of the rotary clamping assembly, and the transferring assembly drives the mask to move to be tightly attached to the battery substrate; the rotary bearing assembly is fixedly arranged at the bottom of the cavity, and the rotary bearing assembly is used for bearing a plurality of masks; the carrying assembly is located on one side of the rotary bearing assembly, and the carrying assembly is used for carrying the mask on the rotary bearing assembly to the transfer assembly; the suction pipe is arranged on the shell part, and the suction pipe is communicated with the cavity. The closed cavity is formed through the shell and matched with the suction pipe to maintain the vacuum environment, the multiple masks are stored through the rotary bearing assembly and automatically taken and placed through the carrying assembly, and the pollution problem caused by repeated vacuum breaking and manual mask replacement is avoided.

Description

Technical Field

[0001] The present application relates to the field of battery production, and in particular to a mask replacement device. Background Art

[0002] With the rapid development of flexible electronic devices, thin-film batteries, as key energy components, face severe challenges in their preparation process. During the vacuum deposition process of multi-layer thin-film structures, each layer of functional materials needs to be precisely deposited through a mask with a specific pattern. When replacing masks with different patterns, traditional preparation processes must repeatedly destroy the vacuum environment for manual operation, which not only prolongs the production cycle, but also introduces environmental pollutants during the cavity opening process. Frequent vacuum destruction and reconstruction processes not only significantly reduce production efficiency, but also cause impurity adsorption at the thin film interface, seriously affecting the battery's charge transfer efficiency and cycle life. Especially when preparing miniaturized, high-density integrated thin-film batteries, the positioning error of manual operation can easily cause mismatch of the multi-layer structure, resulting in increased dispersion of device performance parameters. Utility Model Content

[0003] In view of this, the purpose of this application is to overcome the deficiencies in the prior art and provide a mask replacement device.

[0004] To achieve the above objectives, the technical solutions adopted in this application are as follows:

[0005] This application provides:

[0006] A mask replacing device, comprising:

[0007] a shell having a cavity;

[0008] A rotating clamping assembly, the rotating clamping assembly being fixedly mounted on the top wall of the cavity and configured to drive the battery base to rotate;

[0009] A transfer assembly, located on one side of the rotating clamping assembly, drives the mask to move and adhere to the battery substrate;

[0010] A rotating bearing assembly, the rotating bearing assembly is fixedly disposed at the bottom of the cavity and is used to carry a plurality of masks;

[0011] A transport assembly, the transport assembly being located on one side of the rotating bearing assembly and being used to transport the mask on the rotating bearing assembly to the transfer assembly;

[0012] A suction pipe is provided on the shell and is communicated with the cavity.

[0013] Furthermore, the shell includes a shell, a connecting pipe and a cover plate. The shell has the cavity. A connecting pipe connected to the cavity is fixedly provided on the outer wall of the shell. The connecting pipe has an opening. A cover plate is provided on the connecting pipe. The cover plate is used to open or close the opening.

[0014] Furthermore, the shell also includes a sealing member, a first sealing groove is provided on the end surface of the cover plate facing the connecting pipe, and a second sealing groove is provided on the end surface of the connecting pipe away from the cavity, and a sealing member is provided in the first sealing groove or the second sealing groove.

[0015] Furthermore, the rotary clamping assembly includes a first rotary driving member, a substrate stage and a clamping member. The first rotary driving member is fixedly mounted on the top wall of the cavity. The rotating end of the first rotary driving member is provided with a substrate stage, and two clamping members are provided on the substrate stage at intervals.

[0016] Furthermore, the clamping member includes a connecting member fixedly connected to the substrate stage and a spring provided at one end of the two connecting members close to each other.

[0017] Furthermore, the transfer assembly includes a three-axis moving module and a carrier fixedly installed on the moving end of the three-axis moving module.

[0018] Furthermore, the rotating bearing assembly includes a second rotating driving member and a turntable, the rotating end of the second rotating driving member is fixedly mounted with the turntable, and a plurality of storage slots are provided at the circumferential edge of the turntable.

[0019] Furthermore, the rotating bearing assembly further includes a positioning assembly, which includes a linear drive member, a base, a rotating shaft, a first transmission rod, and a second transmission rod. A base is provided on one side of the linear drive member, a rotating shaft is rotatably mounted on the base, and a first transmission rod and a second transmission rod are fixedly mounted on the circumference of the rotating shaft. The end of the first transmission rod away from the rotating shaft is hinged to the linear drive member, and the end of the second transmission rod away from the rotating shaft is provided with a limit block.

[0020] A plurality of mounting grooves are provided on the circumference of the turntable, a connecting block is fixedly installed in the linear drive member, a limiting groove adapted to the limiting block is provided on the connecting block, and the linear drive member drives the limiting block toward or away from the limiting groove through the first transmission rod and the second transmission rod.

[0021] Furthermore, the transport assembly includes a robotic arm, a mounting frame, a transport piece, and an image acquisition camera. The movable end of the robotic arm is fixedly mounted with the mounting frame, and the transport piece and the image acquisition camera are mounted on the mounting frame.

[0022] Furthermore, the mask replacement device further comprises: a magnetron sputtering assembly and a target position arranged in the cavity, the magnetron sputtering assembly comprises a target gun arranged on the bottom wall of the cavity, and the target position is provided on the target gun.

[0023] The present application forms a closed cavity through a shell and cooperates with a suction tube to maintain a vacuum environment, utilizes a rotating carrying assembly to store multiple masks and is automatically picked up and placed by a handling assembly, and cooperates with a transfer assembly and a rotary clamping assembly to achieve precise alignment and pressing of the mask and the battery substrate, completing the automatic replacement of the mask under vacuum conditions, thus avoiding the pollution problem caused by repeated breaking of the vacuum and manual replacement of the mask in the traditional process. At the same time, the rotating clamping assembly drives the battery substrate to rotate and the transfer assembly drives the mask to move to achieve the position alignment of the mask and the battery substrate, ensuring the alignment accuracy of the multi-layer mask pattern, and effectively solving the technical problems of positioning errors and low production efficiency caused by manual operation.

[0024] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 The figure shows the overall structure of the mask replacement device of the present application;

[0027] Figure 2 Shows a schematic diagram of the shell structure of this application;

[0028] Figure 3 Shows a schematic structural diagram of the rotary clamping assembly of the present application;

[0029] Figure 4 Shows a schematic diagram of the substrate stage structure of the present application;

[0030] Figure 5 Shows a schematic diagram of the transfer assembly structure of the present application;

[0031] Figure 6 Shows a schematic structural diagram of the rotary bearing assembly of the present application;

[0032] Figure 7 Shows a schematic diagram of the positioning component structure of the present application;

[0033] Figure 8Shown is a schematic diagram of the structure of the handling component of this application.

[0034] Description of main component symbols:

[0035] 100 - shell; 110 - housing; 120 - connecting pipe; 130 - cover plate; 200 - rotary clamping assembly; 210 - first rotary driving member; 220 - substrate stage; 230 - clamping member; 231 - connecting member; 232 - spring; 300 - transfer assembly; 310 - three-axis moving module; 320 - carrier; 400 - rotary bearing assembly; 410 - second rotary driving member; 420 - turntable; 421 - mounting slot; 430 - storage slot; 44 0-positioning assembly; 441-linear drive member; 442-base; 443-rotating shaft; 444-first transmission rod; 445-second transmission rod; 446-limiting block; 447-connecting block; 4471-limiting slot; 500-handling assembly; 510-robotic arm; 520-mounting frame; 530-handling member; 540-image acquisition camera; 600-suction tube; 700-magnetron sputtering assembly; 710-target gun; 720-target position; a-mask. DETAILED DESCRIPTION

[0036] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0037] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0039] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components or interactions between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

[0040] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0041] The present application provides a mask replacement device, which includes a housing 100 , a rotating clamping assembly 200 , a transfer assembly 300 , a rotating bearing assembly 400 , a transport assembly 500 , and a suction pipe 600 .

[0042] In some specific embodiments, the shell 100 has a cavity, the rotating clamping assembly 200 is fixedly installed on the top wall of the cavity, the rotating clamping assembly 200 is used to drive the battery base to rotate, the transfer assembly 300 is located on one side of the rotating clamping assembly 200, the transfer assembly 300 drives the mask to move and be close to the battery base, the rotating bearing assembly 400 is fixedly set at the bottom of the cavity, the rotating bearing assembly 400 is used to carry multiple masks, the conveying assembly 500 is located on one side of the rotating bearing assembly 400, the conveying assembly 500 is used to convey the mask on the rotating bearing assembly 400 to the transfer assembly 300, and the suction tube 600 is set on the shell 100, and the suction tube 600 is connected to the cavity.

[0043] See also Figure 1 and Figure 2As shown, in the initial state, there is a battery on the rotating clamping assembly 200. In this embodiment, the inside of the cavity can be vacuumed by the suction tube 600 to meet the requirements of magnetron sputtering, and when it is necessary to replace a mask of a different shape, the previous mask can be moved away from the rotating clamping assembly 200 by the transfer assembly 300, and then the conveying assembly 500 conveys the mask on the transfer assembly 300 to the rotating bearing assembly 400. When replacing a new mask, first the rotating bearing assembly 400 rotates the required mask to the loading position of the conveying assembly 500, and then the conveying assembly 500 conveys the mask on the rotating bearing assembly 400 to the transfer assembly 300, and the transfer assembly 300 drives the mask toward the rotating clamping assembly 200, so that the mask is bonded to the battery base on the rotating clamping assembly 200, and the mask replacement is completed.

[0044] In one embodiment, the suction tube 600 is connected to a corresponding vacuum system. For example, the suction tube 600 can be connected to a vacuum machine. In order to obtain the vacuum degree inside the cavity in real time, a corresponding vacuum gauge can be installed in the cavity to measure the vacuum degree. The vacuum degree is not limited here and can be set according to actual needs.

[0045] It is understandable that when vacuuming is required, an external vacuum pump extracts the air in the shell 100 through the suction tube 600, so that the inside of the shell 100 meets the vacuum requirements. When the battery substrate needs to be replaced, the vacuum can also be broken through the suction tube 600, that is, the suction tube 600 allows external gas to enter the shell 100, thereby facilitating the opening of the shell 100 to replace the battery substrate or mask.

[0046] Furthermore, in this embodiment, a corresponding control system should also be included. The control system can be composed of a control processor, a memory, a control program, etc., so as to control each component to operate according to a preset trajectory and time to achieve mask replacement.

[0047] It is understandable that in the above-mentioned process of replacing the mask, no manual intervention is required, and there is no need to manually replace different masks back and forth, so there is no need for frequent vacuum processing and other processes, which greatly improves the efficiency of battery production.

[0048] In this embodiment, in order to manually observe the battery status inside the cavity, a corresponding observation window is provided on the outer wall of the shell 100, so that the status inside the cavity can be observed from the outside.

[0049] In some specific embodiments, the shell 100 includes a shell 110, a connecting pipe 120 and a cover plate 130. The shell 110 has a cavity. A connecting pipe 120 connected to the cavity is fixedly arranged on the outer wall of the shell 110. The connecting pipe 120 has an opening. A cover plate 130 is arranged on the connecting pipe 120. The cover plate 130 is used to open or close the opening.

[0050] Please continue reading Figure 1 and Figure 2 As shown, in order to be able to place batteries and masks of different specifications into the cavity, a connecting pipe 120 is fixedly provided on the outer wall of the shell 110, and the connecting pipe 120 is connected to the cavity. The channel formed by the connecting pipe 120 is a loading and unloading channel for the battery substrate and a channel for the mask to enter and exit the cavity. Furthermore, the battery substrate and the mask can be placed in and out of the cavity by a robot or manually, and the specific setting can be made according to actual conditions. For example, when used in a production line, a robot can be used to transport, place or take the battery substrate and mask, and when used in a laboratory, manual placement and taking can be used.

[0051] In order to maintain the vacuum level inside the cavity of the housing 110 , the opening of the communication pipe 120 is sealed by the cover plate 130 , thereby preventing external gas from entering the cavity.

[0052] In some specific embodiments, the shell 100 also includes a seal, a first sealing groove (not shown in the figure) is provided on the end surface of the cover plate 130 facing the connecting pipe 120, and a second sealing groove (not shown in the figure) is provided on the end surface of the connecting pipe 120 facing away from the cavity, and a seal is provided in the first sealing groove or the second sealing groove (not shown in the figure).

[0053] In this embodiment, in order to prevent external gas from entering the cavity through the connection position between the cover plate 130 and the connecting pipe 120, a sealing structure is provided at the contact position between the two. Specifically, when the cover plate 130 contacts the connecting pipe 120, the sealing member will deform and fully contact the connecting pipe 120 and the cover plate 130 to complete the sealing, thereby preventing external gas from entering the cavity.

[0054] Exemplarily, the sealing member may be a sealing ring, specifically a rubber sealing ring.

[0055] In some embodiments, the cover plate 130 is hinged to the connecting pipe 120 by a hinge, and the opening of the connecting pipe 120 is opened or closed by rotating the cover plate 130. In order to prevent the cover plate 130 from separating from the connecting pipe 120, the two can be fixed with a buckle, or a cylinder can be provided at the hinge position of the cover plate 130 to drive the cover plate 130 to rotate about the hinge position, thereby realizing the combination or separation of the cover plate 130 and the connecting pipe 120. Specifically, the cover plate 130 is provided with an extension portion at the hinge position, and the linear drive member is hinged to the connecting pipe 120. The telescopic end of the linear drive member is connected to the extension portion, and the cover plate 130 is driven to move away from or closer to the connecting pipe 120 by the telescopic linear drive member. For example, the linear drive member can adopt a linear drive component such as an electric cylinder.

[0056] In some specific embodiments, the rotary clamping assembly 200 includes a first rotary driving member 210, a substrate stage 220 and a clamping member 230. The first rotary driving member 210 is fixedly mounted on the top wall of the cavity. The rotating end of the first rotary driving member 210 is provided with a substrate stage 220, and two clamping members 230 are provided on the substrate stage 220 at intervals.

[0057] See also Figure 3 and Figure 4 As shown, in order to fix the battery substrate on the substrate stage 220, two clamping members 230 are set on the substrate stage 220. When placing the battery substrate, the battery substrate can be placed between the two clamping members 230. The battery substrate is clamped and fixed by the clamping members 230 to prevent it from separating from the substrate stage 220 and falling.

[0058] Illustratively, the first rotation driving member 210 may be a motor, specifically a servo motor.

[0059] In this embodiment, a heating structure is also provided on the substrate stage 220. The specific heating structure can be an electric heating wire, which heats the substrate stage 220 to provide the battery substrate with the temperature required for the reaction. Accordingly, the substrate stage 220 should also have a heat insulation plate to prevent the temperature from being transferred to the first rotating drive member 210 and causing damage to it. It can be understood that the heat insulation plate is installed at the rotating end of the first rotating drive member 210, and the substrate stage 220 is installed on the heat insulation plate.

[0060] In some specific embodiments, the clamping member 230 includes a connecting member 231 fixedly connected to the substrate stage 220 and a spring 232 provided at one end of the two connecting members 231 close to each other.

[0061] Please continue reading Figure 3 and Figure 4As shown, in this embodiment, the corresponding spring pieces 232 are fixed to the substrate stage 220 by two connecting members 231. Since the connecting members 231 can undergo a certain elastic deformation, when the battery base extends between the two connecting members 231, the connecting member 231 will undergo a certain deformation, thereby clamping and fixing the battery base between the two spring pieces 232.

[0062] In some specific embodiments, the transfer assembly 300 includes a three-axis moving module 310 and a carrier 320 fixedly installed on the moving end of the three-axis moving module 310 .

[0063] See also Figure 1 and Figure 5 As shown, after the transport component 500 transports the mask and places it on the carrier 320, the three-axis moving module 310 drives the carrier 320 to move toward the substrate stage 220, so that the mask is attached to the battery base on the substrate stage 220, wherein a portion of the substrate stage 220 is attached to the battery base to shield it.

[0064] Furthermore, the three-axis moving module 310 can realize the movement of the carrier 320 in three dimensions. Specifically, the three-axis moving module 310 can realize movement in the three directions of X, Y, and Z. For example, the carrier 320 can be formed by three linear modules. For example, three motor screw linear modules, linear motor linear modules, etc. can be assembled to realize movement in three directions.

[0065] In some specific embodiments, the rotating bearing assembly 400 includes a second rotating driving member 410 and a turntable 420 . The turntable 420 is fixedly mounted on the rotating end of the second rotating driving member 410 . A plurality of storage slots 430 are provided at the circumferential edge of the turntable 420 .

[0066] See also Figure 6 As shown, in order to accommodate multiple different masks, multiple storage slots 430 for storing masks are opened on the turntable 420 at evenly spaced intervals. When the corresponding mask is used, the turntable 420 can be driven to rotate by the storage slots 430, thereby rotating the required mask to the loading position of the conveying component 500 to provide a new mask for the conveying component 500.

[0067] In some embodiments, the second rotation driving member 410 may include a motor, a reducer, a divider, etc., so as to accurately control the rotation angle of the turntable 420. For example, the motor may be a servo motor.

[0068] In some specific embodiments, the rotating bearing assembly 400 further includes a positioning assembly 440, a base 442, a rotating shaft 443, a first transmission rod 444, and a second transmission rod 445. The positioning assembly 440 includes a linear drive member 441. A base 442 is provided on one side of the linear drive member 441. A rotating shaft 443 is rotatably mounted on the base 442. The first transmission rod 444 and the second transmission rod 445 are fixedly mounted on the circumference of the rotating shaft 443. The first transmission rod 444 is away from the rotating shaft 443. The end is hinged to the linear drive member 441, and a limit block 446 is provided at the end of the second transmission rod 445 away from the rotating shaft 443; a plurality of mounting grooves 421 are provided on the circumference of the turntable 420, and a connecting block 447 is fixedly installed in the linear drive member 441. The connecting block 447 is provided with a limit groove 4471 adapted to the limit block 446, and the linear drive member 441 drives the limit block 446 to move toward or away from the limit groove 4471 through the first transmission rod 444 and the second transmission rod 445.

[0069] See also Figure 6 and Figure 7 As shown, in order to further rotate and position the turntable 420, when the turntable 420 rotates the corresponding mask to the loading position of the conveying assembly 500, the linear drive member 441 is started to drive the rotating shaft 443 to rotate under the transmission action of the first transmission rod 444, thereby driving the second transmission rod 445 to move toward the turntable 420. At this time, the limit block 446 will move to the limit groove 4471 of the connecting block 447, and cooperate with the connecting block 447 to be fixedly installed in the installation groove 421, thereby preventing the turntable 420 from rotating and moving.

[0070] In some specific embodiments, the transport assembly 500 includes a robotic arm 510, a mounting frame 520, a transport member 530 and an image acquisition camera 540. The mobile end of the robotic arm 510 is fixedly mounted with the mounting frame 520, and the transport member 530 and the image acquisition camera 540 are mounted on the mounting frame 520.

[0071] In this embodiment, in order to facilitate the position adjustment of the image acquisition camera 540, a fine-tuning platform can be installed on the mounting frame 520, and then the image acquisition camera 540 is installed on the fine-tuning platform. The position of the image acquisition camera 540 is adjusted by the fine-tuning platform to meet the position requirements for image acquisition. In order to enable the image acquisition camera 540 to capture images more clearly, a light source is set at the position of the image acquisition camera 540, specifically a coaxial light source, to provide sufficient light for the image acquisition camera 540 to shoot.

[0072] See also Figure 8As shown, when the mask is loaded and unloaded, the control processor controls the start-up of the robot arm 510, and the robot arm 510 drives the transport member 530 located on the mounting frame 520 to move. When the transport member 530 moves to the storage slot 430 position, the control processor controls the transport member 530 to clamp and transport the mask located in the storage slot 430. As the robot arm 510 drives the mask clamped by the transport member 530 to move, the mask is transported to the carrier 320. Then, the robot arm 510 drives the image acquisition camera 540 on the mounting frame 520 to move, and the image acquisition camera 540 is used to photograph and position the mask on the carrier 320, and to photograph and position the battery substrate on the substrate stage 220. The images of the mask and the battery substrate captured by the image acquisition camera 540 are transmitted to the control processor, and the control processor processes the captured images to obtain the relative position between the mask and the battery substrate at this time. Next, the positions of the mask and the battery substrate need to be calibrated, which can be done through the three-axis The moving module 310 drives the carrier 320 to move in three dimensions and cooperates with the first rotating drive member 210 to drive the battery substrate located at the substrate stage 220 to rotate so that the mask and the battery substrate are aligned. At this time, the mask and the battery substrate are located at the preset positions, so that they meet the position requirements of magnetron sputtering and complete the calibration positioning. It should be noted that in the process of the three-axis moving module 310 driving the mask located on the carrier 320 to move and the first rotating drive member 210 driving the battery substrate located on the substrate stage 220 to rotate, the robotic arm 510 can drive the image acquisition camera 540 to shoot and monitor the position of the mask and the battery substrate in real time, and feed back the captured image to the control processor in real time. The control processor controls the three-axis moving module 310 and the first rotating drive member 210 to work together, and finally aligns the mask and the battery substrate to the predetermined position. After that, the three-axis moving module 310 drives the mask located on the carrier 320 to move toward the battery substrate, so that the mask and the battery substrate are bonded.

[0073] For example, the image acquisition camera 540 may be a CCD industrial camera to achieve real-time image acquisition.

[0074] It is understandable that other devices may be used to transport the mask, for example, clamping the mask with a clamp to achieve transport.

[0075] In some specific embodiments, the mask replacement device further includes a magnetron sputtering assembly 700 and a target position 720 disposed in the chamber. The magnetron sputtering assembly 700 includes a target gun 710 disposed on the bottom wall of the chamber, and a target position 720 is disposed on the target gun 710.

[0076] See Figure 1As shown, the target material on the target position 720 is magnetron sputtered toward the top battery substrate by the target gun 710. Since there is a mask to block it at the battery substrate position, a preset shape can be formed on the battery substrate to meet production or experimental requirements.

[0077] In this embodiment, the battery substrate is a hard substrate, and the mask a is a hard mask.

[0078] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0079] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A mask replacement device, characterized in that: include: A shell (100), wherein the shell (100) has a cavity; a rotating clamping assembly (200), the rotating clamping assembly (200) being fixedly mounted on the top wall of the cavity, and the rotating clamping assembly (200) being used to drive the battery base to rotate; A transfer assembly (300), the transfer assembly (300) being located on one side of the rotating clamping assembly (200), and the transfer assembly (300) driving the mask to move and to be in close contact with the battery substrate; A rotating bearing assembly (400), the rotating bearing assembly (400) being fixedly arranged at the bottom of the cavity, and the rotating bearing assembly (400) being used to bear a plurality of masks; a transport assembly (500), the transport assembly (500) being located on one side of the rotating bearing assembly (400), and the transport assembly (500) being used to transport the mask on the rotating bearing assembly (400) to the transfer assembly (300); A suction pipe (600), the suction pipe (600) is arranged on the shell (100), and the suction pipe (600) is connected to the cavity.

2. The mask replacement device according to claim 1, wherein: The shell (100) comprises a shell (110), a connecting pipe (120) and a cover plate (130); the shell (110) has the cavity; a connecting pipe (120) communicating with the cavity is fixedly provided on the outer wall of the shell (110); the connecting pipe (120) has an opening; a cover plate (130) is provided on the connecting pipe (120); and the cover plate (130) is used to open or close the opening.

3. The mask replacement device according to claim 2, characterized in that: The shell (100) further comprises a sealing member, a first sealing groove is provided on the end surface of the cover plate (130) facing the connecting pipe (120), and a second sealing groove is provided on the end surface of the connecting pipe (120) facing away from the cavity, and the sealing member is provided in either the first sealing groove or the second sealing groove.

4. The mask replacement device according to claim 1, wherein: The rotary clamping assembly (200) comprises a first rotary driving member (210), a substrate stage (220) and a clamping member (230), wherein the first rotary driving member (210) is fixedly mounted on the top wall of the cavity, a substrate stage (220) is provided at a rotating end of the first rotary driving member (210), and two clamping members (230) are provided on the substrate stage (220) at intervals.

5. The mask replacement device according to claim 4, characterized in that: The clamping member (230) comprises a connecting member (231) fixedly connected to the substrate stage (220) and a spring (232) provided at one end of the two connecting members (231) close to each other.

6. The mask replacement device according to claim 1, wherein: The transfer assembly (300) comprises a three-axis moving module (310) and a carrier (320) fixedly mounted on a moving end of the three-axis moving module (310).

7. The mask replacement device according to claim 1, wherein: The rotary bearing assembly (400) comprises a second rotary driving member (410) and a turntable (420); the turntable (420) is fixedly mounted on the rotating end of the second rotary driving member (410); and a plurality of storage slots (430) are provided at the circumferential edge of the turntable (420).

8. The mask replacement device according to claim 7, characterized in that: The rotating bearing assembly (400) further includes a positioning assembly (440), the positioning assembly (440) including a linear driving member (441), a base (442), a rotating shaft (443), a first transmission rod (444) and a second transmission rod (445), the linear driving member (441) is provided with a base (442) on one side, the rotating shaft (443) is rotatably mounted on the base (442), the first transmission rod (444) and the second transmission rod (445) are fixedly mounted on the circumference of the rotating shaft (443), the end of the first transmission rod (444) away from the rotating shaft (443) is hinged to the linear driving member (441), and the end of the second transmission rod (445) away from the rotating shaft (443) is provided with a limiting block (446); The rotating disk (420) is provided with a plurality of mounting grooves (421) on its circumference. A connecting block (447) is fixedly installed in the linear drive member (441). A limiting groove (4471) adapted to the limiting block (446) is provided on the connecting block (447). The linear drive member (441) drives the limiting block (446) to move toward or away from the limiting groove (4471) via the first transmission rod (444) and the second transmission rod (445).

9. The mask replacement device according to claim 1, wherein: The transport assembly (500) comprises a mechanical arm (510), a mounting frame (520), a transport member (530), and an image acquisition camera (540); the mounting frame (520) is fixedly mounted on the movable end of the mechanical arm (510); and the transport member (530) and the image acquisition camera (540) are mounted on the mounting frame (520).

10. The mask replacement device according to claim 1, wherein: The mask replacement device further comprises: a magnetron sputtering assembly (700) and a target position (720) arranged in the cavity; the magnetron sputtering assembly (700) comprises a target gun (710) arranged on the bottom wall of the cavity; and the target position (720) is provided on the target gun (710).

Images