MPCVD cavity structure with good sealing performance

Abstract

The utility model discloses an MPCVD cavity structure with good sealing performance, which comprises an upper cover and a container, the upper cover covers the top end of the container, and a reaction chamber is formed between the upper cover and the container; a first annular sealing groove and a second annular sealing groove are formed in the top end of the container, and sealing rings are mounted in the first annular sealing groove and the second annular sealing groove; a first water cooling cavity is formed in the container, and the container is provided with a first water inlet and a first water outlet which are communicated with the first water cooling cavity. Cooling liquid enters the first water cooling cavity through the first water inlet and flows out of the first water outlet to take away heat of the container, so that the first annular sealing groove and the second annular sealing groove in the top end of the container are cooled, the situation that the sealing rings are in a high-temperature environment and are prone to aging is avoided, and therefore the sealing stability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of accessories for MPCVD equipment, in particular to an MPCVD cavity structure with good sealing performance. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is a method used to grow artificial diamonds. This method places a seed crystal in a vacuum chamber and introduces a carbon-containing mixed gas containing nitrogen, methane and hydrogen. Methane is the source of carbon atoms for synthetic diamonds, while nitrogen acts as a catalyst to increase the growth rate of diamonds. Hydrogen can inhibit the formation of graphite. Under the action of microwave plasma, the carbon-containing gas is dissociated and carbon atoms are deposited into a diamond film on the diamond substrate.

[0003] For example, the patent with application number CN220643255U includes a mounting seat, a container, a top cover and a lifting drive device, wherein the container and the lifting drive device are both mounted on the top surface of the mounting seat; a clamping member is mounted on the movable end of the lifting drive device, wherein the clamping member has a clamping space, the top cover is located in the clamping space, and the top cover is fixedly connected to the clamping member; the clamping member is located directly above the container, and the lifting drive device is used to drive the top cover to close on the container and drive the top cover away from the container, and the top cover and the container form a reaction chamber.

[0004] The temperature of the above device is relatively high during use, and there is no cooling mechanism at the container to cool the container, so the sealing ring on the container is prone to aging, resulting in poor sealing stability of the device. Utility Model Content

[0005] In response to the above-mentioned defects, the purpose of the present invention is to propose an MPCVD chamber structure with good sealing performance, so as to solve the problem that the container of the existing MPCVD equipment lacks a cooling mechanism to cool the container, so the sealing ring on the container is prone to aging, resulting in poor sealing stability of the device.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] An MPCVD chamber structure with good sealing performance comprises an upper cover and a container, wherein the upper cover is covered on the top of the container, and a reaction chamber is formed between the upper cover and the container;

[0008] The top of the container is provided with a first annular sealing groove and a second annular sealing groove, and sealing rings are installed in the first annular sealing groove and the second annular sealing groove;

[0009] A first water-cooling cavity is provided inside the container, and a first water inlet and a first water outlet are provided in the container that are in communication with the first water-cooling cavity.

[0010] Preferably, an annular vacuum groove is formed at the top of the container, the annular vacuum groove is located between the first annular sealing groove and the second annular sealing groove, and a through hole is formed on the inner bottom wall of the annular vacuum groove, the through hole is connected to the first annular sealing groove and the second annular sealing groove;

[0011] A first air pumping hole is provided above the annular vacuum groove. The first air pumping hole is arranged at the bottom end of the upper cover. The first air pumping hole is connected to an external first air pumping device.

[0012] Preferably, an annular microwave shielding groove is provided at the top of the container, a microwave shielding ring is provided inside the annular microwave shielding groove, the first annular sealing groove is located on the inner side of the second annular sealing groove, and the annular microwave shielding groove is located on the inner side of the first annular sealing groove.

[0013] Preferably, the top of the container is provided with an air storage hole connected to the first annular sealing groove, the air storage hole is located between the first annular sealing groove and the annular microwave shielding groove, and the air storage hole is connected to the reaction chamber.

[0014] Preferably, the first water inlet is located at the outer bottom wall of the container, and the first water outlet is located at the top end of the outer side wall of the container.

[0015] Preferably, the inner bottom wall of the container is provided with a groove, the top end of the groove is detachably covered with a sealing plate, the top end of the sealing plate is provided with a plurality of second air extraction holes connected to the groove, and the groove is connected to an external second air extraction device.

[0016] Preferably, a plurality of second air extraction holes are arranged in an annular array at the top end of the sealing plate.

[0017] Preferably, the top edge of the upper cover is provided with a plurality of first mounting holes, and the top edge of the container is provided with second mounting holes corresponding one-to-one to the plurality of first mounting holes. When the upper cover is closed on the top of the container, the first mounting holes and the second mounting holes are fixedly connected by fasteners.

[0018] Preferably, the top edge of the container is symmetrically provided with a plurality of positioning posts, and the top edge of the upper cover is provided with positioning holes corresponding one-to-one to the plurality of positioning posts. When the upper cover is closed on the top of the container, the positioning posts are inserted into the positioning holes.

[0019] Preferably, a second water-cooling cavity is provided inside the upper cover, and a second water inlet and a second water outlet communicating with the second water-cooling cavity are provided on the outer side wall of the upper cover.

[0020] The technical solution provided by the utility model may have the following beneficial effects:

[0021] The utility model allows the coolant to enter the first water cooling chamber through the first water inlet and flow out from the first water outlet to take away the heat of the container, so as to cool the first annular sealing groove and the second annular sealing groove at the top of the container, thereby preventing the sealing ring from being in a high temperature environment and being easily aged, thereby improving the sealing stability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 This is a schematic diagram of the internal structure of the upper cover of the utility model being closed on the container;

[0024] Figure 3 This utility model Figure 2 A magnified view of area A in ;

[0025] Figure 4 It is a structural schematic diagram of the container of the utility model;

[0026] Figure 5 This utility model Figure 4 A magnified view of area A in ;

[0027] Figure 6 It is a schematic diagram of the internal structure of the container of the present utility model.

[0028] Wherein: 1. upper cover; 11. first air extraction hole; 12. first air extraction device; 13. first mounting hole; 14. positioning hole; 15. second water-cooling chamber; 2. container; 21. first annular sealing groove; 211. air storage hole; 22. second annular sealing groove; 23. sealing ring; 24. annular vacuum groove; 241. through hole; 25. microwave shielding groove; 251. microwave shielding ring; 26. groove; 27. sealing plate; 271. second air extraction hole; 28. second air extraction device; 29. ​​positioning column; 3. first water-cooling chamber; 31. first water inlet; 32. first water outlet. DETAILED DESCRIPTION

[0029] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0030] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more such features, and are used to distinguish between the described features, without distinction of order or importance.

[0031] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0032] Below is the attached figure Figures 1 to 6 The technical solution of the utility model is further illustrated through specific implementation methods.

[0033] like Figure 1-6 As shown, a MPCVD chamber structure with good sealing performance includes an upper cover 1 and a container 2, wherein the upper cover 1 covers the top of the container 2, and a reaction chamber is formed between the upper cover 1 and the container 2;

[0034] The top of the container 2 is provided with a first annular sealing groove 21 and a second annular sealing groove 22, and a sealing ring 23 is installed in each of the first annular sealing groove 21 and the second annular sealing groove 22;

[0035] A first water-cooling chamber 3 is provided inside the container 2 , and a first water inlet 31 and a first water outlet 32 ​​are provided in the container 2 , which are in communication with the first water-cooling chamber 3 .

[0036] The coolant enters the first water-cooling chamber 3 through the first water inlet 31 and flows out from the first water outlet 32 ​​to remove the heat of the container 2, so as to cool the first annular sealing groove 21 and the second annular sealing groove 22 at the top of the container 2, thereby preventing the sealing ring 23 from being in a high temperature environment and being easily aged, thereby improving the sealing stability of the device.

[0037] like Figure 2-4As shown, an annular vacuum groove 24 is formed at the top of the container 2, and the annular vacuum groove 24 is located between the first annular sealing groove 21 and the second annular sealing groove 22. A through hole 241 is formed on the inner bottom wall of the annular vacuum groove 24, and the through hole 241 is connected to the first annular sealing groove 21 and the second annular sealing groove 22;

[0038] A first air extraction hole 11 is provided above the annular vacuum groove 24 . The first air extraction hole 11 is provided at the bottom end of the upper cover 1 . The first air extraction hole 11 is connected to an external first air extraction device 12 .

[0039] Specifically, when vacuuming, the gas on the outside of the sealing ring 23 in the first annular sealing groove 21 and the gas on the inside of the sealing ring 23 in the second annular sealing groove 22 enter the annular vacuum groove 24 through the through hole 241, and the gas in the annular vacuum groove 24 is extracted by the first exhaust device 12 through the first exhaust hole 11, so that the connection between the container 2 and the upper cover 1 is more tightly fitted together, and under the action of the sealing ring 23, external air is prevented from entering the reaction chamber through the connection between the container 2 and the upper cover 1.

[0040] like Figure 2-4 As shown, an annular microwave shielding groove 25 is provided at the top of the container 2, a microwave shielding ring 251 is provided inside the annular microwave shielding groove 25, the first annular sealing groove 21 is located on the inner side of the second annular sealing groove 22, and the annular microwave shielding groove 25 is located on the inner side of the first annular sealing groove 21.

[0041] Specifically, the microwave shielding ring 251 can be provided to prevent microwave leakage in the reaction chamber from affecting the external environment and the deposition of diamonds.

[0042] like Figure 2-4 As shown, the top of the container 2 is provided with an air storage hole 211 connected to the first annular sealing groove 21, and the air storage hole 211 is located between the first annular sealing groove 21 and the annular microwave shielding groove 25, and the air storage hole 211 is connected to the reaction chamber.

[0043] Specifically, when the first air extraction device 12 is evacuating a vacuum, the sealing ring 23 deforms so that the upper and lower ends of the sealing ring 23 are respectively in close contact with the upper cover 1 and the container 2 to achieve sealing. Therefore, the air inside the sealing ring 23 of the first annular sealing groove 21 cannot be extracted through the gap between the sealing ring 23 and the upper cover 1 and the container 2. This part of the air will gradually flow into the reaction chamber along the gap between the container 2 and the upper cover 1, affecting the vacuum environment in the reaction chamber and thus affecting the deposition of diamonds. Therefore, the air storage hole 211 is provided to communicate with the reaction chamber. When the reaction chamber is evacuated, the air inside the sealing ring 23 of the first annular sealing groove 21 can flow into the reaction chamber through the air storage hole 211 and be extracted, thereby avoiding the residual air inside the sealing ring 23 of the first annular sealing groove 21.

[0044] like Figure 6 As shown, the first water inlet 31 is located at the outer bottom wall of the container 2 , and the first water outlet 32 ​​is located at the top end of the outer side wall of the container 2 .

[0045] Specifically, the first water inlet 31 is located above the first water outlet 32, so that the coolant can fill the first water cooling chamber 3 and then flow out from the first water outlet 32, so that the coolant can fully contact the first water cooling chamber 3 to achieve a good cooling effect.

[0046] like Figure 2 and 4 As shown, a groove 26 is provided on the inner bottom wall of the container 2, and a sealing plate 27 is removably covered on the top of the groove 26. A plurality of second air extraction holes 271 connected to the groove 26 are provided on the top of the sealing plate 27, and the groove 26 is connected to an external second air extraction device 28.

[0047] Specifically, the air in the reaction chamber enters the groove 26 through the plurality of second air extraction holes 271 and is then extracted by the second air extraction device 28 , so that a vacuum environment is formed in the reaction chamber.

[0048] Furthermore, the sealing plate 27 is detachably covered on the top of the groove 26 by bolts, so that the sealing plate 27 can be easily removed to clean the groove 26, thereby preventing impurities generated during the diamond growth process from entering the groove 26 through the second exhaust hole 271 and affecting the vacuum of the device.

[0049] like Figure 1 As shown, a plurality of second air extraction holes 271 are arranged in a circular array at the top end of the sealing plate 27 .

[0050] Specifically, a plurality of second air extraction holes 271 are provided in an annular array at the top of the sealing plate 27 , so that the air in the reaction chamber can be evenly extracted.

[0051] like Figure 1 As shown, the top edge of the upper cover 1 is provided with a plurality of first mounting holes 13, and the top edge of the container 2 is provided with second mounting holes corresponding one-to-one to the plurality of first mounting holes 13. When the upper cover 1 is covered on the top of the container 2, the first mounting holes 13 and the second mounting holes are fixedly connected by fasteners.

[0052] Preferably, the fasteners are bolts, which can facilitate assembly and disassembly between the container 2 and the upper cover 1.

[0053] like Figure 1 As shown, a plurality of positioning posts 29 are symmetrically provided on the top edge of the container 2, and a positioning hole 14 corresponding one-to-one to the plurality of positioning posts 29 is provided on the top edge of the upper cover 1. When the upper cover 1 is covered on the top of the container 2, the positioning posts 29 are inserted into the positioning holes 14.

[0054] Specifically, the cooperation between the positioning posts 29 and the positioning holes 14 can facilitate the sealed docking of the upper cover 1 and the container 2 .

[0055] like Figure 2 As shown, a second water-cooling chamber 15 is provided inside the upper cover 1 , and a second water inlet and a second water outlet communicating with the second water-cooling chamber 15 are provided on the outer wall of the upper cover 1 .

[0056] Specifically, the upper cover 1 can be cooled by the second water-cooling chamber 15 , thereby preventing the upper cover 1 from being overheated and causing the sealing ring 23 to be overheated.

[0057] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will be able to devise other specific implementations of the present invention without inventive effort, and such implementations will fall within the scope of protection of the present invention.

Claims

1. An MPCVD chamber structure with good sealing performance, characterized in that: It comprises an upper cover (1) and a container (2), wherein the upper cover (1) covers the top of the container (2), and a reaction chamber is formed between the upper cover (1) and the container (2); The top of the container (2) is provided with a first annular sealing groove (21) and a second annular sealing groove (22), and a sealing ring (23) is installed in each of the first annular sealing groove (21) and the second annular sealing groove (22); A first water-cooling cavity (3) is provided inside the container (2), and the container (2) is provided with a first water inlet (31) and a first water outlet (32) which are in communication with the first water-cooling cavity (3).

2. The MPCVD chamber structure with good sealing performance according to claim 1, characterized in that: An annular vacuum groove (24) is provided at the top of the container (2), the annular vacuum groove (24) is located between the first annular sealing groove (21) and the second annular sealing groove (22), a through hole (241) is provided on the inner bottom wall of the annular vacuum groove (24), and the through hole (241) is connected to the first annular sealing groove (21) and the second annular sealing groove (22); A first air extraction hole (11) is provided above the annular vacuum groove (24). The first air extraction hole (11) is provided at the bottom end of the upper cover (1). The first air extraction hole (11) is connected to an external first air extraction device (12).

3. The MPCVD chamber structure with good sealing performance according to claim 2, characterized in that: An annular microwave shielding groove (25) is provided at the top end of the container (2), a microwave shielding ring (251) is provided inside the annular microwave shielding groove (25), the first annular sealing groove (21) is located inside the second annular sealing groove (22), and the annular microwave shielding groove (25) is located inside the first annular sealing groove (21).

4. The MPCVD chamber structure with good sealing performance according to claim 3, characterized in that: The top of the container (2) is provided with an air storage hole (211) connected to the first annular sealing groove (21), the air storage hole (211) is located between the first annular sealing groove (21) and the annular microwave shielding groove (25), and the air storage hole (211) is connected to the reaction chamber.

5. The MPCVD chamber structure with good sealing performance according to claim 1, characterized in that: The first water inlet (31) is located at the outer bottom wall of the container (2), and the first water outlet (32) is located at the top end of the outer side wall of the container (2).

6. The MPCVD chamber structure with good sealing performance according to claim 1, characterized in that: The inner bottom wall of the container (2) is provided with a groove (26), the top end of the groove (26) is detachably covered with a sealing plate (27), the top end of the sealing plate (27) is provided with a plurality of second air extraction holes (271) connected to the groove (26), and the groove (26) is connected to an external second air extraction device (28).

7. The MPCVD chamber structure with good sealing performance according to claim 6, characterized in that: A plurality of second air extraction holes (271) are arranged in an annular array at the top end of the sealing plate (27).

8. The MPCVD chamber structure with good sealing performance according to claim 1, characterized in that: The top edge of the upper cover (1) is provided with a plurality of first mounting holes (13), and the top edge of the container (2) is provided with second mounting holes corresponding one-to-one to the plurality of first mounting holes (13). When the upper cover (1) is covered on the top of the container (2), the first mounting holes (13) and the second mounting holes are fixedly connected by fasteners.

9. The MPCVD chamber structure with good sealing performance according to claim 1, characterized in that: The top edge of the container (2) is symmetrically provided with a plurality of positioning posts (29), and the top edge of the upper cover (1) is provided with positioning holes (14) corresponding one-to-one to the plurality of positioning posts (29). When the upper cover (1) is covered on the top of the container (2), the positioning posts (29) are inserted into the positioning holes (14).

10. The MPCVD chamber structure with good sealing performance according to claim 1, characterized in that: A second water-cooling cavity (15) is provided inside the upper cover (1), and a second water inlet and a second water outlet communicated with the second water-cooling cavity (15) are provided on the outer side wall of the upper cover (1).

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