Ultrasonic liquid medicine tank and wet cleaning device

Abstract

The utility model discloses an ultrasonic liquid medicine tank and a wet cleaning device, and relates to the technical field of semiconductor processing, and the ultrasonic liquid medicine tank comprises a tank body, an ultrasonic assembly and a shell structure; the groove body is provided with at least two outer wall surfaces; an ultrasonic assembly is mounted on at least one outer wall surface; a shell structure is mounted on at least the other outer wall surface; a heat exchange cavity is formed between the shell structure and the groove body. The ultrasonic assembly is directly mounted on the outer wall surface of the tank body, and compared with a waterproof ultrasonic design, the ultrasonic transmission path is reduced, so that the ultrasonic effect is improved; and the heat exchange cavity is formed between the shell structure installed on at least one outer wall face of the tank body and the tank body, the heat exchange cavity can achieve the heating function, the heat exchange cavity is matched with the ultrasonic assembly to achieve the double effects of heating and ultrasonic treatment on substances in the tank body, and the heat exchange cavity and the ultrasonic assembly work cooperatively, so that the cleaning efficiency is greatly improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to an ultrasonic liquid tank and a wet cleaning device. Background Art

[0002] In semiconductor manufacturing, wafer cleaning is a critical step in ensuring device performance and yield. As the feature sizes of integrated circuits continue to shrink, the cleanliness requirements for wafer surfaces are becoming increasingly stringent. Traditional wafer cleaning methods primarily involve tank cleaning, where chemical solutions are used to remove particles and residue from the wafer surface. Maintaining the solution temperature within the optimal range is crucial to ensure chemical activity and cleaning effectiveness. Therefore, cleaning tanks are typically equipped with heating modules to control the solution temperature.

[0003] To further enhance cleaning effectiveness, ultrasonic cleaning technology is also being used in the wafer cleaning process. Ultrasonic cleaning utilizes the cavitation effect generated by ultrasound in liquids to effectively remove particles from the wafer surface that are difficult to remove. For example, Chinese patent publication CN218049331U describes a semiconductor wafer cleaning system that includes a cleaning tank, a water bath, and an ultrasonic vibration plate installed at the bottom of the water bath. The water bath and the ultrasonic vibration plate form an existing ultrasonic cleaning tank, which transmits ultrasonic waves into the cleaning tank through the medium of water, thereby performing ultrasonic cleaning.

[0004] However, this design suffers from a long ultrasonic energy transmission path. Energy loss during ultrasonic transmission within the water bath reduces the effectiveness of the ultrasound and reduces cleaning efficiency. Furthermore, this water-insulated ultrasonic design increases the complexity of the device, hindering miniaturization and integration.

[0005] Therefore, a new solution is urgently needed to improve cleaning efficiency, simplify the structure, and facilitate miniaturization design. Utility Model Content

[0006] In view of this, the purpose of this application is to provide an ultrasonic liquid tank and a wet cleaning device that can improve cleaning efficiency, simplify the structure, and facilitate miniaturization design.

[0007] In order to achieve the above technical objectives, the present application provides an ultrasonic liquid medicine tank, comprising a tank body, an ultrasonic component and a shell structure;

[0008] The tank body is provided with at least two outer wall surfaces;

[0009] The ultrasonic component is installed on at least one of the outer wall surfaces;

[0010] The shell structure is mounted on at least another of the outer wall surfaces;

[0011] A heat exchange chamber is formed between the shell structure and the tank body.

[0012] Furthermore, the ultrasonic component is installed on the outer bottom wall of the tank body.

[0013] Furthermore, the ultrasonic component includes at least one ultrasonic vibrator.

[0014] Furthermore, there are multiple ultrasonic vibrators distributed in an array.

[0015] Furthermore, the plurality of ultrasonic vibrators are arranged in a plurality of rows at intervals, and each row includes at least two ultrasonic vibrators.

[0016] Furthermore, the ultrasonic assembly further includes an ultrasonic mounting plate;

[0017] The ultrasonic vibrator is installed on the first side of the ultrasonic installation;

[0018] The second side surface of the ultrasonic mounting plate, which is opposite to the first side surface, is attached to the outer wall surface of the tank body;

[0019] The ultrasonic mounting plate is detachably connected to the trough body.

[0020] Furthermore, the ultrasonic component further includes an ultrasonic shell;

[0021] The ultrasonic shell cover is installed on the first side surface of the ultrasonic mounting plate and is used to form a cover for the ultrasonic vibrator.

[0022] Furthermore, the shell structure is arranged around the outer wall surface of the tank body, and forms the heat exchange cavity between the shell structure and the outer wall surface of the tank body.

[0023] Furthermore, a heater is installed on the shell structure and extends into the heat exchange chamber, so as to heat the heat-conducting medium in the heat exchange chamber.

[0024] Furthermore, it also includes a current equalizing plate;

[0025] The flow balancing plate is arranged at the inner bottom of the tank body, and forms a gap cavity between the flow balancing plate and the inner bottom wall of the tank body;

[0026] The flow balancing plate is provided with a plurality of through holes penetrating the plate;

[0027] A liquid inlet pipe is installed at the top of the outer wall of the tank;

[0028] One end of the liquid inlet pipe extends into the tank body and extends to the gap cavity;

[0029] A liquid outlet pipe is installed at the bottom of the outer wall of the tank body.

[0030] Furthermore, the inner wall surface of the trough body is provided with a plurality of supporting structures for supporting the flow balancing plate.

[0031] Furthermore, the inner bottom wall surface of the trough body has a diversion slope inclined toward the position of the liquid outlet pipe.

[0032] The present application also discloses a wet cleaning device, comprising a device body and the ultrasonic liquid tank.

[0033] From the above technical solutions, it can be seen that the ultrasonic liquid medicine tank designed in this application has the following beneficial effects:

[0034] 1. The ultrasonic component is directly installed on the outer wall of the tank. Compared with the water-insulated ultrasonic design, it reduces the ultrasonic transmission path and thus improves the effect of the ultrasonic effect.

[0035] 2. A heat exchange chamber is formed between the outer shell structure installed on at least another outer wall of the tank body and the tank body. The heat exchange chamber can realize the heating function and cooperate with the ultrasonic component to play a dual role of heating and ultrasonicating the substances in the tank body. The two work together to greatly improve the cleaning efficiency.

[0036] 3. The overall structure is simpler, without complex water-proof ultrasonic structures, and takes up less space, which facilitates the realization of miniaturized design. Miniaturized design can improve the portability and flexibility of the equipment and broaden its application range. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0038] Figure 1 A three-dimensional diagram of an ultrasonic liquid medicine tank provided in this application;

[0039] Figure 2 A side view of an ultrasonic liquid medicine tank provided in this application;

[0040] Figure 3 for Figure 2 AA section view in;

[0041] Figure 4 A top view of an ultrasonic liquid medicine tank provided in this application;

[0042] In the figure: 1. trough body; 2. outer shell structure; 21. heat exchange chamber; 22. heater; 3. ultrasonic component; 31. ultrasonic vibrator; 32. ultrasonic shell; 41. liquid inlet pipe; 42. liquid outlet pipe; 43. circulating liquid pipe; 5. flow equalizing plate; 51. through hole; 6. supporting structure. DETAILED DESCRIPTION

[0043] The following will clearly and completely describe the technical solutions of the embodiments of the present application in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present application, not all of them. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the embodiments of the present application.

[0044] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0045] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, replaceable connections, or integral connections. They can also refer to mechanical connections or electrical connections. They can also refer to direct connections or indirect connections through an intermediate medium. They can also refer to internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0046] The embodiment of the present application discloses an ultrasonic medicine tank.

[0047] See also Figure 1 as well as Figure 3 An embodiment of an ultrasonic liquid medicine tank provided in the embodiments of the present application includes:

[0048] Tank body 1, ultrasonic component 3 and shell structure 2.

[0049] The tank body 1 is provided with at least two outer wall surfaces. It should be noted that the tank body 1 is an existing medicine liquid tank body structure, such as a rectangular tank or a cylindrical tank. Taking a rectangular tank as an example, it has five outer wall surfaces (four outer wall surfaces + one outer bottom wall surface). Taking a cylindrical tank as an example, it has two outer wall surfaces (one "cylindrical" outer wall surface + one outer bottom wall surface).

[0050] An ultrasonic component 3 is installed on at least one outer wall surface.

[0051] A shell structure 2 is mounted on at least one of the other outer walls, forming a heat exchange chamber 21 between the shell structure 2 and the tank body 1. A heat-conducting medium, such as water or oil, is provided in the heat exchange chamber 21 for transferring and exchanging heat, thereby heating the liquid medicine inside the tank body 1.

[0052] The ultrasonic liquid medicine tank designed in this application has the following beneficial effects:

[0053] 1. Mounting the ultrasonic assembly 3 directly on the outer wall of the tank 1 reduces the ultrasonic transmission path compared to a water-insulated ultrasonic design. During ultrasonic propagation, a shorter transmission path reduces energy loss, allowing ultrasound to more effectively impact the liquid medicine within the tank 1, thereby enhancing the effectiveness of the ultrasonic effect.

[0054] 2. A heat exchange chamber 21 is formed between the housing structure 2 mounted on at least one other outer wall of the tank 1 and the tank 1. Heat exchange chamber 21 provides a heating function and, in conjunction with the ultrasonic assembly 3, provides both heating and ultrasonic treatment of the substances within the tank 1. During the cleaning process, ultrasound accelerates the reaction between the cleaning agent and the imaging substance, while heating allows the reaction to proceed at a more optimal temperature. These two functions work synergistically, significantly improving cleaning efficiency.

[0055] 3. The overall structure is simpler, without complex water-blocking ultrasonic structures, and takes up less space, facilitating miniaturization. Miniaturization improves the device's portability and flexibility, broadening its application range (such as for fragments (small wafers)). Furthermore, miniaturization can save on chemical solution usage and reduce costs.

[0056] The above is an embodiment of an ultrasonic liquid medicine tank provided in the embodiment of the present application. The following is an embodiment of an ultrasonic liquid medicine tank provided in the embodiment of the present application. For details, please refer to Figures 1 to 3 .

[0057] Based on the solution of the above embodiment 1:

[0058] Further, if Figure 3 As shown, the ultrasonic component 3 can be installed on the outer bottom wall of the tank body 1, which can reserve all the outer side wall surfaces for the shell structure 2 to form a surrounding heat exchange chamber 21, thereby achieving a better heating effect.

[0059] Of course, the layout of the ultrasonic assembly 3 is not limited to a single outer wall surface. Based on actual needs, the ultrasonic assembly 3 can be installed on different outer walls of the tank body 1 to achieve more complex and sophisticated ultrasonic effects. For example, the ultrasonic assembly 3 can be installed on the outer bottom wall surface and at least one outer side wall surface of the tank body 1 to achieve multi-angle ultrasonic effects on the liquid medicine in the tank body 1, further improving the uniformity and efficiency of the ultrasonic effect. Those skilled in the art can make various designs based on actual needs without limitation.

[0060] Furthermore, if Figure 3 As shown, the ultrasonic component 3 includes at least one ultrasonic vibrator 31. The operating principle of ultrasonic vibrator 31 is based on the piezoelectric effect. Piezoelectric materials deform when subjected to an electric field. Ultrasonic vibrator 31 is typically made of piezoelectric ceramics or other piezoelectric materials, which convert electrical energy into mechanical vibrations (ultrasound waves). In transmit mode, when an alternating voltage is applied to ultrasonic vibrator 31, the piezoelectric material periodically expands and contracts, generating high-frequency vibrations that propagate into the medium in the form of ultrasonic waves.

[0061] Furthermore, if Figure 3 As shown, there are multiple ultrasonic vibrators 31 distributed in an array.

[0062] The array of multiple ultrasonic vibrators 31 allows for a large, uniform ultrasonic effect on the liquid medicine in the tank 1, improving the efficiency and effectiveness of the ultrasonic treatment. The design of the array of ultrasonic vibrators 31 can be adjusted to the shape and size of the tank 1 to ensure that ultrasound evenly covers the entire liquid medicine in the tank 1. Furthermore, the number and arrangement of the ultrasonic vibrators 31 can be varied to meet the needs of different application scenarios.

[0063] Furthermore, the plurality of ultrasonic vibrators 31 are arranged in a plurality of rows at intervals, and each row includes at least two ultrasonic vibrators 31 .

[0064] This design ensures a more uniform ultrasonic effect and facilitates maintenance and replacement of the ultrasonic vibrators 31. During the ultrasonic treatment process, since ultrasonic waves propagate in a medium with a certain degree of directionality, multiple rows of ultrasonic vibrators 31, spaced apart, can achieve multi-directional ultrasonic effects on the liquid medicine within the tank 1, further improving the uniformity and efficiency of the ultrasonic treatment. Furthermore, each row includes at least two ultrasonic vibrators 31, ensuring that sufficient ultrasonic energy is applied to the liquid medicine in each direction, thereby achieving comprehensive ultrasonic treatment of the liquid medicine.

[0065] Furthermore, the ultrasonic component 3 also includes an ultrasonic mounting plate (not shown in the figure); the ultrasonic vibrator 31 is installed on the first side of the ultrasonic mounting; the second side of the ultrasonic mounting plate opposite to the first side is attached to the outer wall surface of the tank body 1; the ultrasonic mounting plate is detachably connected to the tank body 1.

[0066] The design of the ultrasonic mounting plate allows for easy installation and removal of the ultrasonic vibrator 31, facilitating maintenance and replacement of the ultrasonic assembly 3. Furthermore, the detachable connection between the ultrasonic mounting plate and the tank body 1 increases the flexibility and adaptability of the ultrasonic assembly 3, allowing it to be adapted to various tank body shapes and sizes. In practical applications, the ultrasonic mounting plate can employ detachable connection methods such as bolts or snap-fit ​​connections to ensure a stable connection between the ultrasonic assembly 3 and the tank body 1 and facilitate removal.

[0067] Furthermore, if Figure 3 As shown, the ultrasonic assembly 3 further includes an ultrasonic housing 32 ; the ultrasonic housing 32 is mounted on the first side of the ultrasonic mounting plate and is used to form a cover for the ultrasonic vibrator 31 .

[0068] The design of the ultrasonic shell cover 32 can protect the ultrasonic vibrator 31 and prevent it from being damaged during operation. At the same time, the ultrasonic shell cover 32 can also play a role in sound insulation and vibration reduction, reducing the noise and vibration generated by the ultrasonic component 3 during operation, and improving the stability and reliability of the equipment. In addition, the material and shape of the ultrasonic shell cover 32 can also be designed according to actual needs to meet the requirements of different application scenarios. Taking the ultrasonic component 3 set on the outer bottom wall of the tank body 1 as an example, the ultrasonic shell cover 32 can also serve as a support structure 6 to support the tank body 1.

[0069] Furthermore, if Figures 1 to 4 As shown, taking the super-shen component installed on the outer bottom wall of the tank body 1 as an example, the shell structure 2 is arranged around the outer wall of the tank body 1, and a heat exchange cavity is formed between the outer wall of the tank body 1. The shell structure 2 is arranged around the outer wall of the tank body 1, which can achieve comprehensive heating of the side of the tank body 1, improving heating efficiency and uniformity.

[0070] Furthermore, if Figures 1 to 3 As shown, a heater 22 is installed on the outer shell structure 2 and extends into the heat exchange chamber 21 for heating the heat-conducting medium in the heat exchange chamber.

[0071] The heater 22 may be an electric heating element, and its electric heating portion (such as a heating wire) may extend into the heat exchange chamber 21 to heat the heat-conducting medium therein.

[0072] The heater 22 can also be a circulating heater 22, whose heating portion is external and is equipped with a circulation pipeline connected to the heat exchange chamber 21. This allows the heat-conducting medium in the heat exchange chamber 21 to circulate through the heating portion for heating and then circulate back into the heat exchange chamber. The heat-conducting medium circulates within the heat exchange chamber 21, transferring heat to the tank body 1, thereby heating the liquid medicine in the tank body 1. Compared with traditional direct heating methods, this heating method is more uniform and stable, can avoid local overheating or temperature unevenness, and thus improve the cleaning effect and the quality of the liquid medicine.

[0073] Further, if Figure 3 as well as Figure 4 As shown, a flow balancing plate 5 is also included.

[0074] The flow equalizing plate 5 is arranged at the bottom of the tank body 1, and a gap cavity is formed between it and the inner bottom wall of the tank body 1; a plurality of through holes 51 are provided on the flow equalizing plate 5, and a liquid inlet pipe 41 is installed at the top position of the outer wall of the tank body 1; one end of the liquid inlet pipe 41 extends into the tank body 1 and extends to the gap cavity; a liquid outlet pipe 42 is installed at the bottom position of the outer wall of the tank body 1.

[0075] The design of the flow equalizing plate 5 allows the drug liquid to flow into the gap cavity from the liquid inlet pipe 41 and be evenly distributed to the drug liquid area in the tank body 1 through the through holes 51 on the flow equalizing plate 5. This design can improve the uniformity of the drug liquid and avoid splashing when the liquid is introduced; the liquid outlet pipe 42 is used to discharge the treated drug liquid from the tank body 1 to facilitate subsequent collection and processing.

[0076] like Figure 4 As shown, a circulating liquid pipe 43 may be additionally designed to cooperate with the liquid inlet pipe 41 to realize the circulation of the internal liquid medicine, so that the liquid medicine is in full contact with the wafers (semiconductors) in the flower basket, thereby improving the effect.

[0077] Further, if Figure 3 As shown, the inner wall of the tank body 1 is provided with a plurality of supporting structures 6 for supporting the flow balancing plate 5. The supporting structures 6 can be protrusions, and there is no specific limitation.

[0078] Further, if Figure 3 As shown, the inner bottom wall of the tank body 1 has a diversion slope that tilts toward the liquid outlet pipe 42. This diversion slope allows the liquid medicine in the tank body 1 to flow more smoothly toward the liquid outlet pipe 42 under the action of gravity, preventing the liquid medicine from accumulating at the bottom of the tank body 1 or forming dead corners, thereby improving the liquid medicine discharge efficiency and treatment effect. Furthermore, the diversion slope can also reduce the amount of residual liquid medicine in the tank body 1, facilitating subsequent cleaning and maintenance.

[0079] The diversion slope can be adjusted according to actual needs to ensure that the liquid medicine can be discharged smoothly. For example, the diversion slope can be set between 5 degrees and 30 degrees. The specific value can be determined according to the size of the tank body 1, the properties of the liquid medicine and the requirements of the treatment process.

[0080] The present application also discloses a wet cleaning device, which includes a device body and an ultrasonic liquid medicine tank, wherein the ultrasonic liquid medicine tank is installed on the device body.

[0081] The above is a detailed introduction to an ultrasonic liquid tank and wet cleaning device provided by the present application. For those skilled in the art, according to the ideas of the embodiments of the present application, there may be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present application.

Claims

1. An ultrasonic liquid medicine tank, characterized in that: It comprises a tank body (1), an ultrasonic component (3) and a shell structure (2); The tank body (1) is provided with at least two outer wall surfaces; The ultrasonic component (3) is mounted on at least one of the outer wall surfaces; The outer shell structure (2) is mounted on at least another of the outer wall surfaces; A heat exchange chamber (21) is formed between the shell structure (2) and the tank body (1).

2. The ultrasonic liquid medicine tank according to claim 1, characterized in that: The ultrasonic component (3) is mounted on the outer bottom wall of the tank body (1).

3. The ultrasonic liquid medicine tank according to claim 1, characterized in that: The ultrasonic component (3) comprises at least one ultrasonic vibrator (31).

4. The ultrasonic liquid medicine tank according to claim 3, characterized in that: The ultrasonic vibrators (31) are multiple and distributed in an array.

5. The ultrasonic liquid medicine tank according to claim 4, characterized in that: The plurality of ultrasonic vibrators (31) are arranged in a plurality of rows at intervals, and each row includes at least two ultrasonic vibrators (31).

6. The ultrasonic liquid medicine tank according to claim 3, characterized in that: The ultrasonic assembly (3) further includes an ultrasonic mounting plate; The ultrasonic vibrator (31) is installed on the first side of the ultrasonic installation; The second side surface of the ultrasonic mounting plate, which is opposite to the first side surface, is in contact with the outer wall surface of the tank body (1); The ultrasonic mounting plate is detachably connected to the tank body (1).

7. The ultrasonic liquid medicine tank according to claim 6, characterized in that: The ultrasonic component (3) further includes an ultrasonic housing (32); The ultrasonic shell cover (32) is mounted on the first side of the ultrasonic mounting plate and is used to form a cover for the ultrasonic vibrator (31).

8. The ultrasonic liquid medicine tank according to claim 2, characterized in that: The outer shell structure (2) is arranged around the outer wall surface of the tank body (1), and forms the heat exchange cavity between the outer shell structure (2) and the outer wall surface of the tank body (1).

9. The ultrasonic liquid medicine tank according to claim 1, characterized in that: A heater (22) extending into the heat exchange chamber (21) is mounted on the outer shell structure (2) and is used to heat the heat-conducting medium in the heat exchange chamber.

10. The ultrasonic liquid medicine tank according to claim 1, characterized in that: Also includes a flow equalizing plate (5); The flow balancing plate (5) is arranged at the inner bottom of the tank body (1), and forms a gap cavity between the flow balancing plate (5) and the inner bottom wall of the tank body (1); The flow balancing plate (5) is provided with a plurality of through holes (51) penetrating the flow balancing plate; A liquid inlet pipe (41) is installed at the top of the outer wall of the tank body (1); One end of the liquid inlet pipe (41) extends into the tank body (1) and extends to the gap cavity; A liquid outlet pipe (42) is installed at the bottom of the outer wall of the tank body (1).

11. The ultrasonic liquid medicine tank according to claim 10, characterized in that: The inner wall surface of the tank body (1) is provided with a plurality of support structures (6) for supporting the flow balancing plate (5).

12. The ultrasonic liquid medicine tank according to claim 10, characterized in that: The inner bottom wall surface of the tank body (1) has a diversion slope inclined toward the position of the liquid outlet pipe (42).

13. A wet cleaning device, characterized in that: It comprises a device body and the ultrasonic liquid medicine tank according to any one of claims 1 to 12.

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