Stably-supported automatic PECVD (plasma enhanced chemical vapor deposition) equipment rack

Abstract

The utility model provides a steadily supported automatic PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment rack which comprises a supporting assembly, and the supporting assembly comprises a rack main body, a groove, a driving motor, a screw rod, a moving plate, a hinge rod, a connecting plate, a concentric-square-shaped plate, a supporting column, universal wheels and an equipment body; a groove is formed in the rack main body, a driving motor is fixedly connected to the left side of the rack main body, and lead screws are rotationally connected to the inner walls of the two sides of the groove. The equipment body is moved to a place where the equipment body needs to be used through universal wheels, a driving motor is started to drive a lead screw to rotate, the lead screw drives a corresponding moving plate to move, the moving plate extrudes a hinge rod, the hinge rod moves and rotates, the hinge rod drives a concentric-square-shaped plate to move upwards through a connecting plate, and the concentric-square-shaped plate drives a supporting column to move. The supporting columns drive the corresponding universal wheels to move upwards, the universal wheels are stored in the rack body, the rack body can make complete contact with the ground, and the stability of the rack body is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of automation equipment, in particular to a frame for stably supporting automated PECVD equipment. Background Art

[0002] With the continuous development of science and technology, the application of automated PECVD equipment in industrial production is becoming more and more extensive. This equipment has greatly improved production efficiency with its high efficiency and precision. However, in actual use, the stability and safety issues of PECVD equipment have gradually become prominent, especially in terms of support stability after the equipment is moved.

[0003] Traditional automated PECVD equipment racks are usually equipped with universal wheels at the bottom to facilitate the movement and position adjustment of the equipment. However, while this design brings convenience, it also brings some problems. When the equipment is moved to the designated position, the universal wheels cannot be effectively retracted, resulting in a reduction in the contact area between the equipment and the ground, which in turn affects the support stability of the rack. In addition, the presence of universal wheels may also cause the equipment to shake or shift during operation, which has an adverse effect on the normal operation of the equipment and product quality. Therefore, a stable support rack for automated PECVD equipment is proposed. Utility Model Content

[0004] In view of this, the present invention provides a frame for stably supporting automated PECVD equipment to solve or alleviate the technical problems existing in the prior art and at least provide a beneficial option.

[0005] The technical solution of the embodiment of the utility model is achieved as follows: a stable support for an automated PECVD equipment frame, comprising a support assembly, wherein the support assembly comprises a frame body, a groove, a drive motor, a screw rod, a movable plate, a hinged rod, a connecting plate, a circular plate, a support column, a universal wheel, and an equipment body;

[0006] The cam is fixedly provided with a driving motor on the left side of the frame body, and screw rods are rotatably connected to the inner walls of both sides of the groove, and the end of one of the two screw rods extends to the outside of the frame body and is fixedly connected to the output shaft of the driving motor. The screw rod is threadedly connected to the movable plate, and one side of the movable plate is rotatably connected to an obliquely arranged hinged rod, and the ends of the two hinged rods are hingedly connected to the same connecting plate, and a circular plate is fixedly connected to the connecting plate, and four support columns are welded to the bottom of the circular plate, and the bottom ends of the support columns are fixedly connected to universal wheels, and the top of the frame body is fixedly connected to the equipment body.

[0007] Further preferably, the ends of the two screw rods close to each other are fixedly connected, and the threads of the two screw rods have opposite rotation directions.

[0008] Further preferably, two square rods are welded between the inner walls on both sides of the groove, and the square rods are slidably connected to the movable plate.

[0009] Further preferably, a limiting assembly is provided on one side of the support assembly, and the limiting assembly includes a limiting groove and a limiting block;

[0010] Two limiting grooves are provided on the inner walls on both sides of the groove, and a limiting block is slidably connected to the limiting groove, and one side of the limiting block is fixedly connected to one side of the circular plate.

[0011] Further preferably, a mounting groove is opened on the inner wall of one side of the groove, a bearing is fixedly connected to the inner wall of the mounting groove, and the inner side of the inner ring of the bearing is welded to the outer side of one of the two screw rods.

[0012] Further preferably, a threaded hole is provided on the movable plate, and the movable plate is threadedly connected to the corresponding screw rod through the threaded hole.

[0013] Further preferably, the movable plate is provided with two square holes, and the movable plate is slidably connected to the corresponding square rods through the square holes.

[0014] Further preferably, the outer side of the circular plate does not contact the inner wall of the groove.

[0015] The embodiment of the present invention has the following advantages due to the adoption of the above technical solution:

[0016] The utility model moves the equipment body to the place where it needs to be used by the universal wheel, starts the driving motor to drive the screw rod to rotate, the screw rod drives the corresponding moving plate to move, the moving plate squeezes the hinge rod, the hinge rod moves and rotates, the hinge rod drives the circular plate to move upward through the connecting plate, the circular plate drives the supporting column to move, the supporting column drives the corresponding universal wheel to move upward, and the universal wheel is stored in the frame body, so that the frame body can be completely in contact with the ground, thereby ensuring the stability of the frame body.

[0017] The above summary is for the purpose of description only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present invention will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or technical descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 It is a three-dimensional structural diagram of the utility model;

[0020] Figure 2 This is an inclined three-dimensional structural diagram of the utility model;

[0021] Figure 3 It is a partial three-dimensional structural diagram of the utility model;

[0022] Figure 4 This is a cutaway three-dimensional structural diagram of the frame body of the present invention.

[0023] Figure numerals: 1. Support assembly; 2. Frame body; 3. Groove; 4. Drive motor; 5. Screw; 6. Moving plate; 7. Articulated rod; 8. Connecting plate; 9. Clipping plate; 10. Support column; 11. Universal wheel; 12. Square rod; 13. Equipment body; 14. Limit assembly; 15. Limit slot; 16. Limit block. DETAILED DESCRIPTION

[0024] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are to be regarded as illustrative in nature and not restrictive.

[0025] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0026] like Figure 1 As shown in FIG-4 , the embodiment of the present invention provides a stable support for an automated PECVD equipment frame, including a support assembly 1, the support assembly 1 including a frame body 2, a groove 3, a drive motor 4, a screw 5, a movable plate 6, a hinge rod 7, a connecting plate 8, a circular plate 9, a support column 10, a universal wheel 11, and an equipment body 13;

[0027] A groove 3 is provided on the frame body 2, and a drive motor 4 is fixedly connected to the left side of the frame body 2. Screw rods 5 are rotatably connected to the inner walls on both sides of the groove 3. The end of one of the two screw rods 5 extends to the outside of the frame body 2 and is fixedly connected to the output shaft of the drive motor 4. A movable plate 6 is threadedly connected to the screw rod 5, and one side of the movable plate 6 is rotatably connected to a hinged rod 7 set obliquely. The ends of the two hinged rods 7 are hingedly connected to the same connecting plate 8, and a circular plate 9 is fixedly connected to the connecting plate 8. Four support columns 10 are welded to the bottom of the circular plate 9, and the bottom end of the support column 10 is fixedly connected to a universal wheel 11. The top of the frame body 2 is fixedly connected to the equipment body 13, and the ends of the two screw rods 5 close to each other are fixedly connected. The thread of the rod 5 rotates in the opposite direction, and the equipment body 13 is moved to the place where it needs to be used through the universal wheel 11. Then the drive motor 4 is started, and the drive motor 4 drives the screw rod 5 to rotate, and the screw rod 5 drives the corresponding movable plate 6 to move. The movable plate 6 slides on the square rod 12 and squeezes the hinged rod 7. Under the action of the extrusion force, the hinged rod 7 moves and rotates, and the hinged rod 7 drives the circular plate 9 to move upward through the connecting plate 8. The circular plate 9 drives the limit block 16 to slide on the corresponding limit groove 15. At the same time, the circular plate 9 drives the support column 10 to move, and the support column 10 drives the corresponding universal wheel 11 to move upward, and the universal wheel 11 is stored in the frame body 2, so that the frame body 2 can be completely in contact with the ground, ensuring the stability of the frame body 2.

[0028] In one embodiment, two square rods 12 are welded between the inner walls on both sides of the groove 3. The square rods 12 are slidably connected to the movable plate 6. The arrangement of the square rods 12 plays a positioning role.

[0029] In one embodiment, a limiting assembly 14 is provided on one side of the support assembly 1, and the limiting assembly 14 includes a limiting groove 15 and a limiting block 16;

[0030] Two limiting grooves 15 are provided on the inner walls on both sides of the groove 3 , and a limiting block 16 is slidably connected to the limiting groove 15 , and one side of the limiting block 16 is fixedly connected to one side of the circular plate 9 .

[0031] In one embodiment, a mounting groove is provided on the inner wall of one side of the groove 3, and a bearing is fixedly connected to the inner wall of the mounting groove. The inner side of the inner ring of the bearing is welded to the outer side of one of the two screw rods 5. A threaded hole is provided on the movable plate 6, and the movable plate 6 is threadedly connected to the corresponding screw rod 5 through the threaded hole. Two square holes are provided on the movable plate 6, and the movable plate 6 is slidingly connected to the corresponding square rod 12 through the square holes. The setting of the movable plate 6 plays a connecting role.

[0032] In one embodiment, the outer side of the circular plate 9 does not contact the inner wall of the groove 3, and the arrangement of the circular plate 9 plays a connecting role.

[0033] When the utility model is at work: when in use, the equipment body 13 is moved to the place where it needs to be used through the universal wheel 11, and then the driving motor 4 is started, the driving motor 4 drives the screw rod 5 to rotate, and the screw rod 5 drives the corresponding movable plate 6 to move, and the movable plate 6 slides on the square rod 12 and squeezes the hinged rod 7. Under the action of the extrusion force, the hinged rod 7 moves and rotates, and the hinged rod 7 drives the circular plate 9 to move upward through the connecting plate 8, and the circular plate 9 drives the limit block 16 to slide on the corresponding limit groove 15. At the same time, the circular plate 9 drives the support column 10 to move, and the support column 10 drives the corresponding universal wheel 11 to move upward, and the universal wheel 11 is stored in the frame body 2, so that the frame body 2 can be completely in contact with the ground, ensuring the stability of the frame body 2.

[0034] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be based on the scope of protection of the claims.

Claims

1. A frame for stably supporting an automated PECVD equipment, comprising a support assembly (1), characterized in that: The support assembly (1) comprises a frame body (2), a groove (3), a driving motor (4), a screw rod (5), a movable plate (6), a hinge rod (7), a connecting plate (8), a circular plate (9), a support column (10), a universal wheel (11), and a device body (13); The frame body (2) is provided with a groove (3), the left side of the frame body (2) is fixedly connected to a driving motor (4), the inner walls of both sides of the groove (3) are rotatably connected to screw rods (5), the end of one of the two screw rods (5) extends to the outside of the frame body (2) and is fixedly connected to the output shaft of the driving motor (4), the screw rod (5) is threadedly connected to a movable plate (6), one side of the movable plate (6) is rotatably connected to an inclined hinge rod (7), the ends of the two hinge rods (7) are hingedly connected to the same connecting plate (8), the connecting plate (8) is fixedly connected to a circular plate (9), the bottom of the circular plate (9) is welded with four support columns (10), the bottom ends of the support columns (10) are fixedly connected to universal wheels (11), and the top of the frame body (2) is fixedly connected to the device body (13).

2. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: The ends of the two screw rods (5) close to each other are fixedly connected, and the threads of the two screw rods (5) are rotated in opposite directions.

3. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: Two square rods (12) are welded between the inner walls on both sides of the groove (3), and the square rods (12) are slidably connected to the movable plate (6).

4. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: A limiting assembly (14) is provided on one side of the support assembly (1), and the limiting assembly (14) comprises a limiting groove (15) and a limiting block (16); Two limiting grooves (15) are provided on the inner walls on both sides of the groove (3), and a limiting block (16) is slidably connected to the limiting groove (15), and one side of the limiting block (16) is fixedly connected to one side of the circular plate (9).

5. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: A mounting groove is provided on the inner wall of one side of the groove (3), a bearing is fixedly connected to the inner wall of the mounting groove, and the inner side of the inner ring of the bearing is welded to the outer side of one of the two screw rods (5).

6. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: A threaded hole is provided on the movable plate (6), and the movable plate (6) is threadedly connected to the corresponding screw rod (5) through the threaded hole.

7. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: Two square holes are provided on the movable plate (6), and the movable plate (6) is slidably connected to the corresponding square rods (12) through the square holes.

8. The stable support frame for automated PECVD equipment according to claim 1, characterized in that: The outer side of the circular plate (9) does not contact the inner wall of the groove (3).

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