Truss device for picking up wafer box

Abstract

The utility model relates to a truss device for picking up a wafer box, which adopts a multidirectional motor driving and accurate transmission system to realize accurate positioning of a manipulator in a three-dimensional space. Compared with a traditional truss device depending on a single transmission mode, the positioning error is greatly reduced, and the stability and the accuracy of the wafer box in the carrying process are ensured. The mechanical arm clamping structure is reasonable in design, anti-skid rubber pads are arranged on the clamping plates, and the wafer box is clamped and loosened through driving of the air cylinder. By means of the design, the clamping stability of the wafer box is greatly improved, the wafer box is prevented from sliding or falling off in the carrying process, and the risk of wafer damage is reduced.

Description

Technical Field

[0001] This utility model relates to automated handling equipment, specifically a truss device for picking up and handling wafer cassettes. This truss device is primarily used in the semiconductor manufacturing field, enabling precise positioning and stable handling of wafer cassettes during wafer manufacturing, processing, and testing. Its design aims to improve the automation level, handling accuracy, and efficiency of production lines, meeting the demand for efficient, precise, and reliable handling equipment in modern semiconductor production. Background Art

[0002] The semiconductor manufacturing industry is increasingly demanding production efficiency and automation. In particular, the use of efficient and precise mechanical devices has become a crucial tool for improving production line efficiency during wafer handling. Traditional wafer handling methods rely on manual operation or simple robotic arms, which can lead to inaccurate positioning, low efficiency, and wafer damage. To overcome these issues, various automated devices have been developed and implemented. Among them, truss-structured wafer handling devices have garnered widespread attention due to their stability and flexibility.

[0003] Truss structures typically consist of longitudinal and transverse trusses, which, through motor drives and transmission systems, enable multi-directional movement of the robot arm, enabling precise positioning and pickup of wafer cassettes. The design and application of these devices have played a significant role in improving production efficiency, reducing manpower requirements, and lowering wafer breakage rates. However, existing truss systems still lack precision, operational flexibility, and safety. Further improvements are needed, particularly in terms of rapid switching between different working positions, stable clamping of wafer cassettes, and equipment maintenance and adjustment.

[0004] For example, in existing technologies, the forward and backward, left and right, and up and down movements of the truss device usually rely on a single transmission system and control method, which is prone to positioning errors and response delays. In addition, the structural design of the robot arm that clamps the wafer box is not reasonable, and the clamping stability is not high, which may cause the wafer box to slip or fall during transportation. At the same time, the movement range of the overhead crane is limited, and it cannot achieve free movement within a larger range, which limits the application scenarios of the equipment. The docking station design also has defects. The wafer box is prone to offset during transportation, affecting the handling accuracy.

[0005] In order to improve the overall performance of the truss device, there is an urgent need for an improved truss device for picking up wafer boxes, which can achieve higher movement accuracy, more stable clamping effect and more flexible operation mode to meet the growing automation and efficient production needs of the semiconductor manufacturing industry.

[0006] The aforementioned issues were effectively addressed by designing a robot consisting of a longitudinal truss, a transverse truss, a vertical motor, and a gripping mechanism. Furthermore, the improved docking station design ensures the wafer cassette remains stable during transport, preventing lateral movement. Sensors provide real-time monitoring and feedback of the cassette's position and status, improving the accuracy and reliability of the entire handling process. The optimized design of the overhead crane and track allows for free movement of the crane between different working positions, further enhancing the equipment's flexibility and operational range.

[0007] In summary, the improved truss device for picking up wafer boxes is not only more reasonable in structural design, but also can significantly improve the degree of automation and operating efficiency of the production line in practical applications, providing a more efficient and reliable technical solution for the semiconductor manufacturing industry. Utility Model Content

[0008] The purpose of the utility model is to provide an efficient, stable and flexible truss device for picking up wafer boxes, so as to solve the problems of inaccurate positioning, unstable clamping and inconvenient operation existing in the prior art.

[0009] To achieve the above objectives, the present invention provides the following technical solutions:

[0010] A truss device for picking up wafer boxes includes a longitudinal truss and a transverse truss. The forward and backward movement motor is installed on the longitudinal truss of the frame and is driven by a transmission belt or chain to achieve left and right movement of the transverse truss on the longitudinal truss. The left and right movement motor is installed on the transverse truss and is driven by a gear and rack system to achieve forward and backward movement of the robot on the transverse truss. The up and down movement motor is installed on the vertical truss of the robot and is driven by a screw or hydraulic system to achieve up and down movement of the robot.

[0011] in,

[0012] The manipulator moves via a slide rail and gear system. The lower end of the manipulator is provided with a clamping structure for adapting to the protruding structure on the wafer box to lift the entire wafer box.

[0013] The clamping structure includes two parallel clamping plates, a plurality of fixing posts are provided on the clamping plates, and a plurality of notches are provided on the edge of the protruding structure, and the fixing posts are adapted to the notches;

[0014] The overhead crane is suspended on a track at the top of the frame. The sliding mechanism enables the crane to move freely on the track, allowing the crane to move between different working positions. A lifting device is provided at the lower end of the crane for taking and placing wafer boxes.

[0015] The docking platform is set on one side of the frame for temporary storage of materials and connection with the overhead crane.

[0016] Furthermore, the docking platform includes a conveyor belt and two side baffles; the conveyor belt is composed of multiple independent drive units, each drive unit is controlled by a servo motor to achieve precise positioning and transportation of the wafer box on the docking platform; the conveyor belt is provided with two side baffles to ensure that the wafer box remains stable during the transportation process and prevents lateral movement; the docking platform is also provided with multiple sensors for detecting the position and status of the wafer box, and feeding back the information to the control system to coordinate the collaborative work of the overhead crane and the docking platform.

[0017] Furthermore, the longitudinal truss and the transverse truss are fixed by bolt connection; an adjustment bolt is provided at the bottom of the truss for adjusting the horizontal height; a number of limit devices are provided on the truss for limiting the range of movement; the longitudinal truss and the transverse truss are both provided with a rack system, which drives the truss to move in the corresponding direction through the engagement of the gear and the rack; the adjustment bolt is connected to the bottom of the truss by a thread, and the height of the truss can be changed by rotating the adjustment bolt; the limit device includes a plurality of limit blocks, which are fixed to the truss by bolts.

[0018] Furthermore, the manipulator's gripping structure includes two parallel clamping plates, each equipped with a number of fixed columns. The fixed columns are surface-mounted with non-slip rubber pads to enhance the stability of the wafer cassette's grip. The clamping plates are driven by a pneumatic cylinder to tighten and loosen the wafer cassette. The cylinder is connected to an air source via a pipe to provide stable air pressure. Furthermore, a screw drive system is provided on the vertical truss. The screw is connected to the vertical truss via a nut. The motor drives the screw to rotate, enabling the manipulator to move up and down. The vertical truss is also equipped with multiple guide sliders to ensure the manipulator's stability and precision during its up and down movement.

[0019] Furthermore, it also includes a fixed carrier, on which a boss is provided.

[0020] Furthermore, the sliding mechanism of the overhead crane includes multiple rollers and tracks. The rollers are installed at the bottom of the overhead crane. The rollers are in contact with the tracks through bearings to enable the overhead crane to slide freely on the tracks. The overhead crane is provided with an electric push rod for controlling the moving direction and speed of the overhead crane.

[0021] Furthermore, the gear system includes multiple gear sets, each gear set consists of a driving gear and at least one driven gear, the driving gear is connected to the left and right moving motor through a shaft, and the driven gear is engaged with the rack.

[0022] Compared with the prior art, the beneficial effects of the present invention are:

[0023] Higher Positioning Accuracy: This new robot utilizes a multi-directional motor drive and precision transmission system to achieve precise positioning of the robot in three dimensions. Compared to traditional truss devices that rely on a single transmission method, this new robot significantly reduces positioning errors, ensuring stability and accuracy during wafer cassette handling.

[0024] Enhanced Clamping Stability: This new robotic gripper features a well-designed gripping mechanism with anti-slip rubber pads on the clamping plates. The pneumatic cylinder drives the clamping and releasing of the wafer cassette. This design significantly improves the cassette's gripping stability, preventing it from slipping or falling during handling and reducing the risk of wafer damage.

[0025] Improved operational flexibility: This new model optimizes the design of the longitudinal and transverse trusses and the overhead crane, allowing the manipulator and crane to move freely between different working positions. This design improves the operational flexibility of the equipment, allowing it to adapt to different working environments and requirements, and expands its application range.

[0026] Improved Safety: This new system incorporates limiters and multiple sensors to monitor the position and status of the robot and wafer cassette in real time, feeding this information back to the control system. Compared to traditional systems, this system significantly improves safety, preventing unexpected situations and ensuring reliable operation.

[0027] Easy maintenance and adjustment: This utility model adopts modular design and bolt connection method, which simplifies the maintenance and adjustment process of the equipment. Users can easily carry out daily maintenance and quick repairs, reducing equipment downtime and improving production efficiency.

[0028] More stable transfer: This new docking station design includes a conveyor belt and side baffles. The conveyor belt is composed of multiple independent drive units, each controlled by a servo motor, ensuring precise positioning and transfer of the wafer cassettes on the docking station. The side baffles effectively prevent lateral movement of the wafer cassettes during transfer, ensuring stable handling.

[0029] Intelligent Control: This new system incorporates multiple sensors on the docking platform to detect the position and status of the wafer cassettes and provide feedback to the control system. This intelligent control enables the overhead crane and docking platform to work in tandem, improving overall system efficiency and automation.

[0030] In summary, the utility model is superior to existing technologies in terms of positioning accuracy, clamping stability, operational flexibility, safety, ease of maintenance, transmission process stability and intelligent control, providing an efficient and reliable automated handling solution for the semiconductor manufacturing industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 : Schematic diagram of the truss device structure for picking up wafer boxes;

[0032] Figure 2 : Side view of the overhead crane and truss system;

[0033] Figure 3 : Schematic diagram of truss combination structure;

[0034] Figure 4 : Schematic diagram of the combination of the wafer box protrusion structure and the clamping structure;

[0035] Figure 5 : Schematic diagram of the location of the docking platform and the fixed carrier. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0039] See also Figure 1-Figure 5 As shown, the present invention provides a truss device for picking up wafer boxes. The following is a detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings:

[0040] Figure 1The overall structure of the truss device for picking up wafer cassettes according to the present invention is shown. The device includes a longitudinal truss 1, a transverse truss 2, a forward and backward movement motor 3, a left and right movement motor 4, and a vertical movement motor 5. The forward and backward movement motor 3 is mounted on the longitudinal truss 1 and driven by a transmission belt or chain to achieve left and right movement of the transverse truss 2 on the longitudinal truss 1. The left and right movement motor 4 is mounted on the transverse truss 2 and driven by a gear and rack system to achieve forward and backward movement of the robot 6 on the transverse truss 2. The vertical movement motor 5 is mounted on the vertical truss 7 of the robot 6 and driven by a screw or hydraulic system to achieve up and down movement of the robot 6.

[0041] The truss design enables the robot to move flexibly in three dimensions, ensuring precise positioning and stable handling of wafer cassettes. The structure of longitudinal truss 1 and transverse truss 2 provides excellent rigidity and stability, ensuring the stability of the entire system during high-speed operation and reducing vibration and errors.

[0042] Figure 2 A side view of the overhead crane truss system is shown. The crane is suspended from a track 12 at the top of the frame. A sliding mechanism 11 allows the crane to move freely along the track 12, enabling the crane 1 to move between different working positions and increasing the operational flexibility of the equipment. A lifting device 13 is located at the lower end of the crane for loading and unloading wafer cassettes 14.

[0043] The design of the overhead crane ensures a wider coverage area for the entire truss assembly, allowing it to be quickly moved to any designated location when needed, greatly improving handling efficiency. The use of a sliding mechanism ensures smooth and rapid movement of the overhead crane, reducing vibration and errors caused by movement.

[0044] Figure 3 The diagram shows the combined structure of longitudinal trusses 1 and transverse trusses 2. The longitudinal trusses 1 and 2 are bolted together, with adjustment bolts at the bottom of the trusses for adjusting the horizontal height. Several limiters 15 are installed on the longitudinal trusses 1 to limit their range of movement and ensure safe and precise movement.

[0045] This connection method ensures the rigidity and stability of the entire truss system, allowing the truss to operate stably under high loads and high speeds. The design of the adjustment bolts makes the installation and adjustment of the truss more convenient, and the limit device 15 ensures the safety of operation and prevents accidents.

[0046] Figure 4The figure shows how the protrusion 15 of the wafer cassette 14 is coupled to the gripping structure 16. The robot 6 moves via a system of slide rails and gears. The gripping structure 16 is located at its lower end, mates with the protrusion 15 on the wafer cassette 14, and thus lifts the entire wafer cassette. The gripping structure 16 comprises two parallel clamping plates 17, each equipped with several fixing posts 18. The edges of the protrusion 15 of the wafer cassette 14 are provided with several notches, which fit into the notches, ensuring stable grip.

[0047] This design ensures that the wafer cassette will not slide or fall during handling, improving the reliability and stability of the clamping. The use of a slide rail and gear system allows the robot to move smoothly on the transverse truss 2, further enhancing the precision of the operation.

[0048] Figure 5 The diagram shows the positions of the docking platform 19 and the fixed carrier 20. The docking platform 19 is set on one side of the frame and is used for temporary storage of materials and cooperation with the overhead crane. The docking platform 19 includes a conveyor belt 21 and two side baffles 22. The conveyor belt 21 is composed of multiple independent drive units, each of which is controlled by a servo motor to achieve precise positioning and transportation of the wafer box on the docking platform 19. The conveyor belt 21 is provided with two side baffles 22 to ensure that the wafer box remains stable during transportation and prevent lateral movement. The fixed carrier 20 is located adjacent to the docking platform 19 to facilitate the operator's material handling operations.

[0049] This design ensures that the wafer cassettes do not shift or tip over during transport, further improving the stability and accuracy of the transport process. The independent drive unit design of the conveyor belt 21 allows for flexible adjustment of transport speed and direction to meet different production requirements. The fixed carrier 20 provides additional storage space, improving the efficiency of the overall transport process.

[0050] Through the detailed description of the above parts, the embodiments of the present invention can achieve efficient, stable and flexible wafer box picking and handling, providing an efficient and reliable automation solution for the semiconductor manufacturing industry.

[0051] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A truss device for picking up a wafer box, characterized in that: It includes a longitudinal truss and a transverse truss. The forward and backward moving motor is installed on the longitudinal truss of the frame and is driven by a transmission belt or chain to realize the left and right movement of the transverse truss on the longitudinal truss; the left and right moving motor is installed on the transverse truss and is driven by a gear and rack system to realize the forward and backward movement of the manipulator on the transverse truss; the up and down moving motor is installed on the vertical truss of the manipulator and is driven by a screw or hydraulic system to realize the up and down movement of the manipulator; in, The manipulator moves via a slide rail and gear system. The lower end of the manipulator is provided with a clamping structure for adapting to the protruding structure on the wafer box to lift the entire wafer box. The clamping structure includes two parallel clamping plates, a plurality of fixing posts are provided on the clamping plates, and a plurality of notches are provided on the edge of the protruding structure, and the fixing posts are adapted to the notches; The overhead crane is suspended on a track at the top of the frame. The sliding mechanism enables the crane to move freely on the track, allowing the crane to move between different working positions. A lifting device is provided at the lower end of the crane for taking and placing wafer boxes. The docking platform is set on one side of the frame for temporary storage of materials and connection with the overhead crane.

2. The truss device for picking up a wafer box according to claim 1, characterized in that: The docking platform includes a conveyor belt and two side baffles; the conveyor belt is composed of multiple independent drive units, each drive unit is controlled by a servo motor to achieve precise positioning and transportation of the wafer box on the docking platform; the conveyor belt is provided with two side baffles to ensure that the wafer box remains stable during the transportation process and prevent lateral movement; the docking platform is also provided with multiple sensors for detecting the position and status of the wafer box, and feeding back the information to the control system to coordinate the collaborative work of the overhead crane and the docking platform.

3. The truss device for picking up a wafer box according to claim 1, characterized in that: The longitudinal truss and the transverse truss are fixed by bolt connection; the bottom of the truss is provided with an adjustment bolt for adjusting the horizontal height; the truss is provided with a number of limit devices for limiting the range of movement; the longitudinal truss and the transverse truss are both provided with a rack system, which drives the truss to move in the corresponding direction through the engagement of the gear and the rack; the adjustment bolt is connected to the bottom of the truss by a thread, and the height of the truss can be changed by rotating the adjustment bolt; the limit device includes a plurality of limit blocks, which are fixed to the truss by bolts.

4. The truss device for picking up a wafer box according to claim 1, characterized in that: The clamping structure of the manipulator includes two parallel clamping plates, each of which is provided with a number of fixed columns. The surface of the fixed columns is provided with anti-slip rubber pads to improve the clamping stability of the wafer box. The clamping plates are driven by a cylinder to realize the clamping and loosening operations of the wafer box. The cylinder is connected to the air source through a pipe to provide stable air pressure.

5. The truss device for picking up a wafer box according to claim 1, characterized in that: The vertical truss is provided with a screw drive system, the screw is connected to the vertical truss through a nut, and the screw is driven to rotate by a motor to realize the up and down movement of the manipulator; the vertical truss is also provided with multiple guide sliders to ensure the stability and accuracy of the manipulator during the up and down movement.

6. The truss device for picking up a wafer box according to claim 1, characterized in that: It also includes a fixed carrier, on which a boss is provided.

7. The truss device for picking up a wafer box according to claim 1, characterized in that: The sliding mechanism of the overhead crane includes multiple rollers and tracks. The rollers are installed at the bottom of the overhead crane. The rollers are in contact with the tracks through bearings to enable the overhead crane to slide freely on the tracks. The overhead crane is provided with an electric push rod for controlling the moving direction and speed of the overhead crane.

8. The truss device for picking up a wafer box according to claim 1, characterized in that: The gear system includes a plurality of gear sets, each gear set consists of a driving gear and at least one driven gear, the driving gear is connected to the left and right moving motor through a shaft, and the driven gear is meshed with the rack.

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