Fixing ring and chemical mechanical polishing device
By setting a first groove design with varying cross-sectional areas at the bottom of the fixed ring, the problem of low grinding liquid transport efficiency in the prior art is solved, and more efficient grinding liquid transport and improved chemical mechanical grinding effect are achieved.
Patent Information
- Application Number
- CN202422462384.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-11
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2034-10-11
Smart Images
Figure CN223223142U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductors, and more particularly to a fixing ring and a chemical mechanical polishing device. Background Art
[0002] During the semiconductor manufacturing process, chemical mechanical polishing (CPM) is used in a large number of steps to planarize the wafer surface. During the CPM process, a polishing slurry is required. The polishing slurry plays a very important role in the CPM process, affecting the polishing rate, the uniformity of the WIW (within-wafer) and WID (within-die), and the number of defects on the polished wafer.
[0003] The efficiency and volume of slurry delivered to the wafer surface significantly impact polishing results. During the relative motion of the polishing pad and polishing head, slurry is delivered to the wafer surface inside the retaining ring through grooves in the retaining ring. The design of the retaining ring's grooves significantly influences the efficiency and volume of slurry delivered to the wafer surface.
[0004] The fixed ring groove design in the related art has the disadvantages of low grinding liquid delivery efficiency and small delivery volume. Utility Model Content
[0005] The present application is proposed to solve the above-mentioned problem. According to one aspect of the present application, a fixing ring is provided, which includes: an annular body, the inner side of the annular body has a receiving space for receiving the workpiece to be ground, and the annular body has a bottom facing the grinding pad; wherein, the bottom is provided with a plurality of first grooves, and the first groove has a first end and a second end opposite to each other; the first end of the first groove is connected to the receiving space, the second end of the first groove is connected to the outer side of the annular body, and the cross-sectional area of the second end of the first groove is larger than the cross-sectional area of the first end of the first groove.
[0006] In some embodiments of the present application, the cross-sectional area of the first groove gradually increases from the first end to the second end.
[0007] In some embodiments of the present application, the first groove is in a trapezoidal, trumpet-shaped, or bowl-shaped shape.
[0008] In some embodiments of the present application, the first grooves are evenly arranged around the circumference of the accommodating space.
[0009] In some embodiments of the present application, the cross-section of the first end of the first groove along the circumference of the annular body is greater than or equal to 1 mm, and the cross-section of the second end of the first groove along the circumference of the annular body is greater than or equal to 2 mm; and / or, the depth of the first groove is greater than or equal to 2 mm; and / or, the number of first grooves is not less than 20.
[0010] In some embodiments of the present application, the fixing ring further includes: a groove located at the bottom of the annular body; the groove communicates with the outside of the annular body and at least a portion of the second end of the first groove.
[0011] In some embodiments of the present application, the depth of the recess is the same as the depth of the first trench.
[0012] In some embodiments of the present application, the fixing ring also includes: a second groove located at the bottom of the annular body, the second groove is arranged between two adjacent first grooves; the second groove has a third end and a fourth end relative to each other, the third end of the second groove is connected to the first groove, and the fourth end of the second groove is connected to the accommodating space.
[0013] In some embodiments of the present application, a plurality of second grooves are arranged between two adjacent first grooves.
[0014] According to the second aspect of the present application, a chemical mechanical polishing device is also provided, which includes: a polishing pad, a polishing liquid supplier and any one of the above-mentioned fixing rings, wherein the polishing liquid supplier is used to spray polishing liquid onto the polishing pad.
[0015] According to the fixed ring and chemical mechanical polishing device provided in the embodiments of the present application, by setting a first groove at the bottom of the annular body, the cross-sectional area of the second end of the first groove is larger than the cross-sectional area of the first end of the first groove, that is, the outer side and the inner side of the first groove adopt a groove design method with unequal cross-sectional areas, and the cross-sectional area of the first groove on the outer side is larger than the cross-sectional area on the inner side, thereby increasing the capture amount of the polishing liquid on the outer side of the first groove, thereby improving the transportation efficiency of the polishing liquid to the accommodating space, and increasing the transportation amount of the polishing liquid. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0017] Figure 1 This is a schematic top view of the bottom of a fixing ring according to an embodiment of the present application;
[0018] Figure 2for Figure 1 A partially enlarged top view of the bottom of the fixing ring is shown;
[0019] Figure 3 This is a schematic cross-sectional view of a fixing ring according to an embodiment of the present application;
[0020] Figure 4 A schematic cross-sectional view of a fixing ring according to another embodiment of the present application;
[0021] Figure 5 This is a schematic top view of the bottom of a fixing ring according to another embodiment of the present application;
[0022] Figure 6 for Figure 5 A partially enlarged top view of the bottom of the fixing ring is shown;
[0023] Figure 7 This is a schematic top view of the bottom of a fixing ring according to another embodiment of the present application;
[0024] Figure 8 for Figure 7 A partially enlarged top view of the bottom of the fixing ring is shown;
[0025] Figure 9 This is a schematic top view of the bottom of a fixing ring according to another embodiment of the present application;
[0026] Figure 10 for Figure 9 A partially enlarged top view of the bottom of the fixing ring is shown;
[0027] Figure 11 This is a schematic top view of the bottom of a fixing ring according to another embodiment of the present application;
[0028] Figure 12 for Figure 11 A partially enlarged top view of the bottom of the fixing ring is shown;
[0029] Figure 13 This is a schematic top view of the bottom of a fixing ring according to another embodiment of the present application;
[0030] Figure 14 for Figure 13 A partially enlarged top view of the bottom of the fixing ring is shown;
[0031] Figure 15 FIG. 1 is a schematic structural diagram of a chemical mechanical polishing device according to an embodiment of the present application.
[0032] Reference numerals:
[0033] 100-fixing ring 110-support frame
[0034] 120-rotating shaft 10-ring body
[0035] 11- Accommodation space 12- First side
[0036] 13- groove 20- first groove
[0037] 21-first end 22-second end
[0038] 30-second groove 31-third end
[0039] 32- fourth end 40- polishing pad
[0040] 50-Grinding liquid supplier 51-Grinding liquid
[0041] 60-Dresser 71-Radial
[0042] 72- circumferential direction 73- central axis direction DETAILED DESCRIPTION
[0043] In order to make the purpose, technical solutions and advantages of the present application more apparent, the following is a detailed description of example embodiments of the present application with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present application described in this application, all other embodiments obtained by those skilled in the art without creative work should fall within the scope of protection of this application.
[0044] In the following description, a large number of specific details are provided to provide a more thorough understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, some technical features well known in the art are not described in order to avoid confusion with the present application.
[0045] It should be understood that the present application can be implemented in different forms and should not be interpreted as being limited to the embodiments set forth herein. On the contrary, providing these embodiments will make the disclosure thorough and complete and will fully convey the scope of the present application to those skilled in the art.
[0046] The purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present application. When used herein, the singular forms "a", "an", and "the" are intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "comprising" and / or "comprising", when used in this specification, confirm the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.
[0047] In order to fully understand the present application, a detailed structure will be provided in the following description to illustrate the technical solution proposed by the present application. The optional embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may also have other implementation methods.
[0048] During the chemical mechanical polishing process, the delivery efficiency and delivery volume of the grinding liquid to the wafer surface have an important influence on the grinding effect. In the related art, a groove is provided at the bottom of the fixed ring. During the relative motion of the grinding pad and the grinding head, the grinding liquid is input to the wafer surface on the inner side of the fixed ring through the groove on the fixed ring of the grinding head. The groove design on the fixed ring has an important influence on the delivery efficiency and delivery volume of the grinding liquid to the wafer surface. The fixed ring groove design method in the related art all adopts an equal-section groove design method, that is, the groove connects the inner and outer sides of the fixed ring, and the cross-sectional area of the groove on the inner and outer sides is equal. The fixed ring manufactured by adopting this groove design method has the disadvantages of low grinding liquid delivery efficiency and small delivery volume.
[0049] To solve at least some of the technical problems in the above-mentioned related technologies, the present application proposes the following embodiments.
[0050] The following describes some embodiments of the present application in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features therein may be combined with each other.
[0051] First, let me introduce the application scenario of the fixing ring shown in the example of this application. Figure 15 The fixing ring 100 is applied to the grinding head to limit the workpiece to be ground in a fixed accommodation space, and is also used to allow the grinding liquid 51 sprayed on the grinding pad 40 to pass through the fixing ring 100 and be transported into the accommodation space.
[0052] In some embodiments, the workpiece to be polished may be a substantially disk-shaped sheet structure such as, but not limited to, a wafer. For example, the wafer may be a wafer substrate such as a silicon-based wafer or a silicon nitride-based wafer.
[0053] refer to Figure 1 、 Figure 3 and Figure 4 The embodiment of the present application provides a fixing ring 100, which includes: an annular body 10, an inner side of the annular body 10 having a receiving space 11 for receiving a workpiece to be ground, and the annular body 10 having a bottom facing the grinding pad 40. For example, referring to Figure 3 and Figure 4 , the lower part of the annular body 10 is the bottom of the annular body 10.
[0054] When the annular body 10 is provided, the annular body 10 can be any annular structure. The inner side of the annular body 10 is a receiving space 11, which is used to receive and limit the workpiece to be ground when grinding the workpiece. Figure 3 、 Figure 4 and Figure 15 The bottom of the annular body 10 faces the polishing pad 40. The bottom of the annular body 10 is provided with a first surface 12, which abuts against the polishing pad 40, thereby confining the workpiece to be polished within the accommodating space 11. When relative movement occurs between the polishing pad 40 and the polishing head, the polishing pad 40 can polish the surface of the workpiece to be polished that contacts the polishing pad 40 to achieve a flattening process.
[0055] In the examples of this application, refer to Figure 1 and Figure 2 Several first grooves 20 are provided at the bottom of the annular body 10. The first grooves 20 have opposite first ends 21 and second ends 22. The first ends 21 of the first grooves 20 are connected to the accommodating space 11, and the second ends 22 of the first grooves 20 are connected to the outside of the annular body 10. That is, the first grooves 20 are connected to the inside and outside of the annular body 10, so that the grinding liquid 51 sprayed onto the grinding pad 40 can be input into the accommodating space 11 inside the annular body 10 through the first grooves 20, so that the grinding liquid 51 can enter between the workpiece to be ground and the grinding pad 40, thereby improving the grinding effect.
[0056] Furthermore, the cross-sectional area of the second end 22 of the first groove 20 in the embodiment of the present application is greater than the cross-sectional area of the first end 21 of the first groove 20. That is, the outer side and the inner side of the first groove 20 adopt a groove design method with unequal cross-sectional areas, and the cross-sectional area of the first groove 20 on the outer side is larger than the cross-sectional area of the inner side. Compared with the groove design method with medium cross-section in the related art, the above embodiment of the present application can increase the capture amount of the grinding liquid 51 on the outer side of the first groove 20, thereby improving the delivery efficiency of the grinding liquid 51 to the receiving space 11, increasing the delivery amount of the grinding liquid 51, and allowing more grinding liquid 51 to enter the receiving space 11.
[0057] It should be noted that the reference Figure 1The cross section of the first groove 20 mentioned above refers to: a cross section formed by cutting the first groove 20 with an annular section perpendicular to the radial direction 71 of the annular body 10, and the annular section is also concentrically arranged with the center O of the annular body 10.
[0058] Exemplary, reference Figure 1 、 Figure 2 、 Figure 3 and Figure 4 The cross-sectional area of the first groove 20 is the product of the dimension of the cross section of the first groove 20 along the circumferential direction 72 of the annular body 10 and the depth of the first groove 20 (i.e., the dimension of the cross section of the first groove 20 along the central axis 73 of the annular body 10). The depth of the first groove 20 may also refer to the vertical distance between the bottom of the first groove 20 and the first surface 12 of the bottom of the annular body 10.
[0059] In some embodiments, the cross-sectional area of the first groove 20 may gradually increase from the first end 21 of the first groove 20 to the second end 22 of the first groove 20. Specifically, the first groove 20 adopts a non-uniform cross-sectional area design, where the cross-sectional area of the first groove 20 gradually increases from the side close to the accommodating space 11 to the side away from the accommodating space 11, so that the cross-sectional area of the first groove 20 on the outside is larger than the cross-sectional area on the inside, forming a first groove 20 with a larger outer opening and a smaller inner opening.
[0060] Of course, in other embodiments, other designs may be used to make the cross-sectional area of the second end 22 of the first groove 20 larger than the cross-sectional area of the first end 21 of the first groove 20 .
[0061] Exemplary, reference Figure 1 The number of the first grooves 20 provided on the first surface 12 can be at least two, and at least two first grooves 20 can be evenly provided around the periphery of the accommodating space 11, so that the grinding liquid 51 entering the accommodating space 11 can be distributed as evenly as possible to improve the grinding effect.
[0062] Exemplarily, the number of first grooves 20 can be any number such as but not limited to 8, 10, 16, 20, 30, etc., which is specifically related to the outer circumferential length of the accommodating space 11, the size of the cross-section of the first groove 20 along the circumference 72 of the annular body 10, and other dimensions.
[0063] Regarding the design of the first groove 20 , various methods can be adopted. Several configuration methods are exemplarily introduced below.
[0064] In some embodiments, the cross-section of the first groove 20 can be gradually increased along the circumference 72 of the annular body 10 from the first end 21 of the first groove 20 to the second end 22 of the first groove 20, so as to facilitate the gradual increase of the cross-sectional area of the first groove 20 from the first end 21 of the first groove 20 to the second end 22 of the first groove 20, thereby simplifying the difficulty of preparing the first groove 20.
[0065] For example, the depth of the first groove 20 can be made constant. That is, the depth of the first groove 20 remains constant as the first groove 20 extends from the first end 21 of the first groove 20 to the second end 22 of the first groove 20. In this case, the cross-sectional dimension of the first groove 20 along the circumferential direction 72 of the annular body 10 can be controlled to gradually increase from the first end 21 of the first groove 20 to the second end 22 of the first groove 20. This can achieve a gradually increasing cross-sectional area of the first groove 20 from the first end 21 of the first groove 20 to the second end 22 of the first groove 20, thereby simplifying the preparation of the first groove 20.
[0066] Exemplarily, the cross-sectional dimension of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 can be greater than or equal to 1 mm, and the cross-sectional dimension of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 can be greater than or equal to 2 mm. Specifically, the cross-sectional dimension of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 can be equal to any value not less than 1 mm, such as 1 mm, 1.5 mm, or 2 mm. The cross-sectional dimension of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 can be equal to any value not less than 2 mm, such as 2 mm, 2.5 mm, or 3 mm. Exemplarily, when the depth of the first groove 20 is constant, it is necessary to ensure that the cross-sectional dimension of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 is smaller than the cross-sectional dimension of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10. This ensures that the outer opening of the first groove 20 is larger and the inner opening is smaller.
[0067] Exemplarily, the depth of the first groove 20 may be greater than or equal to 2 mm. Specifically, the depth of the first groove 20 may be any value not less than 2 mm, such as 2 mm, 2.5 mm, or 3 mm.
[0068] Regarding the shape design of the first groove 20, various methods can be adopted. Several configuration methods are exemplarily introduced below.
[0069] Exemplary, reference Figure 1 and Figure 2, the shape of the first groove 20 can be a trapezoid. Specifically, the trapezoid includes a long side, a short side, and two waists connecting the long side and the short side respectively. The short side of the trapezoid is located at the first end 21 of the first groove 20, and the long side of the trapezoid is located at the second end 22 of the first groove 20. The two waists of the trapezoid constitute the two sidewalls of the first groove 20, so that the outer opening of the first groove 20 is large and the inner opening is small. That is, in this embodiment, the shape of the first groove 20 widens linearly from the first end 21 of the first groove 20 to the second end 22 of the first groove 20, so as to simplify the preparation method of the first groove 20.
[0070] For example, the long side of the trapezoid can be greater than or equal to 2 mm, that is, the cross-section of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 is greater than or equal to 2 mm. The short side of the trapezoid can be greater than or equal to 1 mm, that is, the cross-section of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 is greater than or equal to 1 mm. The number of first grooves 20 can be greater than or equal to 20.
[0071] It should be noted that the shape of the first groove 20 refers to the longitudinal cross-sectional shape of the first groove 20 perpendicular to the central axis of the annular body 10. The longitudinal cross-sectional shape of the first groove 20 can be seen from a top view of the bottom of the fixing ring 100.
[0072] Exemplary, reference Figure 5 and Figure 6 The shape of the first groove 20 can also be a trumpet-shaped shape, with a first opening at the bottom of the trumpet and a second opening at the top of the trumpet, wherein the area of the first opening is smaller than the area of the second opening. The trumpet-shaped first opening is located at the first end 21 of the first groove 20, and the trumpet-shaped second opening is located at the second end 22 of the first groove 20. The two waistlines of the trumpet form the two sidewall edges of the first groove 20, thereby making the outer opening of the first groove 20 larger and the inner opening smaller. That is, in this embodiment, the shape of the first groove 20 widens non-linearly from the first end 21 of the first groove 20 to the second end 22 of the first groove 20, and the closer to the first end 21 of the first groove 20, the smaller the widening degree, and the closer to the second end 22 of the first groove 20, the larger the widening degree. With this design, the opening size of the second end 22 of the first groove 20 can be maximized while maintaining the same longitudinal cross-sectional area of the first groove 20, thereby allowing as much grinding liquid 51 as possible to enter the accommodating space 11.
[0073] For example, the trumpet-shaped second opening may have a size range of 2 mm or greater along the circumference 72 of the annular body 10, i.e., the cross-section of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 may have a size range of 2 mm or greater. The trumpet-shaped first opening may have a size range of 1 mm or greater, i.e., the cross-section of the first groove 20 at the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 may have a size range of 1 mm or greater. The number of first grooves 20 may be 20 or greater.
[0074] Exemplary, reference Figure 7 and Figure 8 The first groove 20 may also be shaped like a bowl, with a first opening at the bottom and a second opening at the top, wherein the area of the second opening is larger than that of the first opening. The first opening at the bottom of the bowl is located at the first end 21 of the first groove 20, and the second opening at the top of the bowl is located at the second end 22 of the first groove 20. The two waistlines of the bowl form the two sidewalls of the first groove 20, thereby making the outer opening of the first groove 20 larger and the inner opening smaller. That is, in this embodiment, the shape of the first groove 20 widens non-linearly from the first end 21 of the first groove 20 to the second end 22 of the first groove 20, and the degree of widening increases closer to the first end 21 of the first groove 20, and decreases closer to the second end 22 of the first groove 20. With this design, the length of the first groove 20 with a larger cross-sectional area can account for a larger proportion of the total length of the entire first groove 20, thereby allowing as much grinding liquid 51 as possible to enter the receiving space 11.
[0075] For example, the bowl-shaped second opening may have a size range of 2 mm or greater along the circumference 72 of the annular body 10, i.e., the cross-section of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 is 2 mm or greater. The bowl-shaped first opening may have a size range of 1 mm or greater, i.e., the cross-section of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 is 1 mm or greater. The number of first grooves 20 may be 20 or greater.
[0076] For example, when the shape of the first groove 20 is a trapezoid, a trumpet or a bowl, and the depth of the first groove 20 is a constant height value, the cross-sectional area of the first end 21 of the first groove 20 can still be kept smaller than the cross-sectional area of the second end 22 of the first groove 20, so that as much grinding liquid 51 as possible can enter the accommodating space 11.
[0077] It should be understood that the above only exemplifies some design methods of the first groove 20. In addition, other methods can be used to make the cross-sectional area of the first end 21 of the first groove 20 larger than the cross-sectional area of the second end 22 of the first groove 20.
[0078] Exemplarily, the cross-sectional area of the first end 21 of the first groove 20 can be defined as the first cross-sectional area, and the cross-sectional area of the second end 22 of the first groove 20 can be defined as the second cross-sectional area. In some embodiments, the second cross-sectional area can be at least 1.5 times the first cross-sectional area. Specifically, the second cross-sectional area can be any multiple of not less than 1.5, such as 1.5 times, 2 times, 2.5 times, or 3 times the first cross-sectional area. By making the second cross-sectional area at least 1.5 times the first cross-sectional area, the opening ratio of the second end 22 of the first groove 20 relative to the first end 21 of the first groove 20 can be increased, thereby allowing as much grinding liquid 51 as possible to enter the accommodating space 11.
[0079] In some embodiments, when the depth of the first groove 20 is a constant height value, the dimension of the cross section of the second end 22 of the first groove 20 along the circumferential direction 72 of the annular body 10 may be at least 1.5 times the dimension of the cross section of the first end 21 of the first groove 20 along the circumferential direction 72 of the annular body 10. Specifically, the dimension of the cross section of the second end 22 of the first groove 20 along the circumferential direction 72 of the annular body 10 may be any multiple of 1.5, such as 1.5 times, 2 times, 2.5 times, or 3 times the dimension of the cross section of the first end 21 of the first groove 20 along the circumferential direction 72 of the annular body 10, which is not less than 1.5. This ensures that the second cross-sectional area is at least 1.5 times the first cross-sectional area, simplifying the preparation of the first groove 20.
[0080] In some embodiments, reference Figure 1 、 Figure 2 and Figure 3 The fixing ring 100 may further include: a groove 13 located at the bottom of the annular body 10 ; the groove 13 communicates with the outside of the annular body 10 and at least part of the second end 22 of the first groove 20 .
[0081] It should be noted that when the aforementioned groove 13 is provided at the bottom of the annular body 10, the radial dimension 71 of the annular body 10 must meet strength requirements. Secondly, by providing the groove 13 on the outside of the annular body 10, more grinding liquid 51 can enter the first groove 20 through the groove 13. Furthermore, the length of at least a portion of the first groove 20 can be shortened, reducing the length of the delivery path of the grinding liquid 51, thereby improving the delivery efficiency and delivery volume of the grinding liquid 51. Furthermore, since the groove 13 is provided only on the outside of the annular body 10, it does not affect the retaining ring 100's inherent positional limiting effect on the workpiece to be ground therein.
[0082] Exemplary, reference Figure 3The radial dimension a of the area on the first surface 12 of the annular body 10 that contacts the polishing pad 40 can be within the following range: 45 mm ≥ a ≥ 5 mm. This ensures that the radial dimension 71 of the area where the bottom of the annular body 10 contacts the polishing pad 40 is not too small to meet strength requirements, while also being not too large to prevent the first groove 20 from being excessively long, thereby improving the delivery efficiency and volume of the polishing liquid 51.
[0083] For example, the groove 13 may be an annular groove, which is concentrically arranged with the annular body 10. In this case, the annular groove communicates with the outside of the annular body 10 and the second ends 22 of all the first grooves 20. This allows more grinding liquid 51 to enter the first grooves 20 through the annular groove, and also shortens the length of all the first grooves 20, reducing the length of the delivery path of the grinding liquid 51, thereby improving the delivery efficiency and delivery volume of the grinding liquid 51.
[0084] Of course, the groove 13 is not limited to the annular groove shown above, and other forms may be used. In other embodiments, the groove 13 may only communicate with the outside of the annular body 10 and the second ends 22 of some of the first grooves 20. In this case, the second ends 22 of another portion of the first grooves 20 directly communicate with the outside of the annular body 10.
[0085] When determining the depth of the groove 13 and the first trench 20 , various methods may be used, some of which are exemplarily described below.
[0086] For example, the depth of the groove 13 can be the same as the depth of the first groove 20. Since the groove 13 and the first groove 20 have the same depth, there is no step formed by the height difference at the connection between the groove 13 and the first groove 20, which can make the connection between the groove 13 and the first groove 20 flush, thereby reducing the flow resistance of the grinding liquid 51 when flowing between the groove 13 and the first groove 20, so that the grinding liquid 51 can flow between the groove 13 and the first groove 20 efficiently and quickly.
[0087] For example, the depth b of the groove 13 may be greater than or equal to 2 mm. Similarly, the depth of the first groove 20 may also be greater than or equal to 2 mm.
[0088] In other embodiments, the groove 13 and the first trench 20 may have different depths.
[0089] Of course, it should be noted that the depth b of the groove 13 is not limited to the range shown above. In addition, other size design methods can be adopted based on the material and structure of the fixing ring 100.
[0090] It should be noted that the bottom of the annular body 10 is not limited to the method of setting the groove 13. In addition, other methods can also be used. For example, referring to Figure 4 , the groove 13 may not be provided at the bottom of the annular body 10 . In this case, the second end 22 of the first groove 20 is directly connected to the outer side of the annular body 10 .
[0091] In other embodiments, reference Figure 9 and Figure 10 The fixing ring 100 may further include: a second groove 30 located on the first surface 12 of the annular body 10, the second groove 30 being disposed between two adjacent first grooves 20. The second groove 30 has a third end 31 and a fourth end 32 opposite to each other, the third end 31 of the second groove 30 being connected to the first groove 20, and the fourth end 32 of the second groove 30 being connected to the accommodation space 11. For example, referring to Figures 9 to 14 The black solid line indicated by reference numeral 30 represents the second trench 30 .
[0092] By adopting the above-mentioned method, the grinding liquid 51 that enters the interior of the first groove 20 can also flow directly into the holding space 11 through the second groove 30. Compared with the method without providing the second groove 30, in this embodiment, the second groove 30 is further provided in the area between the two first grooves 20, so that the grinding liquid 51 that enters the interior of the first groove 20 from the second end 22 of the first groove 20 can not only enter the holding space 11 from the first end 21 of the first groove 20, but also enter the holding space 11 through the second groove 30, thereby improving the delivery efficiency and delivery volume of the grinding liquid 51 into the holding space 11. The second groove 30 provides an additional channel for the delivery of the grinding liquid 51, thereby further improving the delivery efficiency and delivery volume of the grinding liquid 51 that has been captured outside the first groove 20 into the holding space 11. Moreover, it can also allow the grinding liquid 51 to enter the holding space 11 from more paths, which has the effect of improving the uniform distribution of the grinding liquid 51 in the holding space 11.
[0093] Exemplary, reference Figure 9 and Figure 10 A plurality of second grooves 30 may be provided between two adjacent first grooves 20 .
[0094] For example, the number of the second grooves 30 provided between two adjacent first grooves 20 may be any value not less than two, such as two, three, or four.
[0095] For example, the third ends 31 of the plurality of second grooves 30 can be respectively connected to different first grooves 20 in two adjacent first grooves 20. In this embodiment, it is possible to ensure that each first groove 20 is connected to at least two second grooves 30, that is, at least one second groove 30 is provided on each side of each first groove 20, thereby further improving the efficiency and amount of delivery of the polishing liquid 51 entering the first groove 20 from the second end 22 of the first groove 20 to the receiving space 11. Moreover, the polishing liquid 51 can enter the receiving space 11 through more paths, and the polishing liquid 51 is more evenly distributed within the receiving space 11.
[0096] For example, the depth of the second groove 30 can be made equal to the depth of the first groove 20, so that the first groove 20 and the second groove 30 can be etched and formed simultaneously, and the delivery efficiency and delivery volume of the polishing liquid 51 entering the first groove 20 to the receiving space 11 can be improved. Of course, it should be noted that the depth of the second groove 30 is not limited to being equal to the depth of the first groove 20, and other methods can also be used.
[0097] Exemplarily, the depth of the second groove 30 can be made smaller than that of the first groove 20 , that is, the second groove 30 is shallower than the first groove 20 , thereby minimizing the influence of the groove opening on the inner side of the annular body 10 on the limiting effect of the grinding piece.
[0098] Exemplarily, the cross-section of the third end 31 of the second groove 30 along the circumferential direction 72 of the annular body 10 may be greater than or equal to 1 mm, thereby enabling more grinding liquid 51 to be input into the receiving space 11 through the second groove 30. Exemplarily, the cross-section of the fourth end 32 of the second groove 30 along the circumferential direction 72 of the annular body 10 may also be greater than or equal to 1 mm, thereby enabling the grinding liquid 51 entering the second groove 30 to be more efficiently input into the receiving space 11.
[0099] Some exemplary combinations of the first grooves 20 and the second grooves 30 are introduced below.
[0100] Exemplary, reference Figure 9 and Figure 10When the first groove 20 is trapezoidal in shape, the long side of the trapezoid can be greater than or equal to 2 mm, that is, the cross-section of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 is greater than or equal to 2 mm. The short side of the trapezoid can be greater than or equal to 1 mm, that is, the cross-section of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 is greater than or equal to 1 mm. The number of first grooves 20 can be greater than or equal to 20. Two second grooves 30 are disposed between any two adjacent first grooves 20, and the fourth ends 32 of the two second grooves 30 meet on the inner side of the annular body 10. The cross-section of the third end 31 of the second groove 30 along the circumference 72 of the annular body 10 can be greater than or equal to 1 mm, and the cross-section of the fourth end 32 of the second groove 30 along the circumference 72 of the annular body 10 can also be greater than or equal to 1 mm. The number of second grooves 30 can be greater than or equal to 40, which is related to the number of first grooves 20.
[0101] Exemplary, reference Figure 11 and Figure 12 When the first groove 20 is shaped like a trumpet, the size of the trumpet-shaped second opening along the circumference 72 of the annular body 10 can be greater than or equal to 2 mm, that is, the cross-section of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 can be greater than or equal to 2 mm. The size of the trumpet-shaped first opening can be greater than or equal to 1 mm, that is, the cross-section of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 can be greater than or equal to 1 mm. The number of first grooves 20 can be greater than or equal to 20. Two second grooves 30 are disposed between any two adjacent first grooves 20, and the fourth ends 32 of the two second grooves 30 meet on the inner side of the annular body 10. The cross-section of the third end 31 of the second groove 30 along the circumference 72 of the annular body 10 can be greater than or equal to 1 mm, and the cross-section of the fourth end 32 of the second groove 30 along the circumference 72 of the annular body 10 can also be greater than or equal to 1 mm. The number of second grooves 30 can be greater than or equal to 40, depending on the number of first grooves 20.
[0102] Exemplary, reference Figure 13 and Figure 14When the first groove 20 is bowl-shaped, the size of the bowl-shaped second opening along the circumference 72 of the annular body 10 can be greater than or equal to 2 mm, that is, the cross-section of the second end 22 of the first groove 20 along the circumference 72 of the annular body 10 can be greater than or equal to 2 mm. The size of the bowl-shaped first opening can be greater than or equal to 1 mm, that is, the cross-section of the first end 21 of the first groove 20 along the circumference 72 of the annular body 10 can be greater than or equal to 1 mm. The number of first grooves 20 can be greater than or equal to 20. Two second grooves 30 are disposed between any two adjacent first grooves 20, and the fourth ends 32 of the two second grooves 30 meet on the inner side of the annular body 10. The cross-section of the third end 31 of the second groove 30 along the circumference 72 of the annular body 10 can be greater than or equal to 1 mm, and the cross-section of the fourth end 32 of the second groove 30 along the circumference 72 of the annular body 10 can also be greater than or equal to 1 mm. The number of second grooves 30 can be greater than or equal to 40, depending on the number of first grooves 20.
[0103] In some embodiments, the groove 13, the first groove 20, and the second groove 30 can be combined to form a fixed ring 100, thereby providing a larger area for capturing the polishing liquid 51 outside the first groove 20, a shorter polishing liquid 51 delivery distance, and more polishing liquid 51 delivery channels. This allows the ring to be used in the chemical mechanical polishing process to increase the effective delivery of the polishing liquid 51 to the workpiece. Under the same polishing liquid 51 flow rate conditions, the polishing rate can be increased; or, at the same polishing rate, a lower polishing liquid 51 flow rate can be used. Furthermore, the effective delivery of the polishing liquid 51 also improves polishing stability and expands the process window for chemical mechanical polishing.
[0104] In addition, the present invention also provides a chemical mechanical polishing device, referring to Figure 1 、 Figure 3 and Figure 15 The chemical mechanical polishing device includes: a polishing pad 40 , a polishing liquid supplier 50 and any one of the above-mentioned fixing rings 100 , wherein the polishing liquid supplier 50 is used to spray polishing liquid 51 onto the polishing pad 40 .
[0105] In some embodiments, reference Figure 15 The chemical mechanical polishing device may further include a dresser 60, which is used to dress the polishing pad 40 to maintain its polishing ability.
[0106] Exemplary, reference Figure 1 、 Figure 3 and Figure 15 The fixing ring 100 mentioned above can be the fixing ring 100 on the grinding head. In addition to the fixing ring 100, the grinding head can also include other structures, some of which are exemplarily introduced below.
[0107] Exemplary, reference Figure 15 The grinding head may include a support frame 110, and the second surface of the top of the annular body 10 may be connected to the support frame 110 of the grinding head to fix the annular body 10 on the grinding head. The top of the annular body 10 may be connected to the support frame 110 by any detachable connection method such as, but not limited to, a threaded connection, a snap connection, or the like.
[0108] In some embodiments, the grinding head may further include an adsorption device. Specifically, the support frame 110 may be provided with an adsorption device located within the annular body 10 and configured to adsorb the workpiece to be ground, thereby ensuring that the workpiece and the grinding head are virtually non-moving relative to each other during the grinding process. Exemplarily, the adsorption device may be a structure such as, but not limited to, an adsorption membrane.
[0109] Exemplary, reference Figure 15 The grinding head may further include a rotating shaft 120, which is fixedly connected to the support frame 110, so that when the rotating shaft 120 rotates, it can drive the support frame 110 to rotate, thereby driving the workpiece to be ground adsorbed by the adsorption device to rotate.
[0110] The present application has been described through the above-described embodiments, but it should be understood that the above-described embodiments are for illustrative and illustrative purposes only and are not intended to limit the present application to the described embodiments. In addition, it will be understood by those skilled in the art that the present application is not limited to the above-described embodiments, and that various variations and modifications may be made based on the teachings of the present application, all of which fall within the scope of protection claimed in the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.
Claims
1. A fixing ring, characterized in that: include: An annular body, wherein the inner side of the annular body has an accommodating space for accommodating a workpiece to be polished, and the annular body has a bottom facing the polishing pad; In which, the bottom is provided with several first grooves, the first grooves having opposite first and second ends; the first end of the first groove is connected to the accommodating space, the second end of the first groove is connected to the outside of the annular body, and the cross-sectional area of the second end of the first groove is greater than the cross-sectional area of the first end of the first groove.
2. The fixing ring according to claim 1, wherein: The cross-sectional area of the first groove gradually increases from the first end to the second end.
3. The fixing ring according to claim 2, wherein: The first groove is in a trapezoidal, trumpet-shaped or bowl-shaped shape.
4. The fixing ring according to claim 1, wherein: The first grooves are evenly arranged around the circumference of the accommodating space.
5. The fixing ring according to claim 1, wherein: The cross-section of the first end of the first groove along the circumference of the annular body is greater than or equal to 1 mm, and the cross-section of the second end of the first groove along the circumference of the annular body is greater than or equal to 2 mm; and / or, The depth of the first groove is greater than or equal to 2 mm; and / or, The number of the first grooves is no less than 20.
6. The fixing ring according to claim 1, wherein: Also includes: A groove is located at the bottom of the annular body; the groove is connected to the outside of the annular body and at least part of the second end of the first groove.
7. The fixing ring according to claim 6, wherein: The depth of the recess is the same as the depth of the first groove.
8. The fixing ring according to any one of claims 1 to 7, characterized in that Also includes: a second groove located at the bottom of the annular body, wherein the second groove is disposed between two adjacent first grooves; The second groove has a third end and a fourth end opposite to each other. The third end of the second groove is connected to the first groove, and the fourth end of the second groove is connected to the accommodation space.
9. The fixing ring according to claim 8, wherein: A plurality of second grooves are arranged between two adjacent first grooves.
10. A chemical mechanical polishing device, characterized in that: include: Abrasive pads; a polishing liquid supplier, for spraying polishing liquid onto the polishing pad; as well as, A fixing ring according to any one of claims 1 to 9.