Optical lens surface interference detector

Through the design of the extension mechanism and the clamping mechanism, the problem of insufficient measurement accuracy of the optical lens surface interference detector is solved, and higher measurement accuracy and stability are achieved, which meets the detection needs of lenses of different sizes.

CN223258850UActive Publication Date: 2025-08-22CHENGDU HONGZHENG OPTICAL CO LTD
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Patent Information

Application Number
CN202422391175.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-30
Publication Date
2025-08-22
Estimated Expiration
2034-09-30

AI Technical Summary

Technical Problem

The measurement accuracy of existing optical lens surface interference detectors is poor, and they are susceptible to short optical paths and are susceptible to air disturbances and temperature changes.

Method used

The design of the extension mechanism and the clamping mechanism is adopted, including the extension cylinder, the adjustment ring, the lens, the adjustment member and the clamping block. By flexibly adjusting the optical path length and stably clamping the lens, the optical path stability and the stability of the lens are ensured.

Benefits of technology

It improves measurement accuracy, reduces the influence of environmental factors, enhances measurement accuracy and stability, and improves user experience and the service life of the instrument.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to an optical lens surface interference detector, and belongs to the field of lens detection, the optical lens surface interference detector comprises an interferometer main body, the upper surface of the interferometer main body is provided with a lengthening mechanism, the inner bottom wall of the interferometer main body is provided with a clamping mechanism, and the lengthening mechanism comprises a connecting screw ring, a splicing screw sleeve, a lengthening cylinder, an adjusting ring, a lens and an adjusting piece. According to the optical lens surface interference detector, the lengthening mechanism enables an optical path to be lengthened through the introduction of the lengthening cylinder, so that the measurement range is expanded, the detector can adapt to optical lenses with larger sizes, the influence of environmental factors such as air disturbance and temperature change caused by the short optical path can be reduced, and the detection accuracy is improved. And secondly, due to the arrangement of the lens and the adjusting piece in the lengthening mechanism, a user is allowed to accurately adjust the height position of the lens according to specific measurement requirements, accurate focusing and guiding of the light beams are achieved, and the measurement accuracy is further improved.
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Description

Technical Field

[0001] The present application relates to the field of lens detection technology, and specifically to an optical lens surface interference detector. Background Art

[0002] The optical lens surface interferometer is a high-precision measuring device used to detect the surface quality of optical lenses, including surface flatness, wavefront error, refractive index distribution, etc. The interferometer usually uses laser or LED as a light source to generate a monochromatic, coherent light beam. The generated light beam is divided into two paths. The light beam will experience different degrees of phase change. The interference pattern is captured by a photodetector or other detection equipment and converted into an electrical signal. By analyzing these signals, the phase difference of the optical lens surface can be calculated, and then the surface geometry and error can be obtained.

[0003] As disclosed in Chinese patent publication number (CN218628124U), a lens spherical interferometer includes a base, one side of the top of the base is fixedly connected to a support column, the top of the base is provided with a lifting mechanism and a clamping mechanism, the lifting mechanism includes a top plate fixedly connected to both sides of the top of the support column, the bottoms of the two top plates are movably connected to screws, the bottoms of the two screws are fixedly connected to one side of the top of the base, the outer walls of the two screws are threadedly connected to the support plates, one side of the two support plates is fixedly connected to the workbench, the tops of the two screws are fixedly connected to a transmission shaft, and the two transmission shafts are connected by a belt drive. The utility model is a lens spherical interferometer, which can be used by a motor to drive the screw to rotate, so that the workbench on one side of the screw moves up and down, eliminating the manual adjustment operation process, improving the precision of the spherical interferometer during the adjustment process, and improving the working efficiency of the spherical interferometer.

[0004] However, the existing technology, such as the above-mentioned patent, still has the problem of poor accuracy in optical lens surface interference detection. In the existing technology, a spherical mirror is used to project light onto the optical lens for surface interference detection. However, the light projection distance in this method is short, and its short optical path is easily affected by factors such as air disturbance and temperature change, resulting in a decrease in measurement accuracy. Utility Model Content

[0005] In response to the shortcomings of the existing technology, the present application provides an optical lens surface interference detection instrument, which has the advantages of high optical surface interference detection accuracy, and solves the problem of poor optical lens surface interference detection accuracy.

[0006] To achieve the above-mentioned object, the present application provides the following technical solution: an optical lens surface interferometer detector, comprising an interferometer body, an upper surface of the interferometer body being provided with an extension mechanism, and an inner bottom wall of the interferometer body being provided with a clamping mechanism;

[0007] The extension mechanism includes a connecting screw ring, a splicing screw sleeve, an extension tube, an adjustment ring, a lens and an adjustment piece, wherein the connecting screw ring is fixed to the upper surface of the interferometer body, the splicing screw sleeve is threadedly connected to the outer side of the connecting screw ring, the extension tube is fixed to the top end of the splicing screw sleeve, the adjustment ring is slidably connected to the inner wall of the extension tube, the lens is fixed to the inner wall of the adjustment ring, and the adjustment piece is arranged on the outer side of the adjustment ring to adjust the height position of the lens in the extension tube;

[0008] The adjusting part includes a connecting plate, an adjusting shell, an adjusting screw and a slider. An adjusting port is opened on the left inner wall of the extension tube. The connecting plate is slidably connected between the front and rear inner walls of the adjusting port, and the right side of the connecting plate is fixed to the outer side of the adjusting ring. The adjusting shell is fixed to the outer surface of the extension tube and is located on the outer side of the adjusting port. The adjusting screw is rotatably connected between the upper and lower inner walls of the adjusting shell through a bearing. The slider is threadedly connected to the outer side of the adjusting screw, and the slider is fixed to the left side of the connecting plate.

[0009] By adopting this technical solution, the design of the extension mechanism allows flexible adjustment of the length of the optical path to meet the detection requirements of optical lenses of different sizes. The setting of the adjustment ring and the lens, combined with the adjustment parts, provides precise adjustment capabilities in height.

[0010] Furthermore, a plurality of guide rails are vertically fixed to the inner wall of the extension tube, and reflective mirrors are fixed to the upper and lower ends of the inner wall of the extension tube.

[0011] By adopting this technical solution, stable guidance and precise position control are provided for the adjustment ring, ensuring the stability of the optical path and the correct positioning of the reflector. The use of the reflector enhances the accuracy of the optical path, helps to improve the quality of the interference pattern, and thus enhances the reliability of the measurement results.

[0012] Furthermore, the outer side of the adjustment ring is provided with sliding grooves corresponding to the positions of the plurality of guide rails, and the adjustment ring is slidably connected to the outer sides of the plurality of guide rails via the plurality of sliding grooves.

[0013] By adopting this technical solution, the adjustment ring can slide smoothly and precisely on the guide rail. This structure not only improves the accuracy of the adjustment ring positioning, but also facilitates maintenance and operation, further improving the smoothness of the measurement process and the stability of the instrument.

[0014] Furthermore, the top end of the adjusting screw rod passes through and extends to the top of the adjusting housing and is fixed with an adjusting hand wheel.

[0015] By adopting this technical solution, the addition of a handwheel improves the user experience and makes fine adjustments easier to control.

[0016] Furthermore, the clamping mechanism includes a placement base, two bottom clamping blocks, two first pistons, two top clamping blocks and two second pistons. The placement base is fixed to the inner bottom wall of the interferometer body, and two connecting grooves are provided on the inner wall of the placement base, and the two bottom clamping blocks are respectively slidably connected to the inside of the two connecting grooves. A reset spring is fixed between the bottom clamping block and the side opposite to the inner wall of the connecting groove. The two first pistons are respectively fixed to the side opposite to the two bottom clamping blocks. Two placement grooves are provided on the inner wall of the placement base and above the connecting groove, and the two top clamping blocks are respectively slidably connected to the inner walls of the two placement grooves, and the two second pistons are respectively fixed to the side opposite to the two top clamping blocks.

[0017] By adopting this technical solution, stable clamping of optical lenses is achieved. This design not only ensures the stability of the lenses during the measurement process, but also improves the uniformity and controllability of the clamping force through the application of the hydraulic system, thereby reducing measurement errors caused by improper clamping.

[0018] Furthermore, the inner walls on the opposite sides of the two connecting grooves are each provided with a hydraulic oil groove that penetrates and extends to the inner walls of the two placement grooves.

[0019] By adopting this technical solution, the hydraulic oil is allowed to flow freely in the oil tank, providing smooth and consistent power to the piston, ensuring the smooth movement of the clamping block and the uniformity of the clamping force.

[0020] Furthermore, the first piston and the second piston are both slidably connected along the inner wall of the hydraulic oil tank, and the interior of the hydraulic oil tank and between the opposite sides of the first piston and the second piston are filled with hydraulic oil.

[0021] By adopting this technical solution, an efficient force transmission mechanism is provided. This design not only enhances the response speed of the clamping mechanism, but also effectively absorbs external impacts through the buffering effect of hydraulic oil, protecting the optical lens and the instrument itself.

[0022] Furthermore, the upper surfaces of the two bottom clamping blocks are both provided with guiding inclined surfaces, and the diameters of the first piston and the second piston are both equal to the aperture of the hydraulic oil tank.

[0023] By adopting this technical solution, the smooth movement and precise positioning of the clamping block during the clamping process are ensured, and this design improves the operating accuracy of the clamping mechanism.

[0024] Compared with the existing technology, the technical solution of this application has the following beneficial effects:

[0025] 1. The optical lens surface interferometer uses an extension mechanism to extend the optical path by introducing an extension tube. This not only expands the measurement range and enables the instrument to adapt to larger optical lenses, but also helps reduce the impact of environmental factors such as air disturbances and temperature changes caused by the short optical path, thereby significantly improving measurement accuracy. Secondly, the setting of the lens and adjustment parts in the extension mechanism allows the user to accurately adjust the height position of the lens according to specific measurement requirements, achieving precise focusing and guidance of the light beam, further improving measurement accuracy.

[0026] 2. The optical lens surface interferometer detector uses a clamping mechanism that achieves a secure clamping of the optical lens through the coordinated work of the bottom and top clamping blocks, effectively preventing measurement errors caused by lens movement or vibration. The hydraulic system in the clamping mechanism provides a uniform and controllable clamping force, ensuring the flatness and positioning accuracy of the lens during the measurement process, while also reducing possible damage to the lens. In addition, the design of the piston and hydraulic oil tank in the clamping mechanism makes the clamping action smooth and responsive, thereby improving measurement efficiency. This not only ensures the accuracy of the measurement process, but also enhances the convenience of operation and the service life of the instrument. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the structure of this application;

[0028] Figure 2 This is a schematic diagram of the extension mechanism for this application;

[0029] Figure 3 This is a partial schematic diagram of the extension mechanism for this application;

[0030] Figure 4 This is a schematic diagram of the clamping mechanism of this application.

[0031] In the figure: 1. Interferometer body; 2. Extension mechanism; 21. Connecting screw ring; 22. Splicing screw sleeve; 23. Extension tube; 24. Adjusting ring; 25. Lens; 26. Adjusting part; 261. Connecting plate; 262. Adjusting housing; 263. Adjusting screw rod; 264. Slider; 27. Guide rail; 3. Clamping mechanism; 31. Placement base; 32. Bottom clamping block; 33. First piston; 34. Top clamping block; 35. Second piston; 36. Connecting groove; 37. Return spring; 38. Placement groove; 39. Hydraulic oil tank. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0033] See also Figure 1 An optical lens surface interferometer detector in this embodiment includes an interferometer body 1, an extension mechanism 2 is provided on the upper surface of the interferometer body 1, and a clamping mechanism 3 is provided on the inner bottom wall of the interferometer body 1.

[0034] See also Figures 2 to 3 In order to expand the detection range and improve the detection accuracy, the extension mechanism 2 in this embodiment includes a connecting screw ring 21, a splicing screw sleeve 22, an extension tube 23, an adjusting ring 24, a lens 25 and an adjusting piece 26. The connecting screw ring 21 is fixed to the upper surface of the interferometer body 1, the splicing screw sleeve 22 is threadedly connected to the outer side of the connecting screw ring 21, the extension tube 23 is fixed to the top of the splicing screw sleeve 22, the connecting screw ring 21 is fixed to the upper surface of the interferometer body 1, and the connection between the extension mechanism 2 and the interferometer body 1 is ensured to be stable. According to the measurement requirements, the extension tube 23 is installed with the interferometer body 1 by rotating the splicing screw sleeve 22, the adjusting ring 24 is slidably connected to the inner wall of the extension tube 23, the lens 25 is fixed to the inner wall of the adjusting ring 24, and the adjusting ring 24 is slid along the inner wall of the extension tube 23 to an appropriate position to adjust the height of the lens 25. The adjusting piece 26 is arranged on the outer side of the adjusting ring 24 to adjust the height position of the lens 25 in the extension tube 23.

[0035] The adjusting member 26 includes a connecting plate 261, an adjusting shell 262, an adjusting screw 263 and a slider 264. An adjusting port is provided on the left inner wall of the extension tube 23. The connecting plate 261 is slidably connected between the front and rear inner walls of the adjusting port, and the right side of the connecting plate 261 is fixed to the outer side of the adjusting ring 24. The adjusting shell 262 is fixed to the outer surface of the extension tube 23 and is located on the outer side of the adjusting port. The adjusting screw 263 is rotatably connected between the upper and lower inner walls of the adjusting shell 262 through a bearing. The slider 264 is threadedly connected to the outer side of the adjusting screw 263, and the slider 264 is fixed to the left side of the connecting plate 261. Use the adjusting screw 263 in the adjusting member 26 to rotate the adjusting hand wheel to fine-tune the height position of the lens 25 to achieve precise focusing.

[0036] In this embodiment, several guide rails 27 are vertically fixed to the inner wall of the extension tube 23, and reflectors are fixed to the upper and lower ends of the inner wall of the extension tube 23. The outer side of the adjustment ring 24 is provided with sliding grooves corresponding to the positions of the several guide rails 27, and the adjustment ring 24 is slidably connected to the outer sides of the several guide rails 27 through the several sliding grooves. The top of the adjusting screw rod 263 passes through and extends to the top of the adjusting shell 262 and is fixed with an adjusting handwheel. After adjustment into place, the slider 264 is used to fix the adjusting screw rod 263 to ensure that the position of the lens 25 is stable, and to ensure that the sliding groove of the adjusting ring 24 is aligned with the guide rail 27 on the inner wall of the extension tube 23 so that the adjusting ring 24 can slide smoothly. Confirm that the reflectors at the upper and lower ends of the inner wall of the extension tube 23 are correctly fixed to ensure the correct reflection of the light path. After completing the above steps, the extension mechanism 2 is set up and ready for interference detection of optical lenses.

[0037] See also Figure 4 In order to facilitate the clamping and detection of the optical lens, the clamping mechanism 3 in this embodiment includes a placement base 31, two bottom clamping blocks 32, two first pistons 33, two top clamping blocks 34 and two second pistons 35. The placement base 31 is fixed to the inner bottom wall of the interferometer body 1, and the inner wall of the placement base 31 is provided with two connecting grooves 36, and the two bottom clamping blocks 32 are respectively slidably connected to the inside of the two connecting grooves 36, and a return spring 37 is fixed between the bottom clamping block 32 and the opposite side of the inner wall of the connecting groove 36 to ensure that the interferometer body 1 and the clamping mechanism 3 are clean and unobstructed, and the surface of the optical lens to be tested is clean and dust-free. The optical lens is slowly inserted into the placement base 31 until the bottom of the optical lens contacts the bottom clamping block 32, and the two first pistons 33 are respectively fixed to the opposite side of the two bottom clamping blocks 32. The inner wall of the placement base 31 and above the connecting groove 36 are provided with a There are two placement grooves 38, and the two top clamping blocks 34 are respectively slidably connected to the inner walls of the two placement grooves 38. As the optical lens is further placed, the two bottom clamping blocks 32 move toward the inside of the connecting groove 36. The movement of the bottom clamping block 32 drives the first piston 33 to slide along the hydraulic oil groove 39. The movement of the first piston 33 pushes the hydraulic oil to move in the hydraulic oil groove 39, generating pressure. The pressure of the hydraulic oil pushes the second piston 35 outward. The two second pistons 35 are respectively fixed to the opposite side of the two top clamping blocks 34. The ejection of the second piston 35 drives the top clamping block 34 to move out of the placement groove 38 and fit with the outer side of the optical lens. At this time, the bottom clamping block 32 has moved into place to clamp the optical lens at the bottom to ensure the stability of the lens. The top clamping block 34 moves out and contacts the upper part of the optical lens for top clamping to further fix the lens to prevent it from moving during the measurement process.

[0038] In this embodiment, the inner walls of the opposite sides of the two connecting grooves 36 are each provided with a hydraulic oil groove 39 that penetrates and extends to the inner walls of the two placement grooves 38. The first piston 33 and the second piston 35 are both slidably connected along the inner walls of the hydraulic oil groove 39. The interior of the hydraulic oil groove 39 and between the opposite sides of the first piston 33 and the second piston 35 are filled with hydraulic oil. The upper surfaces of the two bottom clamping blocks 32 are each provided with a guide slope. The diameters of the first piston 33 and the second piston 35 are equal to the aperture of the hydraulic oil groove 39. After the optical lens is stably clamped, interference detection can be started. After the measurement is completed, the optical lens is pulled up to disengage the lens from the bottom clamping block 32. At this time, the elastic force of the reset spring 37 pushes the bottom clamping block 32 back to reset, and then drives the hydraulic oil to reflux through the first piston 33 to pull the top clamping block 34 back to operate the hydraulic system to release the pressure, so that the first piston 33 and the second piston 35 return to their positions, thereby releasing the clamping block and removing the optical lens.

[0039] The working principle of the above embodiment is:

[0040] (1) Fix the connecting screw ring 21 to the upper surface of the interferometer body 1 to ensure that the extension mechanism 2 is stably connected to the interferometer body 1. According to the measurement requirements, install the extension tube 23 to the interferometer body 1 by rotating the splicing screw sleeve 22. Slide the adjustment ring 24 along the inner wall of the extension tube 23 to the appropriate position to adjust the height of the lens 25. Use the adjustment screw 263 in the adjustment member 26 to turn the adjustment hand wheel to fine-tune the height position of the lens 25 to achieve precise focusing. After adjustment, use the slider 264 to fix the adjustment screw 263 to ensure that the position of the lens 25 is stable. Ensure that the slide groove of the adjustment ring 24 is aligned with the guide rail 27 on the inner wall of the extension tube 23 so that the adjustment ring 24 slides smoothly. Confirm that the reflectors at the upper and lower ends of the inner wall of the extension tube 23 are correctly fixed to ensure the correct reflection of the light path. After completing the above steps, the extension mechanism 2 is set up and ready for interference detection of optical lenses.

[0041] (2) Ensure that the interferometer body 1 and the clamping mechanism 3 are clean and unobstructed, and the surface of the optical lens to be tested is clean and dust-free. Slowly insert the optical lens into the placement base 31 until the bottom of the optical lens contacts the bottom clamping block 32. As the optical lens is further placed, the two bottom clamping blocks 32 move toward the inside of the connecting groove 36. The movement of the bottom clamping block 32 drives the first piston 33 to slide along the hydraulic oil groove 39. The movement of the first piston 33 pushes the hydraulic oil to move in the hydraulic oil groove 39, generating pressure. The pressure of the hydraulic oil pushes the second piston 35 outward. The push-out of the second piston 35 drives the top clamping block 34 to move out of the placement groove 38 and fit with the outer side of the optical lens. At this time, the bottom clamping block 32 has moved into place. The optical lens is clamped at the bottom to ensure that the lens is stable. The top clamping block 34 is moved out and contacts the upper part of the optical lens for top clamping to further fix the lens to prevent it from moving during the measurement process. Confirm that the optical lens has been stably clamped by the bottom and top clamping blocks 34 without offset or tilt. After the optical lens is stably clamped, interference detection can be started. After the measurement is completed, pull up the optical lens to disengage it from the bottom clamping block 32. At this time, the elastic force of the reset spring 37 pushes the bottom clamping block 32 back to reset, and then drives the hydraulic oil to flow back through the first piston 33 to pull the top clamping block 34 back to operate the hydraulic system to release the pressure, so that the first piston 33 and the second piston 35 return to their positions, and then release the clamping block and remove the optical lens.

Claims

1. An optical lens surface interferometer detector, comprising an interferometer body (1), characterized in that: An extension mechanism (2) is provided on the upper surface of the interferometer body (1), and a clamping mechanism (3) is provided on the inner bottom wall of the interferometer body (1); The lengthening mechanism (2) comprises a connecting screw ring (21), a splicing screw sleeve (22), an extension tube (23), an adjusting ring (24), a lens (25) and an adjusting member (26), wherein the connecting screw ring (21) is fixed to the upper surface of the interferometer body (1), the splicing screw sleeve (22) is threadedly connected to the outer side of the connecting screw ring (21), the extension tube (23) is fixed to the top end of the splicing screw sleeve (22), the adjusting ring (24) is slidably connected to the inner wall of the extension tube (23), the lens (25) is fixed to the inner wall of the adjusting ring (24), and the adjusting member (26) is arranged on the outer side of the adjusting ring (24) to adjust the height position of the lens (25) in the extension tube (23); The adjusting member (26) includes a connecting plate (261), an adjusting housing (262), an adjusting screw (263) and a slider (264). An adjusting opening is provided on the left inner wall of the extension tube (23). The connecting plate (261) is slidably connected between the front and rear inner walls of the adjusting opening, and the right side of the connecting plate (261) is fixed to the outer side of the adjusting ring (24). The adjusting housing (262) is fixed to the outer surface of the extension tube (23) and is located outside the adjusting opening. The adjusting screw (263) is rotatably connected between the upper and lower inner walls of the adjusting housing (262) through a bearing. The slider (264) is threadedly connected to the outer side of the adjusting screw (263), and the slider (264) is fixed to the left side of the connecting plate (261).

2. The optical lens surface interferometer according to claim 1, characterized in that: A plurality of guide rails (27) are vertically fixed to the inner wall of the extension tube (23), and reflectors are fixed to the upper and lower ends of the inner wall of the extension tube (23).

3. The optical lens surface interferometer according to claim 2, characterized in that: The outer side of the adjustment ring (24) is provided with sliding grooves corresponding to the positions of the plurality of guide rails (27), and the adjustment ring (24) is slidably connected to the outer sides of the plurality of guide rails (27) through the plurality of sliding grooves.

4. The optical lens surface interferometer according to claim 1, characterized in that: The top end of the adjusting screw rod (263) passes through and extends to the top of the adjusting housing (262) and is fixed with an adjusting hand wheel.

5. The optical lens surface interferometer according to claim 1, characterized in that: The clamping mechanism (3) includes a placement base (31), two bottom clamping blocks (32), two first pistons (33), two top clamping blocks (34) and two second pistons (35), wherein the placement base (31) is fixed to the inner bottom wall of the interferometer body (1), the inner wall of the placement base (31) is provided with two connecting grooves (36), and the two bottom clamping blocks (32) are respectively slidably connected to the inside of the two connecting grooves (36), a return spring (37) is fixed between the bottom clamping block (32) and the side opposite to the inner wall of the connecting groove (36), the two first pistons (33) are respectively fixed to the side opposite to the two bottom clamping blocks (32), the inner wall of the placement base (31) is provided with two placement grooves (38) located above the connecting groove (36), and the two top clamping blocks (34) are respectively slidably connected to the inner wall of the two placement grooves (38), and the two second pistons (35) are respectively fixed to the side opposite to the two top clamping blocks (34).

6. The optical lens surface interferometer according to claim 5, characterized in that: The inner walls of the two connecting grooves (36) on the opposite sides are each provided with a hydraulic oil groove (39) that penetrates and extends to the inner walls of the two placement grooves (38).

7. The optical lens surface interferometer according to claim 6, characterized in that: The first piston (33) and the second piston (35) are both slidably connected along the inner wall of the hydraulic oil groove (39), and the interior of the hydraulic oil groove (39) and between the opposite sides of the first piston (33) and the second piston (35) are filled with hydraulic oil.

8. The optical lens surface interferometer according to claim 7, characterized in that: The upper surfaces of the two bottom clamping blocks (32) are both provided with guiding inclined surfaces, and the diameters of the first piston (33) and the second piston (35) are both equal to the aperture of the hydraulic oil groove (39).

Citation Information

Patent Citations

  • Lens spherical interferometer

    CN218628124U