Locking device and movement mechanism

Abstract

The utility model provides a locking device and a movement mechanism, and relates to the technical field of precision equipment. The locking device comprises a fixing block, a flexible part, an adsorption block and a preloading mechanism. The flexible part is flexibly connected with the fixed block and the adsorption block; one or more negative pressure areas used for providing negative pressure are arranged on the side, away from the fixing block, of the adsorption block. The preloading mechanism is connected to the fixing block, extends in the direction of the adsorption block and is used for applying preloading force to the adsorption block.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of precision equipment, and more particularly to a locking device and a motion mechanism. Background Art

[0002] A locking device is used to maintain relative fixation between two components (e.g., a first component and a second component). This locking mechanism can be provided by a drive mechanism that drives the first component relative to the second, or by an independent device other than a motor. In precision equipment, the self-locking function of the drive mechanism cannot maintain the required stationary position of the first component relative to the second. The first component will frequently undergo minute displacements in the locked position due to vibration. Independent locking devices, such as brakes, can wear the brake surface, leading to gradual failure. Utility Model Content

[0003] One or more embodiments of the present specification provide a locking device, which includes: a fixed block, a flexible member, an adsorption block and a preload mechanism; the flexible member flexibly connects the fixed block and the adsorption block; the side of the adsorption block facing away from the fixed block is provided with one or more negative pressure areas for providing negative pressure; the preload mechanism is connected to the fixed block and extends toward the adsorption block, for applying a preload force to the adsorption block.

[0004] In some embodiments, the locking device is used to lock the first component and the second component, the fixing block is fixedly connected to the first component through a mounting hole opened on the fixing block, and the adsorption block can adsorb the second component.

[0005] In some embodiments, the fixing block includes: an annular portion, the middle portion of which forms a accommodating space for accommodating the preload mechanism; an outer boss formed along the outer edge of the annular portion, the outer boss being fixedly connected to the flexible member; and an inner boss formed along the inner edge of the annular portion, the inner boss being used to install the preload mechanism.

[0006] In some embodiments, the flexible member is a flexible sheet; the flexible sheet has a first area fixedly connected to the fixed block and a second area fixedly connected to the adsorption block; at least a portion of the second area can undergo elastic deformation relative to the plane where the first area is located.

[0007] In some embodiments, a gap is provided between the second region of the flexible sheet and the fixing block to provide space for elastic deformation of at least a portion of the second region.

[0008] In some embodiments, the first area of ​​the flexible sheet surrounds the second area; a plurality of flexible sheet grooves are provided inside the second area of ​​the flexible sheet, which run through the thickness direction of the flexible sheet, and the plurality of flexible sheet grooves separate at least a portion of the second area into one or more deformation parts, and the deformation parts can undergo elastic deformation relative to the first area; the adsorption block is fixedly connected to one or more of the deformation parts.

[0009] In some embodiments, the preload mechanism includes: a preload elastic member, and two ends of the preload elastic member directly or indirectly abut against the fixing block and the adsorption block respectively.

[0010] In some embodiments, the preload mechanism further includes: a first pressure plate, the first pressure plate is fixedly connected to the fixed block, and one end of the preload elastic member abuts against the first pressure plate; a second pressure plate, the second pressure plate directly or indirectly abuts against the adsorption block, and the other end of the preload elastic member abuts against the second pressure plate.

[0011] In some embodiments, the first pressure plate is provided with a first pressure plate groove for accommodating the preload elastic member, and / or the second pressure plate is provided with a second pressure plate groove for accommodating the preload elastic member; the preload mechanism also includes: a guide column fixedly connected to the first pressure plate or the second pressure plate, and the preload elastic member is sleeved outside the guide column.

[0012] In some embodiments, the preloading mechanism includes: a preloading cylinder, one of the cylinder body and the piston of the preloading cylinder is fixedly connected to the fixed block, and the other of the cylinder body and the piston of the preloading cylinder directly or indirectly abuts against the adsorption block.

[0013] In some embodiments, the side of the adsorption block facing away from the fixed block is provided with one or more positive pressure areas for providing positive pressure gas.

[0014] One or more embodiments of the present specification provide a motion mechanism, which includes a table and a motion device that moves on the table, and also includes a locking device as described above, wherein the fixing block of the locking device is fixedly connected to the motion device, and the adsorption block of the locking device is adsorbed on the table.

[0015] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) reliable locking is achieved through negative pressure adsorption, which avoids displacement or vibration caused by motor self-locking, ensures the accuracy of locking in place, and avoids wear on the adsorbed object; (2) the modular design of the entire locking device is installed to the first component through the mounting hole on the fixed block, and the entire locking device can be installed, removed or replaced as a whole; (3) the structure of the flexible sheet further ensures that the movement and pitch only occur in the direction from the fixed block to the adsorption block, further avoiding displacement in the plane direction; (4) a preload force is provided by the preload mechanism to assist the contact between the adsorption block and the adsorbed object; (5) positive pressure gas is provided to generate an air film so that the adsorption block will not interfere when the first component moves relative to the second component. It should be noted that different embodiments may have different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0017] Figure 1 is a schematic diagram of a locking device according to some embodiments of this specification.

[0018] Figure 2 It is a schematic diagram from another perspective of the locking device shown in some embodiments of this specification.

[0019] Figure 3 It is a cross-sectional schematic diagram of a locking device according to some embodiments of this specification.

[0020] Figure 4 It is a three-dimensional diagram of the flexible member of the locking device shown in some embodiments of this specification.

[0021] Figure 5 is a schematic diagram of a flexible member of a locking device according to some embodiments of this specification.

[0022] Figure 6 It is a partial cross-sectional schematic diagram of a locking device according to some embodiments of this specification.

[0023] Figure 7 It is another partial cross-sectional schematic diagram of the locking device shown in some embodiments of this specification.

[0024] Figure 8 It is a cross-sectional schematic diagram of a locking device according to another embodiment of the present specification.

[0025] Figure 9It is a partial cross-sectional schematic diagram of a locking device according to another embodiment of the present specification.

[0026] Figure 10 1 is a schematic block diagram of a locking device according to another embodiment of the present invention.

[0027] Figure 11 is a schematic diagram of a motion mechanism according to some embodiments of this specification.

[0028] Markings in the figure: 1 fixing block; 10 mounting hole; 11 annular portion; 12 outer boss; 13 inner boss; 2 flexible sheet; 21 first area; 22 second area; 23 flexible sheet groove; 201 flexible sheet first hole; 202 flexible sheet second hole; 24 deformation portion; 3 adsorption block; 30 adsorption block fixing structure; 31 negative pressure area; 310 negative pressure channel; 32 positive pressure area; 320 positive pressure channel; 4 preload mechanism; 41 first pressure plate; 411 first pressure plate groove; 412 first pressure plate accommodating space; 42 second pressure plate; 421 second pressure plate groove; 43 preload elastic member; 44 guide column; 45 preload cylinder; 46 cylinder body; 47 piston; 50 locking device; 51 first component; 52 second component. DETAILED DESCRIPTION

[0029] To more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the following descriptions are some examples or embodiments of this specification, and those skilled in the art can apply the technical solutions or methods disclosed in this specification to other scenarios based on these technical contents without inventive effort.

[0030] It should be understood that the terms "system," "device," "equipment," "portion," and / or "component," "unit," and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0031] Unless otherwise specified, technical terms used in this specification to describe components, elements, and the like do not necessarily refer to the singular but may include the plural. Generally speaking, terms such as "include" and "comprising" only indicate the inclusion of the steps, elements, or components specifically identified, and these steps, elements, and components do not constitute an exclusive list. For example, the method or device being described may also include other steps or components.

[0032] In the description of this specification, it should be understood that the descriptions involving directions, such as up, down, front, back, left, and right, and the directions or positional relationships indicated are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise expressly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0033] The locking device is used to maintain the relative fixation between two components (e.g., a first component and a second component). In some embodiments, the first component can move relative to the second component and be locked to the second component by a locking device to accommodate the movement and stationary requirements of the first component relative to the second component. In some embodiments, the first component can be a motion mechanism, and the second component can be a table that supports the motion mechanism. The movement of the first component relative to the second component can include translation and / or rotation on the plane of the second component, and can also include rising or falling in a direction perpendicular to the second component. In some cases, the first component is required to be able to maintain its position relative to the second component, for example, to maintain its current position after movement. Based on this, a locking device is provided to lock the first component to the second component.

[0034] In some related embodiments, the locking device may be provided by a drive mechanism that drives the first member to move relative to the second member, such as a drive mechanism with a self-locking function, specifically, a motor with a self-locking function (which may be a linear motor or a rotary motor). In other related embodiments, the locking device may also be provided by an independent device other than the motor.

[0035] Precision equipment, in some applications, involves high-acceleration motion and subsequent locking in place. In precision equipment, the self-locking function of the drive mechanism can struggle to maintain the stationary state of the first component relative to the second component. For example, in some relevant embodiments, a linear motor can achieve self-locking by maintaining a current signal (e.g., a voltage signal). However, under the influence of external vibrations on the first component, the self-locking achieved by the linear motor actually involves adjusting the current signal after the first component has shifted to return it to its pre-displacement position. Therefore, from a microscopic perspective, the first component will experience frequent, minute displacements at the locked position due to vibration.

[0036] In some related embodiments, the independent locking device may include a brake device, which maintains the relative stillness between the first component and the second component by, for example, the static friction force generated by the abutment between a brake mating surface arranged on the first component and a brake surface arranged on the second component. However, in some embodiments, the brake surface will wear out, and the brake mating surface cannot adjust the mating angle according to the wear of the brake surface, causing the brake device to gradually fail. Exemplarily, the brake device may be a guide rail clamp, which maintains the relative stillness between the first component and the second component by the static friction force generated by clamping the guide rail, wherein the first component may be a moving mechanism, the second component may be a guide rail, the guide rail clamp provides a brake mating surface, and the guide rail provides a brake surface. Since the guide rail clamp applies pressure to the brake surface of the guide rail, it is easy to cause the guide rail to deform, thereby causing the brake device to gradually fail and affecting the movement of the moving mechanism on the guide rail.

[0037] Based on this, one or more embodiments of the present specification provide a locking device, which is suitable for solving the problem of locking in place in precision equipment. It achieves locking between two components through adsorption, reduces or avoids the tiny displacement between the two components caused by environmental vibration, and avoids causing wear to the adsorbed surface or deformation of the adsorbed surface such as a guide rail; it further provides flexible parts to adapt to the microscopic plane conditions of the adsorbed surface.

[0038] Figure 1 is a schematic diagram of a locking device according to some embodiments of this specification, Figure 2 is a schematic diagram of a locking device according to some embodiments of this specification. Figure 1 、 Figure 2 As shown, in some embodiments, the locking device may include: a fixed block 1, a flexible member, an adsorption block 3, and a preload mechanism 4. The flexible member flexibly connects the fixed block 1 and the adsorption block 3 to allow the adsorption block 3 to move closer to or further away from the fixed block 1 and / or to adjust its pitch angle relative to the fixed block 1. The adsorption block 3 has one or more negative pressure regions 31 on the side facing away from the fixed block 1 for providing negative pressure, allowing the adsorption block 3 to perform its adsorption function, thereby achieving locking of the two components. The preload mechanism 4 is connected to the fixed block 1 and extends toward the adsorption block 3, for applying a preload force to the adsorption block 3. This preload force allows the adsorption block 3 to move away from the fixed block 1, facilitating its contact with the adsorbed object. This ensures that the adsorption of the adsorption block 3 is not restricted by the microscopic surface conditions of the adsorbed surface and provides a compressed space for the adsorption block 3 during adsorption. In some embodiments, the negative pressure region 31 may be cavity-shaped, with multiple negative pressure holes defined within it. These holes may be connected to an external vacuum pump to provide negative pressure.

[0039] In some embodiments, see Figure 1 、 Figure 2、 Figure 11 As shown, the locking device is used to lock the first component 51 and the second component 52. The fixing block 1 is fixedly connected to the first component 51 through the mounting hole 10 opened on the fixing block 1, and the adsorption block 3 can adsorb the second component 52. Figure 11 In the embodiment shown, the first component 51 is a motion mechanism and the second component 52 is a table. In other embodiments, the first component 51 and the second component 52 can both be motion mechanisms, or the first component 51 and the second component 52 can also be stationary components, as long as both have the need for locking.

[0040] In some embodiments, see Figure 3 As shown, the fixing block 1 includes: an annular portion 11, an outer boss 12 extending outward along the outer edge of the annular portion 11, and an inner boss 13 extending inward along the inner edge of the annular portion 11. The middle portion of the annular portion 11 forms a receiving space for accommodating the preload mechanism 4, the outer boss 12 is fixedly connected to the flexible member, and the inner boss 13 is used to install the preload mechanism 4. In some embodiments, the fixing block 1 can be rectangular, circular, or other shapes when viewed from above. In some embodiments, the mounting hole 10 is opened on the annular portion 11 of the fixing block 1, and there can be multiple mounting holes 10, for example Figure 1 In some embodiments, the outer boss 12 is provided with a hole for connecting the flexible member. In some embodiments, the inner boss 13 is provided with a hole for connecting the preload mechanism 4.

[0041] In one or more embodiments of this specification, see Figure 4 、 Figure 5 As shown, the flexible member is a flexible sheet 2. In some embodiments, the flexible sheet 2 is used to provide a certain flexibility or elasticity to allow the adsorption block 3 to pitch in all directions relative to the fixed block 1, and further to be able to restore the initial position after the adsorption ends. In some embodiments, the flexible sheet 2 is in the form of a thin sheet, and the flexible sheet 2 is roughly parallel to the surface of the adsorbed object, such as the second member 52. In some embodiments, the driving mechanism that drives the first member 51 to move relative to the second member 52, such as a linear motor, will cause the first member 51 to generate a small vibration in the direction of movement while maintaining the first member 51 in the current position. Based on the thin sheet structure of the flexible sheet 2, the direction of the flexibility or elasticity provided by the flexible sheet 2 is Figure 3 The up and down directions instead of Figure 3 The left and right direction or the front and back direction (that is, the flexible sheet 2 is flexible or elastic in the up and down direction and rigid in other directions), so after the adsorption block 3 is adsorbed, the flexible sheet 2 will not produce Figure 3 In the left-right direction or the front-back direction, the fixed block 1 and the adsorption block 3 have rigidity in the direction of movement of the first component 51, thereby avoiding the first component 51 and the second component 52 from being displaced in the left-right direction or the front-back direction. Figure 3 Relative vibration in the left-right direction or the front-back direction caused by a drive mechanism such as a linear motor.

[0042] In some embodiments, the flexible sheet 2 has a first region 21 fixedly connected to the fixed block 1 and a second region 22 fixedly connected to the adsorption block 3, and at least a portion of the second region 22 can be elastically deformed relative to the plane where the first region 21 is located. Further, the first region 21 of the flexible sheet 2 can surround the second region 22, see Figure 5 As shown, Figure 5 The second region 22 is shown within the dotted line portion of Figure 5 The dotted portion shows the first area 21. In some embodiments, the flexible sheet 2 is further provided with a first flexible sheet hole 201 for connecting to the outer boss 12 and a second flexible sheet hole 202 for connecting to the adsorption block 3.

[0043] In one or more embodiments of the present specification, the flexible sheet 2 can be made of a rigid and / or elastic material (such as spring steel) and can be structurally flexible or elastic by means of slotting. For example, a plurality of flexible sheet slots 23 extending through the thickness of the flexible sheet 2 are provided within the second region 22 of the flexible sheet 2. The plurality of flexible sheet slots 23 separate at least a portion of the second region 22 into one or more deformable portions 24. The deformable portions 24 are capable of elastically deforming relative to the first region 21, and the adsorption block 3 is fixedly connected to the one or more deformable portions 24 (e.g., via the second flexible sheet slot 202). In some embodiments, the flexible sheet slot 23 can be located on one side of the interior of the second region 22 and / or at the center of the interior of the second region 22 (in which case a portion of the second region 22 can deform relative to the plane of the first region 21). In other embodiments, the flexible sheet slot 23 can also extend to the boundary of the second region 22 (in which case all portions of the second region 22 can deform relative to the plane of the first region 21).

[0044] In some embodiments, as Figure 4 、 Figure 5 As shown, the flexible sheet slot 23 can be in an I-shape. In other embodiments, the flexible sheet slot 23 can also be radial. In some embodiments, the flexible sheet slot 23 can be in a C-shape to form a deformation portion 24. Figure 4 、 Figure 5 In the embodiment of the flexible sheet groove 23, two symmetrical deformation parts 24 are formed, which have good symmetry. Figure 4 、 Figure 5The pitch angle of the flexible sheet 23 relative to the horizontal plane can be easily adjusted in the left-right and front-back directions (which can be understood as the pitch angle of the adsorption plane of the adsorption block 3 in various directions) and can be stably fixed to the adsorption block 3. In further embodiments, the flexible sheet slot 23 can further form more deformable portions 24, which may have better angular adjustment performance in various directions, but may be more difficult to fix to the adsorption block 3.

[0045] In some embodiments, a gap is provided between the second region 22 of the flexible sheet 2 and the fixed block 1 to provide space for elastic deformation of the second region 22. In some embodiments, the lower end of the outer boss 12 protrudes beyond the annular portion 11, thereby forming an accommodating space within the outer boss 12, which provides a gap between the second region 22 of the flexible sheet 2 and the fixed block 1.

[0046] In some embodiments, see Figure 3 As shown, the upper end of the adsorption block 3 is fixedly connected to the lower surface of the second area 22 of the flexible sheet 2. When the second area 22 of the flexible sheet 2 undergoes elastic deformation, the upper end of the adsorption block 3 may enter the accommodating space along with the elastic deformation of the flexible sheet 2. In some embodiments, the adsorption block 3 forms an adsorption block fixing structure 30 on the side facing the flexible sheet 2. The size of the adsorption block fixing structure 30 is smaller than the size of the accommodating space so that it can partially or completely enter the accommodating space. Exemplarily, the adsorption block 3 can be a two-stage or multi-stage stepped structure, and the uppermost step structure of the adsorption block 3 forms the adsorption block fixing structure 30.

[0047] In one or more embodiments of this specification, see Figure 10 As shown, the flexible member can be one or more flexible blocks, which are arranged around the outer edge of the lower surface of the fixed block. The upper end of the flexible block is fixedly connected to the fixed block, and the lower end of the flexible block is fixedly connected to the adsorption block, thereby providing flexibility or elasticity between the fixed block and the adsorption block. In this embodiment, the flexible block can be made of a flexible material, specifically silicone or rubber.

[0048] In some embodiments, a guide structure (such as a guide post and a guide sleeve, or a guide rail and a slider) can be further provided between the fixed block and the adsorption block to avoid the possibility of the flexible block structure being in a state of ... Figure 10 displacement in the left-right or front-back directions.

[0049] In other embodiments of the present specification, the flexible member may also be a spring sheet with an S-shaped longitudinal section and arranged on the outer edge of the fixing block.

[0050] In one or more embodiments of this specification, see Figures 1 to 7As shown, the preload mechanism 4 includes: a preload elastic member 43, the two ends of the preload elastic member 43 directly or indirectly abut against the fixed block 1 and the adsorption block 3 respectively. In some embodiments, the preload elastic member 43 can be a spring, or an elastic bellows, or an elastic silicone or rubber structure, etc. The preload elastic member 43 provides a preload force, which makes the adsorption block 3 tend to move away from the fixed block 1. The preload elastic member 43 can be compressed by the reaction force provided by the adsorption block 3, and the compression direction can be adaptively adjusted to a certain extent. When the adsorption block 3 generates a pitch angle, the direction of applying the preload force can be adaptively fine-tuned to assist the adsorption block 3 in contact with the adsorbed object.

[0051] In one or more embodiments of the present specification, the preload mechanism 4 further includes: a first pressure plate 41 and a second pressure plate 42, wherein the first pressure plate 41 is fixedly connected to the fixed block 1, one end of the preload elastic member 43 abuts against the first pressure plate 41, the second pressure plate 42 directly or indirectly abuts against the adsorption block 3, and the other end of the preload elastic member 43 abuts against the second pressure plate 41.

[0052] In some embodiments, the second pressure plate 42 can be indirectly pressed against the adsorption block 3, for example, the second pressure plate 42 is pressed against a flexible member (for example, the flexible sheet 2, for example, the second region 22 of the flexible sheet 2), and the flexible sheet 2 is fixedly connected to the adsorption block 3 to transmit the force of the second pressure plate 42. In this embodiment, the flexible sheet 2 holds the second pressure plate 42 and the preload elastic member 43 within the accommodation space of the annular portion 11. In some embodiments, the second pressure plate 42 and components located above the second pressure plate 42, such as the preload elastic member 43, and other related structures act on the flexible sheet 2 due to gravity, thereby also providing a certain preload force. In some further embodiments, the second pressure plate 42 can also be fixedly connected to the flexible sheet 2 (for example, the upper surface of the flexible sheet 2).

[0053] In other embodiments, the second pressure plate 42 can directly abut the adsorption block 3. For example, a flexible member such as a flexible sheet 2 is fixedly connected to the adsorption block 3, and an avoidance area is provided to allow the second pressure plate 42 to pass through the flexible sheet 2 and abut the adsorption block 3.

[0054] In other embodiments, the second pressing plate 42 can simultaneously abut against the adsorption block 3 and the flexible member, such as the flexible sheet 2. For example, the second pressing plate 42 can be in a two-step structure, with the outer edge of the second pressing plate 42 abutting against the flexible member, such as the flexible sheet 2, and the middle portion of the second pressing plate 42 protruding downward, penetrating the flexible member, such as the flexible sheet 2, and abutting against the adsorption block 3.

[0055] In some embodiments, the first pressure plate 42 is fixedly connected to the inner boss 13 , and related structures in the preload mechanism 4 of some embodiments that may be attached to the first pressure plate 42 , such as the preload elastic member 43 , can be installed to the fixed block 1 through the first pressure plate 42 .

[0056] In some embodiments, the first pressing plate 41 defines a first pressing plate slot 411 for accommodating the preload elastic member 43 , and / or the second pressing plate 42 defines a second pressing plate slot 421 for accommodating the preload elastic member 43 .

[0057] In some embodiments, the preload mechanism 4 also includes: a guide column 44 fixedly connected to the first pressure plate 41 or the second pressure plate 42, and the preload elastic member 43 is sleeved outside the guide column 44. The outer diameter of the guide column 44 is slightly smaller than the inner diameter of the preload elastic member 43. While supporting / guiding the preload elastic member 43, the guide column 44 allows the preload elastic member 43 to undergo a certain degree of axial bending to adapt to the pitch angle of the adsorption block.

[0058] In some embodiments, see Figure 3 As shown, the longitudinal cross-section of the first pressing plate 41 is configured in a C-shape. The first pressing plate 41 has a first pressing plate accommodating space 412, and the first pressing plate groove 411 is opened inside the first pressing plate accommodating space 412. In some embodiments, the inner diameter of the first pressing plate accommodating space 412 matches the inner diameter of the inner boss 13. Furthermore, the outer diameter of the second pressing plate 42 is smaller than the inner diameter of the inner boss 13 and smaller than the inner diameter of the first pressing plate accommodating space 412, so that the second pressing plate 42 can be accommodated inside the inner boss 13 and even the first pressing plate accommodating space 412 after being compressed.

[0059] In one or more embodiments of this specification, see Figure 8 、 Figure 9 As shown, the preload mechanism 4 includes a preload cylinder 45. One of the cylinder body 46 and piston 47 of the preload cylinder 45 is fixedly connected to the fixed block 1, and the other of the cylinder body 46 and piston 47 of the preload cylinder 45 directly or indirectly abuts against the adsorption block 3. The preload cylinder 45 operates to move the piston 47 relative to the cylinder body 46, thereby providing a preload force to the adsorption block 3 based on the fixed block 1.

[0060] In some embodiments, the piston 47 is fixedly connected to the inner boss 13, and the cylinder body 46 is arranged inside the inner boss 13, and the cylinder body 46 directly or indirectly abuts against the adsorption block 3 (for example, it can indirectly abut against the adsorption block 3 through the flexible sheet 2, and / or directly abut against the adsorption block 3 through the flexible sheet 2).

[0061] In some embodiments, the surface of the cylinder 46 that contacts the flexible sheet 2 or the adsorption block 3 may be a curved surface to adapt to the various pitch angles of the adsorption block 3 .

[0062] It should be noted that the aforementioned pitch, pitch angle, etc. may refer to the angle change of the adsorbed plane due to the difference or change in the microscopic conditions of the adsorbed plane, or the movement of the adsorbed object, which causes the lower surface of the adsorption block 3 (for example, the side away from the fixed block 1) to form an upward or downward floating angle in various directions in order to implement accurate adsorption.

[0063] In one or more embodiments of the present specification, the side of the adsorption block 3 facing away from the fixed block 1 is provided with one or more positive pressure areas 32 for providing positive pressure gas. The positive pressure gas provided by the positive pressure area can form an air film between the adsorption block 3 and the second component 52, so as to reduce the friction of the adsorption block 3 moving relative to the second component 52, or to separate the adsorption block 3 from the second component 52, and reduce or even avoid the interference of the adsorption block 3 on the second component 52 when the first component 51 moves relative to the second component 52. In some embodiments, the number of negative pressure areas 31 is one, and the positive pressure area 32 surrounds the negative pressure area 31. In other embodiments, the number of negative pressure areas 31 is multiple, and the positive pressure area 32 surrounds the negative pressure area 31 and / or is located between adjacent negative pressure areas 31. See. Figure 3 As shown, a positive pressure channel 320 connected to the positive pressure area 32 and a negative pressure channel 310 connected to the negative pressure area 31 are shown, wherein the positive pressure channel 320 is used to provide positive pressure gas to the positive pressure area 32, and the negative pressure channel 310 is used to connect an air pump to provide negative pressure to the negative pressure area 31.

[0064] See also Figure 11 As shown, one or more embodiments of the present specification also provide a motion mechanism, including a table (i.e., the second component 52) ​​and a motion device (i.e., the first component 51) that moves on the table, and also includes a locking device 50, wherein the fixed block 1 of the locking device 50 is fixedly connected to the motion device, and the adsorption block 3 of the locking device 50 is adsorbed on the table.

[0065] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are taught in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A locking device, characterized in that: include: A fixed block (1), a flexible member (2), an adsorption block (3) and a preload mechanism (4); The flexible member (2) flexibly connects the fixed block (1) and the adsorption block (3); The adsorption block (3) has one or more negative pressure areas (31) for providing negative pressure on a side facing away from the fixed block (1); The preload mechanism (4) is connected to the fixed block (1) and extends in the direction of the adsorption block (3), and is used to apply a preload force to the adsorption block (3).

2. The locking device according to claim 1, characterized in that: The locking device is used to lock the first component (51) and the second component (52); the fixing block (1) is fixedly connected to the first component (51) via a mounting hole (10) provided on the fixing block (1); and the adsorption block (3) is capable of adsorbing the second component (52).

3. The locking device according to claim 1, characterized in that: The fixed block (1) comprises: an annular portion (11), wherein a central portion of the annular portion (11) forms an accommodating space for accommodating the preloading mechanism (4); an outer boss (12) extending outwardly from the outer edge of the annular portion (11), the outer boss (12) being fixedly connected to the flexible member (2); and An inner boss (13) is formed by extending inwardly along the inner edge of the annular portion (11), and the inner boss (13) is used to install the preload mechanism (4).

4. The locking device according to claim 1 or 3, characterized in that: The flexible member (2) is a flexible sheet; The flexible sheet comprises a first region (21) fixedly connected to the fixed block (1) and a second region (22) fixedly connected to the adsorption block (3); At least a portion of the second region (22) is capable of elastic deformation relative to a plane in which the first region (21) is located.

5. The locking device according to claim 4, characterized in that: There is a gap between the second area (22) of the flexible sheet and the fixed block (1) to provide space for at least a portion of the second area (22) to undergo elastic deformation.

6. The locking device according to claim 4, characterized in that: The first region (21) of the flexible sheet surrounds the second region (22); A plurality of flexible sheet grooves (23) extending through the thickness direction of the flexible sheet are provided inside the second region (22) of the flexible sheet, and the plurality of flexible sheet grooves (23) separate at least a portion of the second region (22) into one or more deformation portions (24), and the deformation portions (24) are capable of elastically deforming relative to the first region (21); The adsorption block (3) is fixedly connected to one or more deformation parts (24).

7. The locking device according to claim 1, characterized in that: The preloading mechanism (4) comprises: A preload elastic member (43), wherein two ends of the preload elastic member (43) respectively directly or indirectly abut against the fixing block (1) and the adsorption block (3).

8. The locking device according to claim 7, characterized in that: The preloading mechanism (4) further comprises: a first pressing plate (41), wherein the first pressing plate (41) is fixedly connected to the fixed block (1), and one end of the preload elastic member (43) abuts against the first pressing plate (41); A second pressing plate (42), the second pressing plate (42) directly or indirectly abuts against the adsorption block (3), and the other end of the preload elastic member (43) abuts against the second pressing plate (42).

9. The locking device according to claim 8, characterized in that: The first pressing plate (41) is provided with a first pressing plate groove (411) for accommodating the preload elastic member (43), and / or the second pressing plate (42) is provided with a second pressing plate groove (421) for accommodating the preload elastic member (43); The preload mechanism (4) further comprises a guide column (44) fixedly connected to the first pressing plate (41) or the second pressing plate (42), and the preload elastic member (43) is sleeved outside the guide column (44).

10. The locking device according to claim 1, characterized in that: The preloading mechanism (4) comprises: A pre-compression cylinder (45), one of the cylinder body (46) and the piston (47) of the pre-compression cylinder (45) is fixedly connected to the fixed block (1), and the other of the cylinder body (46) and the piston (47) of the pre-compression cylinder (45) directly or indirectly abuts against the adsorption block (3).

11. The locking device according to claim 1, characterized in that: The side of the adsorption block (3) facing away from the fixed block (1) is provided with one or more positive pressure areas (32) for providing positive pressure gas.

12. A motion mechanism, characterized in that: The invention comprises a table top and a motion device that moves on the table top, and also comprises a locking device according to any one of claims 1 to 11, wherein the fixing block (1) of the locking device is fixedly connected to the motion device, and the adsorption block (3) of the locking device is adsorbed on the table top.

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