Upper sealing cover with cold water cavity for MPCVD (Micro Pressure Chemical Vapor Deposition) equipment

Abstract

The utility model discloses a sealing upper cover with a cold water cavity for MPCVD equipment, which comprises a sealing cover body, a shell is arranged at the top end of the sealing cover body, a first water-cooling cavity is formed between the shell and the sealing cover body, a plurality of observation windows are arranged on the outer side wall of the shell, and the first water-cooling cavity is communicated with the first water-cooling cavity. The multiple observation windows penetrate through the shell and the sealing cover body, and part of window bodies of the multiple observation windows are located in the first water cooling cavity; the outer side wall of the shell is further provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both communicated with the first water cooling cavity. According to the utility model, the cooling liquid flows in the first water cooling cavity, so that the cooling liquid can be in contact with the sealing cover body, the shell and the window bodies of the observation windows, thereby taking away the heat of the sealing cover body, the shell and the observation windows and carrying out cooling and heat dissipation on the sealing cover body, the shell and the observation windows.

Description

Technical Field

[0001] The utility model relates to the technical field of accessories for MPCVD equipment, in particular to a sealing upper cover with a cold water cavity for MPCVD equipment. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is a method used to grow artificial diamonds. This method places a seed crystal in a vacuum chamber and introduces a carbon-containing mixed gas containing nitrogen, methane and hydrogen. Methane is the source of carbon atoms for synthetic diamonds, while nitrogen acts as a catalyst to increase the growth rate of diamonds. Hydrogen can inhibit the formation of graphite. Under the action of microwave plasma, the carbon-containing gas is dissociated and carbon atoms are deposited into a diamond film on the diamond substrate.

[0003] For example, the patent with application number CN221275888U includes a sealing cover body and a piping system; the interior of the sealing cover body is provided with a first cooling water chamber, a second cooling water chamber and a third cooling water chamber, and the second cooling water chamber and the third cooling water chamber are connected by a water inlet channel; the outer end surface of the sealing cover body is provided with a first water inlet, a first water outlet, a second water inlet and a second water outlet, the first water inlet and the first water outlet are connected to the first cooling water chamber, the second water inlet is connected to the second cooling water chamber, and the second water outlet is connected to the third cooling water chamber; the piping system includes a water inlet pipe, a circulation pipe and a water outlet pipe.

[0004] Although the above device can cool and dissipate heat for the sealing cover body through the first cooling water chamber, the second cooling water chamber and the third cooling water chamber, the coolant in the first cooling water chamber, the second cooling water chamber and the third cooling water chamber cannot directly contact the observation window installed on the sealing cover body, so the cooling effect on the observation window is not good. Utility Model Content

[0005] In view of the above-mentioned defects, the purpose of the present invention is to provide a sealed upper cover with a cold water chamber for MPCVD equipment to solve the problem that the cooling structure of the existing sealing cover has a poor cooling effect on the observation window.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A sealed upper cover with a cold water chamber for MPCVD equipment includes a sealing cover body, a housing provided at the top of the sealing cover body, a first water-cooling chamber formed between the housing and the sealing cover body, and a plurality of observation windows provided on an outer wall of the housing. The plurality of observation windows are provided through the housing and the sealing cover body, and a portion of the windows of the plurality of observation windows are located within the first water-cooling chamber.

[0008] The outer side wall of the shell is further provided with a first water inlet and a first water outlet, and both the first water inlet and the first water outlet are communicated with the first water cooling cavity.

[0009] Preferably, the first water inlet is located below the first water outlet.

[0010] Preferably, the housing comprises two semi-conical shells, and the two shells are sealed and butted together to form the truncated cone-shaped housing.

[0011] Preferably, a first mounting hole adapted to the observation window is provided in the middle of the side wall of each shell, a second mounting hole is provided on the left and right edges of the side wall of each shell, and the first mounting hole is formed by docking the two second mounting holes of the two shells.

[0012] Preferably, a second water-cooling cavity is further provided inside the sealing cover body, and a second water inlet and a second water outlet communicating with the second water-cooling cavity are provided at the top end of the sealing cover body.

[0013] Preferably, an air inlet cavity is further provided inside the sealing cover body, an air inlet port connected to the air inlet cavity is provided at the top of the sealing cover body, a plurality of air outlet holes are provided on the inner bottom wall of the air inlet cavity, and the plurality of air outlet holes are all provided through the inner top wall of the sealing cover body.

[0014] Preferably, a plurality of annular arrays of the air outlet holes are arranged on the inner bottom wall of the air inlet cavity.

[0015] Preferably, the air inlet cavity is located between the second water-cooling cavity and the first water-cooling cavity.

[0016] The technical solution provided by the utility model may have the following beneficial effects:

[0017] By flowing the cooling liquid in the first water-cooling chamber, the cooling liquid can come into contact with the sealing cover body, the outer shell and the window bodies of the several observation windows, thereby taking away the heat of the sealing cover body, the outer shell and the several observation windows, and cooling and dissipating the sealing cover body, the outer shell and the several observation windows. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is an exploded view of the structure of the sealing cover body and the shell of the utility model;

[0020] Figure 3 It is a schematic diagram of the internal structure of the sealing cover body and the shell of the utility model.

[0021] Among them: 1. Sealing cover body; 2. Outer shell; 21. First water inlet; 22. First water outlet; 23. Shell; 231. First mounting hole; 232. Second mounting hole; 3. First water-cooling chamber; 4. Observation window; 5. Second water-cooling chamber; 51. Second water inlet; 52. Second water outlet; 6. Air inlet chamber; 61. Air inlet; 62. Air outlet. DETAILED DESCRIPTION

[0022] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0023] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more such features, and are used to distinguish between the described features, without distinction of order or importance.

[0024] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0025] Below is the accompanying drawings Figures 1 to 3 The technical solution of the utility model is further illustrated through specific implementation methods.

[0026] like Figure 1-3As shown, a sealed upper cover with a cold water chamber for MPCVD equipment includes a sealed cover body 1, a shell 2 is provided at the top of the sealed cover body 1, a first water-cooling chamber 3 is formed between the shell 2 and the sealed cover body 1, and a plurality of observation windows 4 are provided on the outer wall of the shell 2. The plurality of observation windows 4 are provided through the shell 2 and the sealed cover body 1, and part of the window body of the plurality of observation windows 4 is located inside the first water-cooling chamber 3;

[0027] The outer wall of the housing 2 is further provided with a first water inlet 21 and a first water outlet 22 . Both the first water inlet 21 and the first water outlet 22 are in communication with the first water-cooling chamber 3 .

[0028] By flowing the coolant in the first water-cooling chamber 3, the coolant can come into contact with the sealing cover body 1, the outer shell 2 and the window bodies of the plurality of observation windows 4, thereby taking away the heat of the sealing cover body 1, the outer shell 2 and the plurality of observation windows 4, and cooling and dissipating the heat of the sealing cover body 1, the outer shell 2 and the plurality of observation windows 4.

[0029] like Figure 3 As shown, the first water inlet 21 is located below the first water outlet 22 .

[0030] Specifically, the first water inlet 21 is located below the first water outlet 22, so that the coolant can enter the first water-cooling chamber 3 from the first water inlet 21 and will not flow out from the first water outlet 22 until the coolant fills the first water-cooling chamber 3, so that the coolant can fully contact the sealing cover 1, the outer shell 2 and the plurality of observation windows 4 to take away heat, thereby achieving a good cooling effect.

[0031] like Figure 2 As shown, the housing 2 includes two semi-conical shells 23 , and the two shells 23 are sealed and butted together to form the truncated cone-shaped housing 2 .

[0032] like Figure 2 As shown, a first mounting hole 231 adapted to the observation window 4 is provided in the middle of the side wall of each shell 23, and a second mounting hole 232 is provided on the left and right edges of the side wall of each shell 23, and the first mounting hole 231 is formed by docking the two second mounting holes 232 of the two shells 23.

[0033] Specifically, when assembling the sealing upper cover, the two shells 23 are respectively installed on the top of the sealing cover body 1 from both sides of the top of the sealing cover body 1, wherein the two observation windows 4 are just installed in the first mounting holes 231 in the middle of the side walls of the corresponding shells 23, and the other two observation windows 4 are just installed in the first mounting holes 231 formed after the corresponding two second mounting holes 232 are connected. Then, the outer shell 2 is connected to the sealing cover body 1 and several observation windows 4 by welding to assemble the sealing upper cover, thereby making the assembly of the sealing upper cover easier and faster.

[0034] like Figure 3 As shown, a second water cooling chamber 5 is further provided inside the sealing cover body 1 , and a second water inlet 51 and a second water outlet 52 communicating with the second water cooling chamber 5 are provided at the top of the sealing cover body 1 .

[0035] Specifically, the flow of the cooling liquid in the second water-cooling chamber 5 can further cool the sealing cover body 1, thereby improving the cooling effect of the sealing upper cover.

[0036] like Figure 3 As shown, the interior of the sealing cover body 1 is also provided with an air inlet cavity 6, the top of the sealing cover body 1 is provided with an air inlet port 61 connected to the air inlet cavity 6, the inner bottom wall of the air inlet cavity 6 is provided with a plurality of air outlet holes 62, and the plurality of air outlet holes 62 are all provided through the inner top wall of the sealing cover body 1.

[0037] like Figure 3 As shown, a plurality of the air outlet holes 62 are arranged in a circular array on the inner bottom wall of the air inlet cavity 6 .

[0038] Specifically, the reaction gas is introduced into the air inlet cavity 6 through the air inlet 61, and then flows into the interior of the sealed upper cover through a plurality of air outlet holes 62. The air outlet holes 62 arranged in a ring array can allow the reaction gas to evenly enter the interior of the sealed upper cover from the top of the sealed upper cover.

[0039] like Figure 3 As shown, the air inlet cavity 6 is located between the second water-cooling cavity 5 and the first water-cooling cavity 3 .

[0040] Specifically, the air inlet cavity 6 can be cooled by the second water-cooling cavity 5 and the first water-cooling cavity 3 , thereby preventing the temperature in the air inlet cavity 6 from being too high and ensuring the safety and stability of the equipment.

[0041] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will be able to devise other specific implementations of the present invention without inventive effort, and such implementations will fall within the scope of protection of the present invention.

Claims

1. A sealed upper cover with a cold water chamber for MPCVD equipment, characterized in that: The invention comprises a sealing cover body (1), a shell (2) is provided at the top of the sealing cover body (1), a first water-cooling cavity (3) is formed between the shell (2) and the sealing cover body (1), a plurality of observation windows (4) are provided on the outer wall of the shell (2), the plurality of observation windows (4) are all provided through the shell (2) and the sealing cover body (1), and part of the window bodies of the plurality of observation windows (4) are all located inside the first water-cooling cavity (3); The outer side wall of the shell (2) is further provided with a first water inlet (21) and a first water outlet (22), and both the first water inlet (21) and the first water outlet (22) are in communication with the first water-cooling chamber (3).

2. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 1, characterized in that: The first water inlet (21) is located below the first water outlet (22).

3. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 1, characterized in that: The housing (2) comprises two semi-conical shells (23), and the two shells (23) are sealed and butted together to form the truncated cone-shaped housing (2).

4. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 3, characterized in that: A first mounting hole (231) adapted to the observation window (4) is provided in the middle of the side wall of each shell (23), and a second mounting hole (232) is provided on the left and right edges of the side wall of each shell (23), and the first mounting hole (231) is formed by butting the two second mounting holes (232) of the two shells (23).

5. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 1, characterized in that: A second water-cooling cavity (5) is further provided inside the sealing cover body (1), and a second water inlet (51) and a second water outlet (52) communicating with the second water-cooling cavity (5) are provided at the top end of the sealing cover body (1).

6. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 5, characterized in that: An air inlet cavity (6) is further provided inside the sealing cover body (1), an air inlet port (61) communicating with the air inlet cavity (6) is provided at the top end of the sealing cover body (1), a plurality of air outlet holes (62) are provided on the inner bottom wall of the air inlet cavity (6), and the plurality of air outlet holes (62) are all provided through the inner top wall of the sealing cover body (1).

7. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 6, characterized in that: A plurality of air outlet holes (62) are arranged in an annular array on the inner bottom wall of the air inlet cavity (6).

8. The sealed upper cover with a cold water chamber for MPCVD equipment according to claim 6, characterized in that: The air inlet cavity (6) is located between the second water-cooling cavity (5) and the first water-cooling cavity (3).

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