Probe station for testing thermoelectric refrigeration chip

Abstract

The utility model discloses a probe station for testing a thermoelectric refrigeration chip, which comprises a probe station main body, a temperature control assembly and a display screen, one end above the probe station main body is provided with a fixing mechanism for fixing the chip, one end above the probe station main body is fixedly connected with a slide rail, and the slide rail is fixedly connected with the probe station main body. One end of the upper part of the probe station main body is slidably connected with a microscope, one end of the side surface of the microscope is provided with a probe assembly, and one end of the upper part of the probe station main body is provided with a sample table for placing a chip; according to the utility model, through the fixing mechanism and the tightness adjusting mechanism, the chip can be fixed, and the tightness degree when the chip is fixed can be changed after the chip is fixed, thereby preventing the chip from being subjected to overlarge pressure or stress, preventing the chip from being physically damaged when the chip is fixed, and preventing the microstructure in the chip from being changed and the performance of the chip from being changed. Therefore, the test result is more accurate, and the event performance of the chip can be truly reflected.

Description

Technical Field

[0001] The utility model relates to the technical field of probe station equipment, in particular to a probe station for testing thermoelectric cooling chips. Background Art

[0002] Because general thermoelectric cooling chips require a probe station during testing, and general probe stations cannot adjust the tightness when fixing the chip. If it is fixed too tightly, the thermoelectric cooling chip may be subjected to excessive pressure or stress, which may cause physical damage to the chip. Even if the chip is not directly damaged due to over-tightening, excessive pressure may cause changes in the microstructure inside the chip, thereby changing its performance. This will make the test results inaccurate and unable to truly reflect the actual performance of the chip. Inaccurate testing may lead to misjudgment of product performance, which in turn affects product design and production, so further improvement is needed. Utility Model Content

[0003] The purpose of the present invention is to provide a probe station for testing a thermoelectric cooling chip in order to solve the problems raised by the above-mentioned background technology, thereby solving the problems raised by the above-mentioned background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a probe station for testing thermoelectric cooling chips, comprising: a probe station main body, a temperature control component and a display screen, a fixing mechanism for fixing the chip is provided at one end above the probe station main body, a slide rail is fixedly connected to one end above the probe station main body, a microscope is slidably connected to one end above the probe station main body, a probe assembly is provided at one end on the side of the microscope, a sample table for placing the chip is provided at one end above the probe station main body, a tightness adjustment mechanism is provided at one end on the side of the fixing mechanism for adjusting the tightness of the chip when fixing it, the temperature control component, the display screen, the microscope and the probe assembly are all prior art.

[0005] As a further solution of the present invention: the fixing mechanism includes a connecting plate slidably connected to one end above the probe station main body, one end of the side surface of the connecting plate is rotatably connected to a rotating block, one end of the side surface of the rotating block is rotatably connected to a roller, one end above the connecting plate is fixedly connected to a fixed block, one end of the side surface of the fixed block is screwed to a threaded rod, one end of the side surface of the threaded rod is fixedly connected to a handle, one end of the side surface of the threaded rod is rotatably connected to an inclined block, one end below the rotating block is fixedly connected to a limiting column, one end of the side surface of the limiting column is rotatably connected to a fixing plate, and one end of the side surface of the rotating block is fixedly connected to a second connecting frame.

[0006] As a further solution of the present invention: the fixing plate includes a rotating ring rotatably connected to one end of the side of the limiting column, one end of the side of the rotating ring is fixedly connected to the fixing plate body, and the upper end of the fixing plate body is fixedly connected to the first connecting frame.

[0007] As a further solution of the present invention: the tension adjustment mechanism includes a telescopic rod arranged at one end of the side of the fixing mechanism, a third connecting frame is fixedly connected to the upper end of the telescopic rod, a limit plate is fixedly connected to the lower end of the telescopic rod, a fourth connecting frame is fixedly connected to one end of the side of the limit plate, a spring is sleeved on one end of the side of the telescopic rod, a ring is sleeved on one end of the side of the telescopic rod, and a threaded ring is screwed on one end of the side of the telescopic rod.

[0008] As a further solution of the present invention: a groove for the inclined block to slide is provided at one upper end of the fixed block, and a threaded hole for the threaded rod to rotate is provided at one side end of the fixed block.

[0009] As a further solution of the present invention: a thread matching the threaded ring is provided at one end of the side surface of the telescopic rod, and the diameters of the limiting plate and the collar are slightly larger than the diameter of the spring.

[0010] As a further solution of the present invention: the limiting columns and the fixing plates are provided in two groups, which are symmetrically arranged at both ends below the rotating block.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] In the utility model, the chip can be fixed by the fixing mechanism and the tension adjustment mechanism, and the tightness of the chip can be changed after fixation, thereby preventing the chip from being subjected to excessive pressure or stress, preventing the chip from being physically damaged when fixed, and avoiding changes in the microstructure inside the chip and changing its performance, so that the test results are more accurate and can truly reflect the actual performance of the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0014] Figure 2 It is a structural diagram of the fixing mechanism in the utility model;

[0015] Figure 3 This is a schematic diagram of the split structure of the fixing mechanism in the utility model;

[0016] Figure 4 It is a schematic diagram of the disassembled structure of the tension adjustment mechanism in the utility model.

[0017] In the figure: 1. Probe station body; 2. Temperature control component; 3. Display screen; 4. Fixing mechanism; 41. Connecting plate; 42. Rotating block; 43. Roller; 44. Fixing block; 45. Threaded rod; 46. Handle; 47. Bevel block; 48. Limiting column; 49. Fixing plate; 491. Rotating ring; 492. Fixing plate body; 493. First connecting frame; 410. Second connecting frame; 5. Slide rail; 6. Microscope; 7. Probe assembly; 8. Sample stage; 9. Tension adjustment mechanism; 91. Telescopic rod; 92. Third connecting frame; 93. Limiting plate; 94. Fourth connecting frame; 95. Spring; 96. Ring; 97. Threaded ring. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the devices or components referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense. For example, they can be fixedly connected, detachably connected, or connected in an integral manner; they can be mechanically connected or electrically connected; they can be directly connected, indirectly connected through an intermediate medium, or they can be internal communication between two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances. The following describes the embodiments of the present invention based on its overall structure.

[0020] Reference Figures 1 to 4In an embodiment of the present invention, a probe station for testing a thermoelectric cooling chip includes: a probe station main body 1, a temperature control component 2 and a display screen 3. A fixing mechanism 4 for fixing the chip is provided at one end above the probe station main body 1, a slide rail 5 is fixedly connected to one end above the probe station main body 1, a microscope 6 is slidably connected to one end above the probe station main body 1, a probe assembly 7 is provided at one end on the side of the microscope 6, a sample stage 8 for placing the chip is provided at one end above the probe station main body 1, and a tightness adjustment mechanism 9 is provided at one end on the side of the fixing mechanism 4 for adjusting the tightness when fixing the chip.

[0021] The fixing mechanism 4 includes a connecting plate 41 that is slidably connected to one end above the probe station main body 1, one end of the side of the connecting plate 41 is rotatably connected to a rotating block 42, one end of the side of the rotating block 42 is rotatably connected to a roller 43, one end of the top of the connecting plate 41 is fixedly connected to a fixed block 44, one end of the side of the fixed block 44 is screwed to a threaded rod 45, one end of the side of the threaded rod 45 is fixedly connected to a handle 46, one end of the side of the threaded rod 45 is rotatably connected to an inclined block 47, one end of the side of the threaded rod 45 is fixedly connected to a limiting column 48 at the bottom end of the rotating block 42, one end of the side of the limiting column 48 is rotatably connected to a fixing plate 49, one end of the side of the rotating block 42 is fixedly connected to a second connecting frame 410, and there are two groups of limiting columns 48 and fixing plates 49, which are symmetrically arranged at both ends below the rotating block 42.

[0022] The fixing piece 49 includes a rotating ring 491 rotatably connected to one end of the side of the limiting column 48 , a fixing piece body 492 is fixedly connected to one end of the side of the rotating ring 491 , and a first connecting frame 493 is fixedly connected to the upper end of the fixing piece body 492 .

[0023] The above scheme is adopted: the fixing mechanism 4 is slid above the probe station body 1, thereby changing the position of the fixing mechanism 4 and changing different positions according to chips of different sizes. The threaded rod 45 is driven to rotate by rotating the handle 46, thereby pushing the side inclined block 47 to move toward the roller 43. Under the thrust of the inclined block 47, the roller 43 drives the rotating block 42 to rotate, so that the time limit column 48 tilts downward, and the fixing plate 49 will be pressed on the chip. The fixing plate 49 can be rotated so that it can be pressed on different positions of the chip.

[0024] The tension adjustment mechanism 9 includes a telescopic rod 91 arranged at one end of the side of the fixing mechanism 4, a third connecting frame 92 is fixedly connected to the upper end of the telescopic rod 91, a limiting plate 93 is fixedly connected to the lower end of the telescopic rod 91, a fourth connecting frame 94 is fixedly connected to one end of the side of the limiting plate 93, a spring 95 is sleeved on one end of the side of the telescopic rod 91, a ring 96 is sleeved on one end of the side of the telescopic rod 91, and a threaded ring 97 is screwed on one end of the side of the telescopic rod 91.

[0025] The above solution is adopted: by rotating the threaded ring 97 to push the ring 96 below, the ring 96 squeezes the spring 95 below, so that the spring 95 applies a force downward, so that the fixing plate 49 is fixed tighter, and the tightness of the fixing plate 49 is changed by the different positions of the threaded ring 97 rotating downward.

[0026] A groove for the inclined block 47 to slide is provided at one end of the upper portion of the fixed block 44 , and a threaded hole for the threaded rod 45 to rotate is provided at one end of the side surface of the fixed block 44 .

[0027] One end of the side of the telescopic rod 91 is provided with a thread that matches the threaded ring 97 . The diameters of the limiting plate 93 and the collar 96 are slightly larger than the diameter of the spring 95 .

[0028] With the above solution, the diameters of the limiting plate 93 and the collar 96 are slightly larger than the diameter of the spring 95 , so that the collar 96 can be driven to move by the position of the threaded ring 97 , thereby squeezing the spring 95 .

[0029] The working principle of the present invention is as follows: the fixing mechanism 4 slides above the probe station body 1, thereby changing the position of the fixing mechanism 4 and changing different positions according to chips of different sizes, and the threaded rod 45 is driven to rotate by rotating the handle 46, thereby pushing the side inclined block 47 to move toward the roller 43, and the roller 43 drives the rotating block 42 to rotate under the thrust of the inclined block 47, so that the time limit column 48 tilts downward, and the fixing plate 49 will be pressed above the chip. The fixing plate 49 can be rotated so that it can be pressed at different positions of the chip, and then the threaded ring 97 is rotated to push the lower ring 96, and the lower spring 95 is squeezed by the ring 96, so that the spring 95 applies a force downward, so that the fixing plate 49 is fixed tighter, and the tightness of the fixing plate 49 is changed by the different positions of the threaded ring 97 rotating downward.

[0030] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A probe station for testing thermoelectric cooling chips, comprising: A probe station body (1), a temperature control component (2) and a display screen (3), characterized in that a fixing mechanism (4) for fixing a chip is provided at one end above the probe station body (1), a slide rail (5) is fixedly connected to one end above the probe station body (1), a microscope (6) is slidably connected to one end above the probe station body (1), a probe component (7) is provided at one end on the side of the microscope (6), a sample table (8) for placing a chip is provided at one end above the probe station body (1), and a tightness adjustment mechanism (9) is provided at one end on the side of the fixing mechanism (4) for adjusting the tightness of the chip when fixing it.

2. A probe station for testing a thermoelectric cooling chip according to claim 1, characterized in that: The fixing mechanism (4) includes a connecting plate (41) slidably connected to an upper end of the probe station body (1), a side end of the connecting plate (41) is rotatably connected to a rotating block (42), a side end of the rotating block (42) is rotatably connected to a roller (43), an upper end of the connecting plate (41) is fixedly connected to a fixing block (44), a side end of the fixing block (44) is screwed to a threaded rod (45), a side end of the threaded rod (45) is fixedly connected to a handle (46), a side end of the threaded rod (45) is rotatably connected to an inclined block (47), a lower end of the rotating block (42) is fixedly connected to a limiting column (48), a side end of the limiting column (48) is rotatably connected to a fixing plate (49), and a side end of the rotating block (42) is fixedly connected to a second connecting frame (410).

3. A probe station for testing a thermoelectric cooling chip according to claim 2, characterized in that: The fixing plate (49) includes a rotating ring (491) rotatably connected to one end of the side of the limiting column (48); one end of the side of the rotating ring (491) is fixedly connected to a fixing plate body (492); and one end above the fixing plate body (492) is fixedly connected to a first connecting frame (493).

4. A probe station for testing a thermoelectric cooling chip according to claim 1, characterized in that: The tension adjustment mechanism (9) comprises a telescopic rod (91) arranged at one end of the side of the fixing mechanism (4); the upper end of the telescopic rod (91) is fixedly connected to a third connecting frame (92); the lower end of the telescopic rod (91) is fixedly connected to a limiting plate (93); the side end of the limiting plate (93) is fixedly connected to a fourth connecting frame (94); the side end of the telescopic rod (91) is sleeved with a spring (95); the side end of the telescopic rod (91) is sleeved with a collar (96); and the side end of the telescopic rod (91) is screwed with a threaded ring (97).

5. A probe station for testing a thermoelectric cooling chip according to claim 2, characterized in that: A groove for the sliding of the inclined block (47) is provided at one upper end of the fixed block (44), and a threaded hole for the rotation of the threaded rod (45) is provided at one side end of the fixed block (44).

6. A probe station for testing a thermoelectric cooling chip according to claim 4, characterized in that: One end of the side of the telescopic rod (91) is provided with a thread that matches the threaded ring (97), and the diameters of the limiting plate (93) and the collar (96) are slightly larger than the diameter of the spring (95).

7. A probe station for testing a thermoelectric cooling chip according to claim 2, characterized in that: The limiting columns (48) and the fixing plates (49) are provided in two groups, and are symmetrically arranged at both ends below the rotating block (42).

Images