Contact plate of testing machine

Abstract

The embodiment of the utility model discloses a testing machine contact plate, and relates to the technical field of semiconductor testing, the testing machine contact plate comprises a fixed frame and a contact panel, the fixed frame is internally provided with a fixed cavity, and the fixed cavity is internally provided with a probe card; a contact panel is arranged on the fixed frame through an adjusting device, the contact panel is arranged corresponding to the position of the probe card, a plurality of contact salient points are arranged on the contact panel, and a circular elastic structure is formed on the plurality of contact salient points; wherein the probe card is provided with a plurality of test probes, the plurality of test probes are arranged corresponding to the contact salient points, so that the test probes are in one-to-one correspondence with the contact salient points, and the contact panel is detachably arranged on the fixed frame. By arranging the contact panel and the adjusting device, different to-be-detected products can be detected in a targeted mode, and meanwhile poor contact is avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor testing technology, and in particular to a contact plate of a testing machine. Background Art

[0002] In the field of wafer testing technology, a tester contact plate typically refers to the plate-like structure that comes into direct contact with the object being tested (such as a chip or circuit board) during the test process. As a crucial interface between the test equipment and the object being tested, the performance of the tester contact plate directly impacts the accuracy and reliability of the test results. With the continuous advancement of testing technology, the requirements for tester contact plates are becoming increasingly stringent.

[0003] According to the requirements of the equipment process, the connection between the probe card and the tester needs to transmit data through a contact plate. The current contact plate method mainly uses a special film plate covered on both sides of the FR4 board. A fixed number of contact heads are cut out on the film plates on both sides. The contact heads are tooth-shaped, and the upper teeth are connected to the lower teeth for conductivity. The contact heads are respectively in contact with the contact surfaces of the probe card and the tester, thereby realizing data transmission.

[0004] The disadvantage of this method is that the contact head of this method is like a sharp tooth. Although it can play a good contact and conductive role, it is easy to scratch the contact surface of the probe card and the tester when contacting the probe card and the tester. In addition, since the contact head is a single-sided spring type, it is possible that some contact heads will have poor contact due to decreased elasticity after long-term use, thereby affecting the transmission of test data and having a short service life (easy to break). Utility Model Content

[0005] In order to solve the problems existing in the prior art, the technical solutions adopted by the present invention to solve the above technical problems are as follows:

[0006] The present application provides a test machine contact plate, comprising:

[0007] A fixed frame, wherein a fixed cavity is defined in the fixed frame, and a probe card is disposed in the fixed cavity;

[0008] a touch panel mounted on the fixed frame via an adjusting device, the touch panel being arranged corresponding to the position of the probe card, the touch panel being provided with a plurality of contact bumps, and a circular elastic structure being formed on the plurality of contact bumps;

[0009] Wherein, a plurality of test probes are arranged on the probe card, and the plurality of test probes are arranged corresponding to the contact bumps, so that the test probes correspond to the contact bumps one-to-one, and the touch panel is detachably arranged on the fixed frame.

[0010] Optionally, in some embodiments of the present application, a baffle is provided on the fixed frame, and there are two baffles, and the two baffles are arranged opposite to each other on the fixed frame, and the touch panel is located between the two baffles. The adjustment device includes a fixing screw, and a fixing hole is provided on the baffle at a position corresponding to the fixed baffle. The fixing screw is threadedly connected to the baffle through the fixing hole, and one end of the fixing screw abuts against the touch panel, so that the touch panel is fixed by the fixing screw.

[0011] Optionally, in some embodiments of the present application, the adjustment device further includes an adjustment block, and the adjustment block is located between the fixing screw and the contact panel, so that the contact panel is abutted by the adjustment block.

[0012] Optionally, in some embodiments of the present application, the adjusting device further includes a push rod and a push plate, the push plate being arranged at one end of the push rod, and when the contact panel is located on the fixed frame, the push plate abuts against the contact panel, and the push rod is movably arranged on the fixed frame, so that the push rod abuts against the contact panel through the push plate, so as to cooperate with the fixed screw to limit the contact panel.

[0013] Optionally, in some embodiments of the present application, a sliding groove is provided on the fixed frame at a position corresponding to the push rod, a sliding rod is provided in the sliding groove, a slider is sleeved on the sliding rod, and the slider slides on the sliding rod along the extension direction of the sliding rod;

[0014] The push rod is located on the slider, so that the push rod moves on the fixed frame.

[0015] Optionally, in some embodiments of the present application, a limiting ring is provided on the fixing frame at a side relative to the touch panel, and the fixing cavity is formed in the limiting ring.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] In the embodiment of the present application, a contact panel is provided. When the test probe is mounted on the fixed frame, during the contact detection process, the contact bumps on both sides of the contact panel can directly contact the probe card, thereby avoiding the problem of poor contact caused by the reduction of the elasticity of the contact head.

[0018] At the same time, the touch panel can be fixed by providing an adjustment device, and the setting of the adjustment device can clamp touch panels of different sizes to perform targeted testing on the product to be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 Schematic diagram of the overall structure of the test machine contact plate provided in the embodiment of the present application Figure 1 ;

[0021] Figure 2 Schematic diagram of the overall structure of the test machine contact plate provided in the embodiment of the present application Figure 2 ;

[0022] Figure 3 A schematic diagram of the overall structure without the touch panel provided in an embodiment of the present application;

[0023] Figure 4 for Figure 3 A in the middle is an enlarged structural diagram;

[0024] Figure 5 This is a schematic diagram of the overall structure of the touch panel provided in an embodiment of the present application.

[0025] Description of reference numerals:

[0026] 100. Fixed frame; 110. Fixed cavity; 120. Baffle; 121. Fixed hole; 130. Slide groove; 131. Slide rod; 132. Slider; 140. Limiting ring; 200. Contact panel; 210. Contact bump; 300. Probe card; 310. Test probe; 400. Adjusting device; 410. Fixing screw; 420. Adjusting block; 430. Push rod; 440. Push plate. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application. It is understood that the drawings are only provided for reference and illustration purposes and are not used to limit the present application. The connection relationship shown in the drawings is only for the convenience of clear description and does not limit the connection method.

[0028] Specifically, if Figure 1 As shown, a test machine contact board is provided in an embodiment of the present application. The test machine contact board is mainly used for wafer testing, and the test points of the product are contact tested through the pins on the probe card 300.

[0029] Its main structure includes a fixed frame 100 and a touch panel 200. A probe card 300 is arranged in the fixed frame. The pins on the probe card 300 test the product through the contact bumps 210 on the touch panel 200. In the above structure, the touch panel 200 is a transmission board, which is arranged between the probe card 300 and the product to be tested, and plays the role of signal connection. A plurality of contact bumps 210 are arranged on both sides of the touch panel 200, and the number and position of the contact bumps 210 on both sides correspond one to one, so that the detection signal on one side can be transmitted to the contact bumps 210 on the other side through the contact bumps 210. In order to facilitate contact and avoid affecting the transmission of test data, a circular elastic structure is provided on the contact bumps 210. The circular elastic structure can make good contact between the product and the probe card 300 to improve the detection efficiency.

[0030] In an embodiment of the present application, when the number of test points on the product to be tested changes, the contact panel 200 with the corresponding number and position of contact bumps 210 can be taken out to test the test points on the product to be tested, thereby avoiding interference of the redundant test probes 310 on the probe card 300 with the product to be tested.

[0031] In the above structure, since a fixed frame 100 is provided and the probe card 300 is located in the fixed cavity 110 on the fixed frame 100, during testing, the test probes 310 on the probe card 300 all contact the product to be tested. In order to avoid this situation, a touch panel 200 needs to be provided. However, in the above, due to the different structures of different products or the different points to be tested, the touch panels 200 should also be of different types, and different touch panels 200 need to be fixed on the fixed frame 100, and the fixing process needs to be processed by the adjustment device 400.

[0032] In the present application, the adjustment device 400 includes a fixed screw 410, one end of which is provided with an adjustment block 420, the adjustment block 420 abuts against the touch panel 200, wherein the fixed screw 410 is connected to the fixed frame 100 through a baffle 120, and two baffles 120 are provided on the fixed frame 100, and the two baffles 120 are respectively provided on both sides of the fixed cavity 110, as shown in FIG. Figure 2 shown.

[0033] The baffle 120 is provided with a plurality of fixing holes 121 , which are evenly distributed on the baffle 120 and pass through the baffle 120 . The fixing screws 410 are threadedly connected to the fixing holes 121 , so that the fixing screws 410 can be rotated and adjusted through the baffle 120 to adjust the touch panel 200 . Specifically,

[0034] The fixing cavity 110 is located in the middle of the fixing frame 100, so that the probe card 300 is located in the fixing cavity 110. In order to facilitate the touch panel 200 to be accurately aligned with the probe card 300, baffles 120 are provided on both sides of the fixing cavity 110 to limit the touch panel 200.

[0035] Preferably, in the embodiment of the present application, the baffle 120 is disposed at the edge of the fixed frame 100 to facilitate adjustment of the position of the touch panel 200;

[0036] Preferably, in the embodiment of the present application, the baffle 120 may also be provided at the opening position of the fixed cavity 110 to directly adjust the position of the touch panel 200;

[0037] More preferably, in the embodiment of the present application, fixing bars are provided on both sides of the fixing frame 100, and there are multiple fixing bars. The baffle 120 is movably provided on the fixing frame 100 through the fixing bars to facilitate flexible adjustment of the position of the baffle 120.

[0038] In the above description, although a fixed cavity 110 is provided, the size of the fixed cavity 110 will limit the size of the probe card 300. However, in actual product testing, since the area of ​​the product to be tested is large and the test points are relatively scattered, the size of the original fixed cavity 110 cannot meet the test requirements. Therefore, it is necessary to provide the touch panel 200, and the number of contact bumps 210 on both sides of the touch panel 200 is the same, but the positions they occupy are different, in order to meet the test requirements of the product, such as Figure 5 Shown is the touch panel 200 in this configuration.

[0039] The fixing frame 100 can be adjusted by fixing bars at different positions on the fixing frame 100 , and it is also convenient for the fixing screws 410 to fix the touch panel 200 .

[0040] In the above, in order to prevent the fixing screw 410 from causing damage to the touch panel 200, in an embodiment of the present application, an adjustment block 420 is provided between the fixing screw 410 and the touch panel 200, and the two sides of the adjustment block 420 respectively abut against the side surface of the touch panel 200 and the end position of the fixing screw 410 toward the touch panel 200.

[0041] The adjusting block 420 is a square block in the embodiment of the present application. Its main purpose is to abut against the touch panel 200 to prevent the fixing screw 410 from causing damage to the touch panel 200.

[0042] Preferably, in the embodiment of the present application, the square block can be set to a long strip shape or other shapes, as long as the shape effectively abuts the touch panel 200 through the fixing screw 410.

[0043] Based on the above structure, the embodiment of the present application further includes a push rod 430 and a push plate 440 , which cooperate with each other to limit and fix the touch panel 200 , specifically:

[0044] A slide groove 130 is provided on the fixed frame 100. The slide groove 130 is specifically arranged on both sides of the fixed cavity 110, and the slide groove 130 is arranged vertically relative to the position of the baffle 120, so that the slide groove 130 and the baffle 120 enclose the fixed cavity 110, wherein a slide rod 131 is provided in the slide groove 130, and the slide rod 131 is arranged in the slide groove 130 along the direction of the slide groove 130, and a slider 132 is sleeved on the slide rod 131, and the slider 132 moves along the direction of the slide rod 131.

[0045] In the embodiment of the present application, the slider 132 may be a fixed slider 132 , which means that the slider 132 is manually movable, and is moved by pushing the slider 132 by hand.

[0046] In the embodiment of the present application, preferably, the slider 132 can be an electric slider 132, and the slider 132 is electrically driven on the sliding rod 131 to achieve the effect of precise positioning.

[0047] In the embodiment of the present application, preferably, the slider 132 and the slide rod 131 can be used in conjunction with each other, the slider 132 is restricted in the slide groove 130, and the rotation of the slide rod 131 drives the slider 132 to move in the slide groove 130, thereby realizing the movement process of the slider 132.

[0048] A push rod 430 is provided on the slider 132, and the push rod 430 is fixedly connected to the slider 132, so that the push rod 430 moves through the movement of the slider 132, and a push plate 440 is provided on the output end of the push rod 430, and the push plate 440 abuts against the touch panel 200, so that the positions on both sides of the touch panel 200 are clamped by the push plate 440 to complete the limitation of the position of the touch panel 200.

[0049] In the above structure, the push rod 430 is a linear push rod 430 , and the movement distance of the push plate 440 can be controlled by adjusting the push rod 430 to adjust the position of the touch panel 200 .

[0050] In the embodiment of the present application, a limit ring 140 is further provided. As shown in the figure, the limit ring 140 is provided on a side of the fixed frame 100 relative to the touch panel 200 to form a fixed cavity 110. The probe card 300 is located in the fixed cavity 110. The provision of the limit ring 140 allows the probe card 300 to be pushed by air through air compression when testing the product, so that the probe card 300 can test the product.

[0051] In the above process, since the touch panel 200 is limited by the adjustment device 400, in the embodiment of the present application, the adjustment device 400 is required to only limit the touch panel 200, and has no obvious pressure effect on the touch panel 200, thereby facilitating the probe card 300 and the touch panel 200 to be pushed by compressed air to complete the test process.

[0052] The above embodiments are only used to illustrate the technical method of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A testing machine contact plate, characterized in that: include: A fixed frame, wherein a fixed cavity is defined in the fixed frame, and a probe card is disposed in the fixed cavity; a touch panel mounted on the fixed frame via an adjusting device, the touch panel being arranged corresponding to the position of the probe card, the touch panel being provided with a plurality of contact bumps, and a circular elastic structure being formed on the plurality of contact bumps; Wherein, a plurality of test probes are arranged on the probe card, and the plurality of test probes are arranged corresponding to the contact bumps, so that the test probes correspond to the contact bumps one-to-one, and the touch panel is detachably arranged on the fixed frame.

2. A test machine contact plate according to claim 1, characterized in that: A baffle is provided on the fixed frame, and there are two baffles, and the two baffles are arranged opposite to each other on the fixed frame, and the touch panel is located between the two baffles. The adjusting device includes a fixing screw, and a fixing hole is provided on the baffle. The fixing screw is threadedly connected to the baffle through the fixing hole, and one end of the fixing screw abuts against the touch panel, so that the touch panel is fixed by the fixing screw.

3. A test machine contact plate according to claim 2, characterized in that: The adjusting device further includes an adjusting block, which is located between the fixing screw and the contact panel, so that the contact panel is abutted by the adjusting block.

4. A testing machine contact plate according to claim 2, characterized in that: The adjusting device also includes a push rod and a push plate, the push plate is arranged at one end of the push rod, and when the touch panel is located on the fixed frame, the push plate abuts against the touch panel, and the push rod is movably arranged on the fixed frame, so that the push rod abuts against the contact panel through the push plate, so as to cooperate with the fixed screw to limit the contact panel.

5. A testing machine contact plate according to claim 4, characterized in that: A sliding groove is provided on the fixed frame at a position corresponding to the push rod, a sliding rod is provided in the sliding groove, a slider is sleeved on the sliding rod, and the slider slides on the sliding rod along the extension direction of the sliding rod; The push rod is located on the slider, so that the push rod moves on the fixed frame.

6. The testing machine contact plate according to claim 1, characterized in that: A limiting ring is provided on the fixing frame at a side relative to the touch panel, and the fixing cavity is formed in the limiting ring.

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