Silicon wafer sorting and feeding device with guiding function
By designing a silicon wafer sorting and loading device with guide function, using double-head ball screws and guide plate guide silicon wafers, and through industrial camera detection, the position offset and defect problems of silicon wafers are solved, precise loading and sorting are achieved, and the quality and production efficiency of silicon wafers are improved.
Patent Information
- Application Number
- CN202520001334.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-02
- Publication Date
- 2025-08-22
- Estimated Expiration
- 2035-01-02
AI Technical Summary
The existing feeding devices do not have the guiding function, which leads to the position of the silicon wafer, affects the loading accuracy, and may have microscopic defects and impurities, affecting product quality.
A silicon wafer sorting and loading device with guide function was designed, and the silicon wafer is guided by double-headed ball screws and guide plates, and detected by industrial cameras to remove defective silicon wafers to achieve accurate loading.
Ensure that the silicon wafer is accurately guided to the predetermined channel, avoid position deviation, improve loading accuracy, eliminate defective silicon wafers, ensure the quality of the silicon wafers, and improve working efficiency.
Smart Images
Figure CN223254160U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of sorting machines, in particular to a silicon wafer sorting and loading device with a guiding function. Background Art
[0002] Silicon wafers are mainly used in the photovoltaic and semiconductor fields. The production process of silicon wafers includes crystal pulling, cutting, squaring, grinding, slicing, cleaning, chamfering, etching, chemical mechanical polishing, etc. In order to improve efficiency, the use of loading devices is indispensable in each process.
[0003] Currently, commonly used loading devices generally include conveyor belts and robots. The conveyor belt is used to transfer silicon wafers, and then the robot is used to transfer the silicon wafers to the required position. However, existing loading devices generally do not have a guiding function. During loading, it is easy to cause the position of the silicon wafers to shift, affecting the loading accuracy. In addition, the silicon wafers may have microscopic defects, lattice defects and impurities. If the silicon wafers are not sorted, the defective silicon wafers will cause the product quality to decrease in the subsequent production process.
[0004] Therefore, to address the above-mentioned problem of lack of sorting and guiding functions, a silicon wafer sorting and loading device with guiding function can be designed. Utility Model Content
[0005] In order to overcome the problem of lack of sorting and guiding functions.
[0006] The technical solution of the utility model is as follows: a silicon wafer sorting and loading device with a guiding function comprises a frame, in which equidistantly distributed loading rollers are rotatably connected; a guiding adjustment component and a pushing component are also included; a sorting receiving tray is fixedly connected to the middle of the front end of the frame, and a guiding adjustment component is fixedly connected to the right end of the frame; the guiding adjustment component comprises a bearing fixing seat, a double-headed ball screw is rotatably connected between the bearing fixing seat and another bearing fixing seat; a screw pair symmetrically distributed front and back is installed on the outer side of the double-headed ball screw; the left end of the guiding adjustment component is rotated from the front to the back The front guide plate and the rear guide plate are installed in sequence at the back, and the sorting cylinders symmetrically distributed on the left and right are installed in the frame; the pushing assembly is installed at the retractable end of the rear side of the sorting cylinder, and the pushing assembly includes a pushing plate and a pushing rod. The upper end of the pushing plate is fixedly connected with a clamping block, the front end of the pushing rod is fixedly connected with a first magnetic block, and the rear end of the pushing plate is installed with a second magnetic block magnetically connected to the first magnetic block. The upper end of the frame is installed with a sorting detection frame, the lower end of the top of the sorting detection frame is installed with an upper industrial camera, and the upper end of the bottom of the frame is installed with a lower industrial camera aligned with the upper industrial camera.
[0007] Preferably, the silicon wafer is placed on the loading roller in the frame, and the double-headed ball screw between the bearing fixing seat and the other bearing fixing seat is rotated. The screw pair converts the rotary motion into linear motion, driving the front guide plate and the rear guide plate to move inward synchronously to guide the front and rear sides of the silicon wafer. The loading roller is started, driving the silicon wafer to move to the left. When passing through the sorting and detection frame, the silicon wafer is photographed under the action of the upper industrial camera and the lower industrial camera, and the photo is fed back to the external control system. The control system determines whether the silicon wafer has a problem based on the photo. If there is a problem, when passing through the pushing assembly, the control system controls the sorting cylinder to retract, and the first magnetic block at the front end of the pushing rod moves forward and is adsorbed by the second magnetic block, driving the pushing plate and the card block forward until the silicon wafer is pushed onto the sorting receiving tray. The silicon wafer without problem continues to move to the left to realize the loading of the silicon wafer.
[0008] Preferably, a card slot matching the card block is provided at the front end of the rear guide plate, and the upper end of the bottom of the sorting and receiving tray is flush with the feeding roller and the upper end of the frame.
[0009] Preferably, the lower ends of the front guide plate and the rear guide plate away from the guide adjustment assembly are fixedly connected to pulleys.
[0010] Preferably, a motor is fixedly connected to the lower end of the frame, a first sprocket is installed on the outside of the motor output shaft, a second sprocket is installed on the outside of the rear end of the feeding roller, and a chain is meshed and connected to the outside of the first sprocket and the second sprocket.
[0011] Preferably, the two bearing fixing seats are fixedly connected to the right end of the frame and are symmetrically distributed about the front and rear of the frame. Both ends of the double-headed ball screw are provided with threads, and the length of the threads is greater than 1 / 4 of the width of the frame.
[0012] Preferably, the upper industrial camera and the lower industrial camera are staggered with the feeding roller, and the shooting width of the upper industrial camera and the lower industrial camera is greater than the width of the frame.
[0013] Preferably, two screw pairs are provided, and the screw pairs are fixedly connected to the front guide plate and the rear guide plate respectively.
[0014] The beneficial effects of the present invention are as follows: it can effectively guide silicon wafers accurately to the predetermined conveying channel, and by guiding the front and rear sides of the silicon wafers, it can avoid the position of the silicon wafers from being offset, while preventing damage caused by collisions, effectively ensuring the accuracy of the loading position, and can be flexibly adjusted according to silicon wafers of different sizes and types to adapt to different guiding requirements. At the same time, it has a sorting function, which ensures the quality of the silicon wafers by removing defective silicon wafers, and realizes the rapid and orderly sorting and loading of silicon wafers, thereby improving work efficiency and reducing manual intervention. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1Shown is a schematic diagram of the first three-dimensional structure of the silicon wafer sorting and loading device with a guiding function of the present invention;
[0016] Figure 2 Shown is a schematic diagram of the second three-dimensional structure of the silicon wafer sorting and loading device with a guiding function of the present invention;
[0017] Figure 3 Shown is a schematic diagram of the cross-sectional three-dimensional structure of the silicon wafer sorting and loading device with a guiding function of the present invention;
[0018] Figure 4 Shown is a schematic diagram of the three-dimensional structure of the pushing component in the silicon wafer sorting and loading device with a guiding function of the present invention.
[0019] Explanation of the accompanying reference numerals: 1. Frame; 2. Loading roller; 3. Sorting receiving tray; 41. Fixed seat with bearing; 42. Double-ended ball screw; 43. Screw pair; 5. Front guide plate; 6. Rear guide plate; 7. Sorting cylinder; 81. Push plate; 82. Push rod; 83. Block; 84. First magnetic block; 85. Second magnetic block; 9. Sorting detection frame; 10. Upper industrial camera; 11. Lower industrial camera; 12. Pulley; 13. Motor; 14. First sprocket; 15. Second sprocket; 16. Chain. DETAILED DESCRIPTION
[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0021] See also Figure 1-Figure 4 The utility model provides an embodiment: a silicon wafer sorting and loading device with a guiding function, comprising a frame 1, in which equidistantly distributed loading rollers 2 are rotatably connected; further comprising a guiding adjustment component and a pushing component, a sorting receiving tray 3 is fixedly connected to the middle of the front end of the frame 1, and a guiding adjustment component is fixedly connected to the right end of the frame 1, the guiding adjustment component comprises a bearing fixing seat 41, a double-headed ball screw 42 is rotatably connected between the bearing fixing seat 41 and another bearing fixing seat 41; a screw pair 43 symmetrically distributed front and back is installed on the outer side of the double-headed ball screw 42; the left end of the guiding adjustment component is sequentially installed with front and rear rollers 43 from front to back. Guide plate 5 and rear guide plate 6, the frame 1 is equipped with a sorting cylinder 7 that is symmetrically distributed on the left and right; the telescopic end of the rear side of the sorting cylinder 7 is equipped with a pushing assembly, the pushing assembly includes a pushing plate 81 and a pushing rod 82, the upper end of the pushing plate 81 is fixedly connected with a clamping block 83, the front end of the pushing rod 82 is fixedly connected with a first magnetic block 84, the rear end of the pushing plate 81 is equipped with a second magnetic block 85 that is magnetically connected to the first magnetic block 84, the upper end of the frame 1 is equipped with a sorting detection frame 9, the lower end of the top of the sorting detection frame 9 is equipped with an upper industrial camera 10, and the upper end of the bottom of the frame 1 is equipped with a lower industrial camera 11 that is aligned with the upper industrial camera 10.
[0022] See also Figure 1-Figure 2 and Figure 4 14 and 15. In this embodiment, a slot matching the card block 83 is provided at the front end of the rear guide plate 6, and the upper end of the bottom of the sorting receiving tray 3 is flush with the feeding roller 2 and the upper end of the frame 1. The lower ends of the front guide plate 5 and the rear guide plate 6 on the side away from the guide adjustment component are fixedly connected to the pulley 12, and the left ends of the front guide plate 5 and the rear guide plate 6 are supported by the pulley 12 to ensure that the positions of the front guide plate 5 and the rear guide plate 6 do not shift during movement. A motor 13 is fixedly connected to the lower end of the frame 1, and a first sprocket 14 is installed on the outer side of the output shaft of the motor 13. A second sprocket 15 is installed on the outer side of the rear end of the feeding roller 2. The first sprocket 14 and the second sprocket 15 are meshed with a chain 16 on the outer sides. The first sprocket 14, the second sprocket 15 and the chain 16 are used to transmit the power of the motor 13 to the feeding roller 2, driving the feeding roller 2 to rotate.
[0023] See also Figure 1 In this embodiment, the two bearing fixing seats 41 are fixedly connected to the right end of the frame 1 and are symmetrically distributed about the front and rear of the frame 1. Both ends of the double-headed ball screw 42 are provided with threads, and the length of the threads is greater than 1 / 4 of the width of the frame 1. The upper industrial camera 10 and the lower industrial camera 11 are staggered with the feeding roller 2, and the shooting width of the upper industrial camera 10 and the lower industrial camera 11 is greater than the width of the frame 1, ensuring that the upper and lower ends of the silicon wafer can be photographed and inspected at the same time, and the inspection effect is more comprehensive. There are two screw pairs 43, and the screw pairs 43 are fixedly connected to the front guide plate 5 and the rear guide plate 6 respectively.
[0024] During operation, the silicon wafer is placed on the feeding roller 2 in the frame 1, and the double-headed ball screw 42 between the bearing fixing seat 41 and the other bearing fixing seat 41 is rotated. The screw pair 43 converts the rotary motion into linear motion, driving the front guide plate 5 and the rear guide plate 6 to move inward synchronously. The pulley 12 slides on the upper end of the bottom of the frame 1. The front guide plate 5 and the rear guide plate 6 guide the front and rear sides of the silicon wafer. The motor 13 is started. Under the action of the first sprocket 14, the second sprocket 15 and the chain 16, the feeding roller 2 rotates, driving the silicon wafer to move to the left. When it is at the sorting inspection rack 9, the upper industrial camera 10 and the lower industrial camera 11 take pictures of the silicon wafers, and the pictures are fed back to the external control system. The control system determines whether there is a problem with the silicon wafer based on the pictures. If there is a problem, when passing the pushing assembly, the control system controls the sorting cylinder 7 to retract, and the first magnetic block 84 at the front end of the pushing rod 82 moves forward and is adsorbed by the second magnetic block 85, driving the pushing plate 81 and the clamping block 83 forward until the silicon wafer is pushed onto the sorting receiving tray 3. The silicon wafers without problems continue to move to the left to realize the loading of the silicon wafers.
[0025] Through the above steps, the silicon wafers can be effectively and accurately guided to the predetermined conveying channel, and by guiding the front and back sides of the silicon wafers, the position of the silicon wafers can be avoided from being offset. Flexible adjustments can be made according to silicon wafers of different sizes and types. At the same time, the system has a sorting function, which ensures the quality of the silicon wafers by removing defective silicon wafers to solve the problem of lack of sorting and guiding functions.
[0026] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the purpose of the present invention.
Claims
1. A silicon wafer sorting and loading device with a guiding function, comprising a frame (1), wherein equidistantly distributed loading rollers (2) are rotatably connected to the frame (1); characterized in that: The invention also includes a guide adjustment component and a pusher component. The middle part of the front end of the frame (1) is fixedly connected to the sorting receiving plate (3). The right end of the frame (1) is fixedly connected to the guide adjustment component. The guide adjustment component includes a bearing fixing seat (41). A double-headed ball screw (42) is rotatably connected between the bearing fixing seat (41) and another bearing fixing seat (41); a screw pair (43) symmetrically distributed in front and back is installed on the outer side of the double-headed ball screw (42); a front guide plate (5) and a rear guide plate (6) are installed in sequence from front to back on the left end of the guide adjustment component, and a sorting cylinder (7) symmetrically distributed in left and right is installed in the frame (1); A push assembly is installed at the telescopic end of the rear side of the selection cylinder (7), and the push assembly includes a push plate (81) and a push rod (82). The upper end of the push plate (81) is fixedly connected to a clamping block (83), the front end of the push rod (82) is fixedly connected to a first magnetic block (84), and the rear end of the push plate (81) is installed with a second magnetic block (85) magnetically connected to the first magnetic block (84). The upper end of the frame (1) is installed with a sorting detection frame (9), the lower end of the top of the sorting detection frame (9) is installed with an upper industrial camera (10), and the upper end of the bottom of the frame (1) is installed with a lower industrial camera (11) aligned with the upper industrial camera (10) in an upper and lower direction.
2. The silicon wafer sorting and loading device with a guiding function according to claim 1, characterized in that: A card slot matching the card block (83) is provided at the front end of the rear guide plate (6), and the upper end of the bottom of the sorting receiving tray (3) is flush with the upper end of the feeding roller (2) and the frame (1).
3. The silicon wafer sorting and loading device with a guiding function according to claim 1, characterized in that: The lower ends of the front guide plate (5) and the rear guide plate (6) on the side away from the guide adjustment assembly are both fixedly connected to a pulley (12).
4. The silicon wafer sorting and loading device with a guiding function according to claim 1, characterized in that: The lower end of the frame (1) is fixedly connected to a motor (13), a first sprocket (14) is installed on the outer side of the output shaft of the motor (13), a second sprocket (15) is installed on the outer side of the rear end of the feeding roller (2), and a chain (16) is meshed and connected to the outer sides of the first sprocket (14) and the second sprocket (15).
5. The silicon wafer sorting and loading device with a guiding function according to claim 1, characterized in that: The two bearing fixing seats (41) are fixedly connected to the right end of the frame (1) and are symmetrically distributed front to back about the frame (1). Both ends of the double-ended ball screw (42) are provided with threads, and the length of the threads is greater than 1 / 4 of the width of the frame (1).
6. The silicon wafer sorting and loading device with a guiding function according to claim 1, characterized in that: The upper industrial camera (10) and the lower industrial camera (11) are staggered with the feeding roller (2), and the shooting width of the upper industrial camera (10) and the lower industrial camera (11) is greater than the width of the frame (1).
7. The silicon wafer sorting and loading device with a guiding function according to claim 1, characterized in that: Two screw pairs (43) are provided, and the screw pairs (43) are fixedly connected to the front guide plate (5) and the rear guide plate (6), respectively.