Infrared quartz scanning field lens with large image plane

Abstract

The utility model relates to the technical field of scanning field lenses, in particular to an infrared quartz scanning field lens with a large image plane. The infrared quartz scanning field lens with the large image plane comprises a diaphragm and an image plane, a field lens is installed between the diaphragm and the image plane, and the field lens comprises six lenses which are coaxially arranged in sequence, are made of fused quartz glass materials and have the refractive index of 1.46; infrared laser emitted by the infrared quartz scanning field lens with the large image plane has a heat effect, the scanning image plane is enlarged under the condition that it is guaranteed that edge focusing light spots are not distorted, machining actions such as punching, cutting and marking can be conducted on a workpiece in a large range, and the machining speed of infrared laser machining is greatly increased.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning field mirrors, in particular to an infrared quartz scanning field mirror with a large image surface. Background Art

[0002] Laser processing technology is developing rapidly, in which the scanning field lens determines the processing accuracy and scanning range. The scanning field lens is an optical scanning focusing lens that works with the galvanometer. After focusing the laser, the focused light spot moves on the scanning image surface, realizing laser engraving, laser cutting, laser marking and other processing.

[0003] In the related art, most of the scanning field mirrors used are short-wavelength beams. Short-wavelength beams are prone to edge focus spot distortion in the directions of glass cutting and metal cutting, which reduces the final scanning image surface, and ultimately makes it impossible to perform large-scale drilling, cutting, marking and other processing actions on the workpiece, thereby reducing the processing speed of the entire laser processing equipment for the workpiece.

[0004] In view of the problems in the above background technology, the present invention aims to provide an infrared quartz scanning field lens with a large image surface. Utility Model Content

[0005] The purpose of the utility model is to provide an infrared quartz scanning field mirror with a large image surface, so as to solve the problem of slow processing speed of laser processing of workpieces by laser processing equipment using short wavelength beams proposed in the above background technology.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] An infrared quartz scanning field lens with a large image surface, the infrared quartz scanning field lens with a large image surface comprising:

[0008] An aperture and an image plane, wherein a field lens is installed between the aperture and the image plane, and the field lens includes six coaxially arranged lenses in sequence and made of fused quartz glass, each with a refractive index of .

[0009] The six lenses are respectively a first negative lens with a focal length between -200mm and -50mm, a second positive lens with a focal length between 200mm and 400mm, a third positive lens with a focal length between 50mm and 200mm, a fourth positive lens with a focal length between 150mm and 350mm, a fifth positive lens with a focal length between 300mm and 600mm, and a sixth negative lens with a focal length between -200mm and -50mm.

[0010] As a further solution of the present invention: the field lens further includes a protective lens in a flat plate structure between the sixth negative lens and the image plane.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] The large-image infrared quartz scanning field lens has the following advantages compared to the current short-wavelength scanning field lens:

[0013] This large-image infrared quartz scanning field lens is used in the field of infrared laser processing. The light beam is emitted through the lens in the order of "negative-positive-positive-positive-positive-positive-negative" with an aperture. The material is fused quartz glass with high infrared light transmittance. Through the optimization design of wavelength setting, focal length scaling and aberration control, the scanning field lens with excellent image quality is finally achieved. Compared with other short-wavelength processing fields, it has a faster processing speed and is commonly used in glass cutting, metal cutting and other directions.

[0014] Infrared laser has a thermal effect, which can increase the scanning image surface while ensuring that the edge focus spot is not distorted. It can realize a large range of processing actions such as drilling, cutting, and marking on the workpiece, greatly improving the processing speed of infrared laser processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present invention.

[0016] Figure 1 This is a schematic structural diagram of an infrared quartz scanning field lens with a large image surface according to an embodiment of the present utility model.

[0017] In the figure: 1-aperture, 2-light beam, 3-first negative lens, 4-second positive lens, 5-third positive lens, 6-fourth positive lens, 7-fifth positive lens, 8-sixth negative lens, 9-protective mirror, 10-image plane. DETAILED DESCRIPTION

[0018] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0019] Example

[0020] See also Figure 1 The embodiment of the present invention provides an infrared quartz scanning field lens with a large image surface, and the infrared quartz scanning field lens with a large image surface includes:

[0021] An aperture 1 and an image plane 10, with a field lens installed between the aperture 1 and the image plane 10. The field lens includes six coaxially arranged lenses made of fused quartz glass, each with a refractive index of 1.46. The six lenses are, respectively, a first negative lens 3 with a focal length between -200 mm and -50 mm, a second positive lens 4 with a focal length between 200 mm and 400 mm, a third positive lens 5 with a focal length between 50 mm and 200 mm, a fourth positive lens 6 with a focal length between 150 mm and 350 mm, a fifth positive lens 7 with a focal length between 300 mm and 600 mm, and a sixth negative lens 8 with a focal length between -200 mm and -50 mm.

[0022] This large-image infrared quartz scanning field lens is used in the field of infrared laser processing. The light beam 2 is emitted from the aperture 1 and passes through the lenses in the order of "negative-positive-positive-positive-positive-positive-negative". The material is fused quartz glass with high infrared light transmittance. Through the optimization design of wavelength setting, focal length scaling and aberration control, the scanning field lens with excellent image quality is finally achieved. Compared with other short-wavelength processing fields, it has a faster processing speed and is commonly used in glass cutting, metal cutting and other directions.

[0023] Infrared laser has a thermal effect, which can increase the scanning image surface while ensuring that the edge focus spot is not distorted. It can realize a wide range of processing actions such as drilling, cutting, and marking on the workpiece, greatly improving the processing speed of infrared laser processing;

[0024] In one embodiment of the present invention, the field lens further includes a protective lens 9 having a flat plate structure between the sixth negative lens 8 and the image plane 10;

[0025] The curvature radius, material, thickness of each lens and the spacing between lenses are modified to optimize the aberration. The following are the parameters of the optical system embodiment of the infrared quartz scanning field lens with a large image surface after calibration, as shown in Table 1:

[0026] Table 1

[0027]

[0028] The final result is a scanning field mirror with an operating wavelength of 1064nm, a field of view of 40 degrees, an image plane of 200mm, and an aperture of 20mm.

[0029] The optical transfer function table of the scanning field mirror is shown in Table 2:

[0030] Table 2

[0031]

[0032] The diffraction energy concentration diagram of the scanning field mirror shows that 77% of the energy in each field of view is concentrated within a 28-micron diameter range, with little astigmatism, as shown in Table 3:

[0033] Table 3

[0034]

[0035] In the description of this utility model, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0036] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An infrared quartz scanning field lens with a large image surface, comprising: A diaphragm (1) and an image plane (10); characterized in that: A field lens is installed between the aperture (1) and the image plane (10), and the field lens includes six coaxially arranged lenses distributed in sequence and made of fused quartz glass, each with a refractive index of 1.46; The six lenses are respectively a first negative lens (3) with a focal length between -200 mm and -50 mm, a second positive lens (4) with a focal length between 200 mm and 400 mm, a third positive lens (5) with a focal length between 50 mm and 200 mm, a fourth positive lens (6) with a focal length between 150 mm and 350 mm, a fifth positive lens (7) with a focal length between 300 mm and 600 mm, and a sixth negative lens (8) with a focal length between -200 mm and -50 mm.

2. The large-image-area infrared quartz scanning field lens according to claim 1, characterized in that: The field lens further includes a protective mirror (9) in a flat plate structure located between the sixth negative lens (8) and the image plane (10).

Images