Non-contact type mask placing and boxing device

Abstract

The utility model discloses a non-contact type mask placing and boxing device, which relates to the technical field of mask placing and comprises a device shell, a mask placing operation window is arranged on the device shell, and a sealing door is mounted at the position of the mask placing operation window. A lifting structure is installed on the vertical wall of the device shell and connected with a plate placing component, and a limiting column is installed at the position, under the plate placing component, of the bottom of the device shell. The plate placing component comprises two first-stage fork arms which are parallel to each other, a plate placing platform is arranged on the first-stage fork arms, and the two first-stage fork arms are connected through a telescopic structure; a controller used for controlling the lifting structure and the telescopic structure to be opened or closed is installed outside the device shell. The intervention of workers is reduced, the probability that dust is attached to the mask is reduced, and the treatment efficiency of the whole rear section is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask placing, in particular to a contactless mask placing and boxing device. Background Art

[0002] Photolithography masks are a key material in the microelectronics manufacturing process, primarily used for pattern transfer in semiconductor manufacturing. Masks must be completely clean, free of dust, other particles, and other contaminants. If dust or other particles are present on the mask, downstream photolithography equipment can transfer the dust from the mask to the product during the exposure process, causing defects and resulting product losses. Therefore, dust control in the mask manufacturing process is crucial.

[0003] Even if the environmental control in the mask factory is up to standard, there is still a great risk of dust adhering to the mask when the final mask is placed in the final mask box. This is mainly related to the operator, because the current mask box loading in the industry is basically done by manually holding a simple clamp or directly touching the mask, and placing the mask directly in the open mask box. In addition to the space reserved for placing the mask in the mask box, there is not much space reserved on the edge of the box for the access of the clamp. In addition, during the plate placement process, the staff is always above the mask box. The movement of the staff themselves will cause a greater risk of dust on their bodies falling onto the mask. When the plate is placed, the staff checks and finds dust attached, and needs to hold the box again to remove the dust, which reduces the packaging efficiency of the later stage.

[0004] Therefore, the current mask is easily stained with dust when it is packed, and the staff needs to clean it again after the mask is placed, which makes the packaging efficiency low. Utility Model Content

[0005] Based on the problem pointed out in the background technology that the current mask plate is easily contaminated with dust when being boxed, and the staff needs to clean it again after the plate is placed, resulting in low packaging efficiency, the purpose of this application is to propose a contactless mask plate placing and boxing device, which reduces the intervention of staff, reduces the probability of dust adhering to the mask plate, and improves the processing efficiency of the entire back-end.

[0006] The utility model is achieved through the following technical solutions:

[0007] The present application provides a contactless mask placing and boxing device, comprising a device housing, a mask placing operation window provided on the device housing, and a sealing door installed at the mask placing operation window;

[0008] A lifting structure is installed on the vertical wall of the device housing, a plate placing component is connected to the lifting structure, and a limiting column is installed at the bottom of the device housing directly below the plate placing component;

[0009] The plate placing component comprises two mutually parallel primary fork arms, a plate placing platform is provided on the primary fork arms, and the two primary fork arms are connected by a telescopic structure;

[0010] A controller for controlling the opening or closing of the lifting structure and the telescopic structure is installed outside the device housing.

[0011] As a better embodiment of the present application, the lifting structure includes a linear guide rail, a sliding member of the linear guide rail is connected to a connecting rod, and the connecting rod is connected to the telescopic structure.

[0012] In addition to using linear guide rails, the lifting structure can also use electric lifting rods. The electric lifting rods are installed on the inner wall of the device shell, and the plate placing component is connected to the telescopic end of the electric lifting rod. The plate placing component is moved up and down by the driving action of the electric lifting rod.

[0013] As a preferred embodiment of the present application, the connecting rod is an L-shaped structure.

[0014] As a better implementation in the present application, the limiting column is movably installed at the bottom of the device housing.

[0015] As a better embodiment of the present application, a magnetic plate is installed at the bottom of the device housing, and a magnetic block that attracts the magnetic plate is installed at the bottom of the limiting column.

[0016] By movably mounting the limit pins on the bottom of the device housing, the device can be adapted to a variety of mask sizes. The limit pins are mounted magnetically, allowing them to be moved freely and easily operated.

[0017] As a better implementation method in the present application, a weight sensor is installed on the plate placing platform, and the weight sensor is communicatively connected with the lifting structure and the telescopic structure.

[0018] As a preferred embodiment of the present application, a signal light is installed on the outer surface of the device housing, and the signal light is communicatively connected with the weight sensor.

[0019] As a better embodiment of the present application, the telescopic structure includes a bidirectional telescopic electric push rod, which is installed in a sleeve. The sleeve is connected to the lifting structure, and the telescopic ends on both sides of the electric push rod are connected to secondary fork arms, which are connected to the primary fork arms.

[0020] By installing a weight sensor on the plate placement platform, when a mask is placed on the first-level fork arm, the external signal light will light up to remind the staff that there is a mask on the plate placement component. After the mask box at the bottom is placed, the switch is turned on. When the first-level fork arm puts the mask into the mask box, the moment the mask leaves the first-level fork arm, the weight sensor recognizes it and the linear guide stops moving immediately. Then the second-level fork arms on both sides of the plate placement component extend a certain length, and then the linear guide moves upward, and the plate placement component leaves the mask box.

[0021] As a preferred embodiment of the present application, the sleeve is detachably connected to the lifting structure.

[0022] The detachable connection method can be a threaded connection or a bolt assembly connection.

[0023] The sleeve and the lifting structure are connected in a detachable manner, that is, the sleeve and the connecting rod are connected in a detachable manner. The detachable connection between the sleeve and the connecting rod is convenient for assembly, and it is also convenient to disassemble and replace the plate placing component if it is necessary to replace it.

[0024] As a preferred embodiment of the present application, the length of the plate placing platform is smaller than the length of the primary fork arm.

[0025] The length of the plate placement platform is set to be smaller than the length of the first-level fork arm because if the plate placement platform is too long, it will collide with the support device inside the mask box. This can ensure safety during the entire plate placement process.

[0026] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0027] (1) The contactless mask plate placing and boxing device in this application can reduce the occurrence of manual contact with the mask plate and the resulting dirt on the plate, reduce the intervention of staff, reduce the probability of dust adhering to the mask plate, and improve the processing efficiency of the entire back-end.

[0028] (2) The contactless mask plate placing and boxing device in this application can effectively improve the cleanliness of the mask plate during the placing and boxing process.

[0029] (3) The contactless mask placing and boxing device in this application can meet the mask placing and boxing operations of different sizes of masks.

[0030] (4) The weight sensor installed in the plate placing component structure in this application can ensure the stability and safety of the entire plate placing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the accompanying drawings:

[0032] Figure 1 This is a schematic diagram of the external structure of a contactless mask placing and boxing device in the present invention;

[0033] Figure 2 This is a schematic diagram of the internal structure of a contactless mask placing and boxing device in the present invention;

[0034] Figure 3 This is a structural diagram of the mask plate placing component in the utility model;

[0035] Figure 4 This is a schematic diagram of the positioning column of the mask box in the utility model;

[0036] Figure 5 This is a schematic diagram of the installation of the linear guide rail in the utility model;

[0037] Figure 6 This is a schematic diagram of the installation of the electric push rod in the utility model;

[0038] Figure 7 It is a structural schematic diagram of the threaded connection between the sleeve and the connecting rod in the utility model.

[0039] Markings and corresponding parts names in the accompanying drawings:

[0040] 1-Device housing, 2-Sealed door, 3-Controller, 4-Lifting structure, 5-Connecting rod, 6-First-stage fork arm, 7-Mask box, 8-Limiting column, 9-Electric push rod, 10-Sliding part, 11-Plate placement platform, 12-Second-stage fork arm, 13-Sleeve, 14-Transparent glass observation window. DETAILED DESCRIPTION

[0041] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0043] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0044] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, integrated connections, or direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model in specific contexts.

[0045] Example 1

[0046] like Figures 1 to 6 As shown, this embodiment provides a contactless mask placing and boxing device, comprising a device housing 1, a mask placing operation window provided on the device housing 1, and a sealing door 2 installed at the mask placing operation window; wherein the sealing door 2 can be provided with a transparent glass observation window 14, so that the staff can observe the placement of the mask from the outside;

[0047] A lifting structure 4 is installed on the vertical wall of the device housing 1, and a plate placing component is connected to the lifting structure 4. A limiting column 8 is installed at the bottom of the device housing 1 just below the plate placing component;

[0048] The plate placing component includes two mutually parallel primary fork arms 6, on which a plate placing platform 11 is provided, and the two primary fork arms 6 are connected by a telescopic structure;

[0049] A controller 3 for controlling the opening or closing of the lifting structure 4 and the telescopic structure is installed outside the device housing 1.

[0050] Specifically, the lifting structure 4 is a linear guide rail, and the sliding part 10 of the linear guide rail is connected to an L-shaped connecting rod 5, which is connected to a sleeve 13. A bidirectional telescopic electric push rod 9 is installed in the sleeve 13, and the telescopic ends on both sides of the electric push rod 9 are connected to secondary fork arms 12, and the secondary fork arms 12 are connected to the primary fork arms 6.

[0051] Specifically, the limiting post 8 is movably mounted on the bottom of the device housing 1. A magnetic plate is mounted on the bottom of the device housing 1, and a magnetic block that attracts the magnetic plate is mounted on the bottom of the limiting post 8.

[0052] Specifically, a weight sensor is installed on the plate placing platform 11, and the weight sensor is in communication connection with the linear guide rail and the electric push rod 9. A signal light is installed on the outer surface of the device housing 1, and the signal light is in communication connection with the weight sensor.

[0053] Specifically, the length of the plate placing platform 11 is less than the length of the primary fork arm 6. This prevents the plate placing platform 11 from colliding with the supporting device inside the mask box 7, thereby ensuring safety during the entire plate placing process.

[0054] When using the device, first open the sealed door 2 of the device, and then adjust the position of the limit column 8 of the bottom mask box 7 placement platform according to the size of the mask to be boxed. For example, if you need to box a 6-inch plate, first adjust the number and position of the limit column 8 of the 6-inch plate, replace the plate placing component of the corresponding size, and then use the external handheld clamp to place the mask on the upper plate placing component, and place the mask box 7 of the corresponding size on the bottom mask box 7 placement platform, then close the sealed door 2, press the start button, and the linear guide rail causes the plate placing component to start descending. When the mask is placed in the mask box 7, the mask leaves the first fork After the arm 6 reaches the plate placing platform 11, the weight sensor will recognize that there is no mask on the plate placing component at this time, and then the linear guide will stop moving, the electric push rod 9 will push the secondary fork arm 12 to extend, and then the linear guide will move the plate placing component up to the initial position, and the secondary fork arm 12 will retract to the initial position. At this time, the entire plate placing process is completed, and then the operator can open the sealed door 2 and close the mask box 7. Except for placing the mask on the primary fork arm 6 and placing the empty mask box 7 in the early stage, the actual plate placing operation of the mask does not require much intervention from the staff. The lid is directly closed after the plate placing is completed to ensure the cleanliness of the entire process.

[0055] Example 2

[0056] like Figure 7 As shown, this embodiment provides a contactless mask placing and boxing device. The difference from the first embodiment is that the sleeve 13 and the connecting rod 5 in this embodiment are connected by threads. Other structural features are the same as those of the first embodiment.

[0057] Compared with embodiment 1, this embodiment adopts detachable connection mode for sleeve 13 and connecting rod 5. Sleeve 13 and connecting rod 5 are detachably connected, are convenient for assembly, and when the plate placing component needs to be replaced, it is also convenient to disassemble and replace.

[0058] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the utility model in detail. It should be understood that the above description is only a specific implementation method of the utility model and is not intended to limit the scope of protection of the utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.

Claims

1. A contactless mask plate placing and boxing device, characterized in that: The device comprises a housing (1), wherein a plate placing operation window is provided on the housing (1), and a sealing door (2) is installed at the plate placing operation window; A lifting structure (4) is installed on the vertical wall of the device housing (1), a plate placing component is connected to the lifting structure (4), and a limiting column (8) is installed at the bottom of the device housing (1) directly below the plate placing component; The plate placing component comprises two mutually parallel primary fork arms (6), a plate placing platform (11) is provided on the primary fork arms (6), and the two primary fork arms (6) are connected via a telescopic structure; A controller (3) for controlling the opening or closing of the lifting structure (4) and the telescopic structure is installed outside the device housing (1).

2. The contactless mask placing and boxing device according to claim 1, characterized in that: The lifting structure (4) comprises a linear guide rail, a sliding member (10) of the linear guide rail is connected to a connecting rod (5), and the connecting rod (5) is connected to the telescopic structure.

3. The contactless mask placing and boxing device according to claim 2, characterized in that: The connecting rod (5) is an L-shaped structure.

4. The contactless mask placing and boxing device according to claim 1, characterized in that: The limiting column (8) is movably mounted on the bottom of the device housing (1).

5. The contactless mask placing and boxing device according to claim 4, characterized in that: A magnetic plate is installed at the bottom of the device housing (1), and a magnetic block that attracts the magnetic plate is installed at the bottom of the limiting column (8).

6. The contactless mask placing and boxing device according to claim 1, characterized in that: A weight sensor is installed on the plate placing platform (11), and the weight sensor is in communication connection with the lifting structure (4) and the telescopic structure.

7. The contactless mask placing and boxing device according to claim 6, characterized in that: A signal light is installed on the outer surface of the device housing (1), and the signal light is communicatively connected with the weight sensor.

8. The contactless mask placing and boxing device according to claim 1, characterized in that: The telescopic structure comprises a bidirectional telescopic electric push rod (9), the electric push rod (9) being installed in a sleeve (13), the sleeve (13) being connected to the lifting structure (4), the telescopic ends on both sides of the electric push rod (9) being connected to secondary fork arms (12), and the secondary fork arms (12) being connected to the primary fork arms (6).

9. The contactless mask placing and boxing device according to claim 8, characterized in that: The sleeve (13) is detachably connected to the lifting structure (4).

10. The contactless mask placing and boxing device according to claim 1, characterized in that: The length of the plate placing platform (11) is smaller than the length of the primary fork arm (6).

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