Scraper unit, glue scraping device and glue scraping machine table

Abstract

The utility model provides a scraper unit, a glue scraping device and a glue scraping machine table. The scraper unit comprises a scraper column and a sliding rail, and the glue scraping device comprises a shell and a scraper formed by arranging a plurality of scraper units side by side. Wherein the tool post is columnar, and a sliding block matched with the sliding rail in shape is fixedly arranged at the upper end of the tool post, so that the tool post can slide up and down in the vertical direction. According to the technical scheme, the tool posts in the scraper units can move along the sliding rails, so that after the multiple scraper units are arranged side by side to form the complete scraper, in the glue scraping process, the lower ends of the tool posts can independently move up and down after making contact with the upper surface of a resin plate to be subjected to glue scraping; the overall shape of the lower edge of the scraper is changed to adapt to the shape of the upper surface of a resin plate to be subjected to glue scraping, so that the uniformity of the glue scraping effect is effectively improved. Through combination, the scraper units can be suitable for resin plates corresponding to crystal bars of various specifications, the production efficiency is effectively improved, and the cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular to a scraper unit, a glue scraping device and a glue scraping machine. Background Art

[0002] In the semiconductor wafer manufacturing process, the fixation and movement of the crystal rod is one of the key links. In order to ensure the stability of the crystal rod during the processing, a groove that matches the shape of the crystal rod is usually set on the surface of the resin plate, and glue is used to fix the crystal rod in the groove of the resin plate. The crystal rod can be moved later by moving the resin plate. Specifically, a proper amount of glue is dripped into the groove of the resin plate through a dispensing device, and then the excess glue is scraped off with a scraper, and the remaining glue forms a uniform glue layer on the surface of the groove. Finally, the crystal rod is placed in the groove to achieve the fixation of the crystal rod and the resin plate.

[0003] However, in the prior art, the scrapers in the scraping equipment are mostly fixed in design, and their shape, size and angle cannot be changed, nor can they be easily replaced. Therefore, the scraping equipment with this design has obvious limitations when used, that is, one scraping equipment can only be used to handle the bonding task of crystal rods of one specification, and multiple equipment needs to be configured for crystal rods of different specifications, resulting in increased space and money costs. For example, the scraper of a scraping equipment is specially designed for 8-inch crystal rods. When facing 12-inch crystal rods, the size of the scraper is significantly smaller than the corresponding resin plate groove size, and the curvature of the contact part is also quite different, resulting in the scraper being unable to form a good fit with the groove, making it difficult to effectively remove excess glue or achieve uniform distribution of glue, which seriously affects the actual scraping effect. Therefore, there is a need for a scraping equipment that can be applied to crystal rods of different sizes to improve the efficiency of wafer manufacturing and reduce the cost of wafer manufacturing. Utility Model Content

[0004] The purpose of the embodiments of the present application is to provide a scraper unit, a scraping device, and a scraping machine, wherein the blade column in the scraper unit can move along a slide rail. Therefore, after multiple scraper units are arranged side by side to form a complete scraper, during the scraping process, the lower end of each blade column can independently move up and down after contacting the upper surface of the resin plate to be scraped, so that the overall shape of the scraper lower edge changes to adapt to the shape of the upper surface of the resin plate to be scraped, thereby effectively improving the uniformity of the scraping effect. The scraper units of the present application can be combined to be applicable to resin plates corresponding to various specifications of crystal rods, effectively improving production efficiency and reducing costs.

[0005] In a first aspect, the present application provides a scraper unit comprising a blade column and a slide rail, wherein the blade column is cylindrical, and a slider matching the shape of the slide rail is fixedly provided on the upper end of the blade column, so that the blade column can slide up and down in the vertical direction.

[0006] In one feasible solution, the slide rail includes a first track and a second track that are parallel to each other, each having an adjustable magnetic attraction strength. When there is no magnetic attraction between the first track and the second track, the slider can move freely up and down along the slide rail. When there is magnetic attraction between the first track and the second track, the first track and the second track approach each other and clamp the slider, thereby fixing the position of the tool post.

[0007] In an implementable solution, the scraper unit is further provided with a cylinder with a variable volume, which is arranged above the knife column and is used to apply downward pressure to the knife column.

[0008] In one feasible solution, a raised scraping head is provided at the lower end of the knife column to increase the contact area between the knife column and the glue during the scraping process and reduce scratches on the surface of the resin plate.

[0009] In a second aspect, the present application provides a scraping device for scraping glue onto a resin plate through a groove where glue has been dispensed to form a uniform adhesive layer, comprising a housing and a scraper. The housing has a hollow interior with a long, strip-shaped opening at the bottom. The scraper comprises a plurality of scraper units arranged side by side, each having a blade column arranged vertically, a slide rail disposed within the housing, and a lower end of the blade column extending out of the housing through the opening.

[0010] In one feasible solution, the slide rail includes a first track and a second track that are parallel to each other, each having an adjustable magnetic attraction strength. When there is no magnetic attraction between the first track and the second track, the slider can move freely up and down along the slide rail. When there is magnetic attraction between the first track and the second track, the first track and the second track approach each other and clamp the slider, thereby fixing the position of the tool post.

[0011] In an implementable solution, the scraper unit is further provided with a cylinder with a variable volume, which is arranged above the knife column and is used to apply downward pressure to the knife column.

[0012] In one feasible solution, a raised scraping head is provided at the lower end of the knife column to increase the contact area between the knife column and the glue during the scraping process and reduce scratches on the surface of the resin plate.

[0013] In one feasible solution, the scraper unit is detachably arranged inside the housing.

[0014] In a third aspect, the present application provides a scraper machine comprising a scraper device, a base, a motion mechanism, a controller, and a driver. The base is used to place a resin plate and provide support for other components. The motion mechanism is disposed above the base. The motion mechanism includes a translation mechanism and a lifting mechanism, which are used to drive the scraper device to perform translational motion in the horizontal plane and vertical motion. The controller is connected to the driver signal and is used to control the driver to drive the translation mechanism and the lifting mechanism to perform corresponding movements.

[0015] Compared with the prior art, the beneficial effects of this application include at least:

[0016] In the scraper unit provided by the present application, the blade column can move along the slide rail. Therefore, after combining multiple scraper units to form a complete scraper, since the blade columns in each scraper unit can move in the vertical direction, when in use, the scraper is moved downward so that each blade column contacts the upper surface of the resin plate. The shape of the upper surface of the resin plate will push each blade column to move up and down respectively, so that the shape of the lower edge of the scraper adapts to the shape of the upper surface of the resin plate, making the scraping effect more uniform and avoiding the phenomenon of excessive or insufficient glue in some areas. Since the shape of the lower edge of the scraper can adapt to the shape of the upper surface of the resin plate, the scraper unit of the present application can be applied to resin plates corresponding to crystal rods of various specifications after combination, without the need to replace or adjust according to different tasks, which can effectively improve production efficiency and reduce costs.

[0017] Furthermore, the sliding rails in the scraper unit include a first rail and a second rail. When the shape of the lower edge of the scraper formed by the multiple scraper units adapts to the shape of the upper surface of the resin plate, the first rail and the second rail are attracted together by magnetic force, clamping the slider, increasing the friction between the slider and the sliding rail, and fixing the blade column in the vertical position, thereby fixing the shape of the lower edge of the scraper. This can effectively prevent the shape of the lower edge of the scraper from being disturbed and changing during the scraping process, which in turn leads to poor scraping results. In addition, by providing a cylinder in the scraper unit to apply downward pressure to the blade column, the position of the blade column can be further fixed, ensuring that the lower edge of the scraper always matches the shape of the upper surface of the resin plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 Schematic diagram of the internal structure of a scraper unit according to an embodiment of the present application;

[0020] Figure 2 It is a front view of the scraping device;

[0021] Figure 3 It is a bottom view of the scraping device;

[0022] Figure 4 This is a schematic diagram of the scraping machine.

[0023] In the figure: 1. Shell; 2. Scraper; 4. Base; 5. Motion mechanism; 6. Controller; 7. Driver; 8. Glue baffle; 9. Resin plate; 101. Opening; 301. Knife column; 302. Slide rail; 303. Cylinder; 311. Slider; 312. Glue scraper; 321. First track; 322. Second track; 501. Translation mechanism; 502. Lifting mechanism; 701. Belt. DETAILED DESCRIPTION

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0026] like Figure 1 As shown, the present application provides a scraper unit, including a knife column 301 and a slide rail 302. The knife column 301 is cylindrical, and a slider 311 that matches the shape of the slide rail 302 is fixed on the upper end of the knife column 301, so that the knife column 301 can slide up and down in the vertical direction.

[0027] Preferably, the slide rail 302 includes a first rail 321 and a second rail 322 that are parallel to each other, each having an adjustable magnetic attraction strength. When there is no magnetic attraction between the first rail 321 and the second rail 322, the slider 311 can freely move up and down along the slide rail 302. When there is magnetic attraction between the first rail 321 and the second rail 322, the first rail 321 and the second rail 322 approach each other and clamp the slider 311, thereby fixing the position of the tool post 301. Specifically, electromagnets can be positioned opposite each other on the first rail 321 and the second rail 322. When energized, these electromagnets generate opposing magnetic forces, thereby generating a force that forces the first rail 321 and the second rail 322 toward each other. Thus, by energizing or deenergizing the electromagnets on the first rail 321 and the second rail 322, the magnetic attraction strength of the first rail 321 and the second rail 322 can be controlled, thereby controlling the movement of the slider. Alternatively, the entire first rail 321 and the entire second rail 322 can be configured as electromagnets.

[0028] Furthermore, the first and second rails 321, 322 can be configured such that when the magnetic attraction strength is below a preset threshold, the slider 311 can freely move up and down along the slide rail 302; when the magnetic attraction strength is above the preset threshold, the first and second rails 321, 322 approach each other and clamp the slider 311, thereby fixing the position of the tool column 301. For example, the preset threshold can be set to ensure an attractive force of 10N between the first and second rails 321, 322. That is, when the attractive force between the first and second rails 321, 322 is less than 10N, the slider 311 can move up and down; when the attractive force is greater than or equal to 10N, the slider 311 is clamped and cannot move. In this way, the electromagnets on the first and second rails 321, 322 can remain energized at all times, and during use, the magnetic attraction strength of the first and second rails 321, 322 can be controlled by adjusting the current to control the movement of the slider 311. Specifically, factors such as the friction coefficient between the first rail 321 / the second rail 322 and the slider 311, the weight of the slider 311 and the knife column 301 will affect the preset threshold value of the magnetic attraction strength. Therefore, the preset threshold value of the magnetic attraction strength can be specifically determined according to actual conditions.

[0029] In addition, if Figure 1As shown, a cylinder 303 with a variable volume can also be provided in the scraper unit. The cylinder 303 is provided above the knife column 301 and is used to apply downward pressure to the knife column 301. Preferably, the cylinder 303 can be made of rubber. The cylinder 303 can be connected to an external gas cylinder or air compressor and other equipment through a pipeline to adjust the internal air pressure. Specifically, the air pressure inside the cylinder 303 can be adjusted within the range of 0.1MPa-0.6MPa. After the first rail 321 and the second rail 322 clamp the slider 311, the cylinder 303 can effectively press the knife column 301 to prevent the knife column 301 from moving upward due to external interference, so that the shape of the lower edge of the scraper 2 changes.

[0030] like Figure 1 As shown, a raised scraper head 312 can be provided at the lower end of the blade column 301. A spherical scraper head 312 is preferably used. Compared with a blade column without a scraper head, this design can increase the contact area between the blade column 301 and the glue during the scraping process, while also eliminating sharp corners, thereby preventing the sharp corners of the blade column 301 from contacting the upper surface of the resin plate 9 and reducing scratches on the upper surface of the resin plate 9.

[0031] like Figure 2 and Figure 3 As shown, the present application also provides a scraping device for scraping glue in the grooves on the resin plate 9 where glue is dispensed to form a glue layer with uniform thickness. Figure 2 and Figure 4 As shown, the upper surface of the resin plate 9 can be provided with a concave arc groove so that the crystal rod can be more firmly adhered to the resin plate 9 in the subsequent process flow. The scraper device includes a shell 1 and a scraper 2. The interior of the shell 1 is a hollow structure, and the bottom has a long strip opening 101. The scraper 2 is composed of a plurality of scraper units arranged side by side. The scraper unit includes a columnar knife column 301 and a slide rail 302 arranged in the vertical direction. The upper end of the knife column 301 is fixed with a slider 311 that matches the shape of the slide rail 302, so that the knife column 301 can slide up and down in the vertical direction. The slide rail 302 is provided inside the shell 1, and the lower end of the knife column 301 extends out of the outside of the shell 1 through the opening 101. Preferably, the scraper unit can be detachably provided inside the shell 1. For example, the slide rail 302 can be fixed inside the shell 1 by screws or snaps, so that the scraper unit can be disassembled and replaced as a whole later, thereby effectively reducing the difficulty and cost of maintenance.

[0032] When using, Figure 2As shown, the scraping device is first moved downward so that the lower end of each blade post 301 contacts the upper surface of the resin plate 9. The scraping device continues to move downward. At this point, the first and second rails 321, 322 are de-energized or the current is very weak, unable to generate sufficient attraction to clamp the slider 311. Therefore, each blade post 301 can freely move up and down along its corresponding rail 302 to adapt to the shape of the upper surface of the resin plate 9. When all blade posts 301 are in position, i.e., the shape of the lower edge of the scraper 2 matches the shape of the upper surface of the resin plate 9, the first and second rails 321, 322 are energized or the current is increased to generate sufficient attraction to clamp the slider 311. This brings the first and second rails 321, 322 closer together to clamp the slider 311, securing all blade posts 301 and thus fixing the shape of the lower edge of the scraper 2. This ensures that even if disturbances occur during the scraping process, such as minor unevenness on the upper surface of the resin plate 9 or jitter in the movement of the scraping device, the shape of the lower edge of the scraper 2 remains stable.

[0033] Since the scraper device uses multiple scraper units to form a complete scraper 2, the blade columns 301 in each scraper unit can move in the vertical direction relative to the housing 1. Therefore, when in use, the scraper device is moved downward so that each blade column 301 contacts the upper surface of the resin plate 9. The shape of the upper surface of the resin plate 9 will push each blade column 301 to move up and down respectively. Figure 2 As shown, the shape of the lower edge of the scraper 2 adapts to the shape of the upper surface of the resin plate 9, making the scraping effect more uniform and avoiding the phenomenon of excessive or insufficient glue in some areas. Because the shape of the lower edge of the scraper 2 can adapt to the shape of the upper surface of the resin plate 9, the scraping device of the present application is suitable for resin plates corresponding to various specifications of crystal ingots, without the need for replacement or adjustment according to different tasks, which can effectively improve production efficiency and reduce costs.

[0034] Furthermore, the slide rail 302 in the scraper unit includes a first rail 321 and a second rail 322. When the shape of the lower edge of the scraper 2 adapts to the shape of the upper surface of the resin plate 9, the first rail 321 and the second rail 322 approach each other under the action of magnetic attraction, clamping the slider 311, increasing the friction between the slider 311 and the slide rail 302, and fixing the blade column 301 relative to the housing 1, thereby fixing the shape of the lower edge of the scraper 2. This can effectively prevent the shape of the lower edge of the scraper 2 from being disturbed and changing during the scraping process, thereby resulting in poor scraping effect. In addition, by providing a cylinder 303 in the scraper unit to apply downward pressure to the blade column 301, the position of the blade column 301 can be further fixed, ensuring that the lower edge of the scraper 2 always matches the shape of the upper surface of the resin plate 9.

[0035] Generally, increasing the number of scraper units and reducing the bottom diameter of the blade posts 301 improves the fit of the scraper's lower edge formed by all blade posts 301 with the surface of the resin sheet 9, thereby ensuring better scraping results. However, an excessive number of scraper units increases the probability of scraper 2 malfunctioning, while excessively thin blade posts 301 may result in insufficient strength, making them susceptible to breakage and other accidents during the scraping process. Therefore, the number and size of blade posts 301 should be carefully calculated and analyzed. Currently, the maximum diameter of a crystal ingot used in actual production is 300 mm, and the maximum required resin sheet width is 200 mm. Therefore, scraper 2 can include 100 scraper units, each with a bottom diameter of 2 mm, to cover all possible resin sheet sizes. Furthermore, blade posts 301 can be made of polyphenylene sulfide (PPS), which offers excellent wear and chemical resistance, meeting the various requirements of the scraping process and extending the service life of scraper 2.

[0036] like Figure 4 As shown, the present application also provides a scraper machine, including a scraper device, a base 4, a motion mechanism 5, a controller 6 and a driver 7. Among them, the base 4 is used to place the resin plate and provide support for other components. The motion mechanism 5 is arranged above the base 4. The motion mechanism 5 includes a translation mechanism 501 and a lifting mechanism 502, which are used to drive the scraper device to perform translational movement in the horizontal plane and movement in the vertical direction. The controller 6 is connected to the driver 7 signal, and is used to control the driver 7 to drive the translation mechanism 501 and the lifting mechanism 502 to perform corresponding movements respectively. Specifically, a servo motor can be used as a driver, such as Figure 4 As shown, the translation mechanism 501 can be driven by a belt 701 to achieve translational motion. The lifting mechanism 502 is disposed below the translation mechanism 501, and the scraping device is installed below the lifting mechanism 502. The movement accuracy of the lifting mechanism 502 is at least ±0.05 mm.

[0037] In one embodiment, if Figure 4 As shown, the upper surface of the base 4 can also be provided with a rubber baffle 8, which is located on both sides of the resin plate 9 (for easy observation, Figure 4 Only one side of the glue baffle 8 is shown in the figure), which is used to prevent glue from overflowing to both sides of the resin plate 9 during the scraping process, ensuring that the glue only exists on the upper surface of the resin plate 9 to facilitate the smooth progress of subsequent production processes.

[0038] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A scraper unit, characterized in that: include: A knife column (301), wherein the knife column (301) is columnar; A slide rail (302) is fixedly provided on the upper end of the knife column (301) with a slider (311) that matches the shape of the slide rail (302), so that the knife column (301) can slide up and down in the vertical direction.

2. The scraper unit according to claim 1, characterized in that The slide rail (302) comprises a first track (321) and a second track (322) which are parallel to each other, and the first track (321) and the second track (322) have adjustable magnetic attraction strengths; When there is no magnetic attraction between the first track (321) and the second track (322), the slider (311) can freely move up and down along the slide rail (302); when there is magnetic attraction between the first track (321) and the second track (322), the first track (321) and the second track (322) approach each other and clamp the slider (311), thereby fixing the position of the knife column (301).

3. The scraper unit according to claim 1, characterized in that A cylinder (303) with a variable volume is also provided. The cylinder (303) is provided above the knife column (301) and is used to apply downward pressure to the knife column (301).

4. The scraper unit according to claim 1, characterized in that A raised scraping head (312) is provided at the lower end of the knife column (301) for increasing the contact area between the knife column (301) and the glue during the scraping process and reducing scratches on the surface of the resin plate.

5. A glue scraping device for scraping glue on a resin plate through a groove where glue is dispensed to form a glue layer of uniform thickness, characterized in that: include: A housing (1), wherein the interior of the housing (1) is a hollow structure, and a bottom has a long strip-shaped opening (101); The scraper (2) is composed of a plurality of scraper units arranged side by side; the scraper unit includes a columnar blade column (301) and a slide rail (302) arranged in a vertical direction, and a slider (311) that matches the shape of the slide rail (302) is fixedly provided on the upper end of the blade column (301), so that the blade column (301) can slide up and down in the vertical direction; the slide rail (302) is arranged inside the shell (1), and the lower end of the blade column (301) extends out of the shell (1) through the opening (101).

6. The scraping device according to claim 5, characterized in that: The slide rail (302) comprises a first track (321) and a second track (322) which are parallel to each other, and the first track (321) and the second track (322) have adjustable magnetic attraction strengths; When there is no magnetic attraction between the first track (321) and the second track (322), the slider (311) can freely move up and down along the slide rail (302); when there is magnetic attraction between the first track (321) and the second track (322), the first track (321) and the second track (322) approach each other and clamp the slider (311), thereby fixing the position of the knife column (301).

7. The scraping device according to claim 5, characterized in that: A cylinder (303) with a variable volume is also provided. The cylinder (303) is provided above the knife column (301) and is used to apply downward pressure to the knife column (301).

8. The scraping device according to claim 5, characterized in that: A raised scraping head (312) is provided at the lower end of the knife column (301) for increasing the contact area between the knife column (301) and the glue during the scraping process and reducing scratches on the surface of the resin plate.

9. The scraping device according to claim 5, characterized in that: The scraper unit is detachably arranged inside the housing (1).

10. A scraping machine, characterized in that: The scraping device according to any one of claims 5 to 9 further comprises: A base (4) for placing the resin plate and providing support for other components; A motion mechanism (5) is provided above the base (4); the motion mechanism (5) comprises a translation mechanism (501) and a lifting mechanism (502), and is used to drive the scraping device to perform translational motion in a horizontal plane and vertical motion; A controller (6) and a driver (7), wherein the controller (6) is connected to the driver (7) via signals and is used to control the driver (7) to drive the translation mechanism (501) and the lifting mechanism (502) to respectively perform corresponding movements.

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