Cadmium telluride crystal cutting equipment capable of adjusting crystal orientation
By designing a cadmium telluride crystal cutting equipment with adjustable crystal direction, the combination of steering adjustment plate and damping shaft is used to solve the problems of large cutting damage, small adjustable crystal direction range and high cost of existing equipment, and flexible crystal direction adjustment and low damage cutting are achieved.
Patent Information
- Application Number
- CN202422300815.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-09-20
AI Technical Summary
The existing cadmium telluride crystal cutting equipment has problems such as large cutting damage, small adjustable crystal direction range, high equipment cost and low flexibility.
An adjustable crystal cutting device including diamond wire and a wire wheel is designed. By combining a steering adjustment plate and a damping shaft, the cadmium telluride crystal is realized, and the diamond wire with a bus diameter of 300 μm and a 10-12 μm diamond grain size is used for cutting.
It realizes that the crystal direction can be adjusted at any time during the cutting process, reduces cutting damage, improves the flexibility of the equipment and reduces costs.
Smart Images
Figure CN223290068U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of cadmium telluride crystal processing, in particular to cadmium telluride crystal cutting equipment with adjustable crystal orientation. Background Art
[0002] Semiconductor wafers are the core of integrated circuit chips, usually obtained from single crystals through slicing, etching, grinding, chemical mechanical polishing, cleaning processes, etc. Slicing is an important part of wafer processing and plays an important role in the final shipment quality of the wafer. <111> and <211> Since it is not possible to grow cadmium telluride crystals in a directional manner, the unknown crystal direction is adjusted to <111> and <211> Crystal planes are particularly important.
[0003] Due to the limitations of crystal growth methods, existing cadmium telluride crystals can only be cut using inner circle cutting equipment. However, inner circle cutting equipment has many problems, such as large cutting damage, small adjustable crystal orientation range, high equipment cost, and low flexibility. Utility Model Content
[0004] The utility model aims to provide a cadmium telluride crystal cutting device with adjustable crystal orientation to overcome the above problems or at least partially solve the above problems.
[0005] In order to achieve the above-mentioned purpose, the technical solution of the present utility model is specifically implemented as follows:
[0006] The utility model provides a cadmium telluride crystal cutting device with adjustable crystal orientation, comprising a diamond wire and a wire wheel, wherein the diamond wire is wound on the wire wheel, and further comprising a steering adjustment plate 1 and a steering adjustment plate 2, wherein the steering adjustment plate 2 is arranged on the upper side of a base and is rotatably connected via a damping shaft 2, wherein the upper side surface of the steering adjustment plate 2 is fixedly connected to a connecting plate, wherein the steering adjustment plate 1 is arranged on the connecting plate and is rotatably connected via a damping shaft 1, and wherein the upper side surface of the steering adjustment plate 1 is fixedly connected to a resin pad for connecting a cadmium telluride crystal.
[0007] As a further solution of the present invention, an arc-shaped notch groove is provided on the connecting plate, and the steering adjustment plate is matchedly arranged on the arc-shaped notch groove.
[0008] As a further solution of the present invention, an annular protrusion is integrally connected to the upper side surface of the base, and the second steering adjustment plate is matched and arranged inside the annular protrusion.
[0009] As a further solution of the present invention, scale lines are provided on the front side surface of the connecting plate and the upper side surface of the annular protrusion.
[0010] As a further solution of the present invention, a locking bolt 1 is connected to the steering adjustment plate 1 through threaded engagement, and the back of the locking bolt 1 is in contact with the connecting plate, and a locking bolt 2 is connected to the annular protrusion of the steering adjustment plate 2 through threaded engagement, and the inner side surface of the locking bolt 2 is in contact with the steering adjustment plate 2.
[0011] As a further solution of the present invention, the locking bolt 1, the locking bolt 2 and the damping shaft 1 are all provided with hexagonal grooves.
[0012] As a further solution of the present invention, the busbar diameter of the diamond wire is 300 μm, and the diamond grain size is 10-12 μm.
[0013] The utility model provides a cadmium telluride crystal cutting device with adjustable crystal orientation, which has the beneficial effects of being able to be stopped and started at any time during the cutting process and adjusting the crystal orientation, being relatively flexible and low in cost, and using a diamond wire with a busbar diameter of 300 μm and a diamond grain size of 10-12 μm for cutting, which can effectively reduce damage during the cutting process. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0015] Figure 1 It is a structural diagram of the present utility model.
[0016] Figure 2 It is a side view of the present utility model.
[0017] In the figure: 1. Resin pad; 2. Steering adjustment plate 1; 3. Connecting plate; 4. Steering adjustment plate 2; 5. Base; 6. Locking bolt 2; 7. Scale line; 8. Locking bolt 1; 9. Damping shaft 1; 10. Diamond wire; 11. Wire pulley; 12. Cadmium telluride crystal; 41. Damping shaft 2. DETAILED DESCRIPTION
[0018] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
[0019] See also Figure 1 and Figure 2 An embodiment of the present invention provides a cadmium telluride crystal cutting device with adjustable crystal orientation, comprising a diamond wire 10 and a wire wheel 11, wherein the diamond wire 10 is wound on the wire wheel 11, and further comprising a steering adjustment plate 2 and a steering adjustment plate 2 4, wherein the steering adjustment plate 2 4 is arranged on the upper side of the base 5 and is rotatably connected via a damping shaft 2 41, and a connecting plate 3 is fixedly connected to the upper side of the steering adjustment plate 2 4, wherein the steering adjustment plate 2 is arranged on the connecting plate 3 and is rotatably connected via a damping shaft 1 9, and a resin pad 1 for connecting the cadmium telluride crystal 12 is fixedly connected to the upper side of the steering adjustment plate 2.
[0020] An arc-shaped notch is provided on the connecting plate 3, and the steering adjustment plate 2 is matched and arranged on the arc-shaped notch. By being arranged in the arc-shaped notch, the steering adjustment plate 2 can rotate on its own, thereby driving the cadmium telluride crystal 12 to perform vertical rotation adjustment.
[0021] An annular protrusion is integrally connected to the upper side of the base 5, and the steering adjustment plate 2 4 is matched and arranged inside the annular protrusion, so that the steering adjustment plate 2 4 can rotate in the annular protrusion, thereby driving the cadmium telluride crystal 12 to rotate horizontally.
[0022] Scale lines 7 are provided on the front side surface of the connecting plate 3 and the upper side surface of the annular protrusion. A locking bolt 8 is connected to the steering adjustment plate 2 through threaded engagement, and the back of the locking bolt 8 is in contact with the connecting plate 3. A locking bolt 26 is connected to the annular protrusion of the steering adjustment plate 24 through threaded engagement, and the inner side surface of the locking bolt 26 is in contact with the steering adjustment plate 24, which facilitates the control of the rotation angle of the steering adjustment plate 2 and the steering adjustment plate 24.
[0023] The locking bolt 1 8 , the locking bolt 2 6 and the damping shaft 1 9 are all provided with hexagonal grooves, which facilitate the use of an hexagonal wrench to rotate and adjust the locking bolt 1 8 , the locking bolt 2 6 and the damping shaft 1 9 , thereby controlling the rotation angle of the cadmium telluride crystal 12 .
[0024] The diameter of the main wire of the diamond wire 10 is 300 μm, and the diameter of the diamond grains is 10-12 μm.
[0025] During use of the present invention, a cutting line is first drawn on the surface of the cadmium telluride crystal 12, and then the cadmium telluride crystal 12 is glued to the prepared resin plate, and the cadmium telluride crystal 12 with the resin plate is fixed to the equipment cutting table, that is, the upper side of the steering adjustment plate 1 2, and then the steering adjustment plate 1 2 and the steering adjustment plate 2 4 are rotated to adjust the vertical and horizontal angles of the cutting. If the cutting is not on one surface, the equipment can be stopped during the cutting process, and then the vertical and horizontal angles can be adjusted to the desired direction.
[0026] When cutting, diamond wire 10 with a main wire diameter of 300 μm and a diamond grain size of 10-12 μm is used to effectively reduce damage during the cutting process.
[0027] Fix the cadmium telluride crystal 12 and the numerical pad on the steering adjustment plate 2, and cut it once to obtain a wafer. Calibrate and test the vertical and horizontal crystal directions of the wafer, calculate the vertical and horizontal crystal direction deviations, and adjust the vertical and horizontal axis crystal direction knobs respectively according to the vertical and horizontal crystal direction deviation values until the desired crystal plane is cut.
[0028] The above are merely embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.
Claims
1. A cadmium telluride crystal cutting device with adjustable crystal orientation, comprising a diamond wire (10) and a wire wheel (11), wherein the diamond wire (10) is wound on the wire wheel (11), characterized in that: The invention also includes a steering adjustment plate 1 (2) and a steering adjustment plate 2 (4), wherein the steering adjustment plate 2 (4) is arranged on the upper side of the base (5) and is rotatably connected via a damping shaft 2 (41), and the upper side of the steering adjustment plate 2 (4) is fixedly connected to a connecting plate (3), and the steering adjustment plate 1 (2) is arranged on the connecting plate (3) and is rotatably connected via a damping shaft 1 (9), and the upper side of the steering adjustment plate 1 (2) is fixedly connected to a resin pad (1) for connecting a cadmium telluride crystal (12).
2. The cadmium telluride crystal cutting device with adjustable crystal orientation according to claim 1, characterized in that: The connecting plate (3) is provided with an arc-shaped notch groove, and the steering adjustment plate (2) is matched and arranged on the arc-shaped notch groove.
3. The cadmium telluride crystal cutting device with adjustable crystal orientation according to claim 2, characterized in that: The upper side surface of the base (5) is integrally connected with an annular protrusion, and the second steering adjustment plate (4) is matched and arranged inside the annular protrusion.
4. The cadmium telluride crystal cutting device with adjustable crystal orientation according to claim 3, characterized in that: The front side surface of the connecting plate (3) and the upper side surface of the annular protrusion are both provided with scale lines (7).
5. The cadmium telluride crystal cutting device with adjustable crystal orientation according to claim 3, characterized in that: The steering adjustment plate 1 (2) is connected to a locking bolt 1 (8) through threaded engagement, and the back of the locking bolt 1 (8) contacts the connecting plate (3). The annular protrusion of the steering adjustment plate 2 (4) is connected to a locking bolt 2 (6) through threaded engagement, and the inner side surface of the locking bolt 2 (6) contacts the steering adjustment plate 2 (4).
6. The cadmium telluride crystal cutting device with adjustable crystal orientation according to claim 5, characterized in that: The locking bolt 1 (8), the locking bolt 2 (6) and the damping shaft 1 (9) are all provided with hexagonal grooves.
7. The cadmium telluride crystal cutting device with adjustable crystal orientation according to claim 1, characterized in that: The diameter of the main wire of the diamond wire (10) is 300 μm, and the diameter of the diamond grains is 10-12 μm.