Silicon wafer basket detection device

Abstract

The utility model provides a silicon wafer basket detection device, and relates to the technical field of monocrystalline silicon production. The silicon wafer basket detection device provided by the utility model comprises a main body, a lifting mechanism, a laser detection assembly, a controller and a display, the main body comprises a detection table, and a basket to be detected is configured to be placed on the detection table for detection; the lifting mechanism, the controller and the display are all arranged on the main body, the laser detection assembly is arranged on the lifting mechanism, the laser detection assembly comprises a laser sensor, and the laser sensor detects whether a silicon wafer slot is deformed by emitting laser to the silicon wafer slot of a to-be-detected flower basket; the lifting mechanism, the displayer and the laser sensor are all electrically connected with the controller, the controller is used for controlling the lifting mechanism to ascend and descend, the laser sensor transmits a detection result to the controller, and the detection result is processed by the controller and then transmitted to the displayer to be displayed. The utility model provides a silicon wafer basket detection device which can improve the detection precision.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a silicon wafer basket detection device. Background Art

[0002] At present, the main processes of silicon wafer slicing include silicon rod incoming, crystal bonding, slicing, degumming, cleaning, sorting, and packaging for shipment. During the cleaning process, silicon wafers are generally placed in a special carrier for cleaning. This special fixture is generally called a "flower basket" in the industry. The inspection of the flower basket is usually achieved through manual visual judgment. However, this detection method has poor accuracy. When the flower basket has abnormalities such as wear and deformation, it is usually difficult to detect in time. When the abnormal flower basket is put into use, it will have a direct impact on product quality. Utility Model Content

[0003] In order to solve at least one of the problems mentioned in the background technology, the present invention provides a silicon wafer flower basket detection device, which can improve the detection accuracy.

[0004] In order to achieve the above purpose, the present invention provides the following technical solutions:

[0005] The utility model provides a silicon wafer basket detection device, comprising a main body, a lifting mechanism, a laser detection component, a controller and a display. The main body comprises a detection platform, and the flower basket to be tested is configured to be placed on the detection platform for detection;

[0006] The lifting mechanism, the controller, and the display are all disposed on the main body. The laser detection assembly is disposed on the lifting mechanism. The laser detection assembly includes a laser sensor. The laser sensor is configured to emit laser light into the silicon wafer slot of the flower basket to be tested to detect whether the silicon wafer slot is deformed.

[0007] The lifting mechanism, display, and laser sensor are all electrically connected to the controller. The controller is used to control the lifting mechanism to move up and down, so as to drive the laser sensor to detect whether the silicon wafer slots of the flower basket to be tested are deformed one by one. The laser sensor transmits the detection results to the controller, which processes them and then transmits them to the display for display.

[0008] As an optional embodiment, the lifting mechanism includes a drive motor and a ball screw unit, the laser detection component is connected to the ball screw unit, and the drive motor is used to drive the ball screw unit to move so as to drive the laser detection component to move up and down.

[0009] As an optional embodiment, the ball screw unit includes a guide rail, a screw and a nut. The guide rail is arranged on the main body, and the screw is arranged on the guide rail. The length direction of the screw and the guide rail is consistent, and the length direction of the screw and the guide rail is perpendicular to the detection table. The drive motor is arranged at the top of the ball screw unit, the nut is movably arranged along the screw, and the laser detection assembly is slidably set on the guide rail and connected to the nut.

[0010] As an optional embodiment, the laser detection assembly further includes a mounting bracket, the laser sensor is disposed on the mounting bracket, and the mounting bracket can be slidably disposed on the guide rail and connected to the nut.

[0011] As an optional embodiment, the mounting frame is configured to surround the periphery of the flower basket to be tested, and the mounting frame includes a first connecting plate and two second connecting plates perpendicularly connected to both ends of the first connecting plate. The first connecting plate is slidably disposed on the guide rail and connected to the nut;

[0012] The flower basket to be tested is configured to be sandwiched between two second connecting plates, and the laser sensor is installed on the second connecting plates.

[0013] As an optional embodiment, the laser sensor includes a laser emitter and a laser receiver, which are respectively installed on different second connecting boards. The laser emitter is used to emit laser into the silicon wafer slot of the flower basket to be tested, and the laser receiver is used to receive the laser emitted by the laser emitter.

[0014] As an optional embodiment, the main body further includes a mounting seat, and the mounting seat is used to place the flower basket to be tested.

[0015] As an optional embodiment, the mounting seat includes a mounting groove and a limiting groove, the flower basket to be tested is installed in the mounting groove, and the handle on the flower basket to be tested is clamped in the limiting groove.

[0016] As an optional embodiment, the installation groove and the limiting groove have openings along the length direction of the installation groove, and the flower basket to be tested is configured to be slidably installed in the installation groove along the opening.

[0017] As an optional embodiment, it further includes a plurality of support bases, which are arranged at the bottom of the main body and are used to support the main body.

[0018] The utility model provides a silicon wafer flower basket detection device, including a main body, a lifting mechanism, a laser detection component, a controller and a display. The main body includes a detection platform, and the flower basket to be tested is configured to be placed on the detection platform for detection; the lifting mechanism, the controller and the display are all arranged on the main body, and the laser detection component is arranged on the lifting mechanism. The laser detection component includes a laser sensor, and the laser sensor is configured to emit laser into the silicon wafer slot of the flower basket to be tested to detect whether the silicon wafer slot is deformed; the lifting mechanism, the display and the laser sensor are all electrically connected to the controller, and the controller is used to control the lifting mechanism to perform lifting and movement to drive the laser sensor to detect whether the silicon wafer slot of the flower basket to be tested is deformed one by one. The laser sensor transmits the detection results to the controller, and after being processed by the controller, transmits them to the display for display. When the silicon wafer flower basket detection device provided by the present invention detects the flower basket, the flower basket can be placed on the detection table, and the laser sensor is aligned with the silicon wafer slot on the flower basket. If the laser emitted by the laser sensor can smoothly pass through the silicon wafer slot, it means that the silicon wafer slot has passed the detection; otherwise, it means that the silicon wafer slot has a defect and has failed the detection. The lifting mechanism can drive the laser sensor to move up and down, so as to detect each silicon wafer slot of the flower basket one by one. On the one hand, the controller can control the lifting mechanism to move up and down accurately, and on the other hand, it can receive the data detected by the laser sensor, and transmit the detection data to the display after performing certain processing on the detection data, so as to facilitate the detection personnel to intuitively observe the detection results. It can be seen that the silicon wafer flower basket detection device provided by the present invention can automatically detect defects in the flower basket, thereby improving the detection accuracy and detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0020] Figure 1 A schematic diagram of the overall structure of a silicon wafer basket detection device provided by an embodiment of the present utility model;

[0021] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0022] Figure 3 A schematic diagram of a silicon wafer flower basket detection device according to an embodiment of the present invention detecting a flower basket;

[0023] Figure 4 for Figure 3 Cross-sectional view at point B;

[0024] Figure 5 A schematic diagram showing the connection between the lifting mechanism and the laser detection assembly in the silicon wafer basket detection device provided by an embodiment of the present invention;

[0025] Figure 6 for Figure 3 Schematic diagram of the flower basket.

[0026] Description of reference numerals:

[0027] 100-Silicon wafer basket detection device;

[0028] 110-main body;

[0029] 111-testing table;

[0030] 112-mounting seat;

[0031] 1121-installation slot;

[0032] 1122-limiting slot;

[0033] 1123-opening;

[0034] 120-lifting mechanism;

[0035] 121- driving motor;

[0036] 122-ball screw unit;

[0037] 1221-guide rail;

[0038] 1222-screw;

[0039] 130-Laser detection component;

[0040] 131-Laser sensor;

[0041] 132-mounting frame;

[0042] 1321-first connecting plate;

[0043] 1322-second connecting plate;

[0044] 140-display;

[0045] 150-support seat;

[0046] 200-flower basket;

[0047] 210-silicon chip slot;

[0048] 220-handle. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0050] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe the present invention and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0051] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0052] Furthermore, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0053] Furthermore, the terms "first," "second," etc., are primarily used to distinguish between different devices, elements, or components (which may or may not be of the same type and configuration), and are not intended to indicate or imply the relative importance or quantity of the devices, elements, or components indicated. Unless otherwise specified, "plurality" means two or more.

[0054] During the cleaning process, monocrystalline silicon wafers are generally placed in a dedicated carrier for cleaning. This dedicated fixture is generally called a "flower basket" in the industry. The flower basket is usually inspected by human visual judgment. However, this detection method has poor accuracy. When the flower basket has abnormalities such as wear and deformation, it is usually difficult to detect them in time. When abnormal flower baskets are put into use, they will have a direct impact on product quality.

[0055] In view of this, the present invention provides a silicon wafer flower basket 200 detection device, including a main body 110, a lifting mechanism 120, a laser detection component 130, a controller and a display 140. The main body 110 includes a detection table 111, and the flower basket 200 to be tested is configured to be placed on the detection table 111 for detection; the lifting mechanism 120, the controller and the display 140 are all arranged on the main body 110, and the laser detection component 130 is arranged on the lifting mechanism 120. The laser detection component 130 includes a laser sensor 131; the lifting mechanism 120, the display 140 and the laser sensor 131 are all electrically connected to the controller. When inspecting the flower basket 200, the flower basket 200 can be placed on the inspection table 111, and the laser sensor 131 is aligned with the silicon wafer slot 210 on the flower basket 200. If the laser emitted by the laser sensor 131 can smoothly pass through the silicon wafer slot 210, it means that the silicon wafer slot 210 has passed the inspection. Otherwise, it means that the silicon wafer slot 210 has a defect and has failed the inspection. The lifting mechanism 120 can drive the laser sensor 131 to rise and fall, thereby inspecting each silicon wafer slot 210 of the flower basket 200 one by one. The controller can control the lifting mechanism 120 to move up and down accurately, and can receive data detected by the laser sensor 131, process the detection data, and transmit it to the display 140 for display, so that the inspector can intuitively observe the inspection results. It can be seen that the silicon wafer flower basket 200 inspection device provided by the utility model can automatically detect defects in the flower basket 200, thereby improving the inspection accuracy and efficiency.

[0056] Figure 1 A schematic diagram of the overall structure of a silicon wafer basket detection device provided by an embodiment of the present utility model; Figure 2 for Figure 1 Enlarged view of point A in the middle; Figure 3 A schematic diagram of a silicon wafer flower basket detection device according to an embodiment of the present invention detecting a flower basket; Figure 4 for Figure 3 Cross-sectional view at point B; Figure 5 A schematic diagram showing the connection between the lifting mechanism and the laser detection assembly in the silicon wafer basket detection device provided by an embodiment of the present invention; Figure 6 for Figure 3 Schematic diagram of the flower basket.

[0057] You can refer to Figures 1 to 6The present invention provides a device for detecting a silicon wafer basket 200, including a main body 110, a lifting mechanism 120, a laser detection assembly 130, a controller, and a display 140. The main body 110 includes a detection platform 111, and the flower basket 200 to be detected is configured to be placed on the detection platform 111 for detection; the lifting mechanism 120, the controller, and the display 140 are all arranged on the main body 110, and the laser detection assembly 130 is arranged on the lifting mechanism 120. The laser detection assembly 130 includes a laser sensor 131, and the laser sensor 132 is arranged on the lifting mechanism 120. 1 is configured to emit laser light into the silicon wafer slots 210 of the flower basket 200 to be tested to detect whether the silicon wafer slots 210 are deformed. The lifting mechanism 120, the display 140, and the laser sensor 131 are all electrically connected to the controller. The controller is used to control the lifting mechanism 120 to move up and down, thereby driving the laser sensor 131 to detect whether the silicon wafer slots 210 of the flower basket 200 to be tested are deformed one by one. The laser sensor 131 transmits the detection results to the controller, which processes the results and then transmits them to the display 140 for display.

[0058] like Figure 3 As shown, the flower basket 200 can be placed vertically on the detection table 111, and the laser emitted by the laser sensor 131 is emitted horizontally toward the silicon wafer slot 210 of the flower basket 200 (the position on the flower basket 200 for placing silicon wafers).

[0059] When inspecting a wafer flower basket 200, the device for inspecting the wafer flower basket 200 provided in an embodiment of the present invention can place the flower basket 200 on the inspection table 111 and align the laser sensor 131 with the wafer slot 210 on the flower basket 200. If the laser light emitted by the laser sensor 131 can smoothly pass through the wafer slot 210, the wafer slot 210 has passed inspection. Otherwise, the wafer slot 210 has a defect and has failed inspection. The lifting mechanism 120 can drive the laser sensor 131 to move up and down, thereby inspecting each wafer slot 210 in the flower basket 200 one by one. The controller can control the lifting mechanism 120 to move up and down precisely and receive data detected by the laser sensor 131, process the data, and transmit it to the display 140 for display, so that the inspector can visually observe the inspection results. It can be seen that the device for inspecting the wafer flower basket 200 provided by the present invention can automatically detect defects in the flower basket 200, thereby improving inspection accuracy and efficiency.

[0060] In the above embodiment, the lifting mechanism 120 may include a drive motor 121 and a ball screw unit 122. The laser detection assembly 130 is connected to the ball screw unit 122. The drive motor 121 is used to drive the ball screw unit 122 to move the laser detection assembly 130 up and down. A controller can control the rotation of the drive motor 121, which drives the ball screw unit 122, thereby driving the laser sensor 131 to move precisely up and down. The distance the laser sensor 131 moves each time can correspond to the distance between two adjacent silicon wafer slots 210 in the flower basket 200. The use of the ball screw unit 122 can improve the precision and stability of the lifting mechanism 120.

[0061] In the above embodiment, the ball screw unit 122 may include a guide rail 1221, a lead screw 1222, and a nut. The guide rail 1221 is arranged on the main body 110, and the lead screw 1222 is arranged on the guide rail 1221. The length direction of the lead screw 1222 and the guide rail 1221 is consistent, and the length direction of the lead screw 1222 and the guide rail 1221 is perpendicular to the detection platform 111. The drive motor 121 is arranged on the top of the ball screw unit 122, and the nut is movably arranged along the lead screw 1222. The laser detection component 130 is slidably arranged on the guide rail 1221 and connected to the nut. On the one hand, the laser detection component 130 is slidably arranged along the guide rail 1221, and on the other hand, it is connected to the nut, which can improve the stability of the connection of the detection component, avoid shaking during the lifting process, and further improve its detection accuracy.

[0062] In the above embodiment, the laser detection assembly 130 may further include a mounting bracket 132, on which the laser sensor 131 is mounted. The mounting bracket 132 is slidably mounted on the guide rail 1221 and connected to the nut. The mounting bracket 132 can provide a more stable connection between the laser detection assembly 130 and the ball screw unit 122, while also allowing the laser sensor 131 mounted thereon to be extended to the silicon wafer slot 210 to be inspected for detection.

[0063] In the above embodiment, the mounting frame 132 can surround the periphery of the flower basket 200 to be tested. The mounting frame 132 includes a first connecting plate 1321 and two second connecting plates 1322 perpendicularly connected to the ends of the first connecting plate 1321. The first connecting plate 1321 is slidably disposed on the guide rail 1221 and connected to the nut. The flower basket 200 to be tested is configured to be sandwiched between the two second connecting plates 1322, and the laser sensor 131 is mounted on the second connecting plates 1322.

[0064] In the above embodiment, the laser sensor 131 includes a laser emitter and a laser receiver, which are respectively mounted on different second connecting plates 1322. The laser emitter is used to emit laser light into the silicon wafer slot 210 of the flower basket 200 to be tested, and the laser receiver is used to receive the laser light emitted by the laser emitter. It can be understood that if the laser receiver can receive the laser light emitted by the opposite laser emitter, it indicates that the silicon wafer slot 210 under test is qualified; otherwise, it is unqualified.

[0065] In the above embodiment, the main body 110 may further include a mounting base 112, which is used to place the flower basket 200 to be tested. The mounting base 112 can make the flower basket 200 more firmly installed and provide a position for the installation of the flower basket 200, thereby preventing the flower basket 200 from being placed unstably or not being installed in the proper position.

[0066] like Figure 1 and Figure 2 As shown, in the above embodiment, the mounting base 112 may include a mounting groove 1121 and a retaining groove 1122. The flower basket 200 to be tested is mounted in the mounting groove 1121, and the handle 220 on the flower basket 200 to be tested (a structure on the flower basket 200 for convenient transportation of the flower basket 200) is engaged in the retaining groove 1122. The mounting groove 1121 can be used to reinforce the flower basket 200 to prevent it from shaking, and the retaining groove 1122 can be used to allow the handle 220 on the flower basket 200 to be engaged, thereby further positioning and reinforcing the position of the flower basket 200 on the mounting base 112, further ensuring that the flower basket 200 is installed stably and in the proper position.

[0067] like Figure 2 As shown, in the above embodiment, the mounting groove 1121 and the limiting groove 1122 have an opening 1123 along the length of the mounting groove 1121. The flower basket 200 to be tested is configured to be slidably installed in the mounting groove 1121 along the opening 1123. The flower basket 200 can slide into the mounting groove 1121 from the opening 1123 of the mounting groove 1121. Simultaneously, the handle 220 on the flower basket 200 can slide into the limiting groove 1122 from the opening 1123 of the limiting groove 1122 until the flower basket 200 is properly installed on the mounting seat 112. It should be noted that when installing the flower basket 200, the mounting frame 132 can be raised first to prevent the flower basket 200 from contacting the mounting frame 132 while sliding along the mounting seat 112. When the flower basket 200 is between the two second connecting plates 1322 of the mounting frame 132, the mounting frame 132 can be lowered to allow subsequent testing of the flower basket 200.

[0068] The above embodiment may further include a plurality of support bases 150 disposed at the bottom of the main body 110, and the support bases 150 are used to support the main body 110. The provision of the support bases 150 can reduce the contact surface between the detection device of the silicon wafer basket 200 and the ground, thereby reducing the risk of the detection device of the silicon wafer basket 200 being unstable due to local unevenness of the ground. In addition, the support bases 150 can be configured as a height-adjustable structure to level the entire detection device of the silicon wafer basket 200, further improving detection accuracy.

[0069] The present invention provides a device for detecting a silicon wafer basket 200, including a main body 110, a lifting mechanism 120, a laser detection assembly 130, a controller, and a display 140. The main body 110 includes a detection platform 111, and the flower basket 200 to be tested is configured to be placed on the detection platform 111 for detection; the lifting mechanism 120, the controller, and the display 140 are all arranged on the main body 110, and the laser detection assembly 130 is arranged on the lifting mechanism 120. The laser detection assembly 130 includes a laser sensor 131. The laser sensor 131 The device is configured to emit laser light into the wafer slots 210 of the flower basket 200 to be tested, thereby detecting whether the wafer slots 210 are deformed. The lifting mechanism 120, the display 140, and the laser sensor 131 are all electrically connected to a controller. The controller is configured to control the lifting mechanism 120 to move up and down, thereby driving the laser sensor 131 to detect whether the wafer slots 210 of the flower basket 200 to be tested are deformed one by one. The laser sensor 131 transmits the detection results to the controller, which processes the results and then transmits them to the display 140 for display. When inspecting a wafer flower basket 200, the device for inspecting the wafer flower basket 200 provided in an embodiment of the present invention can place the flower basket 200 on the inspection table 111 and align the laser sensor 131 with the wafer slot 210 on the flower basket 200. If the laser light emitted by the laser sensor 131 can smoothly pass through the wafer slot 210, the wafer slot 210 has passed inspection. Otherwise, the wafer slot 210 has a defect and has failed inspection. The lifting mechanism 120 can drive the laser sensor 131 to move up and down, thereby inspecting each wafer slot 210 in the flower basket 200 one by one. The controller can control the lifting mechanism 120 to move up and down precisely and receive data detected by the laser sensor 131, process the data, and transmit it to the display 140 for display, so that the inspector can visually observe the inspection results. It can be seen that the device for inspecting the wafer flower basket 200 provided by the present invention can automatically detect defects in the flower basket 200, thereby improving inspection accuracy and efficiency.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A silicon wafer basket detection device, characterized in that: The device comprises a main body, a lifting mechanism, a laser detection component, a controller and a display. The main body comprises a detection platform, and the flower basket to be tested is configured to be placed on the detection platform for testing. The lifting mechanism, the controller, and the display are all disposed on the main body. The laser detection assembly is disposed on the lifting mechanism. The laser detection assembly includes a laser sensor configured to emit laser light into the silicon wafer slot of the flower basket to be tested to detect whether the silicon wafer slot is deformed. The lifting mechanism, the display, and the laser sensor are all electrically connected to the controller. The controller is used to control the lifting mechanism to move up and down, so as to drive the laser sensor to detect whether the silicon wafer slots of the flower basket to be tested are deformed one by one. The laser sensor transmits the detection results to the controller, which processes the results and then transmits them to the display for display.

2. The silicon wafer basket detection device according to claim 1, characterized in that: The lifting mechanism includes a driving motor and a ball screw unit. The laser detection component is connected to the ball screw unit. The driving motor is used to drive the ball screw unit to move, thereby driving the laser detection component to move up and down.

3. The silicon wafer basket detection device according to claim 2, characterized in that: The ball screw unit includes a guide rail, a screw and a nut. The guide rail is arranged on the main body, and the screw is arranged on the guide rail. The length directions of the screw and the guide rail are consistent, and the length directions of the screw and the guide rail are perpendicular to the detection platform. The drive motor is arranged on the top of the ball screw unit, and the nut is movably arranged along the screw. The laser detection assembly is slidably set on the guide rail and connected to the nut.

4. The silicon wafer basket detection device according to claim 3, characterized in that: The laser detection component further includes a mounting bracket, the laser sensor is arranged on the mounting bracket, and the mounting bracket can be slidably arranged on the guide rail and connected to the nut.

5. The silicon wafer basket detection device according to claim 4, characterized in that: The mounting frame is configured to surround the periphery of the flower basket to be tested, and the mounting frame includes a first connecting plate and two second connecting plates vertically connected to both ends of the first connecting plate. The first connecting plate is slidably disposed on the guide rail and connected to the nut. The flower basket to be tested is configured to be sandwiched between two second connecting plates, and the laser sensor is installed on the second connecting plates.

6. The silicon wafer basket detection device according to claim 5, characterized in that: The laser sensor includes a laser emitter and a laser receiver, which are respectively installed on different second connecting boards. The laser emitter is used to emit laser light into the silicon chip slot of the flower basket to be tested, and the laser receiver is used to receive the laser light emitted by the laser emitter.

7. The silicon wafer basket detection device according to any one of claims 1 to 6, characterized in that: The main body further comprises a mounting seat, and the mounting seat is used for placing the flower basket to be tested.

8. The silicon wafer basket detection device according to claim 7, characterized in that: The mounting seat includes a mounting slot and a limiting slot. The flower basket to be tested is mounted in the mounting slot, and a handle on the flower basket to be tested is clamped in the limiting slot.

9. The silicon wafer basket detection device according to claim 8, characterized in that: The installation slot and the limiting slot have openings along the length direction of the installation slot, and the flower basket to be tested is configured to be slidably installed in the installation slot along the openings.

10. The silicon wafer flower basket detection device according to any one of claims 1 to 6, characterized in that: It also includes a plurality of support seats, which are arranged at the bottom of the main body and are used to support the main body.

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