Photoresist coating equipment for tuning fork crystal production

Abstract

The utility model relates to the technical field of tuning fork crystal processing, in particular to photoresist coating equipment for tuning fork crystal production, which comprises a photoresist coating machine body, the photoresist coating machine body comprises a coating processing chamber, a waste gas purification component is mounted on the rear side of the top of the photoresist coating machine body, and the waste gas purification component is mounted on the rear side of the top of the photoresist coating machine body. The waste gas purification assembly comprises a conveying pipe and a fixing frame, a gas inlet groove is formed in the front surface of the conveying pipe, and a second motor is mounted on the inner wall of the conveying pipe through bolts. By arranging the waste gas purification assembly and the coating processing chamber, waste gas generated by photoresist coating in the coating processing chamber can be sucked under the working state of the fan, is conveyed into the fixed frame through the conveying pipe, is adsorbed by activated carbon particles on the mesh convex plate after passing through the mesh convex plate, and is monitored in real time by the gas concentration sensor; and finally, clean gas is discharged, integrated purification operation is completed, a large purification system does not need to be additionally built, and various use requirements are met.

Description

Technical Field

[0001] The utility model relates to the technical field of tuning fork crystal processing, in particular to a photoresist coating device used for tuning fork crystal production. Background Art

[0002] Tuning fork crystals, as an important component of electronic systems, are widely used in clock control, wireless communications, and consumer electronics. During the production and processing process, photoresist coating is one of the essential steps. Uniformly coating the photoresist on the sample surface is crucial for the preparation of fine patterns.

[0003] In the actual processing process, the photoresist coating process includes steps such as applying photoresist, drying, leveling and imprinting. During these steps, the organic solvents in the positive and negative photoresists will evaporate, producing harmful gases such as benzene and its homologues, phenol, etc. Traditional factories will be equipped with large-scale exhaust gas purification systems for treatment, but for small processing equipment or single equipment, they often do not have the function of integrated purification and cannot meet various usage requirements. At the same time, they cannot perform intelligent monitoring. When the purification capacity fails, the exhaust gas continues to be discharged, increasing safety hazards and having certain limitations. In order to solve the above technical problems, we have designed a photoresist coating equipment for tuning fork crystal production. Utility Model Content

[0004] The purpose of the utility model is to provide a photoresist coating device for tuning fork crystal production, which has the advantage of integrated purification and solves the problem that the photoresist coating device does not have the function of integrated purification, cannot meet various usage requirements, and cannot perform intelligent monitoring. When the purification capacity fails, the waste gas continues to be discharged, which increases safety hazards.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a photoresist coating device for tuning fork crystal production, comprising a photoresist coater body, the photoresist coater body comprising a coating processing chamber, an exhaust gas purification component installed on the rear side of the top of the photoresist coater body, the exhaust gas purification component comprising a transmission pipe and a fixed frame, an air inlet groove is provided on the front surface of the transmission pipe, a second motor is bolted to the inner wall of the transmission pipe, an output end of the second motor is fixedly connected to a movable leaf, the inner cavity of the fixed frame is sequentially mounted with a mesh convex plate, an air collecting hopper and a fan from bottom to top, a first motor is bolted to the right side of the fixed frame, an output end of the first motor is fixedly connected to a screw, a displacement seat is provided on the surface threaded sleeve of the screw, an movable roller is mounted on one side of the displacement seat, and an electromagnetic valve and a gas concentration sensor are respectively mounted on the top of the air collecting hopper.

[0006] Preferably, the front end of the transmission tube passes through the coating processing chamber, and the outer ring of the transmission tube is fixedly connected to the connection point of the photoresist coater body.

[0007] Preferably, the movable leaf is located at the front side of the transmission tube, and one end of the transmission tube away from the coating processing chamber is connected to the bottom of the inner cavity of the fixed frame.

[0008] Preferably, an auxiliary rod is fixedly connected to the front side of the inner cavity of the fixed frame, and the surface sliding sleeve of the auxiliary rod is provided with an auxiliary seat with the same specifications as the displacement seat, and the front and rear ends of the movable roller are movably connected to the displacement seat and the auxiliary seat respectively.

[0009] Preferably, the movable roller is located on the top of the mesh convex plate, and the number of the gas collecting hoppers is several.

[0010] Preferably, the detection end of the gas concentration sensor passes through the inner cavity of the gas collecting hopper, the outer side of the gas collecting hopper is fixedly connected to an auxiliary frame, and the outer ring of the auxiliary frame is fixedly connected to the inner wall of the fixed frame.

[0011] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0012] The utility model has the advantage of integrated purification by arranging an exhaust gas purification component and a coating processing chamber. When the fan is in working state, the exhaust gas generated by photoresist coating in the coating processing chamber can be attracted, and the exhaust gas is transmitted to the fixed frame through the transmission pipe. After passing through the mesh convex plate, the exhaust gas is adsorbed by the activated carbon particles on the mesh convex plate and is monitored in real time by the gas concentration sensor. Finally, the clean gas is discharged to complete the integrated purification operation without the need to build an additional large-scale purification system, which meets various usage requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a three-dimensional schematic diagram of the structure of the utility model;

[0014] Figure 2 This is a rear perspective view of the structure of the utility model;

[0015] Figure 3 This is a three-dimensional schematic diagram of the exhaust gas purification component of the utility model;

[0016] Figure 4 This is a cutaway perspective view of the exhaust gas purification component of the present utility model;

[0017] Figure 5 This is a three-dimensional schematic diagram of the waste gas purification component of the utility model when separated.

[0018] In the figure: 1. Photoresist coater body; 2. Exhaust gas purification component; 201. Transmission pipe; 202. Air inlet slot; 203. Fixed frame; 204. First motor; 205. Fan; 206. Movable blade; 207. Second motor; 208. Movable roller; 209. Screw; 210. Displacement seat; 211. Gas collecting hopper; 212. Mesh convex plate; 213. Auxiliary frame; 214. Solenoid valve; 215. Gas concentration sensor; 3. Coating processing chamber. DETAILED DESCRIPTION

[0019] See also Figure 1-Figure 5 A photoresist coating device for tuning fork crystal production includes a photoresist coating machine body 1, which includes a coating processing chamber 3. An exhaust gas purification component 2 is installed on the rear side of the top of the photoresist coating machine body 1. The exhaust gas purification component 2 includes a transmission pipe 201 and a fixed frame 203. By setting the transmission pipe 201, the coating processing chamber 3 and the fixed frame 203 can be connected, and then the exhaust gas in the coating processing chamber 3 can be guided into the fixed frame 203 through the transmission pipe 201. The front surface of the transmission pipe 201 is provided with an air inlet groove 202. By setting the air inlet slot 202, the exhaust gas transmission demand can be met. The inner wall bolt of the transmission pipe 201 is installed with a second motor 207. The output end of the second motor 207 is fixedly connected with a movable leaf 206. By setting the movable leaf 206 and the second motor 207, the movable leaf 206 can be continuously rotated when the second motor 207 is in working state, thereby periodically blocking the air inlet slot 202, which can effectively avoid the air inlet being fixed and affecting the uniformity of the photoresist coating. The inner cavity of the fixed frame 203 is sequentially installed with mesh convex holes from bottom to top. The plate 212, the gas collecting hopper 211 and the fan 205 are provided. By providing the gas collecting hopper 211, the gas can be discharged upward in a concentrated manner, and then the gas concentration sensor 215 can be used to detect the gas concentration. By providing the mesh convex plate 212, the contact area between the top activated carbon particles and the rising exhaust gas can be increased by utilizing its own inclined design, and the overall purification and adsorption efficiency is better. The right bolt of the fixing frame 203 is installed with the first motor 204. The output end of the first motor 204 is fixedly connected with a screw 209. The surface thread sleeve of the screw 209 A displacement seat 210 is provided. By arranging a screw 209 and the displacement seat 210, a screw transmission function can be achieved. Under the drive of the first motor 204, the screw 209 rotates forward and backward to cause the displacement seat 210 to move horizontally left and right. A movable roller 208 is installed on one side of the displacement seat 210. A solenoid valve 214 and a gas concentration sensor 215 are respectively installed on the top of the gas collecting hopper 211. By arranging the solenoid valve 214, the purified gas can be discharged upward in an open state, and the gas can be prevented from being discharged at will in a closed state.

[0020] See also Figure 1 and Figure 3, the front end of the transmission tube 201 passes through the coating processing chamber 3, and the outer ring of the transmission tube 201 is fixedly connected to the connection of the photoresist coater body 1;

[0021] See also Figure 1 and Figure 3 , the movable leaf 206 is located at the front side of the transmission tube 201, and the end of the transmission tube 201 away from the coating processing chamber 3 is connected to the bottom of the inner cavity of the fixed frame 203;

[0022] See also Figure 4 , the front side of the inner cavity of the fixed frame 203 is fixedly connected with an auxiliary rod, the surface sliding sleeve of the auxiliary rod is provided with an auxiliary seat with the same specifications as the displacement seat 210, and the front and rear ends of the movable roller 208 are movably connected with the displacement seat 210 and the auxiliary seat respectively;

[0023] See also Figure 4 and Figure 5 , the movable roller 208 is located on the top of the mesh convex plate 212, and the number of the gas collecting hopper 211 is several;

[0024] See also Figure 4 and Figure 5 The detection end of the gas concentration sensor 215 passes through the inner cavity of the gas collecting hopper 211. The outer side of the gas collecting hopper 211 is fixedly connected with an auxiliary frame 213. The outer ring of the auxiliary frame 213 is fixedly connected to the inner wall of the fixed frame 203. By setting the auxiliary frame 213, the gas collecting hopper 211 can be covered and installed;

[0025] The front side of the fixed frame 203 is fixedly connected with a support plate, and the surface of the support plate is fixedly connected to the connection of the photoresist coater body 1. The presence of the support plate can effectively improve the installation stability of the fixed frame 203;

[0026] The movable roller 208 includes a crossbar and a plurality of rollers, wherein both ends of the crossbar are movably connected to the displacement seat 210. The rollers are fixedly sleeved on the crossbar and adapted to the top of the mesh convex plate 212. When the movable roller 208 moves with the first motor 204, the rollers rotate, thereby moving the activated carbon particles on the mesh convex plate 212, making the activated carbon particles active, effectively preventing the activated carbon particles from contacting each other at the same position and failing to evenly absorb exhaust gas.

[0027] The photoresist coating machine body 1 is equipped with a controller, and the fan 205, the first motor 204, the solenoid valve 214, the gas concentration sensor 215 and the second motor 207 are all electrically connected to the controller, and the detection signal of the gas concentration sensor 215 is transmitted to the controller;

[0028] In actual application, in order to prevent the exhaust gas from corroding the second motor 207, a protective cover is fixedly installed on the inner wall of the transmission pipe 201 and outside the second motor 207;

[0029] In actual application, both sides of the screw 209 are designed with smooth surfaces, and the smooth surfaces are movably connected to the fixed frame 203 through sealed bearings. This design not only improves the rotational stability of the screw 209, but also prevents exhaust gas from leaking out through the connection between the screw 209 and the fixed frame 203.

[0030] In actual application, in order to prevent dust and impurities from adhering to the blades of the fan 205 when the device is stationary, a dustproof net can be fixedly installed on the top of the fixing frame 203.

[0031] When in use, all components are in the initial state, the inner cavity of the fixed frame 203 and the top of the mesh convex plate 212 are piled with an appropriate amount of activated carbon particles, the preset gas concentration sensor 215 detects the gas concentration value, the tuning fork crystal is coated with photoresist in the coating process chamber 3, and the fan 205, the second motor 207 and the first motor 204 are synchronously controlled to work, wherein the fan 205 can make the exhaust gas in the coating process chamber 3 be transmitted to the fixed frame 203 through the air inlet groove 202 and the transmission pipe 201, the exhaust gas passes through the mesh convex plate 212 and is adsorbed and purified by the activated carbon particles, and the purified gas is discharged upward and outward under the concentrated action of the gas collecting hopper 211, and the second motor 207 drives the movable leaf 206 to rotate continuously, which can periodically enter the air inlet groove 202. Partial blocking is performed to avoid the air intake position being fixed and affecting the uniformity of the photoresist coating. The first motor 204 drives the screw 209 to rotate when working forward and reverse, so that the displacement seat 210 can be continuously displaced left and right, driving the movable roller 208 to displace. At the same time, the movable roller 208 rotates and moves the activated carbon particles above the mesh convex plate 212, so that the overall adsorption and purification uniformity is better. After the equipment is used for a long time, the activated carbon particles on the mesh convex plate 212 are saturated with adsorption. At this time, the gas concentration sensor 215 will detect that the gas concentration flowing through the gas collecting hopper 211 reaches a preset value. The gas concentration sensor 215 sends a signal to the controller on the photoresist coater body 1, and the controller automatically controls the solenoid valve 214 to close, which can effectively prevent the escape of unpurified exhaust gas and has higher overall safety.

[0032] To sum up: the photoresist coating equipment used for tuning fork crystal production, by setting up the exhaust gas purification component 2 and the coating processing chamber 3, solves the problem that the photoresist coating equipment does not have the integrated purification function, cannot meet various usage requirements, and cannot perform intelligent monitoring. When the purification capacity fails, the exhaust gas continues to be discharged, increasing safety hazards.

Claims

1. A photoresist coating device for producing tuning fork crystals, comprising a photoresist coating machine body (1), characterized in that: The photoresist coating machine body (1) includes a coating processing chamber (3), an exhaust gas purification component (2) is installed on the rear side of the top of the photoresist coating machine body (1), and the exhaust gas purification component (2) includes a transmission pipe (201) and a fixed frame (203), an air inlet groove (202) is opened on the front surface of the transmission pipe (201), a second motor (207) is bolted to the inner wall of the transmission pipe (201), an output end of the second motor (207) is fixedly connected to a movable leaf (206), and the inner cavity of the fixed frame (203) is provided with an air inlet groove (202). A mesh convex plate (212), a gas collecting hopper (211) and a fan (205) are sequentially installed from bottom to top; a first motor (204) is installed on the right bolt of the fixing frame (203); a screw rod (209) is fixedly connected to the output end of the first motor (204); a displacement seat (210) is provided on the surface thread sleeve of the screw rod (209); a movable roller (208) is installed on one side of the displacement seat (210); and a solenoid valve (214) and a gas concentration sensor (215) are respectively installed on the top of the gas collecting hopper (211).

2. The photoresist coating device for tuning fork crystal production according to claim 1, characterized in that: The front end of the transmission tube (201) penetrates into the coating processing chamber (3), and the outer ring of the transmission tube (201) is fixedly connected to the connection point of the photoresist coating machine body (1).

3. The photoresist coating device for tuning fork crystal production according to claim 1, characterized in that: The movable leaf (206) is located at the front side of the transmission tube (201), and one end of the transmission tube (201) away from the coating processing chamber (3) is connected to the bottom of the inner cavity of the fixed frame (203).

4. The photoresist coating device for tuning fork crystal production according to claim 1, characterized in that: An auxiliary rod is fixedly connected to the front side of the inner cavity of the fixed frame (203), and a sliding sleeve is provided on the surface of the auxiliary rod with an auxiliary seat having the same specifications as the displacement seat (210). The front and rear ends of the movable roller (208) are movably connected to the displacement seat (210) and the auxiliary seat respectively.

5. The photoresist coating device for tuning fork crystal production according to claim 1, characterized in that: The movable roller (208) is located on the top of the mesh convex plate (212), and the number of the gas collecting hoppers (211) is several.

6. The photoresist coating device for tuning fork crystal production according to claim 1, characterized in that: The detection end of the gas concentration sensor (215) penetrates the inner cavity of the gas collecting hopper (211), the outer side of the gas collecting hopper (211) is fixedly connected to an auxiliary frame (213), and the outer ring of the auxiliary frame (213) is fixedly connected to the inner wall of the fixed frame (203).

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