Modularized boron tail gas expanding and discharging device

Abstract

The utility model relates to boron diffusion production equipment, particularly provides a modularized boron diffusion tail gas exhaust device, and aims to solve the problems that boron diffusion tail gas treatment equipment in the prior art is easy to block and inconvenient to maintain. In order to achieve the purpose, the modularized boron expansion tail gas discharging device comprises a cooling module, a liquid washing module, a filtering module and a sealing unit, and the cooling module is suitable for being connected with a tail gas outlet and cooling tail gas; the liquid washing module is communicated with the cooling module, and the air outlet end of the cooling module is below the liquid level of the liquid washing module; the filtering module is arranged on one side of the air outlet end of the liquid washing module; the air outlet end of the filtering module is suitable for communicating with a vacuum pump; the sealing unit is provided with a maintenance port, and the cooling module, the filtering module and the liquid washing module are all arranged in the sealing unit and are sequentially arranged at intervals in the direction towards the maintenance port. Through the scheme, the cleanliness of tail gas treatment is improved, the vacuum pump is prevented from being blocked, the maintenance efficiency is improved, and the maintenance difficulty is reduced.

Description

Technical Field

[0001] The utility model relates to boron diffusion production equipment, and specifically provides a modular boron diffusion tail exhaust device. Background Art

[0002] As photovoltaic manufacturing moves toward multi-TW scale, the details of large-scale production require detailed evaluation, considering not only efficiency and cost but also device losses to ensure sustainable production. Currently, TOPCon cell technology is one of the mainstream technology paths for N-type cells, and major battery manufacturers are continuously expanding TOPCon cell production. Boron diffusion is a key process that influences cell efficiency. During the manufacturing process, a boron source, BCl₃ or BBr₃, is introduced and reacts with oxygen, oxidizing to form B₂O₃. B₂O₃ reacts with Si to form B. At high temperatures, B₂O₃ diffuses across the silicon wafer surface driven by concentration differences. B₂O₃, an intermediate product in the reaction, is discharged with the high-temperature exhaust gas, which can easily clog the exhaust gas bottle and vacuum pump, causing abnormal pump speeds that affect the diffusion process and ultimately the efficiency of the cell. Therefore, to ensure the long-term and stable operation of the diffusion machine, the exhaust gas needs to be modified to reduce the maintenance cycle of the vacuum pump and simplify the maintenance procedures.

[0003] Accordingly, the art requires a new exhaust emission device to solve the above problems. Utility Model Content

[0004] The utility model aims to solve the above technical problem, that is, to solve the problem in the prior art that boron diffusion tail gas treatment equipment is easily clogged and inconvenient to maintain.

[0005] In a first aspect, the present invention provides a modular boron tail-row expansion device, comprising:

[0006] A cooling module, wherein the cooling module is adapted to be connected to an exhaust gas outlet and to cool the exhaust gas;

[0007] a liquid washing module, wherein the liquid washing module is in communication with the cooling module and an air outlet of the cooling module is below the liquid level of the liquid washing module;

[0008] A filter module, the filter module is arranged on one side of the gas outlet end of the liquid washing module, and the gas outlet end of the filter module is suitable for communicating with a vacuum pump;

[0009] The sealing unit is provided with a maintenance port, and the cooling module, the filter module and the liquid washing module are all provided in the sealing unit and arranged in sequence and at intervals along a direction toward the maintenance port.

[0010] In a specific embodiment of the above-mentioned modular boron expansion tail exhaust device, the cooling module includes a cooling bottle and a cooling coil, the cooling coil is arranged in the cooling bottle, the inlet end of the cooling coil is suitable for connecting with the exhaust gas outlet, and the outlet end of the cooling coil is positioned below the liquid level of the liquid washing module.

[0011] In a specific embodiment of the modular boron expansion tail exhaust device, the cooling module further includes a one-way valve, which is disposed on the cooling coil.

[0012] In a specific embodiment of the above-mentioned modular boron expansion tail exhaust device, the liquid washing module includes an adsorption bottle, which is provided with an air outlet. The adsorption bottle is suitable for containing coolant, and the air outlet end of the cooling coil extends into the adsorption bottle and is configured to be lower than the coolant liquid level.

[0013] In a specific embodiment of the above-mentioned modular boron expansion tail exhaust device, the filter module includes a filter element fixing unit and a filter element, the filter element fixing unit is provided with a filter channel, the filter element is arranged in the filter channel, the inlet end of the filter channel is connected to the air outlet, and the air outlet end of the filter channel is suitable for connecting to a vacuum pump.

[0014] In a specific embodiment of the modular boron expansion tail exhaust device, the filter element is at least one of a glass fiber filter cotton filter element, a synthetic fiber filter cotton filter element, and a non-woven filter cotton filter element.

[0015] In a specific embodiment of the above-mentioned modular boron expansion tail exhaust device, the sealing unit includes a sealing cavity and a sealing flange, the sealing cavity is provided with an installation port to be configured as the maintenance port, and the sealing flange is provided on the installation port and abuts against the cooling module so that the cooling module, the filter module and the liquid washing module are sealed and abutted against each other.

[0016] In a specific embodiment of the modular boron expansion tail exhaust device, an observation window is further provided on the sealed cavity, and an observation range of the observation window corresponds to the cooling bottle.

[0017] In a specific embodiment of the modular boron expansion tail exhaust device, the cooling module further includes an exhaust pipe, the air inlet end of the exhaust pipe is connected to the filter channel, and the exhaust end of the exhaust pipe is suitable for connecting to a vacuum pump.

[0018] In a specific embodiment of the modular boron expansion tail exhaust device, the diameters of the exhaust pipe, the filter channel, and the air outlet decrease in sequence.

[0019] Under the condition of adopting the above technical solution, the utility model discloses a modular boron expansion tail exhaust device, which is achieved by modularly installing a cooling module, a liquid washing module and a filter module in a sealing unit, and a maintenance port is provided on the sealing unit. The cooling module, the filter module and the liquid washing module are all provided in the sealing unit and are arranged in sequence and spaced apart in the direction toward the maintenance port. Through the above solution, the tail gas generated by the boron diffusion is first cooled to reduce its temperature, and then enters the liquid washing module for liquid adsorption, and finally the tail gas is further filtered through the filter module, and finally enters the vacuum pump, thereby improving the cleanliness of the tail gas treatment and avoiding clogging of the vacuum pump; during maintenance, since the cooling module, the liquid washing module and the filter module are all modularly installed, it is only necessary to open the maintenance port and perform maintenance on the module that needs to be repaired, thereby improving maintenance efficiency and reducing maintenance difficulty. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The preferred embodiments of the present invention are described below with reference to the accompanying drawings, in which:

[0021] Figure 1 This is a schematic diagram of the structure of each module of the tail exhaust device in the utility model;

[0022] Figure 2 It is a structural diagram of the sealing unit in the utility model.

[0023] Among them, 1. Cooling module, 2. Liquid washing module, 3. Filtration module, 4. Sealing unit, 5. Maintenance port, 6. Cooling bottle, 7. Cooling coil, 9. Adsorption bottle, 10. Air outlet, 11. Filter element fixing unit, 12. Filter element, 13. Filtration channel, 14. Sealing cavity, 15. Sealing flange, 16. Observation window, 17. Exhaust pipe. DETAILED DESCRIPTION

[0024] The preferred embodiments of the present invention are described below with reference to the accompanying drawings and in conjunction with battery production equipment. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not used to limit the scope of protection of the present invention. Those skilled in the art can make adjustments as needed to adapt to specific applications. For example, although the description is combined with battery production equipment, this is not restrictive, and those skilled in the art can apply the present invention to any other device with exhaust emissions as needed, as long as the device needs to clean the exhaust and improve maintenance efficiency.

[0025] It should be noted that in the description of this utility model, terms such as "upper," "lower," "left," "right," "inner," and "outer" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. This is for ease of description only and does not indicate or imply that the relevant devices or components must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, ordinal numbers such as "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] Furthermore, it should be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "installation" and "connection" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0027] Furthermore, in order to more clearly demonstrate the core technical solution of the present invention, the description of the well-known structures of the battery production equipment is omitted in the following description. However, this omission is only for the convenience of description and does not mean that the battery production equipment can be without these structures.

[0028] like Figure 1-2 As shown, the utility model proposes a modular boron expansion tail exhaust device, including a cooling module 1, a liquid washing module 2, a filter module 3 and a sealing unit 4, the cooling module 1 is suitable for connecting to the exhaust outlet and cooling the exhaust gas; the liquid washing module 2 is connected to the cooling module 1 and the air outlet end of the cooling module 1 is below the liquid level of the liquid washing module 2; the filter module 3 is arranged on one side of the air outlet end of the liquid washing module 2, and the air outlet end of the filter module 3 is suitable for connecting to a vacuum pump; the sealing unit 4 is provided with a maintenance port 5, the cooling module 1, the filter module 3 and the liquid washing module 2 are all arranged in the sealing unit 4, and are arranged in sequence and at intervals along the direction toward the maintenance port 5.

[0029] In this embodiment, battery production equipment is used as an example for explanation. During the battery production process, a boron source BCl3 or BBr3 is introduced and reacts with oxygen to be oxidized to generate B2O3. B2O3 reacts with Si to generate B. Boron diffusion affects the battery efficiency. The production process generates high-temperature exhaust gas, which is discharged through the exhaust gas outlet. It is first connected to the cooling module 1 to cool the high-temperature exhaust gas. The cooled exhaust gas will enter the liquid washing module 2, and the exhaust gas is introduced below the liquid level of the coolant in the liquid washing module 2. The exhaust gas is cleaned by the coolant, and the particulate impurities are adsorbed by the coolant. After the exhaust gas emerges from the liquid surface, it enters the filter module 3 through the outlet end of the liquid washing module 2. The filter module 3 can filter out the fine impurities carried by the air flow and the water vapor carried after the liquid washing. After passing through the filter module 3, it is connected to the vacuum pump to achieve clean treatment of the exhaust gas.

[0030] Furthermore, the cooling module 1, the filter module 3, and the liquid washing module 2 are installed in the sealing unit 4. The sealing unit 4 is provided with a maintenance port 5, which can be opened or closed. The cooling module 1, the filter module 3, and the liquid washing module 2 are arranged in sequence along the axis corresponding to the direction in which the maintenance port 5 is opened. It can be understood that the cooling module 1, the filter module 3, and the liquid washing module 2 are arranged in sequence along the straight line perpendicular to the maintenance port 5. When maintenance is required, the maintenance port 5 is opened, and each module can be maintained in sequence, thereby improving maintenance efficiency. The cooling module 1 in this embodiment can adopt various forms such as conduction cooling and liquid cooling, which are not limited here, and the appropriate cooling method can be selected according to the actual application scenario.

[0031] Based on the above embodiment, the cooling module 1 specifically adopts a structural form in which a cooling coil 7 is arranged in the cooling bottle 6. The inlet end of the cooling coil 7 is used to connect to the exhaust gas outlet of the battery production equipment. The cooling coil 7 is arranged in a surrounding manner in the cooling bottle 6, and other winding forms can also be adopted to increase the cooling contact area and accelerate the cooling efficiency.

[0032] It should be noted that the cooling method of the cooling module 1 is not unique, and cooling water circulation cooling, gas cooling, heat pipe cooling and phase change material cooling can be adopted. The appropriate cooling method is selected according to actual needs.

[0033] Furthermore, based on the above embodiment, a one-way valve is installed on the cooling coil 7 to allow exhaust gas to be discharged along the cooling coil 7 only in the exhaust direction, thus preventing exhaust gas from being sucked back into the battery production equipment and causing internal contamination. The installation position of the one-way valve is selected according to the actual installation space of the equipment.

[0034] On the basis of the above embodiment, the liquid washing module 2 specifically adopts an adsorption bottle 9, in which coolant is contained, an air outlet 10 is provided at the upper end of the adsorption bottle 9, and the cooling coil 7 extends below the internal coolant level of the adsorption bottle 9. The cooled exhaust gas discharged from the cooling coil 7 is discharged upward from the bottom of the coolant. The coolant cleans the exhaust gas, and the particulate impurities in the exhaust gas will be adsorbed by the coolant. After the exhaust gas is discharged from the coolant, it will pass through the air outlet 10 on the adsorption bottle 9 and connect with the filter module 3 for subsequent filtration.

[0035] On the basis of the above embodiment, the filtration module 3 cooperates with the liquid washing module 2. Specifically, the filter element 12 fixing unit 11 of the filtration module 3 is connected to the top of the adsorption bottle 9. The filter element 12 fixing unit 11 has a filtration channel 13. The filtration channel 13 is used to install the filter element 12. The filtration channel 13 can be a through hole formed on the filter element 12 fixing unit 11, or it can be a cylindrical component installed on the filter element 12 fixing unit 11. The inlet end of the filtration channel 13 is connected to the air outlet 10 on the adsorption bottle 9, and the outlet end of the filtration channel 13 is connected to the vacuum pump for discharging the purified exhaust gas.

[0036] It should be noted that the filter element 12 in the above embodiment is optional, and at least one of a glass fiber filter cotton filter element 12, a synthetic fiber filter cotton filter element 12, and a non-woven filter cotton filter element 12 can be used. The appropriate filter element 12 can be selected according to the application scenario and the type of exhaust pollutants.

[0037] On the basis of the above embodiments, the cooling module 1, the filtering module 3 and the liquid washing module 2 are arranged in the sealing unit 4. Specifically, the cooling module 1, the filtering module 3 and the liquid washing module 2 are installed in the sealing cavity 14. The shape of the sealing cavity 14 is not limited. An installation port is provided on the sealing cavity 14 as a maintenance port 5. During maintenance, each module can be removed from the installation port and then maintained. A sealing flange 15 is provided at the installation port to improve the overall sealing of the sealing cavity 14. The sealing flange 15 is detachably connected and can be disassembled for easy maintenance. When the sealing flange 15 is locked, it will abut against the cooling module 1, so that the cooling module 1, the filtering module 3 and the liquid washing module 2 can fit tightly with each other, and the corresponding connecting interfaces between the modules can also maintain better sealing.

[0038] On the basis of the above embodiment, an observation window 16 is further provided on the side wall of the sealed cavity 14. The viewing range of the observation window 16 corresponds to the cooling bottle 6, so as to observe whether there are too many exhaust impurities attached and accumulated inside the cooling coil 7 so as to clean them in time. The position and shape of the observation window 16 can be flexibly selected into a suitable structural form according to actual installation needs, and are not limited here.

[0039] On the basis of the above embodiment, an exhaust pipe 17 is further provided in the cooling module 1, through which the filter channel 13 is connected to the vacuum pump. The exhaust pipe 17 can be provided to clean impurities in the exhaust pipe 17 separately after the filter module 3, thereby improving convenience.

[0040] On the basis of the above embodiment, the diameters of the exhaust pipe 17, the filter channel 13 and the air outlet 10 are reduced at once, so that the exhaust pipe 17, the filter channel 13 and the air outlet 10 can be aligned more accurately in the vertical position during installation.

[0041] Thus far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art may make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will fall within the scope of protection of the present invention.

Claims

1. A modular boron expansion tail exhaust device, characterized in that: The modular boron expansion tail exhaust device comprises: A cooling module (1), wherein the cooling module (1) is suitable for connecting to the exhaust gas outlet and cooling the exhaust gas; a liquid washing module (2), the liquid washing module (2) being in communication with the cooling module (1) and the air outlet end of the cooling module (1) being below the liquid level of the liquid washing module (2); A filter module (3), the filter module (3) being arranged on one side of the air outlet end of the liquid washing module (2), the air outlet end of the filter module (3) being suitable for communicating with a vacuum pump; A sealing unit (4) is provided with a maintenance port (5), the cooling module (1), the filter module (3) and the liquid washing module (2) are all provided in the sealing unit (4) and are arranged in sequence and spaced apart in a direction toward the maintenance port (5).

2. The modular boron expansion tail exhaust device according to claim 1, characterized in that: The cooling module (1) comprises a cooling bottle (6) and a cooling coil (7), wherein the cooling coil (7) is arranged in the cooling bottle (6), the inlet end of the cooling coil (7) is adapted to be in communication with the exhaust gas outlet, and the outlet end of the cooling coil (7) is positioned below the liquid level of the liquid washing module (2).

3. The modular boron expansion tail exhaust device according to claim 2, characterized in that: The cooling module (1) further comprises a one-way valve, which is arranged on the cooling coil (7).

4. The modular boron expansion tail exhaust device according to claim 3, characterized in that: The liquid washing module (2) comprises an adsorption bottle (9), the adsorption bottle (9) is provided with an air outlet (10), the adsorption bottle (9) is suitable for containing cooling liquid, and the air outlet end of the cooling coil (7) extends into the adsorption bottle (9) and is configured to be lower than the cooling liquid level.

5. The modular boron expansion tail exhaust device according to claim 4, characterized in that: The filter module (3) comprises a filter element fixing unit (11) and a filter element (12); the filter element fixing unit (11) is provided with a filter channel (13); the filter element (12) is arranged in the filter channel (13); the inlet end of the filter channel (13) is communicated with the air outlet (10); and the air outlet end of the filter channel (13) is suitable for communicating with a vacuum pump.

6. The modular boron expansion tail exhaust device according to claim 5, characterized in that: The filter element (12) is at least one of a glass fiber filter cotton filter element, a synthetic fiber filter cotton filter element, and a non-woven filter cotton filter element.

7. The modular boron expansion tail exhaust device according to claim 6, characterized in that: The sealing unit (4) comprises a sealing cavity (14) and a sealing flange (15); the sealing cavity (14) is provided with a mounting port configured as the maintenance port (5); the sealing flange (15) is provided on the mounting port and abuts against the cooling module (1) so that the cooling module (1), the filter module (3) and the liquid washing module (2) are sealed against each other.

8. The modular boron expansion tail exhaust device according to claim 7, characterized in that: An observation window (16) is also provided on the sealed cavity (14), and the observation range of the observation window (16) corresponds to the cooling bottle (6).

9. The modular boron expansion tail exhaust device according to claim 8, characterized in that: The cooling module (1) further comprises an exhaust pipe (17), the air inlet end of the exhaust pipe (17) being in communication with the filter channel (13), and the exhaust end of the exhaust pipe (17) being suitable for being in communication with a vacuum pump.

10. The modular boron expansion tail exhaust device according to claim 9, characterized in that: The diameters of the exhaust pipe (17), the filter channel (13) and the air outlet (10) decrease in sequence.

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