Die for producing high-purity aluminum target

Abstract

The utility model relates to the technical field of target material production, in particular to a die for producing a high-purity aluminum target. Comprising an outer sleeve and a back pipe, the outer sleeve is made of aluminum, the inner sleeve is made of aluminum, the outer sleeve is arranged outside the inner sleeve in a sleeved mode, the two ends of the outer sleeve and the two ends of the inner sleeve are connected in a sealed mode through two circular rings, the circular rings are made of aluminum, and a powder filling pipe is arranged on one circular ring. A circular tube type cavity is formed among the outer sleeve, the inner sleeve and the two circular rings, and a back tube made of stainless steel is located in the cavity and arranged outside the inner sleeve in a sleeving mode. By utilizing the die disclosed by the utility model, the high-purity aluminum target material with higher density can be produced.

Description

Technical Field

[0001] The utility model relates to the technical field of target material production, in particular to a mold for producing high-purity aluminum targets. Background Art

[0002] High-purity aluminum targets, used in the electronics industry, require high purity, density, and small grain size. Initially, high-purity aluminum targets were manufactured using a casting method (including ingot casting, rolling, and machining) and were flat targets. However, these targets had low utilization rates and large grains. Later, casting was used to produce rotating aluminum targets (tubular). Rotating aluminum targets had higher utilization rates, but because pure aluminum is soft and weak, duralumin had to be welded to both ends of the tube to create ports for connection to sputtering equipment. The high temperatures generated by welding also caused grain growth at both ends of the target. Later, cold spraying was used to produce rotating aluminum targets. The specific process can be found in patent application number 201811300391.3, "A Cold Spray Preparation Process for Aluminum Rotating Targets and Their Products." However, the cold spray process relies on high-speed particle impact to bond the aluminum powder together, resulting in a relatively low density of the produced aluminum targets. Utility Model Content

[0003] The technical problem to be solved by the present invention is to provide a mold for producing high-purity aluminum targets in response to the above-mentioned technical deficiencies.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a mold for producing high-purity aluminum targets, including an outer sleeve and a back tube, the outer sleeve is made of aluminum, and also includes an inner sleeve made of aluminum. The outer sleeve is sleeved on the outside of the inner sleeve and the two ends are sealed and connected by two circular rings, the material of the circular rings is aluminum, and a powder filling tube is provided on one of the circular rings. A circular tubular cavity is formed between the outer sleeve, the inner sleeve and the two circular rings, and the back tube made of stainless steel is located in the cavity and is sleeved on the outside of the inner sleeve.

[0005] To further optimize the technical solution, a concave platform is provided on one side of the circular ring close to the back tube, and the end of the back tube is inserted into the concave platform.

[0006] To further optimize the technical solution, an isolation tube is further provided in the circular tubular cavity formed between the outer sleeve, the inner sleeve and the two circular rings. The isolation tube is located outside the back tube and inside the outer sleeve.

[0007] Compared with the prior art, the present invention has the following advantages: the outer sleeve, the circular ring and the inner sleeve are all made of aluminum, so the three can be easily welded together to form a sealed circular tubular cavity, and the stainless steel back tube is located in the circular tubular cavity, so that in the subsequent process of using the mold of the present application to produce high-purity aluminum targets, the high-purity aluminum powder can contact the outer wall of the back tube and both are located in a sealed space, and after hot isostatic pressing, a rotating high-purity aluminum target with a higher density can be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 This is a schematic structural diagram of a mold used to produce high-purity aluminum targets.

[0009] Figure 2 for Figure 1 Magnified view of point I in the middle.

[0010] In the figure: 1, outer sleeve; 2, powder filling tube; 3, ring; 31, concave platform; 4, back tube; 5, inner sleeve; 6, isolation tube. DETAILED DESCRIPTION

[0011] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely illustrative and are not intended to limit the scope of the present invention. Furthermore, descriptions of known structures and technologies are omitted in the following description to avoid unnecessary confusion regarding the concepts of the present invention.

[0012] Specific implementation method: Figure 1-2As shown, a mold for producing a high-purity aluminum target comprises an outer sleeve 1 and a backing tube 4. The outer sleeve 1 is made of aluminum and includes an inner sleeve 5, also made of aluminum. The outer sleeve 1 is sleeved onto the outer sleeve 5, and the two ends are sealed by two circular rings 3. The circular rings 3 are made of aluminum and positioned between the outer sleeve 1 and the inner sleeve 5. The three are welded (alternating current argon arc welding can be used). The outer sleeve 1, inner sleeve 5, and circular rings 3 can be made of standard aluminum with a purity of 99.7%, which is relatively low in cost. A powder filling tube 2 is provided on one of the circular rings 3. A cylindrical cavity is formed between the outer sleeve 1, inner sleeve 5, and the two circular rings 3. The backing tube 4, made of stainless steel, is positioned within this cavity and sleeved onto the outer sleeve 5. The outer diameter of the inner sleeve 5 should be as close as possible to the inner diameter of the backing tube 4 to minimize the gap between the two ends. The gaps between the two ends of the backing tube 4 and the two circular rings 3 should be minimized. When in use, first fill the cavity with high-purity aluminum powder (purity is generally greater than 99.99%) through the powder filling tube 2, then use a vacuum device to evacuate the cavity through the powder filling tube 2, the vacuum degree should reach about 0.0001Pa, be careful not to draw away the aluminum powder, then seal the powder filling tube 2 (the powder filling tube 2 can be heated and then flattened and compacted in the radial direction to form a flat sheet. In order to ensure the reliability of the seal, the two layers of the powder filling tube 2 that are bonded together at the end away from the ring 3 are welded together to form a powder filling sleeve. The powder filling sleeve can then be placed in a hot isostatic pressing device at a temperature of about 300°C and 5 The pressing is carried out under the condition of 0 MPa. Since aluminum is relatively soft, the outer sleeve 1 can be deformed inward, while the stainless steel back tube 4 has a high strength and basically will not deform. After the pressing is completed, the aluminum powder is pressed into a dense high-purity aluminum tube with a density of more than 99.9% of the theoretical density. The inner wall of the high-purity aluminum tube is combined with the outer wall of the back tube 4. The outside of the back tube 4 is preferably sandblasted and sprayed with a nickel-aluminum base layer to make the combination between the high-purity aluminum tube and the back tube 4 more firmly. After that, the outer sleeve 1, the inner sleeve 5 and the two rings 3 are removed, and then the combination of the high-purity aluminum tube and the back tube 4 is machined to obtain a high-purity rotating aluminum target.

[0013] The mold of this application is designed with this structure because the outer sleeve 1 needs to have good deformation ability at temperatures around 300°C to be suitable for hot isostatic pressing (HIP). Therefore, aluminum is the best material. Stainless steel cannot be welded to aluminum, so it is impossible to weld the back tube 4 to the outer sleeve 1 through the ring 3 (because it is difficult to find a material that can be welded to both stainless steel and aluminum). In the mold of this application, since the outer sleeve 1, ring 3, and inner sleeve 5 are all made of aluminum, they are easy to weld together. The back tube 4 is located in the circular tubular cavity formed between the three. This ensures that the high-purity aluminum powder and the outer wall of the back tube are both in a closed space during the subsequent HIP process, thus enabling HIP.

[0014] Furthermore, a recess 31 is provided on one side of the ring 3 close to the back tube 4, and the end of the back tube 4 is inserted into the recess 31, so that high-purity aluminum powder is not easy to enter between the back tube 4 and the inner sleeve 5. The outer diameter of the recess 31 is preferably equal to the outer diameter of the back tube 4.

[0015] Furthermore, a spacer tube 6 is disposed within the cylindrical cavity formed between the outer sleeve 1, inner sleeve 5, and two circular rings 3. This spacer tube 6 is located outside the backing tube 4 and closely adheres to the inner side of the outer sleeve 1. The spacer tube 6 is preferably made of expanded graphite paper. This prevents the outer sleeve 1 from easily bonding with the high-purity aluminum tube, making it easier to remove the outer sleeve 1. The circular rings 3 at both ends (along with a small section of the outer sleeve 1, backing tube 4, and inner sleeve 5) can be cut or sawed off.

[0016] It should be understood that the above-described specific embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention shall be included within the scope of protection of the present invention. In addition, the appended claims of the present invention are intended to cover all variations and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents thereof.

Claims

1. A mold for producing a high-purity aluminum target, comprising an outer sleeve (1) and a backing tube (4), characterized in that: The outer sleeve (1) is made of aluminum and further comprises an inner sleeve (5) made of aluminum. The outer sleeve (1) is sleeved on the outside of the inner sleeve (5) and both ends are sealed and connected by two circular rings (3). The circular rings (3) are made of aluminum, and a powder filling tube (2) is provided on one of the circular rings (3). A circular tube-shaped cavity is formed between the outer sleeve (1), the inner sleeve (5) and the two circular rings (3). A back tube (4) made of stainless steel is located in the cavity and sleeved on the outside of the inner sleeve (5).

2. A mold for producing a high-purity aluminum target according to claim 1, characterized in that: A concave platform (31) is provided on one side of the circular ring (3) close to the back tube (4), and the end of the back tube (4) is inserted into the concave platform (31).

3. A mold for producing a high-purity aluminum target according to any one of claims 1 to 2, characterized in that: An isolation tube (6) is further provided in the circular tubular cavity formed between the outer sleeve (1), the inner sleeve (5) and the two circular rings (3). The isolation tube (6) is located outside the back tube (4) and inside the outer sleeve (1).

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