Air volume compensation device and pneumatic system

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an air quantity compensation device and a pneumatic system. The gas volume compensation device comprises a gas storage unit and a gas supplementing pipeline; the gas storage unit is communicated with a gas supplementing pipeline which is communicated with a gas source; the gas storage unit is provided with at least one gas distribution opening, and the gas distribution opening is used for being communicated with a pneumatic component. The air flow compensation device can improve the flow and pressure stability of the air flow reaching the pneumatic component, and can meet the requirement of the pneumatic component for compressed air, so that the response stability and response speed of the pneumatic component are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a gas volume compensation device and a pneumatic system. Background Art

[0002] Existing semiconductor manufacturing equipment is equipped with multiple pneumatic components, such as ALD valves. These pneumatic components need to be opened and closed by compressed gas to make them respond.

[0003] Compressed air is typically distributed to various pneumatic components through a valve island using CDA (Clean Dry Air). This can lead to insufficient airflow when the pipes through which it flows are thin and long. This can cause insufficient airflow or drastic pressure fluctuations before the compressed air reaches the pneumatic components, causing them to fail to open, open in time, or remain open for an extended period of time. This can lead to unstable response speeds and the inability to consistently meet the demand for rapid response. Utility Model Content

[0004] The purpose of the present utility model is to provide an air volume compensation device and a pneumatic system, which can improve the flow rate and pressure stability of the airflow reaching the pneumatic components, and can meet the pneumatic components' demand for compressed gas, thereby improving the response stability and response speed of the pneumatic components.

[0005] The embodiment of the present utility model is achieved as follows:

[0006] In a first aspect, the present invention provides a gas volume compensation device, which includes a gas storage unit and a gas supply pipeline;

[0007] The gas storage unit is connected to the gas supply pipeline, and the gas supply pipeline is connected to the gas source; the gas storage unit is equipped with at least one gas distribution port, and the gas distribution port is used to communicate with the pneumatic components.

[0008] In an optional embodiment, the gas volume compensation device further includes an air intake pipeline, which is connected to the air storage unit and the air source.

[0009] In an optional embodiment, the gas storage unit includes a main body, the main body has a gas storage cavity, and is equipped with a first gas inlet, a second gas inlet and multiple gas distribution ports connected to the gas storage cavity, and the first gas inlet and the second gas inlet are respectively connected to the gas supply pipeline and the gas intake pipeline.

[0010] In an optional embodiment, the gas volume compensation device further includes a pressure detection unit, which is used to detect the gas pressure in the gas storage chamber.

[0011] In an optional embodiment, the first air inlet and the second air inlet are distributed on two opposite sides of the main body.

[0012] In an optional embodiment, the opening cross-sections of the first gas inlet and the second gas inlet are both larger than the opening cross-section of the gas distribution port.

[0013] In an optional embodiment, the plurality of gas distribution ports are all located in a region between the first gas inlet and the second gas inlet, and are sequentially spaced from the first gas inlet toward the second gas inlet.

[0014] In an optional embodiment, the inner diameter of the air supply pipeline is larger than the inner diameter of the air intake pipeline, the inner diameter of the air supply pipeline is larger than the inner diameter of the air intake pipeline, the number of air inlets of the air supply pipeline is 1, and it is connected to the air source; the number of air outlets of the air supply pipeline is 1, and it is connected to the air storage chamber.

[0015] In a second aspect, the present invention provides a pneumatic system, which includes an air intake pipeline, an air source, and the above-mentioned air volume compensation device;

[0016] The air inlet pipeline and the air supply pipeline are both connected to the air source to guide the air flow in the air source into the air storage unit.

[0017] In an optional embodiment, the pneumatic system further includes an air guide branch, and both ends of the air guide branch are respectively connected to the air intake pipeline and the pneumatic components.

[0018] The beneficial effects of the embodiments of the present utility model include:

[0019] The gas volume compensation device includes a gas storage unit and a gas supply pipeline. The gas storage unit is connected to the gas supply pipeline, which is in turn connected to a gas source. The gas storage unit is equipped with at least one gas distribution port for communicating with pneumatic components. The gas volume compensation device can improve the flow rate and pressure stability of the airflow reaching the pneumatic components and meet the pneumatic components' demand for compressed gas, thereby improving the pneumatic components' response stability and speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 This is a schematic diagram of the structure of the pneumatic system in an embodiment of the present utility model;

[0022] Figure 2This is a schematic structural diagram of the gas storage unit in an embodiment of the present utility model;

[0023] Figure 3 This is a schematic structural diagram of the pneumatic system including an air intake pipeline in an embodiment of the present utility model;

[0024] Figure 4 This is a structural diagram of an air storage unit when the pneumatic system includes an air intake pipeline in an embodiment of the present utility model;

[0025] Figure 5 This is a schematic diagram of the arrangement of an air guide branch and an on-off valve when the pneumatic system includes an air intake pipeline in other embodiments of the present invention.

[0026] Icons: 100-gas volume compensation device; 110-gas storage unit; 120-gas supply pipeline; 10-pneumatic components; 210-air inlet pipeline; 220-gas source; 111-gas distribution port; 112-main body; 113-gas storage chamber; 114-first air inlet; 115-second air inlet; 200-pneumatic system; 230-air guide branch; 240-on-off valve. DETAILED DESCRIPTION

[0027] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0030] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0031] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0032] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0033] Please refer to Figure 1 and Figure 2 This embodiment provides a pneumatic system 200, which includes an air source 220 and an air volume compensation device 100. The air source 220 can be a gas compressor or other compressed gas supply device. An air supply line 120 communicates with the air source 220 to direct air from the air source 220 into the air storage unit 110.

[0034] The gas volume compensation device 100 includes a gas storage unit 110 and a gas supply line 120. The gas storage unit 110 is in communication with the gas supply line 120, which is in communication with the gas source 220. The gas storage unit 110 is equipped with at least one gas distribution port 111, which is used to communicate with the pneumatic component 10 to supply compressed gas to the pneumatic component 10.

[0035] Please refer to Figure 1 and Figure 2 The working principle of the gas volume compensation device 100 in the pneumatic system 200 is:

[0036] The gas volume compensation device 100 includes a gas storage unit 110 and a gas supply line 120. The gas storage unit 110 is connected to the gas supply line 120, and the gas supply line 120 is connected to the gas source 220. Thus, the gas storage unit 110 can receive and store compressed gas from the gas source 220.

[0037] The gas storage unit 110 is provided with at least one gas distribution port 111, which is used to communicate with the pneumatic component 10. Such a setting enables compressed gas to be discharged into the pneumatic component 10. Therefore, when the pneumatic component 10 is controlled, when there is sufficient compressed gas stored in the gas storage unit 110, the compressed gas in the gas storage unit 110 can be discharged to the pneumatic component 10 at sufficient pressure and in sufficient quantity, thereby achieving stable control of the pneumatic component 10 and improving the corresponding speed of the pneumatic component 10.

[0038] The provision of the air supply line 120 allows for timely replenishment of compressed gas to the air storage unit 110, ensuring that the compressed gas within the air storage unit 110 is always at sufficient pressure and volume. In other words, the air volume compensation device 100 can improve the stability of the flow rate and pressure of the airflow reaching the pneumatic component 10, thereby meeting the pneumatic component's 10 demand for compressed gas and thereby improving the pneumatic component's 10 response stability and speed.

[0039] Furthermore, the distance between the pneumatic components 10 and the gas storage unit 110 can be shortened by adjusting the position of the gas storage unit 110. Specifically, pneumatic components 10 requiring rapid response can be positioned closer to the gas storage unit 110, shortening the distance the compressed gas must flow. This allows a sufficient amount of compressed gas to be reserved in the gas storage unit 110, ensuring that the gas flow rate meets the needs of the fast-responding pneumatic components 10 and allowing for rapid replenishment, thus avoiding the slow response problem associated with the long gas path in existing designs.

[0040] Through the above-mentioned structural setting, the pneumatic system 200 can improve the flow rate and pressure stability of the airflow reaching the pneumatic component 10, and can meet the demand of the pneumatic component 10 for compressed gas, thereby improving the response stability and response speed of the pneumatic component 10.

[0041] For further information, please refer to Figure 3 and Figure 4In this embodiment, the gas volume compensation device 100 may further include an air intake pipeline 210, which is connected to the air storage unit 110 and the air source 220. Based on this, the air intake pipeline 210 and the air supply pipeline 120 are both connected to the air source 220 to guide the air flow from the air source 220 into the air storage unit 110. The air storage unit 110 is connected to the air supply pipeline 120 and the air intake pipeline 210, and the air supply pipeline 120 and the air intake pipeline 210 are both connected to the air source 220.

[0042] It should be noted that the pneumatic system 200 can be improved based on the existing system, that is, the above-mentioned intake pipe 210 can be a structure in the existing system. Thus, the pneumatic system 200 can add the above-mentioned gas volume compensation device 100 while retaining the intake pipe 210 and gas source 220 of the existing system; or an intake pipe 210 can be added on the basis of the above-mentioned structure.

[0043] The following description will be made by taking the gas volume compensation device 100 including the gas storage unit 110 , the gas supply pipeline 120 and the gas intake pipeline 210 as an example.

[0044] The provision of the air supply line 120 and the air intake line 210 allows for timely replenishment of compressed gas to the air storage unit 110, ensuring that the compressed gas within the air storage unit 110 is always at sufficient pressure and volume. In other words, the air volume compensation device 100 can improve the stability of the flow rate and pressure of the airflow reaching the pneumatic component 10, thereby meeting the pneumatic component's 10 demand for compressed gas and thereby enhancing the pneumatic component's 10 response stability and speed.

[0045] For further information, please refer to Figures 1-4 In this embodiment, when configuring the gas storage unit 110, the gas storage unit 110 includes a main body 112, the main body 112 has a gas storage cavity 113, and is provided with a first gas inlet 114, a second gas inlet 115 and a plurality of gas distribution ports 111 that are connected to the gas storage cavity 113. The first gas inlet 114 and the second gas inlet 115 are connected to the gas supply pipeline 120 and the gas intake pipeline 210, respectively. Among them, the number of gas inlets of the gas supply pipeline 120 is 1, and it is connected to the gas source 220; the number of gas outlets of the gas supply pipeline 120 is 1, and it is connected to the gas storage cavity 113. That is, the gas supply pipeline 120 is a main gas path, which only connects the gas source 220 and the gas storage cavity 113, and avoids participating in the gas supply of other components. It should be noted that when the gas intake pipeline 210 is not provided, as Figure 2 As shown, the air storage unit 110 is only configured with a first air inlet 114 communicating with the air inlet line 210 .

[0046] The provision of the first air inlet 114 and the second air inlet 115 can increase the speed at which compressed gas is introduced into the air storage chamber 113 of the main body 112. Specifically, this arrangement allows the air supply line 120 and the air inlet line 210 to simultaneously introduce compressed gas into the air storage chamber 113 via the first air inlet 114 and the second air inlet 115, respectively, thereby increasing the speed at which compressed gas is introduced into the air storage chamber 113.

[0047] The provision of multiple gas distribution ports 111 enables the gas storage unit 110 to control multiple pneumatic components 10. Alternatively, the pneumatic components 10 can be directly mounted on the gas distribution ports 111, or a shorter air pipe branch can be connected to the gas distribution ports 111. During the control process, corresponding solenoid valves can be installed on the branch connecting the pneumatic components 10 and the gas distribution ports 111 to achieve on-off control of the pneumatic components 10 and the gas storage unit 110.

[0048] In addition, the gas volume compensation device 100 includes a pressure detection unit (not shown). The pressure detection unit is installed in the gas storage chamber 113 to detect the air pressure in the gas storage chamber 113. By detecting the air pressure in the gas storage chamber 113 by the pressure detection unit, the pressure state in the gas storage chamber 113 can be monitored in real time, thereby maintaining stable control of the pneumatic component 10 and maintaining the response speed of the pneumatic component 10.

[0049] Based on the above structure, please refer to Figures 1-4 When configuring the first air inlet 114 and the second air inlet 115, this embodiment adopts a configuration in which the first air inlet 114 and the second air inlet 115 are distributed on opposite sides of the main body 112. Moreover, the opening cross-sections of the first air inlet 114 and the second air inlet 115 are both larger than the opening cross-section of the gas distribution port 111. The purpose of such a configuration is to ensure that the flow rate of the air flow introduced into the air storage chamber 113 through the first air inlet 114 and the second air inlet 115 is greater than the exhaust speed of the gas distribution port 111. With such a configuration, it is easy to maintain the air pressure state in the air storage chamber 113, so as to maintain stable control of the pneumatic component 10 and maintain the response speed of the pneumatic component 10.

[0050] Furthermore, when multiple gas distribution ports 111 are configured, they are all located in the area between the first gas inlet 114 and the second gas inlet 115, and are spaced apart sequentially from the first gas inlet 114 toward the second gas inlet 115. This arrangement improves the unobstructed connection between each gas distribution port 111 and the gas storage chamber 113, facilitates the use of a branch line to connect the pneumatic component 10 with the gas distribution port 111 of the main body 112, prevents interference between the gas supply line 120 and the gas inlet line 210, and facilitates the installation of the various connecting lines.

[0051] For further information, please refer to Figures 1-4 In this embodiment, the inner diameter of the air supply pipeline 120 can also be made larger than the inner diameter of the air intake pipeline 210. The reason is that the compressed gas can be quickly replenished into the air storage chamber 113 through the air supply pipeline 120, thereby avoiding the problem of slow response of the pneumatic component 10 due to insufficient gas in the air storage chamber 113.

[0052] In addition, please refer to Figure 1-Figure 5 In this embodiment, the pneumatic system 200 further includes an air branch 230. The ends of the air branch 230 are connected to the air intake pipe 210 and the pneumatic components 10, respectively. An on-off valve 240 is provided on the air branch 230 to control the flow of air between the air branch 230 and the pneumatic components 10. In other words, in the process of controlling each pneumatic component 10 with compressed gas, the control and response of the pneumatic components 10 can be achieved not only through the compressed gas in the air storage chamber 113 as described above, but also by utilizing the gas in the air intake pipe to control each pneumatic component 10.

[0053] On this basis, a corresponding multi-way valve (not shown in the figure) can also be provided. The multi-way valve is used to connect the pneumatic component 10, the air branch 230, and the gas distribution port 111, so that the air branch 230 and the gas distribution port 111 can selectively enter the pneumatic component 10. By providing the multi-way valve, the pneumatic component 10 can be connected to the air inlet pipe 210 through the air branch 230, or can be connected to the air storage chamber 113. By controlling the on-off valve 240, the pneumatic component 10 can be selectively connected to the air inlet pipe 210 and the air storage chamber 113. That is, the pneumatic component 10 can be controlled by introducing compressed gas through the air inlet pipe 210 or by introducing compressed gas through the air storage chamber 113.

[0054] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A gas volume compensation device, characterized in that: The gas volume compensation device includes a gas storage unit and a gas supply pipeline; The gas storage unit is in communication with the gas supply pipeline, and the gas supply pipeline is in communication with a gas source; the gas storage unit is provided with at least one gas distribution port, and the gas distribution port is used to be in communication with pneumatic components.

2. The gas volume compensation device according to claim 1, characterized in that: The gas volume compensation device further includes an air intake pipeline, which is connected to the air storage unit and the air source.

3. The gas volume compensation device according to claim 2, characterized in that: The gas storage unit includes a main body, which has a gas storage cavity and is equipped with a first gas inlet, a second gas inlet and a plurality of gas distribution ports connected to the gas storage cavity. The first gas inlet and the second gas inlet are respectively connected to the gas supply pipeline and the gas intake pipeline.

4. The gas volume compensation device according to claim 3, characterized in that: The inner diameter of the air supply pipeline is larger than the inner diameter of the air inlet pipeline. The number of the air inlet of the air supply pipeline is 1, and it is connected to the air source; the number of the air outlet of the air supply pipeline is 1, and it is connected to the air storage chamber.

5. The gas volume compensation device according to claim 3 or 4, characterized in that: The gas volume compensation device further includes a pressure detection unit, which is used to detect the gas pressure of the gas storage chamber.

6. The gas volume compensation device according to claim 3 or 4, characterized in that: The first air inlet and the second air inlet are distributed on two opposite sides of the main body.

7. The gas volume compensation device according to claim 6, characterized in that: The opening cross-sections of the first gas inlet and the second gas inlet are both larger than the opening cross-section of the gas distribution port.

8. The gas volume compensation device according to claim 3 or 4, characterized in that: The plurality of gas distribution ports are all located in a region between the first gas inlet and the second gas inlet, and are sequentially spaced from the first gas inlet toward the second gas inlet.

9. A pneumatic system, characterized in that: The pneumatic system comprises an air intake pipeline, an air source, and an air volume compensation device according to any one of claims 1 to 8; The air inlet pipeline and the air supply pipeline are both connected to the air source to guide the air flow in the air source into the air storage unit.

10. The pneumatic system according to claim 9, characterized in that: The pneumatic system further includes an air guide branch, and both ends of the air guide branch are respectively connected to the air intake pipeline and the pneumatic components.

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