Current and voltage detection assembly and radio frequency power supply

Abstract

The utility model relates to the technical field of signal processing and transmission, in particular to a current and voltage detection assembly and a radio frequency power supply, the current and voltage detection assembly comprises a magnetic ring, a current-carrying guide rod and a shielding shell, induced current is generated between the magnetic ring and the current-carrying guide rod in a magnetic field coupling mode, the shielding shell covers the magnetic ring, and the shielding shell is connected with the current-carrying guide rod. One end of the current-carrying guide rod is an input end, the input end penetrates through the side wall of the shielding shell and extends out of the shielding shell, the other end of the current-carrying guide rod is fixedly connected with an output port, and the output port is located outside the shielding shell. According to the invention, the magnetic ring and other elements in the current and voltage detection assembly can be packaged through the shielding housing, thereby reducing the interference of other modules in the radio frequency power supply on the detection current of the magnetic ring, forming effective electromagnetic shielding, improving the precision of current and voltage detection, and reducing the error.

Description

Technical Field

[0001] The utility model relates to the technical field of signal processing and transmission, and in particular to a current and voltage detection component and a radio frequency power supply. Background Art

[0002] When outputting power, existing RF power supplies must collect the power value at the output and compare it with the user-set power value to facilitate PID closed-loop control. However, existing RF power supplies integrate the power amplifier, combiner, and current and voltage detection components onto a single PCB. These components lack effective shielding and isolation, making them susceptible to interference and resulting in significant deviations between the measured output power and the actual output power. Utility Model Content

[0003] The purpose of the present utility model is to overcome the technical problems in that the current and voltage detection components in the radio frequency power supply of the prior art are not effectively shielded and are therefore easily interfered with, and the output detection current signal has large errors, and to provide a current and voltage detection component and a radio frequency power supply.

[0004] In a first aspect, the utility model provides a current and voltage detection component, comprising a magnetic ring, a current-carrying guide rod, a shielding shell and a detection circuit board, wherein the current-carrying guide rod passes through the magnetic ring, the shielding shell covers the outside of the magnetic ring, the detection circuit board is arranged in the shielding shell and is connected to the current-carrying guide rod through a current guide to collect voltage signals; a coil is wound around the magnetic ring, and the detection circuit board is connected to the coil to collect current signals.

[0005] The present application can encapsulate components such as a magnetic ring, a current-carrying guide rod, and a detection circuit board that are susceptible to interference using a shielded shell, thereby reducing the interference of other modules in the RF power supply on the magnetic ring detection current, thereby forming an effective electromagnetic shield and improving the accuracy of current and voltage detection; the power output value obtained is used to compare with the output value set by the user to adjust the output power of the RF power supply through PID calculation; in addition, extending the input and output ends of the current-carrying guide rod through the side wall of the shielded shell to the outside of the shielded shell does not affect the input and output functions of the current signal. After the current is input from the input end of the current-carrying guide rod, it can produce a Hall effect-like effect when passing through the interior of the magnetic ring. The induced current can be generated on the coil on the magnetic ring through magnetic field coupling, and is conducted to the detection circuit board through the lead-out branch line. By detecting the magnitude of the induced current, the current value on the current-carrying guide rod can be indirectly obtained. In addition, the voltage value on the current-carrying guide rod can also be directly measured by conducting the current guide rod to the detection circuit board through the lead-out conductor, thereby realizing the function of measuring the current and voltage values on the current-carrying guide rod respectively.

[0006] Preferably, both ends of the current-carrying guide rod extend out of the side walls of the shielding shell respectively, one end of the current-carrying guide rod is an input end, and the other end of the current-carrying guide rod is fixedly connected to an output port.

[0007] Preferably, a groove is provided on the detection circuit board, the magnetic ring is located in the groove and connected to the detection circuit board; and a gap is provided between the coil and the shielding shell.

[0008] Preferably, the device further comprises a detection output guide connected to the detection circuit board, one end of the detection output guide passes through the side wall of the shielding shell and extends out of the shielding shell.

[0009] Preferably, the flow guide passes through the current-carrying guide rod and is connected to the current-carrying guide rod by threads.

[0010] Preferably, an insulating sleeve is provided on the current-carrying guide rod, and the insulating sleeve is located between the current-carrying guide rod and the magnetic ring; a metal tube is provided between the insulating sleeve and the magnetic ring.

[0011] Preferably, a cover plate is provided at the opening of the shielding shell, and a plurality of through holes are opened on the side wall of the shielding shell.

[0012] In a second aspect, the present invention provides a radio frequency power supply, comprising a housing and an AC-DC module, a power amplifier module, a combiner module, a main control module, a filter module, a substrate and the current and voltage detection component as described above, arranged in the housing, wherein the filter module, AC-DC module, power amplifier module, combiner module, current and voltage detection component and main control module are connected in sequence, the input filter module, power amplifier module, combiner module and current and voltage detection component are arranged above the substrate, and the AC-DC module and main control module are arranged below the substrate.

[0013] Encapsulating the current and voltage detection components, especially the magnetic ring, in a shielding shell can form an effective electromagnetic shield, prevent other modules in the RF power supply from interfering with the current and voltage detection components, improve the current and voltage detection accuracy, and reduce errors.

[0014] Preferably, the input end of the current-carrying guide rod is connected to the combining module, and the detection circuit board is connected to the main control module.

[0015] Preferably, it further includes a heat dissipation fan arranged on one side of the substrate.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The present invention provides a current and voltage detection component that can encapsulate components such as a magnetic ring, a current-carrying guide rod, and a detection circuit board that are susceptible to interference using a shielded shell, thereby reducing interference from other modules in the radio frequency power supply on the magnetic ring detection current, thereby forming an effective electromagnetic shield and improving the accuracy of current and voltage detection; the power output value obtained is used to compare with the output value set by the user to adjust the output power of the radio frequency power supply through PID calculation; in addition, extending the input and output ends of the current-carrying guide rod through the side wall of the shielded shell to the outside of the shielded shell does not affect the input and output functions of the current signal. After the current is input from the input end of the current-carrying guide rod, it can produce a Hall effect-like effect when passing through the interior of the magnetic ring, and can generate an induced current on the coil on the magnetic ring through magnetic field coupling, and then conduct it to the detection circuit board through a branch line. By detecting the magnitude of the induced current, the current value on the current-carrying guide rod can be indirectly obtained. In addition, the voltage value on the current-carrying guide rod can also be directly measured by conducting it to the detection circuit board through a current guide member, thereby realizing the function of measuring the current and voltage values on the current-carrying guide rod separately;

[0018] 2. The utility model provides a radio frequency power supply, which can form an effective electromagnetic shield by encapsulating the detection element in a shielding shell, thereby preventing other modules in the radio frequency power supply from interfering with the current and voltage detection components, thereby improving the current and voltage detection accuracy and reducing errors. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of the radio frequency power supply of the present invention.

[0020] Figure 2 This is a first-perspective structural diagram of the current and voltage detection component in the radio frequency power supply of the present invention.

[0021] Figure 3 This is a second perspective structural diagram of the current and voltage detection component in the radio frequency power supply of the present utility model.

[0022] Markings in the figure:

[0023] 1. Cooling fan, 2. AC-DC module, 3. Power amplifier module, 4. Combiner module, 5. Baseboard, 6. Current and voltage detection component, 61. Current-carrying guide rod, 62. Insulation sleeve, 621. Metal tube, 63. Detection output guide, 64. Shielding shell, 641. Through hole, 65. Detection circuit board, 66. Magnetic ring, 661. Coil, 67. Output port, 68. Current guide, 69. Cover, 7. Main control module, 8. Filter module. DETAILED DESCRIPTION

[0024] The present invention will be further described in detail below with reference to specific embodiments. However, this should not be construed as limiting the scope of the present invention to the following embodiments. All technologies implemented based on the present invention fall within the scope of the present invention.

[0025] Unless otherwise specified, in the description of the specific embodiments of the present invention, the terms indicating orientation or positional relationships such as "upper," "lower," "left," "right," "center," "inside," and "outside" are based on the orientation or positional relationships shown in the accompanying drawings, or are the orientation or positional relationships in which the product / device / apparatus of the present invention is placed when it is conventionally used. These terms of orientation or positional relationships are merely for the purpose of facilitating the description of the present invention or simplifying the description of the specific embodiments to facilitate a quick understanding of the solutions by technicians, and do not indicate or imply that a particular device / component / element must have a specific orientation or be constructed and operated in a specific positional relationship. Therefore, they should not be understood as limitations on the present invention.

[0026] In addition, the expressions “first”, “second”, “third”, etc. in the terms are merely used to distinguish the description of the same or similar components, and should not be understood as emphasizing or implying the relative importance of specific components.

[0027] In addition, in the description of the embodiments of the present invention, "several", "a plurality", and "a number" represent at least 2. It can be any number such as 2, 3, 4, 5, 6, 7, 8, 9, and even more than 9.

[0028] Furthermore, in the description of the technical solutions of this utility model, unless otherwise expressly specified / defined / restricted, the terms "disposed," "installed," "connected," "connected," "provided with," "laid," and "arranged" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections. They may be welding, riveting, bolting, threading, or other commonly used connection methods in the art. Such connections may be mechanical, electrical, or communication connections; they may be direct connections, indirect connections through an intermediate medium, or internal connections between two components.

[0029] Example 1

[0030] This embodiment provides a current and voltage detection component.

[0031] like Figures 2 to 3As shown in the figure, the current and voltage detection assembly described in this embodiment includes a magnetic ring 66, a current-carrying guide rod 61 and a shielding shell 64. The magnetic ring 66 is sleeved on the current-carrying guide rod 61 and is located in the shielding shell 64. That is to say, the shielding shell 64 covers the outside of the magnetic ring 66, so as to shield the magnetic ring 66. One end of the current-carrying guide rod 61 is the input end, and the other end is the output end. Both ends of the current-carrying guide rod 61 pass through the side wall of the shielding shell 64 and extend to the outside of the shielding shell 64. The output end of the current-carrying guide rod 61 is connected to the output port 67, and the output port 67 is also located outside the shielding shell 64.

[0032] The portion of the current-carrying guide rod 61 within the shielding housing 64 can be electrically connected to the detection circuit board 65 via a current guide member 68 for voltage detection. The current-carrying guide rod 61 can pass through a magnetic ring 66 wound with a coil 661. There is no contact between the magnetic ring 66 and the current-carrying guide rod 61. In other words, a gap is formed between the magnetic ring 66 and the current-carrying guide rod 61. The coil 661 of the magnetic ring 66 can generate an induced current through magnetic field coupling, which is conducted to the detection circuit board 65 via a branch line. The current and voltage detection assembly can collect the voltage and current at the output end of the RF power supply, obtain the corresponding amplitude and phase, and transmit them to the main control module.

[0033] The current and voltage detection assembly includes a magnetic ring 66, a current-carrying guide rod 61, and a detection circuit board 65. Because it is susceptible to interference from other circuit modules within the RF power supply, it is encapsulated and isolated within a shielding shell 64, providing effective electromagnetic shielding and reducing external interference with the detection elements. Specifically, the shielding shell 64 can be made of a metal material, such as a copper alloy, aluminum alloy, or other composite alloy. It must have good electrical conductivity to absorb and attenuate external signal interference. The signal-shielded magnetic ring 66 can generate a sufficiently stable induced current, making the current detection accuracy higher; the input signal can be transmitted to the current-carrying guide rod 61 along the input end of the current-carrying guide rod 61, and then output from the output port 67. When the input current signal passes through the inside of the magnetic ring 66, it can generate an induced current on the coil 661 on the magnetic ring 66. The coil 661 can conduct the induced current to the detection circuit board 65. By detecting the magnitude of the induced current, the current value on the current-carrying guide rod 61 can be indirectly obtained. In addition, the voltage value on the current-carrying guide rod 61 can also be conducted to the detection circuit board 65 through the current guide 68 for direct measurement, which can realize the function of measuring the current and voltage values on the current-carrying guide rod 61 respectively.

[0034] In this embodiment, a detection circuit board 65 is further provided in the shielding shell 64. The detection circuit board 65 can be located below the current-carrying guide rod 61. Specifically, an opening or a groove for accommodating a magnetic ring 66 can be provided on the detection circuit board 65. The lower part of the magnetic ring 66 is embedded in the opening or the groove, which can make the structure packaged in the shielding shell 64 more compact, thereby reducing the overall volume of the current and voltage detection component, thereby making the current and voltage detection component occupy a smaller space in the RF power supply, and improving the overall integration of the device. Here, if an opening is provided on the detection circuit board 65, the opening can pass through the detection circuit board 65, and a When the magnetic ring 66 is installed, the bottom of the magnetic ring 66 does not contact the shielding shell 64, that is, there is a gap between the magnetic ring 66 and the shielding shell 64, and the current on the coil 661 of the magnetic ring 66 will not be conducted to the shielding shell 64 to cause current shunting and interference. The two sides of the magnetic ring 66 are connected and fixed to the detection circuit board 65 by gluing. If the detection circuit board 65 is provided with a groove, the groove does not pass through the detection circuit board 65, and the magnetic ring 66 can be directly embedded in the groove without direct contact with the shielding shell 64, and no current shunting and interference will be generated. A diversion guide 68 is also connected between the detection circuit board 65 and the current-carrying guide rod 61, that is, according to Figure 3 In the orientation shown in , the upper end of the current-guiding guide 68 is connected to the current-carrying guide rod 61, and the lower end of the current-guiding guide 68 is connected to the detection circuit board 65. The connection position between the current-guiding guide 68 and the current-carrying guide rod 61 is located upstream of the magnetic ring 66 according to the transmission direction of the input signal on the current-carrying guide rod 61. That is, the input current signal can first be diverted by the current-guiding guide 68 before being transmitted to the magnetic ring 66, and the signal diverted to the current-guiding guide 68 can be transmitted to the detection circuit board 65 as a detection signal, so as to facilitate the detection of the voltage on the current-carrying guide rod 61. Specifically, the current-guiding guide 68 can be a screw, which can pass through the current-carrying guide rod 61 and be connected to the detection circuit board 65, and the screw and the current-carrying guide rod 61 can be connected by a thread.

[0035] In this embodiment, a detection output conductor 63 is also connected to the detection circuit board 65. Here, the detection output conductor 63 can be understood as a metal conductive rod, which can be used to conduct the current on the detection circuit board 65 to the main control module for current detection. The number of detection output conductors 63 is 2, and the two detection output conductors 63 can respectively transmit the voltage and induced current on the detection circuit board 65 for detection. Other numbers of detection output conductors 63 can also be selected according to actual needs. One end of the detection output conductor 63 is connected to the detection circuit board 65, and the detection output conductor 63 can pass through the side wall of the shielding shell 64 and extend the other end outside the shielding shell 64, so that the detection signal on the detection circuit board 65 can be transmitted to the shielding shell 64. The effect outside the shielding shell 64 is that, specifically, the input signal can be input from the input end of the current-carrying conductor, and a part of the input signal is transmitted to the detection circuit board 65 after being diverted by the diversion guide 68 as a detection signal. The detection signal can then be transmitted along one of the detection output guides 63 to the main control board in the main control module in the RF power supply, and the other detection output guide 63 can also transmit the induced current generated by the coil 661 on the magnetic ring 66 to the main control module for current value conversion. The main control module can give a corresponding control signal according to the output current and voltage feedback and the PID operation to adjust the output power of the RF power supply; the setting direction of the detection output guide 63 can correspond to other circuit modules in the RF power supply.

[0036] Optionally, an insulating sleeve 62 is provided on the current-carrying guide rod 61. Specifically, the material of the insulating sleeve 62 can be non-metallic insulating materials such as plastic and rubber. At the connection between the current-carrying guide rod 61 and the shielding shell 64, an insulating sleeve 62 is required for insulation protection to prevent the input current signal from being input from the input end of the current-carrying guide rod 61 and then transmitted through the current-carrying guide rod 61 to the shielding shell 64, which is also a conductor, thereby causing signal loss. In addition, an insulating sleeve 62 is also required to be provided between the current-carrying guide rod 61 and the magnetic ring 66 to ensure dielectric insulation and avoid crosstalk between the currents on the current-carrying guide rod 61 and the magnetic ring 66. The current-carrying guide rod 61 carries a high-frequency and high-voltage signal, and the magnetic ring 66 carries a high-frequency and low-voltage signal. Insulation needs to be provided between the two, which can be air insulation or structural insulation. A metal tube 621 can be sleeved on the insulating sleeve 62 between the rings 66. The metal tube 621 can be used to reduce signal interference between the current-carrying guide rod 61 and the magnetic ring 66 to ensure detection accuracy; preferably, the insulating sleeve 62 can be arranged between the input end of the current-carrying guide rod 61 and the connection between the current-guiding guide 68 and the current-carrying guide rod 61 (excluding the connection between the input end and the current-guiding guide 68 and the current-carrying guide rod 61), that is, the input end of the current-carrying guide rod 61 and the connection between the current-guiding guide 68 and the current-carrying guide rod 61 do not need to be wrapped with the insulating sleeve 62, so as to facilitate the electrical connection between the current-carrying guide rod 61 and the upstream components and the current-guiding guide 68. Similarly, the insulating sleeve 62 also needs to be arranged on the current-carrying guide between the magnetic ring 66 and the output port 67 to avoid the output current signal from being transmitted to the side wall on the other side of the shielding shell 64.

[0037] Alternatively, the material of the current-carrying guide rod 61 may be copper alloy, or other types of conductor materials may be selected according to actual use needs, such as aluminum alloy, nickel alloy, etc., which is not specifically limited in the present invention.

[0038] Optionally, a cover 69 can be provided at the opening on the upper part of the shielding shell 64 to close the opening of the shielding shell 64. Specifically, the cover 69 can be connected to the shielding shell 64 by screws, so that components such as the magnetic ring 66, the current-carrying guide rod 61 and the detection circuit board 65 are encapsulated in the shielding shell 64; a plurality of through holes 641 can be provided on the side wall of the shielding shell 64, and the various components encapsulated in the shielding shell 64 can dissipate heat through the through holes 641, thereby avoiding the heat generated by the components in the shielding shell 64 during use from accumulating in the shielding shell 64.

[0039] Example 2

[0040] This embodiment provides a radio frequency power supply.

[0041] like Figures 1 to 3As shown in , the RF power supply described in this embodiment may include a substrate 5 and the current and voltage detection component described in Example 1, and the current and voltage detection component 6 is arranged on the substrate 5.

[0042] In this embodiment, the RF power supply also includes an AC-DC module 2, a power amplifier module 3, a combiner module 4, a main control module 7 and a filter module 8, and each of the above modules is integrated on a substrate 5; specifically, the substrate 5 can be a water-cooled plate, and the various modules installed on the water-cooled plate can dissipate heat through the water cooling effect of the water-cooled plate.

[0043] In the RF power supply, the input end of the current-carrying guide rod 61 is connected to the combiner module 4, and the output end is connected to the output end of the RF power supply. One end of the detection output guide 63 is located in the shielding shell 64 and connected to the detection circuit board 65. The other end extends out of the shielding shell 64 and passes through the water cooling plate to connect to the main control module 7 below.

[0044] Optionally, in order to further improve the heat dissipation effect of the RF power supply, a heat dissipation fan 1 can be set on one side of the substrate 5. The heat dissipation fan 1 combined with the water cooling plate can enhance the heat dissipation effect of each module in the RF power supply, solving the technical problem of poor heat dissipation effect under high-integration installation of each module in the RF power supply.

[0045] It should be noted that the specific structure and function of the current and voltage detection component described in this embodiment are consistent with the current and voltage detection component described in Example 1, and will not be described in detail in this embodiment.

[0046] In summary, the current and voltage detection component of the present invention can encapsulate components that are susceptible to interference, such as the magnetic ring, current-carrying guide rod, and detection circuit board, using a shielding shell, thereby reducing the interference of other modules in the RF power supply on the magnetic ring detection current, thereby forming an effective electromagnetic shielding and improving the accuracy of current and voltage detection; the obtained power output value is used to compare with the output value set by the user to adjust the output power of the RF power supply through PID calculation; in addition, extending the input and output ends of the current-carrying guide rod through the side wall of the shielding shell to the outside of the shielding shell does not affect the input and output functions of the current signal. After the current is input from the input end of the current-carrying guide rod, it can produce a Hall effect-like effect when passing through the inside of the magnetic ring. The induced current can be generated on the coil on the magnetic ring through magnetic field coupling, and is conducted to the detection circuit board through the lead-out branch line. By detecting the magnitude of the induced current, the current value on the current-carrying guide rod can be indirectly obtained. In addition, the voltage value on the current-carrying guide rod can also be conducted to the detection circuit board through the current-conducting conductor for direct measurement, which can realize the function of measuring the current and voltage values on the current-carrying guide rod respectively; the radio frequency power supply of the utility model encapsulates the detection element through a shielding shell to form an effective electromagnetic shielding, which can prevent other modules in the radio frequency power supply from interfering with the current and voltage detection components, thereby improving the current and voltage detection accuracy and reducing errors.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A current and voltage detection component, characterized in that: It comprises a magnetic ring (66), a current-carrying guide rod (61), a shielding shell (64) and a detection circuit board (65), wherein: The current-carrying guide rod (61) passes through the magnetic ring (66), and the shielding shell (64) is covered outside the magnetic ring (66); The detection circuit board (65) is arranged in the shielding shell (64) and connected to the current-carrying guide rod (61) via a current guide member (68) to collect voltage signals; A coil (661) is wound around the magnetic ring (66), and the detection circuit board (65) is connected to the coil (661) to collect current signals.

2. The current and voltage detection component according to claim 1, characterized in that: Both ends of the current-carrying guide rod (61) extend out of the side walls of the shielding shell (64), one end of the current-carrying guide rod (61) is an input end, and the other end of the current-carrying guide rod (61) is fixedly connected to an output port (67).

3. The current and voltage detection component according to claim 1, characterized in that: A groove is provided on the detection circuit board (65), the magnetic ring (66) is located in the groove and connected to the detection circuit board; and a gap is provided between the coil (661) and the shielding shell (64).

4. The current and voltage detection component according to claim 1, characterized in that: It also includes a detection output guide (63) connected to the detection circuit board (65), one end of the detection output guide (63) passes through the side wall of the shielding shell (64) and extends outside the shielding shell (64).

5. The current and voltage detection component according to claim 1, characterized in that: The flow guide (68) passes through the current-carrying guide rod (61) and is connected to the current-carrying guide rod (61) via threads.

6. The current and voltage detection component according to claim 1, characterized in that: An insulating sleeve (62) is sleeved on the current-carrying guide rod (61), and the insulating sleeve (62) is located between the current-carrying guide rod (61) and the magnetic ring (66); a metal tube (621) is provided between the insulating sleeve (62) and the magnetic ring (66).

7. The current and voltage detection component according to any one of claims 1 to 5, characterized in that: A cover plate (69) is provided at the opening of the shielding shell (64), and a plurality of through holes (641) are provided on the side wall of the shielding shell (64).

8. A radio frequency power supply, characterized in that: The invention comprises a housing and an AC-DC module (2), a power amplifier module (3), a combiner module (4), a main control module (7), a filter module (8), a substrate (5) and a current and voltage detection component (6) according to any one of claims 1 to 6, wherein the filter module (8), the AC-DC module (2), the power amplifier module (3), the combiner module (4), the current and voltage detection component (6) and the main control module (7) are connected in sequence; the filter module (8), the power amplifier module (3), the combiner module (4) and the current and voltage detection component (6) are arranged above the substrate (5), and the AC-DC module (2) and the main control module (7) are arranged below the substrate (5).

9. The radio frequency power supply according to claim 8, characterized in that: The input end of the current-carrying guide rod (61) is connected to the combining module (4), and the detection circuit board (65) is connected to the main control module (7).

10. The radio frequency power supply according to claim 8 or 9, characterized in that: It also includes a heat dissipation fan (1) arranged on one side of the base plate (5).

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