Detection tool for side edge of strip-shaped target material

Abstract

The utility model provides a strip-shaped target material side edge detection tool, the detection tool comprises a tool body, one side of the tool body is provided with a first vertical groove and a first transverse groove, and the first vertical groove is used for fixing the side edge of a strip-shaped target material; one end of the first vertical groove is connected with the first transverse groove to form a T-shaped groove, the first transverse groove is a through groove, and the grooving depth of the first transverse groove is larger than that of the first vertical groove. According to the utility model, through the specific arrangement of the tool body, before the target material is detected, the roughness monitor can be clamped in the first transverse groove in advance, the first vertical groove is utilized to be close to the target material, stable detection is carried out, the precision is high, the structure is simple, and the tool is suitable for popularization.

Description

Technical Field

[0001] The utility model belongs to the technical field of strip target material detection, and relates to a detection tool for the side of a strip target material. Background Art

[0002] In the semiconductor and LCD industries, target assemblies are commonly used for sputtering metal films. These assemblies typically consist of a target material portion that meets sputtering requirements and a backplane portion that provides a certain degree of strength. The sputtering process places high demands on the curvature of the target assembly. For example, in the case of LCD targets, after curvature correction, the target assembly needs to be placed on a testing platform to inspect the curvature of both the target surface and the backplane.

[0003] The existing technical solution discloses a target material detection platform, a target material detection device and a target material detection method. The target material detection platform is a rectangular parallelepiped; two strip grooves are provided on the upper surface of the target material detection platform along the width direction of the rectangular upper surface and parallel to each other, which are used to accommodate the fork bar of the forklift when the forklift places the target material on the upper surface of the target material detection platform.

[0004] The prior art also discloses a calibration method for an LCD bar target assembly. The assembly is placed flat in a U-shape on a calibration platform, pressure is applied to both ends of the assembly, and then the assembly is cooled to room temperature before the pressure is removed. By applying pressure to both ends of the assembly, the problem of varying degrees of deformation of the metal target due to thermal expansion and contraction can be effectively resolved, ensuring that the overall flatness of the assembly remains within acceptable limits.

[0005] The prior art also discloses a target material inspection tool, comprising a main body and a plug gauge. The main body is provided with a detection through-hole for mounting the target material. Opposite sides of the main body are provided with abutment surfaces for contact with adjacent equipment to align the detection through-hole with the actual mounting position of the target material. The plug gauge is mounted on the main body and abuts against the target material to secure the target material within the detection through-hole.

[0006] However, the existing inspection tooling still has problems such as long inspection time, loose clamping of the target material, inaccurate measurement, and the inspection platform is not conducive to target material handling, inconvenient personnel transportation and safety hazards. Therefore, it is urgent to design and develop an inspection tool for the side of the strip target material to overcome the defects of the existing technology and meet the actual application needs. Utility Model Content

[0007] In response to the shortcomings of the existing technology, the purpose of the present invention is to provide a detection tool for the side of a strip target. In the present invention, through the specific setting of the tool body, the roughness monitor can be inserted into the first horizontal groove in advance before detecting the target material, and the first vertical groove is used to approach the target material for stable detection. It has high accuracy, simple structure, and is suitable for promotion.

[0008] To achieve this purpose, the present invention adopts the following technical solutions:

[0009] The utility model provides a detection tool for the side of a strip target material, the detection tool comprising a tool body, one side of the tool body being provided with a first vertical groove and a first transverse groove, the first vertical groove being used to fix the side of the strip target material; one end of the first vertical groove is connected to the first transverse groove to form a T-shaped groove, the first transverse groove being a through groove, and the groove depth of the first transverse groove being greater than the groove depth of the first vertical groove.

[0010] In the present invention, through the specific setting of the tooling body, the roughness monitor can be inserted into the first horizontal groove in advance before detecting the target material, and the first vertical groove is used to approach the target material for stable detection. It has high accuracy, simple structure and is suitable for promotion.

[0011] It should be noted that the present invention does not impose any particular restrictions on the material of the tool body, and those skilled in the art can make adaptive adjustments based on actual conditions. The size of the tool body can also be enlarged or reduced accordingly based on the requirements of the target material.

[0012] It should be noted that traditional non-standard products will have errors after processing, resulting in loose clamping when combined with detection instruments for monitoring, and accurate monitoring cannot be carried out. However, the utility model overcomes the above-mentioned technical difficulties through the specific design of the tooling body, and the detection method is more convenient and accurate, so that it fully meets product requirements.

[0013] It should be noted that the groove depth of the first transverse groove in the present invention is greater than the groove depth of the first vertical groove because this structural limitation meets the detection requirements. If it were not for this structure, the detection instrument may not be clamped tightly and the detection data may be biased.

[0014] As a preferred technical solution of the present invention, the tool body is an integrated structure.

[0015] As a preferred technical solution of the present invention, the length of the first vertical groove is 45-46 mm, for example, it can be 45 mm, 45.1 mm, 45.2 mm, 45.3 mm, 45.4 mm, 45.5 mm, 45.6 mm, 45.7 mm, 45.8 mm, 45.9 mm, 46 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0016] As a preferred technical solution of the present invention, the width of the first vertical groove is 22 to 23 mm, for example, it can be 22 mm, 22.1 mm, 22.2 mm, 22.3 mm, 22.4 mm, 22.5 mm, 22.6 mm, 22.7 mm, 22.8 mm, 22.9 mm, 23 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0017] The length of the first vertical slot in the present invention is 45-46 mm and the width is 22-23 mm because the detection instrument can be tightened within this size range. If it is not within this range, the non-standard finished product will be loose and the detection data will be deviated.

[0018] As a preferred technical solution of the present invention, the groove depth of the first vertical groove is 25 to 26 mm, for example, it can be 25 mm, 25.1 mm, 25.2 mm, 25.3 mm, 25.4 mm, 25.5 mm, 25.6 mm, 25.7 mm, 25.8 mm, 25.9 mm, 26 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0019] The slotting depth of the first vertical slot in the present invention is 25 to 26 mm because within this size range, all models of non-standard products of this type can be satisfied. If it is not within this range, the fastening of the detection instrument will be unstable. This is because an excessively long slotting depth will affect the effective detection formation of the detection instrument, resulting in errors.

[0020] It should be noted that, in the present invention, the inner surface of the first vertical groove can be adhered with one or more layers of tape for protection to avoid scratching the product.

[0021] As a preferred technical solution of the present invention, the length of the first transverse groove is 55-56 mm, for example, it can be 55 mm, 55.1 mm, 55.2 mm, 55.3 mm, 55.4 mm, 55.5 mm, 55.6 mm, 55.7 mm, 55.8 mm, 55.9 mm, 56 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0022] As a preferred technical solution of the present invention, the width of the first transverse groove is 16 to 17 mm, for example, it can be 16 mm, 16.1 mm, 16.2 mm, 16.3 mm, 16.4 mm, 16.5 mm, 16.6 mm, 16.7 mm, 16.8 mm, 16.9 mm, 17 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0023] In the present invention, the length of the first transverse groove is 55-56 mm and the width is 16-17 mm. This is because the effective detection formation of the detection instrument plus the width of the fastener is approximately 55-56 mm. If it is not within this range, the detection tooling will be too heavy and not conducive to portability and practicality. This is because the detection tooling is made of metal material, which has good deformation resistance and corrosion resistance.

[0024] As a preferred technical solution of the present invention, the groove depth of the first transverse groove is 33 to 34 mm, for example, it can be 33 mm, 33.1 mm, 33.2 mm, 33.3 mm, 33.4 mm, 33.5 mm, 33.6 mm, 33.7 mm, 33.8 mm, 33.9 mm, 34 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] The groove depth of the first transverse groove in the present invention is 33 to 34 mm because the detection instrument can fit the detection tooling within this size range. If it is not within this range, the detection instrument will bulge outward, affecting the detection accuracy. This is because the special nature of the detection probe requires horizontal contact with the product for detection.

[0026] It should be noted that, in the present invention, one or more layers of tape may be adhered to the inner surface of the first transverse groove for protection to avoid scratching the product.

[0027] As a preferred technical solution of the present invention, the tooling body is provided with at least two through holes on both sides of the first vertical groove along the slotting direction perpendicular to the first horizontal groove, for example, it can be 2, 3, 4, 5, 6, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable; the through holes are used to fix monitoring instruments.

[0028] Preferably, the diameter of the through hole is 8 to 9 mm, for example, it can be 8 mm, 8.1 mm, 8.2 mm, 8.3 mm, 8.4 mm, 8.5 mm, 8.6 mm, 8.7 mm, 8.8 mm, 8.9 mm, 9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0029] The size and shape of the through hole in the present invention are not particularly limited, and those skilled in the art can make adaptive adjustments according to actual conditions. The shape of the through hole can be a round hole, and a bolt or a fixing pin can be set in the through hole for fixing.

[0030] As a preferred technical solution of the present invention, the tooling body is provided with at least one through groove along the slotting direction parallel to the first transverse groove, for example, it can be 1, 2, 3, 4, 5, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable; the through groove is used to fix the strip target material.

[0031] The size and shape of the through slot in the present invention are not particularly limited, and those skilled in the art can make adaptive adjustments according to actual conditions. The shape of the through slot can be a circular through slot, and a bolt or a fixing pin can be set in the through slot for fixing.

[0032] Preferably, the diameter of the through groove is 8 to 9 mm, for example, it can be 8 mm, 8.1 mm, 8.2 mm, 8.3 mm, 8.4 mm, 8.5 mm, 8.6 mm, 8.7 mm, 8.8 mm, 8.9 mm, 9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0033] Compared with the prior art, the beneficial effects of the present invention are:

[0034] In the present invention, through the specific setting of the tooling body, the roughness monitor can be inserted into the first horizontal groove in advance before detecting the target material, and the first vertical groove is used to approach the target material for stable detection. It has high accuracy, simple structure and is suitable for promotion. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A schematic diagram of the structure of a tool for detecting the side of a strip target provided by a specific embodiment of the present invention;

[0036] Among them, 1-first vertical groove; 2-first horizontal groove; 3-through hole; 4-through groove. DETAILED DESCRIPTION

[0037] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0038] It should be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0039] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0040] The utility model provides a detection tool for the side of a strip target material, such as Figure 1 As shown, the detection tooling includes a tooling body, and a first vertical groove 1 and a first transverse groove 2 are opened on one side of the tooling body. The first vertical groove 1 is used to fix the side of the strip target material; one end of the first vertical groove 1 is connected with the first transverse groove 2 to form a T-shaped groove, the first transverse groove 2 is a through groove, and the groove depth of the first transverse groove 2 is greater than the groove depth of the first vertical groove 1.

[0041] In the present invention, through the specific setting of the tooling body, the roughness monitor can be inserted into the first transverse groove 2 in advance before detecting the target material, and the first vertical groove 1 is used to be close to the target material for stable detection. It has high accuracy, simple structure and is suitable for promotion.

[0042] It should be noted that the present invention does not impose any particular restrictions on the material of the tool body, and those skilled in the art can make adaptive adjustments based on actual conditions. The size of the tool body can also be enlarged or reduced accordingly based on the requirements of the target material.

[0043] It should be noted that traditional non-standard products will have errors after processing, resulting in loose clamping when combined with detection instruments for monitoring, and accurate monitoring cannot be carried out. However, the utility model overcomes the above-mentioned technical difficulties through the specific design of the tooling body, and the detection method is more convenient and accurate, so that it fully meets product requirements.

[0044] Furthermore, the tool body is an integrated structure.

[0045] Furthermore, the length of the first vertical groove 1 is 45-46 mm, for example, it can be 45 mm, 45.1 mm, 45.2 mm, 45.3 mm, 45.4 mm, 45.5 mm, 45.6 mm, 45.7 mm, 45.8 mm, 45.9 mm, 46 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0046] Furthermore, the width of the first vertical groove 1 is 22-23 mm, for example, it can be 22 mm, 22.1 mm, 22.2 mm, 22.3 mm, 22.4 mm, 22.5 mm, 22.6 mm, 22.7 mm, 22.8 mm, 22.9 mm, 23 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0047] Furthermore, the groove depth of the first vertical groove 1 is 25-26 mm, for example, it can be 25 mm, 25.1 mm, 25.2 mm, 25.3 mm, 25.4 mm, 25.5 mm, 25.6 mm, 25.7 mm, 25.8 mm, 25.9 mm, 26 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0048] It should be noted that, in the present invention, the inner surface of the first vertical groove 1 can be adhered with one or more layers of tape for protection to avoid scratching the product.

[0049] Furthermore, the length of the first transverse groove 2 is 55 to 56 mm, for example, it can be 55 mm, 55.1 mm, 55.2 mm, 55.3 mm, 55.4 mm, 55.5 mm, 55.6 mm, 55.7 mm, 55.8 mm, 55.9 mm, 56 mm, etc., but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0050] Furthermore, the width of the first transverse groove 2 is 16 to 17 mm, for example, it can be 16 mm, 16.1 mm, 16.2 mm, 16.3 mm, 16.4 mm, 16.5 mm, 16.6 mm, 16.7 mm, 16.8 mm, 16.9 mm, 17 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0051] Furthermore, the groove depth of the first transverse groove 2 is 33 to 34 mm, for example, it can be 33 mm, 33.1 mm, 33.2 mm, 33.3 mm, 33.4 mm, 33.5 mm, 33.6 mm, 33.7 mm, 33.8 mm, 33.9 mm, 34 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0052] It should be noted that, in the present invention, the inner surface of the first transverse groove 2 can be adhered with one or more layers of tape for protection to avoid scratching the product.

[0053] Furthermore, the tool body is provided with at least two through holes 3 on both sides of the first vertical slot 1 along a slotting direction perpendicular to the first transverse slot 2 , and the through holes 3 are used for fixing the monitoring instrument.

[0054] Furthermore, the diameter of the through hole 3 is 8 to 9 mm, for example, it can be 8 mm, 8.1 mm, 8.2 mm, 8.3 mm, 8.4 mm, 8.5 mm, 8.6 mm, 8.7 mm, 8.8 mm, 8.9 mm, 9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0055] Furthermore, the tooling body is provided with at least one through groove 4 along a slotting direction parallel to the first transverse groove 2 , and the through groove 4 is used to fix the strip-shaped target material.

[0056] Furthermore, the diameter of the through groove 4 is 8 to 9 mm, for example, it can be 8 mm, 8.1 mm, 8.2 mm, 8.3 mm, 8.4 mm, 8.5 mm, 8.6 mm, 8.7 mm, 8.8 mm, 8.9 mm, 9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0057] Example 1

[0058] This embodiment provides a tool for detecting the side of a strip target, wherein:

[0059] The detection tooling includes a tooling body, and a first vertical groove 1 and a first transverse groove 2 are opened on one side of the tooling body. The first vertical groove 1 is used to fix the side of the strip target material; one end of the first vertical groove 1 is connected with the first transverse groove 2 to form a T-shaped groove, and the first transverse groove 2 is a through groove, and the groove depth of the first transverse groove 2 is greater than the groove depth of the first vertical groove 1.

[0060] The tool body is an integrated structure, the length of the first vertical groove 1 is 45 mm, the width of the first vertical groove 1 is 22 mm, and the groove depth of the first vertical groove 1 is 25 mm.

[0061] The length of the first transverse groove 2 is 55 mm, the width of the first transverse groove 2 is 17 mm, and the groove depth of the first transverse groove 2 is 33 mm.

[0062] The tool body is provided with two through holes 3 on both sides of the first vertical slot 1 along the slotting direction perpendicular to the first horizontal slot 2. The through holes 3 are used to fix the monitoring instrument, and the diameter of the through holes 3 is 8 mm.

[0063] The tool body is provided with a through groove 4 along the slotting direction parallel to the first transverse groove 2. The through groove 4 is used to fix the strip target material. The diameter of the through groove 4 is 8 mm.

[0064] In summary, the present invention can insert the roughness monitor into the first transverse groove 2 in advance before detecting the target material through the specific setting of the tooling body, and use the first vertical groove 1 to be close to the target material for stable detection. It has high accuracy, simple structure and is suitable for promotion.

[0065] The above description is only a specific implementation method of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present invention fall within the protection scope and disclosure scope of the present invention.

Claims

1. A tool for detecting the side of a strip target, characterized in that: The detection tool comprises a tool body, one side of which is provided with a first vertical groove and a first horizontal groove, wherein the first vertical groove is used to fix the side of the bar target; One end of the first vertical groove is connected to the first transverse groove to form a T-shaped groove. The first transverse groove is a through groove, and the groove depth of the first transverse groove is greater than the groove depth of the first vertical groove.

2. The detection tool for the side of the strip target according to claim 1, characterized in that: The tool body is an integrated structure.

3. The detection tool for the side of the strip target according to claim 1, characterized in that: The length of the first vertical groove is 45-46 mm.

4. The detection tool for the side of a strip target according to claim 1, characterized in that: The width of the first vertical groove is 22-23 mm.

5. The detection tool for the side of a strip target according to claim 1, characterized in that: The groove depth of the first vertical groove is 25-26 mm.

6. The tooling for detecting the side of a strip target according to claim 1, characterized in that: The length of the first transverse groove is 55-56 mm.

7. The tooling for detecting the side of a strip target according to claim 1, characterized in that: The width of the first transverse groove is 16-17 mm.

8. The tooling for detecting the side of a strip target according to claim 1, characterized in that: The groove depth of the first transverse groove is 33-34 mm.

9. The tooling for detecting the side of a strip target according to claim 1, characterized in that: The tool body is provided with at least two through holes on both sides of the first vertical slot along a slotting direction perpendicular to the first horizontal slot, and the through holes are used to fix the monitoring instrument; The diameter of the through hole is 8-9 mm.

10. The tooling for detecting the side of a strip target according to claim 1, characterized in that: The tool body is provided with at least one through groove along a slotting direction parallel to the first transverse groove, and the through groove is used to fix the bar-shaped target material; The diameter of the through groove is 8-9 mm.

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