Plate conveying device of vacuum coating machine

By introducing a plate feeding device into the vacuum coating equipment, the efficient movement of the workpiece hanging plate is achieved using the mounting frame, fixed groove plate and parallelogram hyperbolic crank mechanism, which solves the problems of large space occupation and low efficiency caused by the multi-cabin design, and improves production efficiency and membrane quality stability.

CN223292641UActive Publication Date: 2025-09-02DONGGUAN HUICHENG VACUUM TECH
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Patent Information

Application Number
CN202422515285.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-17
Publication Date
2025-09-02
Estimated Expiration
2034-10-17

AI Technical Summary

Technical Problem

The multi-cabin design of existing vacuum coating equipment leads to large space occupation, low vacuum efficiency, low feed and discharge efficiency, and complex mechanical structure, making it difficult to meet the requirements of efficient production and film quality stability.

Method used

The plate feeding device is adopted, including a mounting frame, upper and lower fixed groove plate, moving groove plate and parallelogram double crank mechanism, to realize the overall front and back movement of the workpiece hanging plate in the transition compartment, and the inlet and exit plate between the transition compartment and the process compartment is realized through the hanging board moving compartment, reducing the number of cabins and simplifying action control.

Benefits of technology

It improves work efficiency, reduces vacuum time, simplifies mechanical structure, improves safety and reduces equipment maintenance costs, and ensures consistency of membrane quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a plate feeding device of a vacuum coating machine, which comprises a mounting frame, a plate feeding device and a plate feeding device, and is characterized in that the mounting frame is arranged in a transition cabin; the pair of upper fixing groove plates and the pair of lower fixing groove plates are fixedly arranged on the mounting frame; the upper movable groove plates are movably mounted on the mounting frame through an upper driving crank connecting rod and an upper driven crank connecting rod, and the upper driving crank connecting rod is connected with an upper power source; the pair of lower movable groove plates is movably mounted on the mounting frame through a lower driving crank connecting rod and a lower driven crank connecting rod, and the lower driving crank connecting rod is connected with a lower power source; and the pair of parallelogram double-crank mechanisms is used for driving the hanging plate moving frame, and a hanging plate lifting assembly used for lifting the workpiece hanging plate is arranged on the hanging plate moving frame. The plate feeding device is simple in plate feeding action and capable of improving working efficiency.
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Description

Technical Field

[0001] The utility model relates to the technical field of large vacuum coating machines, in particular to a plate feeding device of a vacuum coating machine. Background Art

[0002] The technological development trends of vacuum coating equipment are, first, to increase production capacity and efficiency, and second, to improve the quality and stability of coated products. To improve production capacity and efficiency, equipment designs are becoming larger and larger, with increasing load capacities. Individual workpiece hangers (multiple workpieces are mounted on hangers for simultaneous coating) are also becoming larger and heavier. To improve film quality and stability, in addition to introducing new coating technologies and processes, a fundamental requirement is to maintain stable and constant coating atmosphere within the furnace, ensuring that residual gas within each furnace is minimized and remains consistent. To achieve these requirements, the most effective means is to perform the coating and workpiece loading and unloading processes within each furnace in a vacuum, without breaking the vacuum. This allows each furnace to be coated under the same vacuum, preventing atmospheric contamination from breaking the vacuum. This allows for consistent residual atmosphere between furnaces, significantly improving film quality and consistency. Consequently, in recent years, vacuum coating equipment has developed in both large-scale and multi-chamber configurations.

[0003] For example, Chinese patent CN216037214U discloses a vacuum coating device comprising four compartments: a process compartment, a transport compartment, a feed compartment, and a discharge compartment. These four compartments not only take up a large amount of space, but also result in low vacuum efficiency. Furthermore, this multi-compartment design requires both the feed compartment and the discharge compartment to pass through a transport compartment when feeding materials into or discharging materials from the process compartment, resulting in low feeding and discharging efficiency and a very complex mechanical structure and motion process for feeding and discharging materials. Utility Model Content

[0004] The purpose of the utility model is to provide a plate feeding device for a vacuum coating machine, which has a compact structure, simple plate feeding action and can improve work efficiency.

[0005] The purpose of the utility model can be achieved through the following technical solutions.

[0006] A plate feeding device of a vacuum coating machine is provided in a transition chamber for plate entry and a transition chamber for plate exit of the vacuum coating equipment, and is used to feed a workpiece hanging plate from the transition chamber for plate entry to a rotary rack of a process chamber, or to remove a workpiece hanging plate from the rotary rack of the process chamber and feed it to the transition chamber for plate exit. The plate feeding device comprises:

[0007] A mounting frame is provided in the transition cabin;

[0008] A pair of upper fixed slot plates and a pair of lower fixed slot plates are fixedly arranged on the mounting frame and used for placing a plurality of parallel workpiece hanging plates;

[0009] A pair of upper movable slot plates, each having a plurality of grooves corresponding to the positions of the hanging plate placement grooves of the upper fixed slot plate, and movably mounted on the mounting frame via an upper active crank connecting rod and an upper driven crank connecting rod, wherein the upper active crank connecting rod is connected to an upper power source;

[0010] A pair of lower movable slot plates are provided with a plurality of grooves corresponding to the positions of the hanging plate placement grooves of the lower fixed slot plates, and are movably mounted on the mounting frame via a lower active crank connecting rod and a lower driven crank connecting rod, wherein the lower active crank connecting rod is connected to a lower power source;

[0011] A pair of parallelogram double crank mechanisms are arranged on both sides of the front of the mounting frame and are used to drive the hanging plate moving frame. The hanging plate moving frame is provided with a hanging plate lifting component for lifting the workpiece hanging plate.

[0012] The hanging plate lifting assembly may be composed of a lifting motor and a lifting bracket.

[0013] Inside the transition chamber where the panels enter, a parallelogram-shaped double-crank mechanism controls the movement of the panel moving frame, allowing the bracket of the panel lifting assembly to extend into the corresponding process groove on the frontmost workpiece panel in the transition chamber. As the bracket ascends, it lifts the workpiece panel, which is then transferred to the corresponding rotary rack in the process chamber by the panel moving frame. The bracket of the panel lifting assembly then descends, securing the workpiece panel on the rotary rack for coating. Once the workpiece panel is placed on the rotary rack, the bracket descends to a height sufficient to allow the bracket's movement path to clear the workpiece panel.

[0014] Inside the transition chamber where the panels are discharged, a parallelogram double-crank mechanism controls the movement of the panel moving frame, allowing the bracket of the panel lifting assembly to extend into the corresponding process groove of the coated workpiece panel on the rotating rack in the process chamber. As the bracket rises, it lifts the workpiece panel, which is then transported by the panel moving frame to the panel placement slot at the front of the transition chamber. The bracket of the panel lifting assembly then descends, securing the workpiece panel in the panel placement slot in the transition chamber. After the workpiece panel is placed, the bracket of the panel moving frame moves again, descending to a height sufficient to ensure that the bracket's movement path avoids the workpiece panel.

[0015] In the two transition cabins, multiple workpiece hanging plates placed on the upper fixed trough plate and the lower fixed trough plate can move as a whole with the upper movable trough plate and the lower movable trough plate. Specifically, the upper power source drives the upper movable trough plate, and the lower power source drives the lower movable trough plate, so that the upper movable trough plate and the lower movable trough plate move forward or backward synchronously. The upper active crank connecting rod, the upper driven crank connecting rod, the lower active crank connecting rod and the lower driven crank connecting rod adopt the same structure, and each crank rotates one circle synchronously. The upper movable trough plate and the lower movable trough plate can lift all the workpiece hanging plates as a whole and move forward or backward the distance of a hanging plate placement slot, thereby realizing the overall movement of all workpiece hanging plates by one slot position.

[0016] The utility model is provided with a crank connecting rod to realize the overall forward and backward movement of the workpiece hanging plate in the transition cabin, and the plate is fed into the transition cabin into the process cabin and the plate is taken out from the process cabin to the transition cabin through a parallelogram double crank mechanism and a hanging plate moving frame. The movement control action of the workpiece hanging plate is simple, which can improve work efficiency.

[0017] By using the plate feeding device of the present invention to deliver uncoated workpiece plates to the process chamber or remove coated workpiece plates from the process chamber, the vacuum coating equipment only needs one process chamber and two transition chambers: one for plate loading and the other for plate unloading. This reduces the number of chambers, significantly reduces the overall volume of the vacuum chamber required, and shortens the vacuuming time required to achieve working conditions.

[0018] The utility model also has the following improvements:

[0019] The upper movable groove plate of the present invention is arranged on the inner side of the upper fixed groove plate.

[0020] The lower movable groove plate of the present invention is arranged on the inner side of the lower fixed groove plate.

[0021] The upper power source of the present invention is arranged on the outside of the transition cabin, and the output shaft of the upper power source is connected to the shell of the transition cabin through a magnetic fluid seal.

[0022] The lower power source of the present invention is arranged on the outside of the transition cabin, and the output shaft of the lower power source is connected to the shell of the transition cabin through a magnetic fluid seal.

[0023] The power source of the hanging plate moving frame of the parallelogram double crank mechanism of the present invention is arranged outside the transition cabin, and the output shaft of the power source of the hanging plate moving frame is connected to the shell of the transition cabin through a magnetic fluid seal.

[0024] The front and rear ends of the transition cabin of the present invention are provided with movable doors to facilitate the entry, transfer or exit of workpiece hanging boards.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] 1. The utility model is provided with a crank connecting rod to realize the overall forward and backward movement of the workpiece hanging plate in the transition chamber, and realizes the entry of the plate from the transition chamber to the process chamber and the exit of the plate from the process chamber to the transition chamber through the parallelogram double crank mechanism and the hanging plate moving frame. The movement control action of the workpiece hanging plate is simple, which can improve work efficiency.

[0027] 2. This utility model has multiple power sources that can be installed outside the chamber, reducing the number of motors or cylinders required in the vacuum chamber. This can reduce the risk of motor short circuit ignition and cylinder leakage, improve safety, and reduce equipment maintenance costs. At the same time, the structure can be made more compact, making the plate feeding work more efficient.

[0028] 3. The plate feeding device of the present invention is used to feed uncoated workpiece hanging plates to the process chamber, or to remove coated workpiece hanging plates from the process chamber. The vacuum coating equipment only needs to set up one process chamber and two transition chambers, which reduces the number of chambers and significantly reduces the overall volume of the vacuum chamber required, and the vacuuming time required to achieve working conditions is shorter. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is an overall structural diagram of a large vacuum coating equipment used in the utility model;

[0030] Figure 2 This is a cross-sectional structural diagram of the transition cabin and the process cabin in the embodiment;

[0031] Figure 3 This is a side view of the board feeding device in the transition cabin of the utility model;

[0032] Figure 4 yes Figure 3 A side view of the upper movable trough plate and the lower movable trough plate within the middle dotted frame;

[0033] Figure 5 It is a three-dimensional diagram of the plate feeding device of the utility model;

[0034] Figure 6 yes Figure 5 A three-dimensional diagram of a workpiece hanging plate placed on a plate feeding device;

[0035] Figure 7 This is a three-dimensional diagram of the plate feeding device of the present invention at another angle;

[0036] Figure 8 yes Figure 7 A three-dimensional diagram of a workpiece hanging plate placed on a plate feeding device;

[0037] Figure 9 This is a front view of the plate feeding device of the present invention;

[0038] Figure 10 This is the working state 1 of the hanging plate movable rack of the utility model;

[0039] Figure 11 This is the second working state of the hanging plate movable frame of the utility model.

[0040] Explanation of the accompanying drawings: 1. Transition cabin; 2. Moving door; 3. Process cabin; 3a. Rotating frame; 4. Mounting frame; 5. Upper fixed slot plate; 6. Lower fixed slot plate; 7. Workpiece hanging plate; 8. Upper movable slot plate; 8a. Upper active crank connecting rod; 8b. Upper driven crank connecting rod; 8c. Upper power source; 9. Lower movable slot plate; 9a. Lower active crank connecting rod; 9b. Lower driven crank connecting rod; 9c. Lower power source; 10. Parallelogram double crank mechanism; 10a. Power source of hanging plate moving frame; 11. Hanging plate moving frame; 12. Hanging plate lifting assembly. DETAILED DESCRIPTION

[0041] The technical solution of the present invention is described in detail below in conjunction with the accompanying drawings and embodiments so that those skilled in the art can better understand and implement the technical solution of the present invention.

[0042] Example

[0043] A plate feeding device of a vacuum coating machine is provided in a transition chamber 1 for feeding plates and a transition chamber 1 for discharging plates of the vacuum coating equipment, and is used to feed a workpiece hanging plate 7 from the feeding transition chamber 1 to a rotating rack 3a of a process chamber 3, or to remove a workpiece hanging plate 7 from the rotating rack 3a of the process chamber 3 and feed it to the discharging transition chamber 1. The plate feeding device includes:

[0044] The mounting frame 4 is arranged in the transition cabin 1;

[0045] A pair of upper fixed slot plates 5 and a pair of lower fixed slot plates 6 are fixedly mounted on the mounting frame 4 and are used to place a plurality of parallel workpiece hanging plates 7;

[0046] A pair of upper movable slot plates 8 are provided with a plurality of grooves corresponding to the positions of the hanging plate placement grooves of the upper fixed slot plate 5, and are movably mounted on the mounting frame 4 via an upper active crank connecting rod 8a and an upper driven crank connecting rod 8b. The upper active crank connecting rod 8a is connected to an upper power source 8c;

[0047] A pair of lower movable slot plates 9 are provided with a plurality of grooves corresponding to the positions of the hanging plate placement grooves of the lower fixed slot plate 6, and are movably mounted on the mounting frame 4 via a lower active crank connecting rod 9a and a lower driven crank connecting rod 9b. The lower active crank connecting rod 9a is connected to a lower power source 9c;

[0048] A pair of parallelogram double crank mechanisms 10 are provided on both sides of the front of the mounting frame 4 for driving a hanging plate moving frame 11 , on which a hanging plate lifting assembly 12 for lifting the workpiece hanging plate 7 is provided.

[0049] The hanging plate lifting assembly 12 may be composed of a lifting motor and a lifting bracket.

[0050] In the transition chamber 1 where the panels are fed, a parallelogram-shaped double-crank mechanism 10 controls the movement of the panel moving frame 11, causing the bracket of the panel lifting assembly 12 to extend into the corresponding process groove on the front-end workpiece panel 7 in the transition chamber 1. When the bracket ascends, the workpiece panel 7 is lifted. The panel moving frame 11 then moves the workpiece panel 7 to the corresponding rotary rack 3a in the process chamber 3. The bracket of the panel lifting assembly 12 descends, securing the workpiece panel 7 on the rotary rack 3a for coating. After the workpiece panel 7 is placed on the rotary rack 3a, when the panel moving frame 11 moves again, the bracket descends to a height sufficient to ensure that the bracket's movement path avoids the workpiece panel 7.

[0051] In the transition chamber 1 where the plate is discharged, the parallelogram double crank mechanism 10 controls the movement of the plate moving frame 11, so that the bracket of the plate lifting assembly 12 extends into the process groove corresponding to the coated workpiece plate 7 on the rotating frame 3a in the process chamber 3. When the bracket moves up, it lifts the workpiece plate 7, and then the plate moving frame 11 moves the workpiece plate 7 to the plate placement slot at the front end of the transition chamber 1. The bracket of the plate lifting assembly 12 descends, so that the workpiece plate 7 is fixed in the plate placement slot of the transition chamber 1. After the workpiece plate 7 is placed, when the plate moving frame 11 moves again, the bracket descends to a height that satisfies the bracket's movement path to avoid the workpiece plate 7.

[0052] In the two transition cabins 1, multiple workpiece hanging plates 7 placed on the upper fixed slot plate 5 and the lower fixed slot plate 6 can move as a whole with the upper movable slot plate 8 and the lower movable slot plate 9. Specifically, the upper power source 8c drives the upper movable slot plate 8, and the lower power source 9c drives the lower movable slot plate 9, so that the upper movable slot plate 8 and the lower movable slot plate 9 move forward or backward synchronously. The upper active crank connecting rod 8a, the upper driven crank connecting rod 8b, the lower active crank connecting rod 9a and the lower driven crank connecting rod 9b adopt the same structure, and each crank rotates one circle synchronously. The upper movable slot plate 8 and the lower movable slot plate 9 can lift all the workpiece hanging plates 7 as a whole and move them forward or backward the distance of a hanging plate placement slot, that is, all the workpiece hanging plates 7 are moved one slot position as a whole.

[0053] In one embodiment, the upper movable groove plate 8 is arranged on the inner side of the upper fixed groove plate 5 .

[0054] In one embodiment, the lower movable groove plate 9 is arranged on the inner side of the lower fixed groove plate 6 .

[0055] In one embodiment, the upper power source 8c is disposed outside the transition cabin 1, and the output shaft of the upper power source 8c is connected to the shell of the transition cabin 1 via a magnetic fluid seal.

[0056] In one embodiment, the lower power source 9c is disposed outside the transition cabin 1, and the output shaft of the lower power source 9c is connected to the shell of the transition cabin 1 via a magnetic fluid seal.

[0057] In one embodiment, the hanging plate moving frame power source 10a of the parallelogram double crank mechanism 10 is arranged outside the transition cabin 1, and the output shaft of the hanging plate moving frame power source 10a is connected to the shell of the transition cabin 1 through a magnetic fluid seal.

[0058] In one embodiment, movable doors 2 are provided at the front and rear ends of the transition cabin 1 to facilitate the entry, transfer or exit of the workpiece hanging plate 7 .

[0059] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A plate feeding device for a vacuum coating machine, characterized in that: The plate feeding device is provided in a transition chamber for feeding plates and a transition chamber for discharging plates in the vacuum coating equipment, and is used to feed the workpiece hanging plate from the transition chamber for feeding plates to the rotary rack of the process chamber, or to remove the workpiece hanging plate from the rotary rack of the process chamber and feed it to the transition chamber for discharging plates. The plate feeding device includes: A mounting frame is provided in the transition cabin; A pair of upper fixed slot plates and a pair of lower fixed slot plates are fixedly arranged on the mounting frame and used for placing a plurality of parallel workpiece hanging plates; A pair of upper movable slot plates, each having a plurality of grooves corresponding to the positions of the hanging plate placement grooves of the upper fixed slot plate, and movably mounted on the mounting frame via an upper active crank connecting rod and an upper driven crank connecting rod, wherein the upper active crank connecting rod is connected to an upper power source; A pair of lower movable slot plates are provided with a plurality of grooves corresponding to the positions of the hanging plate placement grooves of the lower fixed slot plates, and are movably mounted on the mounting frame via a lower active crank connecting rod and a lower driven crank connecting rod, wherein the lower active crank connecting rod is connected to a lower power source; A pair of parallelogram double crank mechanisms are arranged on both sides of the front of the mounting frame and are used to drive the hanging plate moving frame. The hanging plate moving frame is provided with a hanging plate lifting component for lifting the workpiece hanging plate.

2. The plate feeding device of the vacuum coating machine according to claim 1, characterized in that: The upper movable slot plate is arranged on the inner side of the upper fixed slot plate.

3. The plate feeding device of the vacuum coating machine according to claim 1, characterized in that: The lower movable groove plate is arranged on the inner side of the lower fixed groove plate.

4. The plate feeding device of the vacuum coating machine according to claim 2, characterized in that: The upper power source is arranged outside the transition cabin, and the output shaft of the upper power source is connected to the shell of the transition cabin through a magnetic fluid seal.

5. The plate feeding device of the vacuum coating machine according to claim 3, characterized in that: The lower power source is arranged outside the transition cabin, and the output shaft of the lower power source is connected to the shell of the transition cabin through a magnetic fluid seal.

6. The plate feeding device of the vacuum coating machine according to claim 1, characterized in that: The power source of the hanging plate moving frame of the parallelogram double crank mechanism is arranged on the outside of the transition cabin, and the output shaft of the power source of the hanging plate moving frame is connected to the shell of the transition cabin through a magnetic fluid seal.

7. The plate feeding device of the vacuum coating machine according to claim 1, characterized in that: The front end and the rear end of the transition cabin are provided with movable doors.

Citation Information

Patent Citations

  • Hanging plate conveying and taking manipulator for conveying workpiece hanging plate of large vacuum coating machine

    CN216037214U