Detection device

Abstract

The embodiment of the utility model relates to the technical field of electronic device detection, and particularly discloses a detection device which comprises an operation table, a sample loading mechanism, a sampling mechanism, a first adjusting mechanism, a detection mechanism and a transmission mechanism, the sample loading mechanism, the sampling mechanism, the first adjusting mechanism, the detection mechanism and the transmission mechanism are all arranged on the operation table, and the sample loading mechanism is used for bearing a sample; the first adjusting mechanism comprises a rotary table and a driving assembly, the rotary table is used for fixing the sample, the driving assembly is connected with the rotary table, and the driving assembly is used for driving the rotary table to drive the sample to rotate around a first shaft and driving the rotary table to rotate around a second shaft so as to drive the sample to rotate around the second shaft; the detection mechanism is used for detecting surface defects of the sample; the transmission mechanism is used for sequentially transmitting the sample from the sampling mechanism to the first adjusting mechanism and the detection mechanism. Through the above mode, the automatic detection device reduces the influence of human factors on the detection result, and improves the detection accuracy.

Description

Technical Field

[0001] The embodiment of the utility model relates to the technical field of electronic device detection, and in particular to a detection device. Background Art

[0002] In modern industrial production, product surface quality inspection is a crucial step, directly impacting the overall quality and market competitiveness of a product. Surface defect detection is particularly essential for high-precision, demanding electronic devices, such as semiconductor chips and precision mechanical parts. Currently, surface defect detection for electronic devices typically relies on manual visual inspection, where the device is manually clamped and placed under a microscope for observation.

[0003] In the process of implementing the embodiments of the present application, the inventors discovered that manually clamping electronic devices is easily affected by human factors such as hand shaking, resulting in large errors in observation results. Utility Model Content

[0004] In view of the above problems, an embodiment of the present invention provides a detection device, which overcomes the above problems or at least partially solves the above problems.

[0005] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide a detection device, including an operating table, a loading mechanism, a sampling mechanism, a first adjustment mechanism, a detection mechanism and a transmission mechanism, the loading mechanism is arranged on the operating table, the loading mechanism is used to carry samples, the sampling mechanism is arranged on the operating table, the sampling mechanism is used to take samples out of the loading mechanism, the first adjustment mechanism is arranged on the operating table, the first adjustment mechanism includes a turntable and a drive assembly, the turntable is used to fix the sample, the drive assembly is connected to the turntable, the drive assembly is used to drive the turntable to rotate around a first axis, thereby driving the sample to rotate around the first axis, and driving the turntable to rotate around a second axis, thereby driving the sample to rotate around the second axis, the detection mechanism is arranged on the operating table, the detection mechanism is used to detect surface defects of the sample, the transmission mechanism is arranged on the operating table, and the transmission mechanism is used to transfer the sample from the sampling mechanism to the first adjustment mechanism and the detection mechanism in sequence.

[0006] Optionally, the first adjustment mechanism further includes a first lifting assembly, and the first lifting assembly is used to drive the turntable to move back and forth in a direction perpendicular to the surface of the operating table.

[0007] Optionally, the driving assembly drives the turntable to rotate around the second axis at an angle less than or equal to 90 degrees.

[0008] Optionally, the drive assembly includes a first motor, a second motor and a first traction belt, the first motor is connected to the turntable, the first motor and the second motor are connected through the first traction belt, the first motor is used to drive the turntable to rotate around the first axis, and the second motor is used to drive the first motor and the turntable to rotate around the second axis.

[0009] Optionally, the loading mechanism includes a material box, a third lifting assembly and a sensing assembly, and the third lifting assembly and the sensing assembly are arranged adjacent to the operating table. The third lifting assembly is used to drive the material box to move back and forth in a direction perpendicular to the surface of the operating table, and the sensing assembly is used to sense the position of the sample in the material box.

[0010] Optionally, the transmission mechanism includes a first transmission component and a second transmission component, and the first transmission component and the second transmission component are arranged in parallel in a direction perpendicular to the surface of the operating table, and both the first transmission component and the second transmission component can drive the sample to move back and forth along the length direction of the transmission component.

[0011] Optionally, the detection mechanism includes a microscope, a mobile detection platform and a transfer platform, the transfer platform is used to receive the sample transmitted by the transmission mechanism, the mobile detection platform is arranged adjacent to the transfer platform, the microscope is arranged above the mobile detection platform, and the mobile detection platform is used to move the sample on the transfer platform into the detection range of the microscope.

[0012] Optionally, the detection device further includes a second adjustment mechanism, which is disposed on the operating table and adjacent to the first adjustment mechanism. The second adjustment mechanism is used to drive the sample to rotate around a third axis, and the rotation angle is less than or equal to 180 degrees.

[0013] Optionally, the second adjustment mechanism includes a third motor, a fixing part and a second lifting assembly, the fixing part is used to fix the sample, the third motor is connected to the fixing part, the third motor is used to drive the fixing part to rotate around the third axis, and the second lifting assembly is used to drive the fixing part to move back and forth in a direction perpendicular to the surface of the operating table.

[0014] Optionally, the detection device further includes an edge-finding mechanism, which is disposed on the operating table and adjacent to the first adjustment mechanism, and is used to perform edge positioning on the sample on the first adjustment mechanism.

[0015] The beneficial effect of the embodiment of the present utility model is as follows: Different from the prior art, the embodiment of the present application provides a detection device, including an operating table, a sample loading mechanism, a sampling mechanism, a first adjustment mechanism, a detection mechanism and a transmission mechanism, wherein the sample loading mechanism, the sampling mechanism, the first adjustment mechanism, the detection mechanism and the transmission mechanism are all arranged on the operating table, the sample loading mechanism is used to carry the sample, the sampling mechanism is used to take the sample out of the sample loading mechanism, the first adjustment mechanism includes a turntable and a drive assembly, the turntable is used to fix the sample, the drive assembly is connected to the turntable, the drive assembly is used to drive the turntable to rotate around a first axis, thereby driving the sample to rotate around the first axis, and driving the turntable to rotate around a second axis, thereby driving the sample to rotate around the second axis, the detection mechanism is used to detect surface defects of the sample, and the transmission mechanism is used to transfer the sample from the sampling mechanism to the first adjustment mechanism and the detection mechanism in sequence. In the above manner, the automated detection device reduces the influence of human factors on the detection results and improves the accuracy of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the drawings without creative work.

[0017] Figure 1 It is a three-dimensional diagram of the detection device provided by an embodiment of the utility model;

[0018] Figure 2 This is an enlarged perspective view of the material box and the third lifting assembly in the sample loading mechanism provided by an embodiment of the present utility model;

[0019] Figure 3 It is an enlarged stereoscopic view of the sampling mechanism provided in an embodiment of the utility model;

[0020] Figure 4 It is an enlarged three-dimensional diagram of the first adjustment mechanism provided in an embodiment of the present utility model;

[0021] Figure 5 It is an enlarged three-dimensional diagram of the second adjustment mechanism provided in an embodiment of the present utility model;

[0022] Figure 6 This is an enlarged stereoscopic view of the edge-finding mechanism provided by an embodiment of the present utility model;

[0023] Figure 7 It is an enlarged stereoscopic view of the transmission mechanism provided by an embodiment of the utility model. DETAILED DESCRIPTION

[0024] In order to facilitate the understanding of the present invention, the present invention is described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this specification are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art to which this utility model belongs. The terms used in this specification and in the description of this utility model are only for the purpose of describing specific embodiments and are not intended to limit the utility model. The term "and / or" used in this specification includes any and all combinations of one or more of the relevant listed items.

[0026] See also Figure 1 The detection device 1000 includes an operating table 1, a sample loading mechanism 2, a sampling mechanism 3, a first adjustment mechanism 4, a second adjustment mechanism 5, an edge-finding mechanism 6, a transmission mechanism 7, and a detection mechanism 8. The sample loading mechanism 2, the sampling mechanism 3, the first adjustment mechanism 4, the second adjustment mechanism 5, the edge-finding mechanism 6, the transmission mechanism 7, and the detection mechanism 8 are all arranged on the operating table 1. The second adjustment mechanism 5 and the edge-finding mechanism 6 are both arranged adjacent to the first adjustment mechanism 4. The sample loading mechanism 2 is used to carry samples, the sampling mechanism 3 is used to remove samples from the sample loading mechanism 2 and return the samples to the sample loading mechanism 2. The first adjustment mechanism 4 and the second adjustment mechanism 5 are used to drive the sample to rotate. The edge-finding mechanism 6 is used to locate the edge of the sample on the first adjustment mechanism 4. The detection mechanism 8 is used to detect surface defects of the sample. The transmission mechanism 7 is used to transport the sample back and forth between the sampling mechanism 3, the first adjustment mechanism 4, and the detection mechanism 8 in sequence.

[0027] It should be noted that the sample can be an electronic device or a semi-finished product in its manufacturing process, such as a wafer, semiconductor chip, integrated circuit board, etc., and surface defects refer to the appearance of oxide scale, stains, pits, cracks, bubbles and other undesirable conditions on the surface of the sample.

[0028] For the above-mentioned loading mechanism 2, please refer to Figure 1 and Figure 2The loading mechanism 2 includes a material box 21, a sensing component 22 and a third lifting component 23. The third lifting component 23 and the sensing component 22 are adjacently arranged on the operating table 1. The third lifting component 23 includes a material table 231, a material table bracket 232 and a first lifting slide 233. The first lifting slide 233 is vertically arranged on the operating table 1. The material table bracket 232 is connected to the first lifting slide 233. The material table 231 is arranged at one end of the material table bracket 232. The material table 231 is used to fix the material box 21. The material table 231 is provided with a position sensor 2311. The position sensor 2311 is used to identify material boxes 21 of different sizes and limit the position of the material box 21. The material table bracket 232 can move back and forth along the first lifting slide 233, thereby driving the material table 231 and the material box 21 to reciprocate in a direction perpendicular to the surface of the operating table 1. The opposite side walls of the material box 21 are provided with a plurality of grooves 211. The grooves 211 are used to accommodate the edges of the sample to fix the sample to the material box 21. The sensing component 22 is located on one side of the material table 231 , and is used to sense and identify the position of the sample in the material box 21 .

[0029] For sampling mechanism 3, see Figure 3 The sampling mechanism 3 includes a sampling fixture 31, a sampling rack 32, and a first horizontal slide 33. The first horizontal slide 33 is parallel to the surface of the operating table 1, and the sampling rack 32 is perpendicular to the first horizontal slide 33. The sampling fixture 31 is mounted on the sampling rack 32. One end of the sampling fixture 31 is fixedly connected to the sampling rack 32. The other end of the sampling fixture 31 is U-shaped and has an adsorption hole for pneumatically adsorbing or releasing the sample. When the sampling rack 32 reciprocates along the first horizontal slide 33, the sampling rack 32 drives the sample on the sampling fixture 31 to move.

[0030] For the first adjustment mechanism 4, please refer to Figure 4The first adjustment mechanism 4 includes a turntable 41, a drive assembly 42, and a first lifting assembly 43. The turntable 41 can adsorb and fix the sample. The drive assembly 42 includes a first motor 421, a second motor 422, a first traction belt 423, and a first transmission wheel 424. The rotating shaft of the first motor 421 is connected to the turntable 41. The first motor 421 can drive the turntable 41 to rotate around the first axis, thereby driving the sample on the turntable 41 to rotate around the first axis. The first traction belt 423 is connected end to end and is sleeved between two first transmission wheels 424. One first transmission wheel 424 is fixedly connected to the first motor 421, and the other first transmission wheel 424 is connected to the rotating shaft of the second motor 422. The second motor 422 drives the first motor 421 and the turntable 41 to be connected around the second axis through the first traction belt 423 and the first transmission wheel 424, and the rotation angle is less than or equal to 90 degrees. The first lifting assembly 43 includes a first bracket 431 and a guide rail 432. The guide rail 432 is arranged perpendicular to the operating table 1. The first bracket 431 is used to install the first motor 421, the second motor 422 and the first transmission wheel 424. The first bracket 431 can move back and forth along the guide rail 432, thereby driving the turntable 41 to move back and forth in a direction perpendicular to the surface of the operating table 1.

[0031] It should be noted that in the embodiment of the present application, the turntable 41 is a circular disk, the first axis is the centerline of the turntable 41, the second axis is parallel to the perpendicular direction of the central axis of the first transmission wheel 424, and the line on which the second axis lies is parallel to the surface of the operating table 1. In some embodiments, the turntable surface is provided with annular areas of different diameters, each of which is evenly distributed with adsorption holes for sample adsorption to accommodate samples of different sizes. In some embodiments, the turntable can also have other shapes, such as rectangular or oval, to accommodate samples of different shapes and sizes.

[0032] For the second adjustment mechanism 5, please refer to Figure 5 The second adjustment mechanism 5 includes a fixing member 51, a third motor 52, a second traction belt 53, a second transmission wheel 54, and a second lifting assembly 55. The fixing member 51 is used to adsorb and fix the sample. The second traction belt 53 is connected end to end and is sleeved between two second transmission wheels 54. One second transmission wheel 54 is connected to the fixing member 51, and the other transmission wheel is connected to the rotating shaft of the third motor 52. The third motor 52 drives the fixing member 51 to rotate around the third axis through the second traction belt 53 and the second transmission wheel 54, thereby driving the sample on the fixing member 51 to rotate around the third axis, and the rotation angle is less than or equal to 180 degrees. The second lifting assembly 55 includes a second bracket 551 and a second lifting rail 552. The second lifting rail 552 is perpendicular to the operating table 1. The second bracket 551 is used to install the third motor 52 and the second transmission wheel 54. The second bracket 551 can move back and forth along the second lifting rail 552, thereby driving the fixing member 51 to move back and forth in a direction perpendicular to the surface of the operating table 1.

[0033] It should be noted that the third axis is parallel to the vertical direction of the central axis of the second transmission wheel 54 , and the straight line where the third axis is located is parallel to the surface of the operating table 1 .

[0034] For the above-mentioned edge-finding mechanism 6, please refer to Figure 6 The edge-finding mechanism 6 includes an edge-finding bracket 61, a laser sensor 62, and a second horizontal slide 63. The second horizontal slide 63 is arranged parallel to the surface of the operating table 1. The edge-finding bracket 61 is arranged perpendicular to the second horizontal slide 63 and can reciprocate along the second horizontal slide 63. A notch 610 is provided on one side of the edge-finding bracket 61. The laser sensor 62 is located in the notch 610. The laser sensor 62 includes a transmitter and a receiver. The transmitter is located on one of the upper and lower sides of the notch 610, and the receiver is located on the other side. When a sample is inserted into the notch 610, the transmitter emits a laser beam to the sample surface. The receiver receives the laser beam reflected by the sample surface, thereby identifying the edge of the sample.

[0035] For the above transmission mechanism 7, see Figure 7 The transmission mechanism 7 includes a first transmission assembly 71, a second transmission assembly 72, and a fourth lifting assembly 73. The first transmission assembly 71 includes a first transmission rail 712 and a first transmission fixture 711. One end of the first transmission fixture 711 is movably connected to the first transmission rail 712. The other end of the first transmission fixture 711 is curved and has adsorption holes for adsorbing samples. The second transmission assembly 72 includes a second transmission rail 722 and a second transmission fixture 721. One end of the second transmission fixture 721 is movably connected to the second transmission rail 722. The other end of the second transmission fixture 721 is curved and has adsorption holes for adsorbing samples. The first and second transport rails 712, 722 are arranged parallel to each other in a direction perpendicular to the surface of the operating table 1. The first transport fixture 711 can reciprocate along the length of the first transport rail 712, and the second transport fixture 721 can reciprocate along the length of the second transport rail 722. The first and second transport fixtures 711, 721 can move in the same direction or in opposite directions, achieving bidirectional alternating transport of two samples. The fourth lifting assembly 73 includes a transport bracket and a third lifting rail. The third lifting rail is arranged perpendicular to the operating table 1. The transport bracket is used to mount the first and second transport assemblies 71, 72. The transport bracket can reciprocate along the third lifting rail, thereby driving the first and second transport assemblies 71, 72 to reciprocate along the third lifting rail.

[0036] For the above-mentioned testing agency 8, please refer to Figure 1The inspection mechanism 8 includes a microscope 83, a mobile inspection platform 82 and a transfer platform 81. The transfer platform 81 is used to receive the sample transmitted by the transmission mechanism 7. The mobile inspection platform 82 and the transfer platform 81 are arranged adjacent to each other. The microscope 83 is arranged above the mobile platform. The mobile inspection platform 82 is used to move the sample on the transfer platform 81 to the inspection range of the microscope 83. The microscope 83 is used for the operator to observe the surface defects of the sample.

[0037] In some embodiments, the detection device 1000 also includes a control mechanism (not shown), which is communicatively connected to the loading mechanism 2, the sampling mechanism 3, the first adjustment mechanism 4, the second adjustment mechanism 5, the edge-finding mechanism 6, the transmission mechanism 7 and the detection mechanism 8, and is used to control the operation of each mechanism.

[0038] In the embodiment of the present application, the process of testing samples by the detection device 1000 is as follows: first, at least one sample to be tested is inserted into the groove 211 in the material box 21, the material box 21 is fixed to the material table 231, and the material table bracket 232 drives the material box 21 to move back and forth along the lifting slide rail. At the same time, the sensing component 22 cooperates to sense the position of each sample in the material box 21. According to the obtained sample position information, the sampling bracket 32 ​​of the sampling mechanism 3 moves along the first horizontal slide rail 33 and cooperates with the third lifting component 23 of the loading mechanism 2. The sampling fixing member 31 takes out a sample from the material box 21 and moves to the top of the first adjustment mechanism 4. Then, the first bracket 431 drives the turntable 41 to move upward along the guide rail 432. The turntable 41 extends from the U-shaped opening of the sampling fixing member 31 to rotate the sample. The first motor 421 and the second motor 422 drive the sample in the turntable 41 to rotate 360 ​​degrees around the first axis and 90 degrees around the second axis respectively. During the rotation, the operator performs The first observation and inspection is carried out. After the first observation and inspection is completed, the turntable 41 returns to its initial position. The fixing part of the second adjustment mechanism 5 moves upward under the action of the second lifting component 55 to transfer the sample. The third motor 52 drives the sample on the fixing part to rotate 180 degrees around the third axis through the second traction belt 53 and the second transmission wheel 54. During the rotation, the operator performs a second observation and inspection on the back of the sample and records the identification code on the back of the sample. After the second observation and inspection is completed, the fixing part returns to its initial position, and the sample returns to the turntable 41. The first transmission component 71 moves upward through the third lifting slide rail, and the first transmission fixing part 711 transfers the sample from the turntable 41. Then, the first transmission fixing part 711 moves along the first transmission slide rail 712 to transport the sample to the transfer stage 81. The mobile inspection platform 82 moves the transfer sample toward the transfer stage 81 and transports the sample to the detection range of the microscope 83. The operator performs a third observation and inspection on the surface defects of the sample through the microscope 83.

[0039] After the third observation and inspection is completed, the mobile inspection platform 82 transports the sample back to the transfer stage 81, and then the second transmission component 72 transports the sample from the transfer stage 81 back to the turntable 41. At this time, the edge-finding bracket 61 moves along the second horizontal slide rail 63 until the edge of the sample on the turntable 41 extends into the gap 610. While the turntable 41 rotates around the first axis, the laser sensor 62 locates the edge of the sample. According to the edge information, the sample is adjusted to a preset position through the turntable 41. The preset position can be the orientation of the sample in the material box 21 before the inspection. Then, the sampling mechanism 3 puts the sample from the turntable 41 back into the material box 21.

[0040] It is understood that during the above-described testing process, when the sample leaves the turntable 41 after completing the second observation test, the sampling mechanism 3 can simultaneously remove another sample from the magazine 21. While the sample undergoes the third observation test, the other sample is also undergoing the first and second observation tests. While the second transport assembly 72 transports the sample that has completed the third observation test from the transfer stage 81 back to the turntable 41, the first transport assembly 71 simultaneously transports the other sample that has completed the second observation test to the transfer stage 81.

[0041] In the embodiment of the present application, the various mechanisms of the detection device 1000 are modularly designed and automatically controlled, which reduces the impact of human operation during the detection process and improves the accuracy and consistency of the detection. Specifically, through the cooperation of the first adjustment mechanism 4 and the second adjustment mechanism 5, comprehensive detection of the front, edge, and back of the sample can be achieved, avoiding visual blind spots during the detection process and improving the accuracy and reliability of the detection. At the same time, the edge-finding mechanism 6 locates the edge of the sample, and the orientation of the sample can be precisely adjusted, further ensuring the accuracy of the detection. The transmission mechanism 7, which uses bidirectional transmission, can continuously detect multiple samples, effectively improving detection efficiency.

[0042] It should be noted that the preferred embodiments of the present invention are given in the specification and drawings of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. These embodiments do not serve as additional limitations on the content of the present invention. The purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive. In addition, the above-mentioned technical features continue to be combined with each other to form various embodiments not listed above, which are all considered to be within the scope of the description of the present invention; further, it is obvious to those skilled in the art that improvements or changes can be made based on the above description, and all such improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A detection device, characterized in that: include: operating table; A sample loading mechanism is provided on the operating table and is used to carry samples; A sampling mechanism, provided on the operating table, for taking out samples from the loading mechanism; a first adjustment mechanism, disposed on the operating table, comprising a turntable and a drive assembly, the turntable being used to fix the sample, the drive assembly being connected to the turntable, the drive assembly being used to drive the turntable to rotate about a first axis, thereby driving the sample to rotate about the first axis, and to drive the turntable to rotate about a second axis, thereby driving the sample to rotate about the second axis; A detection mechanism, provided on the operating table, for detecting surface defects of the sample; The transmission mechanism is provided on the operating table, and is used to sequentially transmit the sample from the sampling mechanism to the first regulating mechanism and the detecting mechanism.

2. The detection device according to claim 1, characterized in that The first adjustment mechanism further includes a first lifting assembly, which is used to drive the turntable to move back and forth in a direction perpendicular to the surface of the operating table.

3. The detection device according to claim 1, characterized in that The driving assembly drives the turntable to rotate around the second axis at an angle less than or equal to 90 degrees.

4. The detection device according to claim 3, characterized in that , The drive assembly includes a first motor, a second motor and a first traction belt. The first motor is connected to the turntable. The first motor and the second motor are connected through the first traction belt. The first motor is used to drive the turntable to rotate around the first axis. The second motor is used to drive the first motor and the turntable to rotate around the second axis.

5. The detection device according to claim 1, characterized in that The loading mechanism includes a material box, a third lifting assembly and a sensing assembly. The third lifting assembly and the sensing assembly are adjacently arranged on the operating table. The third lifting assembly is used to drive the material box to move back and forth in a direction perpendicular to the surface of the operating table, and the sensing assembly is used to sense the position of the sample in the material box.

6. The detection device according to claim 1, characterized in that , The transmission mechanism includes a first transmission component and a second transmission component. The first transmission component and the second transmission component are arranged in parallel in a direction perpendicular to the surface of the operating table. The first transmission component and the second transmission component can both drive the sample to move back and forth along the length direction of the transmission component.

7. The detection device according to claim 1, characterized in that The detection mechanism includes a microscope, a mobile detection platform and a transfer platform. The transfer platform is used to receive the sample transmitted by the transmission mechanism. The mobile detection platform is arranged adjacent to the transfer platform. The microscope is arranged above the mobile detection platform. The mobile detection platform is used to move the sample on the transfer platform to the detection range of the microscope.

8. The detection device according to any one of claims 1 to 7, characterized in that , The detection device also includes a second adjustment mechanism, which is arranged on the operating table and adjacent to the first adjustment mechanism. The second adjustment mechanism is used to drive the sample to rotate around a third axis, and the rotation angle is less than or equal to 180 degrees.

9. The detection device according to claim 8, characterized in that The second adjustment mechanism includes a third motor, a fixing part and a second lifting assembly, the fixing part is used to fix the sample, the third motor is connected to the fixing part, the third motor is used to drive the fixing part to rotate around the third axis, and the second lifting assembly is used to drive the fixing part to reciprocate in a direction perpendicular to the surface of the operating table.

10. The detection device according to any one of claims 1 to 7, characterized in that: The detection device further includes an edge-finding mechanism, which is disposed on the operating table and adjacent to the first adjustment mechanism. The edge-finding mechanism is used to perform edge positioning on the sample on the first adjustment mechanism.

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