Transfer device and anisotropic conductive adhesive film attaching equipment

Abstract

The utility model provides a transfer device and anisotropic conductive adhesive film attaching equipment, the transfer device comprises a support, an adsorption part, a negative pressure part, an air pressure control module and a driving part, the adsorption part is arranged on the support, and the adsorption part is used for adsorbing a to-be-transferred part; the negative pressure piece is communicated with the adsorption part so as to provide adsorption force for the adsorption part; the air pressure control module is used for controlling the negative pressure value at the adsorption part, so that the adsorption force at the adsorption part reaches a preset threshold value; the driving piece is connected with the support so as to drive the support to drive the to-be-transferred piece on the adsorption part to move to the preset discharging position, the stability and reliability of adsorption are guaranteed through negative pressure control, the risk that the to-be-transferred piece falls in the transferring process is reduced, the to-be-transferred piece can be accurately placed at the preset position, the production precision and quality are guaranteed, and the production efficiency is improved. And the production yield of products is improved.

Description

Technical Field

[0001] The present application relates to the field of electronic packaging technology, and in particular to a transfer device and anisotropic conductive film attaching equipment. Background Art

[0002] In the anisotropic conductive film attaching process, a transfer device is required to suck up the anisotropic conductive film and transfer it to the preset discharge position. The anisotropic conductive film includes but is not limited to sheathed optical cables. However, in the actual production process, sheathed optical cables are prone to unstable adsorption and cannot be accurately placed in the preset discharge position, which reduces the production yield of the product. Utility Model Content

[0003] The present application discloses a transfer device and anisotropic conductive film attaching equipment, which can improve the production yield of products.

[0004] In order to achieve the above-mentioned purpose, the present application discloses a transfer device, which includes:

[0005] Bracket;

[0006] An adsorption portion, the adsorption portion is provided on the bracket and is used to adsorb the part to be transferred;

[0007] a negative pressure member, the negative pressure member being in communication with the adsorption portion to provide adsorption force to the adsorption portion;

[0008] an air pressure control module, the air pressure control module being used to control the negative pressure value at the adsorption portion so that the adsorption force at the adsorption portion reaches a preset threshold;

[0009] A driving member is connected to the bracket to drive the bracket to drive the part to be transferred on the adsorption part to move to a preset discharge position.

[0010] Optionally, the transfer device further includes an air supply pipe, the air supply pipe including a first end and a second end, the first end is communicated with the adsorption portion, and the second end is communicated with the negative pressure member;

[0011] The air pressure control module includes a first control component, an air pressure regulating valve and an air pressure sensing component. The air pressure regulating valve and the air pressure sensing component are electrically connected to the first control component respectively. The air pressure regulating valve is connected in series to the air supply pipe. The air pressure sensing component is arranged in the air supply pipe. The air pressure sensing component is used to sense the air pressure value in the air supply pipe and can transmit the sensed air pressure value to the first control component. The first control component is used to control the opening degree of the air pressure regulating valve according to the air pressure value sensed by the air pressure sensing component to adjust the air pressure in the air supply pipe.

[0012] Optionally, the gas supply pipeline is further provided with an electromagnetic control valve, and the electromagnetic control valve is used to control the opening and closing of the gas supply pipeline;

[0013] The transfer device is also provided with a position sensing component electrically connected to the electromagnetic control valve. The position sensing component is used to sense whether the part to be transferred has reached the preset discharge position and can transmit the sensed signal to the electromagnetic control valve. The electromagnetic control valve is used to control the opening and closing of the air supply pipeline according to the signal sensed by the position sensing component.

[0014] Optionally, the transfer device also includes a second control member, which is electrically connected to the driving member and the position sensing member respectively, and the second control member is used to control the driving member to drive the bracket to move when the position sensing member senses that the part to be transferred has not reached the preset discharge position, so as to adjust the part to be transferred to the preset discharge position.

[0015] Optionally, the distance between the first end and the second end of the air supply pipe is 0.5 cm-0.6 cm.

[0016] Optionally, the air supply pipe is a rigid pipe and is fixedly arranged on the bracket.

[0017] Optionally, the adsorption portion includes a disc-shaped suction nozzle.

[0018] Optionally, the diameter of the disc-shaped suction nozzle is 0.325cm-0.355cm.

[0019] Optionally, the adsorption portion is made of silicone rubber.

[0020] The present application also provides an anisotropic conductive film attaching device, which includes the above-mentioned transfer device.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] When it is necessary to transfer the part to be transferred, the negative pressure part is connected to the adsorption part and starts to provide adsorption force to the adsorption part, so that the adsorption part can firmly adsorb the part to be transferred, and the air pressure control module plays a role, accurately controlling the negative pressure value at the adsorption part to ensure that the adsorption force at the adsorption part reaches the preset threshold value, ensuring that the part to be transferred will not accidentally fall off during the transfer process, and then the driving part starts the movement of the driving bracket, thereby driving the adsorption part and the part to be transferred adsorbed thereon to move together, so as to accurately move the part to be transferred to the preset discharge position, so that the entire transfer process is automated and production efficiency is improved. The precise negative pressure control ensures the stability and reliability of adsorption, reduces the risk of objects falling during the transfer process, and can accurately place the part to be transferred to the preset position, ensuring the accuracy and quality of production and improving the production yield of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 is a schematic diagram of a transfer device provided in an embodiment of the present application;

[0025] Figure 2 This is a front view of the transfer device provided in an embodiment of the present application;

[0026] Figure 3 This is a front view of a transfer device with a negative pressure member provided in an embodiment of the present application;

[0027] Figure 4 This is a schematic diagram of the transfer device provided in an embodiment of the present application from another perspective.

[0028] Description of main reference numerals

[0029] 1- Transfer device;

[0030] 100-Stand;

[0031] 200-adsorption part;

[0032] 300-negative pressure piece;

[0033] 400 - gas supply pipe; 410 - first end; 420 - second end. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0035] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0036] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0037] Furthermore, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0038] Furthermore, the terms "first," "second," and the like are primarily used to distinguish between different devices, elements, or components, which may or may not have the same specific type and configuration, and are not intended to indicate or imply the relative importance or quantity of the devices, elements, or components indicated. Unless otherwise specified, "plurality" means two or more.

[0039] As mentioned in the background technology, in the actual production process, the sheathed optical cable is prone to unstable adsorption and cannot be accurately placed in the preset discharge position, which reduces the production yield of the product.

[0040] In order to solve the above problems, the present application provides a transfer device and an anisotropic conductive film attaching device. The transfer device ensures the stability and reliability of adsorption through negative pressure control, reduces the risk of objects falling during the transfer process, and can accurately place the transferred parts to the preset position, thereby ensuring the accuracy and quality of production and improving the production yield of the product.

[0041] The technical solution of the present application will be further described below with reference to specific embodiments and drawings.

[0042] See also Figures 1 to 3 , this embodiment provides a transfer device 1, which includes: a bracket 100, an adsorption part 200, a negative pressure part 300, an air pressure control module and a driving part. The adsorption part 200 is arranged on the bracket 100, and the adsorption part 200 is used to adsorb the part to be transferred; the negative pressure part 300 is connected to the adsorption part 200 to provide adsorption force to the adsorption part 200; the air pressure control module is used to control the negative pressure value at the adsorption part 200 so that the adsorption force at the adsorption part 200 reaches a preset threshold value; the driving part is connected to the bracket 100 to drive the bracket 100 to drive the part to be transferred on the adsorption part 200 to move to a preset discharge position.

[0043] Among them, the above-mentioned preset threshold is determined according to the part to be transferred. When the adsorption force at the adsorption part 200 reaches the preset threshold, the part to be transferred can be firmly adsorbed and will not fall during the transfer process; the above-mentioned part to be transferred is anisotropic conductive film, such as a sheathed optical cable.

[0044] When it is necessary to transfer the part to be transferred, the negative pressure part 300 is connected to the adsorption part 200 and starts to provide adsorption force to the adsorption part 200, so that the adsorption part 200 can firmly adsorb the part to be transferred, and the air pressure control module plays a role, accurately controlling the negative pressure value at the adsorption part 200, ensuring that the adsorption force at the adsorption part 200 reaches the preset threshold value, ensuring that the part to be transferred will not accidentally fall off during the transfer process, and then the driving part starts the movement of the driving bracket 100, thereby driving the adsorption part 200 and the part to be transferred adsorbed thereon to move together, so as to accurately move the part to be transferred to the preset discharge position, so that the entire transfer process is automated and production efficiency is improved, and precise negative pressure control ensures the stability and reliability of adsorption, reduces the risk of objects falling during the transfer process, and can accurately place the part to be transferred to the preset position, ensuring the accuracy and quality of production, and improving the production yield of the product.

[0045] In one possible embodiment, see Figure 2 and Figure 3The transfer device 1 also includes an air supply pipe 400, which includes a first end 410 and a second end 420. The first end 410 is connected to the adsorption part 200, and the second end 420 is connected to the negative pressure part 300; the air pressure control module includes a first control part, an air pressure regulating valve and an air pressure sensing part. The air pressure regulating valve and the air pressure sensing part are electrically connected to the first control part respectively. The air pressure regulating valve is connected in series to the air supply pipe 400. The air pressure sensing part is arranged in the air supply pipe 400. The air pressure sensing part is used to sense the air pressure value in the air supply pipe 400 and can transmit the sensed air pressure value to the first control part. The first control part is used to control the opening degree of the air pressure regulating valve according to the air pressure value sensed by the air pressure sensing part to adjust the air pressure in the air supply pipe 400.

[0046] The first control component may be a microcontroller or a programmable logic controller, the air pressure regulating valve may be an electric regulating valve or a pneumatic regulating valve, and the air pressure sensing component may be a pressure sensor or a pressure transmitter.

[0047] In addition, the gas supply pipe 400 can be a flexible pipe or a rigid pipe, which is not limited here.

[0048] Thus, the first control component can receive and process information from the air pressure sensing component and issue control instructions. The air pressure regulating valve is connected in series in the air supply pipeline 400 and adjusts the opening degree according to the instructions of the first control component, thereby directly controlling the gas flow and pressure in the air supply pipeline 400. The air pressure sensing component is arranged in the air supply pipeline 400 and can sense the air pressure value in the pipeline in real time and accurately and transmit it to the first control component. During the transfer process, the air pressure sensing component continuously monitors the air pressure value in the air supply pipeline 400 and transmits the data to the first control component. The first control component accurately controls the opening degree of the air pressure regulating valve according to the preset air pressure threshold and the received real-time air pressure value. When the air pressure is lower than the preset value, the opening degree of the regulating valve is increased to increase the air pressure in the air supply pipeline 400; conversely, the opening degree of the regulating valve is reduced to reduce the air pressure. Through such automatic adjustment, the air pressure in the air supply pipeline 400 is always kept stable within an appropriate range, thereby ensuring that the adsorption force of the adsorption part 200 is stable at the preset threshold, thereby achieving reliable adsorption and transfer of the transferred parts.

[0049] Of course, the air pressure control module is not limited to the above form. For example, the air pressure control module can also be an air pressure control module based on a proportional-integral-differential (PID) controller, including a PID controller, an electronic proportional valve and a pressure sensor. The pressure sensor is arranged in the air supply pipe 400, and is used to detect the air pressure value in the air supply pipe 400 in real time, and transmit the detected air pressure signal to the PID controller. The PID controller calculates based on the set target air pressure value and the actual detected air pressure value, and outputs a control signal to adjust the opening of the electronic proportional valve. The electronic proportional valve is connected in series to the air supply pipe 400, and controls the gas flow in the air supply pipe 400 by adjusting the opening, thereby adjusting the air pressure. During operation, when the air pressure in the air supply pipe 400 deviates from the target value, the PID controller performs a comprehensive calculation based on the size, change speed and accumulation of the deviation, and outputs control signals of the proportional, integral and differential parts respectively. The proportional control part immediately adjusts according to the current deviation size; the integral control part is used to eliminate steady-state errors, and gradually adjusts the output as time accumulates, so that the system achieves zero-difference regulation; the differential control part performs predictive adjustment according to the change speed of the deviation, improves the response speed and stability of the system, and stabilizes the air pressure in the air supply pipe 400 near the set target value by continuously adjusting the opening of the electronic proportional valve.

[0050] In a possible embodiment, an electromagnetic control valve is also provided on the air supply pipe 400, and the electromagnetic control valve is used to control the opening and closing of the air supply pipe 400; the transfer device 1 is also provided with a position sensing component electrically connected to the electromagnetic control valve, and the position sensing component is used to sense whether the part to be transferred has reached a preset discharge position and can transmit the sensed signal to the electromagnetic control valve, and the electromagnetic control valve is used to control the opening and closing of the air supply pipe 400 according to the signal sensed by the position sensing component.

[0051] During the transfer process, the position sensing component can sense in real time whether the part to be transferred has reached the preset discharge position. When the part to be transferred has not reached the preset position, the electromagnetic control valve keeps the air supply pipe 400 open to maintain the adsorption force of the adsorption part 200, ensuring the stability of the part to be transferred during the transfer process. Once the position sensing component senses that the part to be transferred has reached the preset discharge position, it will transmit this signal to the electromagnetic control valve. After receiving the signal, the electromagnetic control valve quickly controls the air supply pipe 400 to close, thereby causing the adsorption force of the adsorption part 200 to lose, thereby achieving accurate discharge of the part to be transferred. Therefore, through the coordinated work of the position sensing component and the electromagnetic control valve, precise control of the discharge timing of the part to be transferred is achieved, ensuring that the part to be transferred can accurately reach the preset discharge position.

[0052] In a possible embodiment, the transfer device 1 also includes a second control component, which is electrically connected to the driving component and the position sensing component respectively. The second control component is used to control the driving component to drive the bracket 100 to move when the position sensing component senses that the part to be transferred has not reached the preset discharge position, so as to adjust the part to be transferred to the preset discharge position.

[0053] Therefore, when the position sensing component senses that the part to be transferred has not reached the preset discharge position, it will transmit this information to the second control component. After receiving this signal, the second control component sends an instruction to the driving component. After receiving the instruction, the driving component drives the bracket 100 to continue moving, thereby adjusting the position of the part to be transferred to ensure that it can accurately reach the preset discharge position. Therefore, through the electrical connection and coordinated work of the second control component, the position sensing component and the driving component, dynamic adjustment and precise control of the position of the part to be transferred are realized, further improving the accuracy and reliability of the transfer device 1.

[0054] Among them, the second control component can be a microprocessor or a programmable logic controller (PLC). After receiving the signal from the position sensing component, the second control component will analyze and process the signal, and calculate the direction and distance that need to be adjusted based on the difference between the actual position of the current part to be transferred and the preset discharge position. Then, the second control component sends a control instruction to the driving component to control the driving component to drive the bracket 100 to perform precise movement adjustment. For example, if the position sensing component detects that the part to be transferred deviates from the preset discharge position in the horizontal direction, the second control component will control the driving component to make fine adjustments in the horizontal direction so that the part to be transferred gradually approaches the preset discharge position. If the height of the part to be transferred in the vertical direction is not appropriate, the second control component can also control the driving component to make vertical adjustments. Through continuous monitoring and adjustment, until the position sensing component senses that the part to be transferred has reached the preset discharge position, at this time, the second control component controls the driving component to stop moving, and the adsorption part 200 releases the part to be transferred to complete the transfer operation.

[0055] In one possible embodiment, see Figure 2 The distance between the first end 410 and the second end 420 of the air supply pipe 400 is 0.5 cm-0.6 cm.

[0056] The distance between the first end 410 and the second end 420 of the air supply pipe 400 is in the range of 0.5cm-0.6cm, which can not only meet the needs of negative pressure transmission and ensure that the adsorption part 200 obtains sufficient and stable adsorption force, but also achieve a better balance in the overall layout and space utilization of the device, making the structure of the entire transfer device 1 more compact and reasonable.

[0057] In one possible embodiment, see Figure 2 The air supply pipe 400 is a rigid pipe and is fixedly mounted on the bracket 100 .

[0058] By making the air supply pipe 400 of a rigid material, the air supply pipe 400 can have better shape stability and pressure resistance, can maintain its own structural integrity during operation, and reduce the instability of gas transmission caused by deformation or bending. In addition, the air supply pipe 400 is fixed on the bracket 100. This fixing method can ensure that the air supply pipe 400 will not shake or displace when the device is running, thereby ensuring the stability and reliability of negative pressure transmission, and providing a strong guarantee for the adsorption part 200 to continuously and stably provide adsorption force.

[0059] In one possible embodiment, see Figure 4 , the adsorption portion 200 includes a disc-shaped adsorption nozzle.

[0060] The adsorption part 200 includes a disc-shaped suction nozzle, which can provide a larger contact area, thereby increasing the stability and reliability of adsorption. Moreover, the disc-shaped suction nozzle can distribute the adsorption force more evenly, so that the part to be transferred is subjected to more balanced force during the adsorption process, reducing the risk of deformation or falling off due to local uneven force. In addition, the larger contact area also helps to adapt to parts to be transferred of different shapes and sizes, thereby improving the versatility of the adsorption part 200.

[0061] Of course, the adsorption portion 200 is not limited to a disc-shaped suction nozzle. For example, it can also be an elliptical suction nozzle, a rectangular suction nozzle, a claw-shaped suction nozzle, etc., which should be known to those skilled in the art.

[0062] In a possible embodiment, the diameter of the disc-shaped suction nozzle is 0.325 cm-0.355 cm.

[0063] By making the diameter of the disc-shaped suction nozzle between 0.325 cm and 0.355 cm, the disc-shaped suction nozzle can provide a sufficient suction area to ensure effective suction of the transferred object, while not being too large to affect the structural compactness and operational flexibility of the entire transfer device 1 .

[0064] In a possible embodiment, the adsorption portion 200 is made of silicone rubber.

[0065] Silicone rubber has good flexibility and elasticity, and can better adhere to the surface of the part to be transferred when adsorbing it, thereby increasing the sealing and stability of the adsorption. Silicone rubber also has certain wear resistance and corrosion resistance, and can maintain good performance during long-term use, thereby extending the service life of the adsorption part 200. In addition, the material of silicone rubber is relatively soft, and causes less damage to the surface of the part to be transferred, and is suitable for transferring objects with higher surface quality requirements.

[0066] The silicone rubber can be ordinary silicone rubber, antistatic silicone rubber, high-temperature resistant silicone rubber, etc. In a preferred embodiment, the adsorption portion 200 is made of directional silicone rubber. Conductive silicone rubber can effectively conduct static electricity and prevent the accumulation of static electricity. When the adsorption portion 200 is conductive silicone rubber, it can promptly eliminate static electricity that may be generated during the process of contact and separation with the object, protecting the adsorbed object. In particular, for electrostatically sensitive electronic components such as integrated circuits and chips, the risk of damage due to static electricity can be greatly reduced. Conductive silicone rubber generally has good conductivity and uniform resistance distribution, so that the adsorption portion 200 can generate a more uniform adsorption force when adsorbing an object. Compared with non-conductive silicone rubber, conductive silicone rubber can better contact the surface of the adsorbed object, ensuring that the adsorption force is evenly distributed across the entire contact surface, thereby improving the stability and reliability of adsorption. Whether adsorbing flat objects or irregularly shaped objects, better adsorption effects can be achieved.

[0067] The embodiment of the present application further provides an anisotropic conductive film attaching device, which includes the transfer device 1 in any one of the above embodiments.

[0068] Among them, the transfer device 1 in the embodiment of the present application can have the same structure as the transfer device 1 in the above embodiment, and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiment, and the embodiment of the present application will not be repeated here.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the transfer device and the anisotropic conductive film attaching equipment of the present application, and do not limit them. Although the transfer device and the anisotropic conductive film attaching equipment of the present application are described in detail with reference to the above embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the above embodiments, or replace some or all of the technical features therein with equivalents. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A transfer device (1), characterized in that The transfer device (1) comprises: bracket (100); An adsorption portion (200), the adsorption portion (200) being arranged on the bracket (100), and the adsorption portion (200) being used to adsorb the part to be transferred; a negative pressure member (300), the negative pressure member (300) being in communication with the adsorption portion (200) to provide adsorption force to the adsorption portion (200); An air pressure control module, the air pressure control module being used to control the negative pressure value at the adsorption portion (200) so that the adsorption force at the adsorption portion (200) reaches a preset threshold value; A driving member is connected to the bracket (100) to drive the bracket (100) to drive the part to be transferred on the adsorption part (200) to move to a preset discharge position.

2. The transfer device (1) according to claim 1, characterized in that The transfer device (1) further comprises an air supply pipe (400), wherein the air supply pipe (400) comprises a first end (410) and a second end (420), wherein the first end (410) is in communication with the adsorption portion (200), and the second end (420) is in communication with the negative pressure member (300); The air pressure control module includes a first control component, an air pressure regulating valve and an air pressure sensing component. The air pressure regulating valve and the air pressure sensing component are electrically connected to the first control component respectively. The air pressure regulating valve is connected in series to the air supply pipeline (400). The air pressure sensing component is arranged in the air supply pipeline (400). The air pressure sensing component is used to sense the air pressure value in the air supply pipeline (400) and can transmit the sensed air pressure value to the first control component. The first control component is used to control the opening degree of the air pressure regulating valve according to the air pressure value sensed by the air pressure sensing component, so as to adjust the air pressure in the air supply pipeline (400).

3. The transfer device (1) according to claim 2, characterized in that The air supply pipeline (400) is also provided with an electromagnetic control valve, and the electromagnetic control valve is used to control the opening and closing of the air supply pipeline (400); The transfer device (1) is also provided with a position sensing component electrically connected to the electromagnetic control valve, the position sensing component is used to sense whether the part to be transferred has reached the preset discharge position and can transmit the sensed signal to the electromagnetic control valve, and the electromagnetic control valve is used to control the opening and closing of the air supply pipe (400) according to the signal sensed by the position sensing component.

4. The transfer device (1) according to claim 3, characterized in that The transfer device (1) further comprises a second control member, the second control member being electrically connected to the driving member and the position sensing member respectively, and the second control member being used to control the driving member to drive the bracket (100) to move when the position sensing member senses that the part to be transferred has not reached the preset discharge position, so as to adjust the part to be transferred to the preset discharge position.

5. The transfer device (1) according to claim 2, characterized in that The distance between the first end (410) and the second end (420) of the air supply pipe (400) is 0.5 cm to 0.6 cm.

6. The transfer device (1) according to claim 2, characterized in that The air supply pipe (400) is a rigid pipe and is fixedly arranged on the bracket (100).

7. The transfer device (1) according to claim 1, characterized in that The adsorption part (200) includes a disc-shaped suction nozzle.

8. The transfer device (1) according to claim 7, characterized in that The diameter of the disc-shaped suction nozzle is 0.325cm-0.355cm.

9. The transfer device (1) according to claim 1 or 7, characterized in that The adsorption portion (200) is made of silicone rubber.

10. An anisotropic conductive film attaching device, characterized in that: The anisotropic conductive film attaching device comprises the transfer device (1) according to any one of claims 1 to 9.

Images