Large-yield substrate bearing device and substrate processing equipment

Abstract

The utility model relates to a large-yield substrate bearing device which comprises a paddle rod, a boat support and a small boat. The boat support is supported on the paddle rod, the small boats are supported on the boat support, the plurality of small boats are arranged in the boat support along the length direction of the paddle rod, the small boats are provided with at least two rows of bearing groups, the plurality of bearing groups are arranged along the width direction of the paddle rod, and each bearing group comprises a plurality of bearing positions for placing substrates; a limiting groove is formed in the center of the bottom of the boat support, and the paddle rods abut against the interior of the limiting groove at intervals. At least two rows of bearing groups are arranged in the width direction of the paddle rod, so that the size in the width direction in the process container can be effectively utilized, the space utilization rate is improved, the slide glass quantity is increased, the effective efficiency is improved, and the large productivity is realized. In addition, the paddle rods provide support from the limiting grooves in the bottom of the boat support, and the situation that space in the width direction is occupied when the paddle rods are distributed on the two sides of the boat support can be avoided. The utility model further relates to substrate processing equipment.

Description

Technical Field

[0001] The utility model relates to photovoltaic production equipment, in particular to a large-output substrate carrying device and substrate processing equipment. Background Art

[0002] With the increasing popularity of solar power generation, demand for related photovoltaic products is increasing. To meet this growing demand, the efficiency of diffusion process equipment must be improved. Currently, improving diffusion process efficiency typically requires increasing the size of the quartz tube and, in turn, the height of the boat, thereby increasing the amount of wafers the boat can hold. However, this increased size of the quartz tube wastes space on both sides of the boat's width, resulting in low space utilization within the tube. Utility Model Content

[0003] Based on this, it is necessary to provide a high-yield substrate carrying device and substrate processing equipment that increases the space utilization inside the quartz tube, increases the amount of wafers carried in the quartz tube, and thus improves processing efficiency, in order to address the problem of low space utilization after the size of the existing quartz tube is increased.

[0004] A high-throughput substrate carrying device, comprising:

[0005] Paddle pole;

[0006] a boat support, supported on the paddle shaft; and

[0007] A boat is supported on the boat support, wherein a plurality of the boats are arranged in the boat support along the length direction of the paddle shaft, the boat has at least two rows of carrying groups, the plurality of the carrying groups are arranged along the width direction of the paddle shaft, and each of the carrying groups includes a plurality of carrying positions for placing substrates;

[0008] A limiting groove is formed at the center of the bottom of the boat support, and the plurality of paddle rods are spaced apart from each other and supported in the limiting groove.

[0009] With the high-throughput substrate loading device described above, once placed within a process vessel, at least two rows of loading groups are formed along the width of the paddle rod. This effectively utilizes the width of the process vessel, improving space utilization and increasing the number of loaded substrates, thereby increasing efficiency and achieving high production capacity. The paddle rod provides support from the bottom limit slots of the boat support, avoiding the space occupied in the width direction by side support solutions, further improving space utilization efficiency in the width direction.

[0010] Furthermore, the plurality of paddle rods are symmetrically distributed about the center of gravity of the boat support.

[0011] Furthermore, the cross section of the paddle rod in the length direction is rectangular, and the height dimension of the cross section is greater than the width dimension of the cross section.

[0012] Furthermore, the paddle rod is a hollow tubular structure.

[0013] Furthermore, a plurality of positioning frames are formed in the boat support along its length direction, and a positioning portion is provided at the bottom of the boat, and the positioning portion can be fitted into the positioning frame to limit the position of the boat.

[0014] Furthermore, a gripping portion is provided on the top of the boat for cooperating with a mechanism for taking and placing the boat.

[0015] Furthermore, the boat includes an upper plate, a lower plate and a connecting member, the connecting member is connected between the upper plate and the lower plate, the surface of the connecting member has a plurality of slots, and the slots on the plurality of connecting members are matched in groups to form the bearing position.

[0016] Furthermore, the connecting member includes a first connecting member and a second connecting member, the first connecting member is located on opposite sides of the boat, the second connecting member is located in the middle of the boat, and the second connecting member forms the bearing group with the first connecting members on both sides respectively.

[0017] Furthermore, at least one of the upper plate and the lower plate is hollowed out to provide a weight-reducing window.

[0018] A substrate processing device comprises the above-mentioned high-throughput substrate carrying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0020] Figure 1 This is an axonometric diagram of a high-throughput substrate carrying device provided in one embodiment of the present application;

[0021] Figure 2 A front view of a high-throughput substrate carrying device provided in one embodiment of the present application;

[0022] Figure 3 A schematic diagram of the coordination between the boat support and the boat provided in one embodiment of the present application;

[0023] Figure 4 A front view of a high-throughput substrate carrying device provided by another embodiment of the present application;

[0024] Figure 5A schematic diagram of a boat support structure provided in one embodiment of the present application;

[0025] Figure 6 A schematic diagram of a boat structure provided in one embodiment of the present application;

[0026] Figure 7 A schematic diagram of the coordination between a boat support and a small boat provided in another embodiment of the present application;

[0027] Figure 8 A schematic diagram of a boat structure provided in another embodiment of the present application. DETAILED DESCRIPTION

[0028] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0031] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0032] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0033] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0034] On the one hand, see Figure 1 、 Figure 2 The present application provides a high-volume substrate carrying device, comprising a paddle rod 100, a boat support 200, and a boat 300. The boat support 200 is supported by the paddle rod 100, and the boat 300 is supported by the boat support 200. A plurality of the boats 300 are arranged in the boat support 200 along the length direction of the paddle rod 100. The boat 300 has at least two rows of carrying groups, and the plurality of the carrying groups are arranged along the width direction of the paddle rod 100. Each of the carrying groups includes a plurality of carrying positions for placing substrates. A limiting groove 201 is formed at the bottom center of the boat support 200, and a plurality of the paddle rods 100 are spaced apart and supported in the limiting groove 201.

[0035] In the present embodiment, the substrate is specifically a silicon wafer, and the paddle rod 100 is specifically made of silicon carbide. The high-yield substrate carrier can be placed in a process container after loading the silicon wafer, and the silicon wafers can be processed in batches. With the above-mentioned high-yield substrate carrier, after the high-yield substrate carrier is placed in the process container, since there are at least two rows of carrier groups along the width direction of the paddle rod 100, the width direction dimension of the process container can be effectively utilized, the space utilization rate can be improved, the amount of wafers loaded can be increased, thereby improving the efficiency and achieving high production capacity. In addition, the paddle rod 100 provides support from the limiting groove 201 at the bottom of the boat support 200, which can avoid the occupation of the width direction space caused by the side support scheme of the paddle rod 100 being distributed on both sides of the boat support 200, and further improve the space utilization efficiency in the width direction.

[0036] See also Figure 2 、 Figure 4 , the multiple paddle rods 100 are symmetrically distributed about the center of gravity of the boat support 200.

[0037] Arranging the paddle shafts 100 symmetrically about the center of gravity of the boat support 200 improves support stability and reduces the risk of rollover. In the figure, there are two paddle shafts 100, providing two supports between the boat support 200. Compared to a single paddle support structure, the support has better anti-vibration performance and better stability.

[0038] See also Figure 2 、 Figure 4 One embodiment of the present application provides a high-throughput substrate loading device, wherein the paddle rod 100 has a rectangular cross-section along its length, with the height dimension of the cross-section being greater than the width dimension. The rectangular cross-section provides a flat surface on the upper surface of the paddle rod for support and contact, and the increased height dimension of the cross-section improves the paddle rod 100's resistance to vertical deformation and fracture, ensuring that the paddle rod 100 can carry more substrate weight, thereby increasing the loading capacity.

[0039] See also Figures 1 to 4 The paddle shaft 100 is a hollow tubular structure. The paddle shaft adopts a tubular structure, which can significantly reduce its own weight while ensuring its load-bearing performance and bending resistance, thereby achieving lightweight components and saving costs.

[0040] See also Figures 5 to 7 A plurality of positioning frames 202 are formed in the boat support 200 along its own length direction, and a positioning portion 301 is provided at the bottom of the boat 300. The positioning portion 301 can be fitted into the positioning frame 202 to limit the position of the boat 300.

[0041] The cooperation between the positioning frame 202 and the positioning portion 301 can keep the boat 300 placed in the boat holder 200 in a stable loading position, significantly reducing the unstable effect caused by shaking and improving the stability of the substrate in the boat 300 during transportation and transfer. Figure 5 The bottom of the boat support 200 is formed by a plurality of rod-shaped structures to form a positioning frame 202, and the interior of the positioning frame 202 is hollow. This can achieve weight reduction while ensuring the overall structural strength of the boat support 200 and reduce the bearing pressure of the paddle rod 100.

[0042] Also, see Figure 5 In this embodiment, support ears 203 are provided at both ends of the boat support 200 for a robot to grab the boat support 200 for transportation.

[0043] See also Figure 6 A grabbing portion 302 is provided on the top of the boat 300 for cooperating with a mechanism for taking and placing the boat 300.

[0044] The gripping portion 302 can be a pair of hook-shaped structures as shown in the figure, which are used to cooperate with the robot arm that grasps the boat 300 to realize the transportation of the boat 300. In addition, the gripping portion 302 can also be a plurality of lifting ring structures, so that it can cooperate with the mating end of the rod-shaped transfer mechanism. When the rod-shaped structure of the transfer mechanism is inserted into the lifting ring structure, the boat 300 can be lifted and transported.

[0045] In this embodiment, the boat 300 includes an upper plate 310, a lower plate 320, and a connector 330. The connector 330 is connected between the upper plate 310 and the lower plate 320. The connector 330 has a plurality of slots 331 on its surface. The slots 331 on the connectors 330 are grouped together to form the carrying position. The gripping portion 302 is provided on the upper plate 310.

[0046] Regarding the gripping portion 302, a pair of hook-shaped structures can also be connected by a connector. This not only improves the overall stability of the gripping portion 302, but also serves as a reinforcement for the upper plate 310, increasing the overall strength of the boat 300 and thus accommodating the increased load brought by the increased number of wafers loaded. The substrates in the boat 300 are placed horizontally, and the slots 331 on the multiple connectors 330 that make up the loading position are located in the same plane, allowing the substrates to be inserted and stored. As shown in the figure, the connector 330 is specifically a rod-shaped structure with a slot 331 machined on its surface facing the loading position.

[0047] In one embodiment, the connecting member 330 includes a first connecting member 340 and a second connecting member 350. The first connecting member 340 is located on opposite sides of the boat 300, and the second connecting member 350 is located in the middle of the boat 300. The second connecting member 350 forms the load-bearing group with the first connecting members 340 on both sides.

[0048] Specific to Figure 6 In the embodiment shown, two groups of second connectors 350 are provided, forming a load-bearing group with the first connectors 340 on the corresponding side. The central part of the boat 300 is supported by two groups of second connectors 350, which significantly enhances the structural strength. In addition, the positioning portion 301 on the lower plate 320 can also play a role in structural reinforcement. Figure 8 In the embodiment shown, only one group of second connecting members 350 is provided, and the load-bearing groups on both sides share the same group of second connecting members 350. The overall structure of the boat 300 is further simplified, and the weight of the boat 300 is further reduced.

[0049] In one embodiment, at least one of the upper plate 310 and the lower plate 320 is hollowed out to form a weight-reducing window 360. Figure 6 , the weight-reducing window 360 is provided on the lower plate 320. The upper plate 310 maintains the structure complete, which can facilitate the setting of the grabbing portion 302. When the lower plate 320 is provided with the weight-reducing window 360, the positioning portion 301 can be formed on the periphery of the weight-reducing window 360, so as to achieve lightweighting while reinforcing the structure and ensure structural strength. Boat ears 303 are also provided on both sides of the boat 300, which are used to hook the top of the side panels on both sides of the boat support 200 when the boat support 200 is placed. In this way, the weight of the boat 300 and the substrate can be distributed to the side panels of the boat support 200, avoiding excessive force on the bottom of the boat support 200, and giving full play to the overall structural strength of the boat support 200 for bearing.

[0050] In another aspect, the present application further provides a substrate processing apparatus comprising the high-throughput substrate carrier device of the aforementioned embodiment. In this embodiment, the substrate is specifically a silicon wafer. The aforementioned substrate processing apparatus further comprises a process vessel, which may specifically be a chamber of a coating apparatus or a diffusion apparatus, with the quartz tube 20 constituting the inner cavity of the process vessel.

[0051] Of course, in other embodiments, the substrate processing equipment may also be equipment for processing other products, which is not limited here.

[0052] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A high-yield substrate carrying device, characterized in that: include: Paddle (100); A boat support (200) supported on the paddle rod (100); and A small boat (300) is supported on the boat support (200), wherein a plurality of the small boats (300) are arranged in the boat support (200) along the length direction of the paddle rod (100), and the small boat (300) has at least two rows of carrying groups, wherein the plurality of the carrying groups are arranged along the width direction of the paddle rod (100), and each of the carrying groups includes a plurality of carrying positions for placing substrates; A limiting groove (201) is formed at the bottom center of the boat support (200), and a plurality of the paddle rods (100) are spaced apart from each other and supported in the limiting groove (201).

2. The high-throughput substrate carrying device according to claim 1, characterized in that: The plurality of paddle rods (100) are symmetrically distributed about the center of gravity of the boat support (200).

3. The high-throughput substrate carrying device according to claim 1, characterized in that: The cross section of the paddle rod (100) in the length direction is rectangular, and the height dimension of the cross section is greater than the width dimension of the cross section.

4. The high-throughput substrate carrying device according to claim 3, characterized in that: The paddle shaft (100) is a hollow tubular structure.

5. The high-throughput substrate carrying device according to claim 1, characterized in that: A plurality of positioning frames (202) are formed in the boat support (200) along its length direction, and a positioning portion (301) is provided at the bottom of the boat (300). The positioning portion (301) can be fitted into the positioning frame (202) to limit the position of the boat (300).

6. The high-throughput substrate carrying device according to claim 1, characterized in that: The top of the boat (300) is provided with a gripping portion (302) for cooperating with a mechanism for taking and placing the boat (300).

7. The high-throughput substrate carrying device according to claim 1, characterized in that: The boat (300) includes an upper plate (310), a lower plate (320) and a connecting member (330). The connecting member (330) is connected between the upper plate (310) and the lower plate (320). The surface of the connecting member (330) has a plurality of slots (331). The slots (331) on the plurality of connecting members (330) are grouped together to form the bearing position.

8. The high-throughput substrate carrying device according to claim 7, characterized in that: The connecting member (330) includes a first connecting member (340) and a second connecting member (350), wherein the first connecting member (340) is located on opposite sides of the boat (300), and the second connecting member (350) is located in the middle of the boat (300), and the second connecting member (350) forms the bearing group with the first connecting members (340) on both sides.

9. The high-throughput substrate carrying device according to claim 8, characterized in that: At least one of the upper plate (310) and the lower plate (320) is hollowed out to provide a weight-reducing window (360).

10. A substrate processing device, characterized in that: The invention comprises the high-throughput substrate carrying device according to any one of claims 1 to 9.

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