Acoustic streaming type liquid flow module and microfluidic system based on acoustic streaming

Abstract

The utility model provides an acoustic streaming type liquid flow module, which comprises a rear shell provided with a first space for accommodating a circuit substrate and a second space for accommodating an interface; the circuit substrate is assembled at the position of the first space; a special ultrasonic device is arranged on one surface, back to the rear shell, of the circuit substrate; a micro-fluidic chip is tightly attached to the surface, back to the rear shell, of the special ultrasonic device, a micro-channel is formed in the micro-fluidic chip, and a liquid flow inlet and a liquid flow outlet which are communicated with the micro-channel are formed in the surface, back to the rear shell, of the micro-fluidic chip or the adjacent surface of the micro-fluidic chip; the acoustic fluid range of the special ultrasonic device comprises at least one part of the micro-channel; the interface is arranged at the position of the second space, is electrically connected with the special ultrasonic device through a circuit line on the circuit substrate, and is used for connecting a driving signal provided by an external driving device; and the front shell is assembled on the rear shell in a mode of shielding the interface. According to the application, the acoustic streaming type liquid flow modules with different functions can be conveniently replaced to the acoustic streaming type micro-fluidic system.

Description

Technical Field

[0001] The present application relates to the fields of micro-electro-mechanical systems (MEMS), analytical instruments, and acoustofluidics, and in particular to an acoustofluidic liquid flow module and an acoustofluidic-based microfluidic system. Background Art

[0002] An acoustofluidic microfluidic system refers to a system that uses ultra-sonic devices to act on the liquid in a microfluidic chip to achieve corresponding functions, such as the capture, aggregation, release, sorting, and mixing of particles in the liquid within the microchannel of the microfluidic control. The liquid flow chips used in current acoustofluidic systems are glued and permanently fixed to the base. When the chip becomes clogged or its smoothness decreases after long-term use and needs to be replaced, the chip cannot be replaced alone. The entire base connected to the chip needs to be replaced, which increases costs and wastes expensive consumables. Secondly, a chip cannot be compatible with multiple functions and has a limited range of uses. In addition, the liquid flow chip must undergo a complex cleaning procedure before use, which is time-consuming and has the risk of contaminating the sample.

[0003] How to provide a module that can quickly replace ultra-ultrasonic devices and microfluidic chips to achieve corresponding multiple functions is the technical problem to be solved by this application. Summary of the Invention

[0004] In view of the above problems in the prior art, the present application provides an acoustic fluidic flow module and an acoustic fluidic microfluidic system based on the acoustic fluidic method, which can be connected to an external driving device, a liquid supply device, etc. through an interface, and different acoustic fluidic flow modules can be selected according to different functions for rapid replacement to achieve multiple functions.

[0005] In a first aspect, the present application provides an acoustic fluidic flow module, comprising:

[0006] The rear housing has a first space for accommodating the circuit substrate and a second space for accommodating the interface;

[0007] The circuit substrate is mounted in the first space on the front of the rear housing; a supersonic device is provided on the side of the circuit substrate facing away from the rear housing;

[0008] A microfluidic chip is closely attached to a surface of the ultra-sonic device facing away from the rear housing, wherein the microfluidic chip has a microchannel therein, and a liquid inlet and a liquid outlet communicating with the microchannel are disposed on a surface or an adjacent surface of the microfluidic chip facing away from the rear housing; the acoustic fluid range of the ultra-sonic device includes at least a portion of the microchannel;

[0009] The interface is provided in the second space on the front side of the rear housing, the interface is electrically connected to the circuit substrate, and is electrically connected to the ultra-ultrasonic device through the circuit line on the circuit substrate, and the interface is used to connect to the driving signal provided by the external device that drives the ultra-ultrasonic device;

[0010] The front housing is assembled onto the rear housing in a manner of shielding the interface.

[0011] As a possible implementation of the first aspect, a surface of the microfluidic chip facing away from the rear housing is made of a transparent material so that the microchannel can be observed.

[0012] As a possible implementation of the first aspect, an edge of the first space of the rear housing has a flange, and the microfluidic chip is engaged with the flange.

[0013] As a possible implementation of the first aspect, ends of the rear shell and the front shell corresponding to the interface have outwardly extending portions, and the extending portions form a base.

[0014] As a possible implementation of the first aspect, the rear shell and the front shell have corresponding positioning grooves and positioning columns for positioning and engaging the rear shell and the front shell during assembly.

[0015] As a possible implementation of the first aspect, the rear shell and the front shell are provided with corresponding magnet slots and patch irons, and magnets are installed in the magnet slots and magnetically engage with the corresponding patch irons.

[0016] As a possible implementation of the first aspect, the ultra-sonic device includes one or more ultra-sonic devices, and the interface includes one or more groups of pins corresponding to the one or more ultra-sonic devices.

[0017] As a possible implementation of the first aspect, the shape of the microchannel of the microfluidic chip, the number of liquid inlets and the positions of the liquid outlets connected to the microchannel, the number of liquid outlets and the positions of the liquid outlets connected to the microchannel, the position of the super-ultrasonic device relative to the microchannel, and / or the shape of the super-ultrasonic device match the function to be achieved by the acoustic fluid flow module.

[0018] The second aspect of the present application provides a microfluidic system based on acoustic fluidics, comprising: an acoustic fluidic liquid flow module as described above; a driving device for driving a super-ultrasonic device, which provides an interface for providing a driving signal through a signal line, and is used for detachably plugging into the interface of the acoustic fluidic liquid flow module; a liquid supply device, connected to the liquid flow inlet of the acoustic fluidic liquid flow module through a pipeline; and a liquid collection device, connected to the liquid flow outlet of the acoustic fluidic liquid flow module through a pipeline.

[0019] As a possible implementation of the second aspect, the present invention further includes: an optical signal acquisition device, wherein the optical signal acquisition end of the optical signal acquisition device can be adjusted to face the transparent material side of the microfluidic chip of the acoustic fluid flow module facing away from the rear shell.

[0020] As described above, the acoustofluidic flow module provided by this application can be quickly assembled with the drive device, liquid supply device, and other components of an acoustofluidic microfluidic system. Different acoustofluidic flow modules can be quickly replaced based on different functions, achieving multiple functions. Furthermore, the acoustofluidic flow module is compact and space-saving.

[0021] Specifically, the acoustofluidic liquid flow module provided in the present application has the characteristics of easy disassembly, replaceable individual components, expandability (multiple acoustofluidic liquid flow modules are used in combination), and plug-and-play (plugged into the interface of the liquid supply device, liquid collection device, and drive device of the acoustofluidic microfluidic system). Acoustofluidic liquid flow modules with different functions can be selected according to needs, and can be quickly replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1a It is an image and schematic diagram of the jet phenomenon and secondary flow phenomenon generated by the ultra-ultrasonic device provided in the embodiment of the present application;

[0023] Figure 1b Schematic diagram of an acoustic fluid tunnel generated by a super-ultrasonic device provided in an embodiment of the present application;

[0024] Figure 1c Schematic diagram of the acoustic beam flow generated by the ultra-ultrasonic device provided in an embodiment of the present application;

[0025] Figure 2 Schematic diagram of a driving device of an ultra-ultrasonic device provided in an embodiment of the present application;

[0026] Figure 3 Schematic diagram of an explosion of an acoustic fluid flow module provided in an embodiment of the present application;

[0027] Figure 4 Schematic diagram of the assembly state of the acoustic fluid flow module provided in an embodiment of the present application.

[0028] It should be understood that the sizes and shapes of the blocks in the above structural diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the blocks presented in the structural diagrams are merely schematic representations of the structural relationships between the blocks and do not limit the physical connection methods of the embodiments of the present invention. DETAILED DESCRIPTION

[0029] The technical solution provided by this application is further described below with reference to the accompanying drawings and examples. It should be understood that the system structure and business scenarios provided in the examples of this application are mainly for illustrating possible implementation methods of the technical solution of this application and should not be interpreted as the sole limitation of the technical solution of this application. It is known to those skilled in the art that with the evolution of the system structure and the emergence of new business scenarios, the technical solution provided by this application is also applicable to similar technical problems.

[0030] It should be understood that the acoustofluidic fluid flow solutions provided in the embodiments of this application include acoustofluidic fluid flow modules and acoustofluidic-based microfluidic system, as well as their applications. Because these technical solutions solve the same or similar problems, some repetitions may not be repeated in the following descriptions of the specific embodiments. However, these specific embodiments should be considered as cross-references and can be combined with each other.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. In the event of any inconsistency, the meanings described in this specification or the meanings derived from the contents recorded in this specification shall prevail. In addition, the terms used herein are only for the purpose of describing the embodiments of this application and are not intended to limit this application. In order to accurately describe the technical content in this application and to accurately understand the present invention, the following explanations or definitions are given for the terms used in this specification before describing the specific embodiments:

[0032] 1) Ultrasonic device: A high-frequency resonator can be a device that generates mechanical vibrations by applying voltage based on the piezoelectric effect. In this application, a piezoelectric resonator that generates ultrasonic waves of not less than 0.5 gigahertz (GHz) during operation is used. Preferably, a piezoelectric resonator that generates ultrasonic waves of not less than 1 GHz and not more than 30 GHz during operation is used. Such piezoelectric resonators can be, for example, surface acoustic wave (SAW) devices, bulk acoustic wave (BAW) devices, etc. For example, when it is a BAW, it can be a film bulk acoustic wave resonator (FBAR), a solid-state mounted resonator (SMR), or a Lamb wave resonator (LWR). For the sake of convenience, the piezoelectric resonator that can generate ultrasonic waves of not less than 0.5 GHz will be referred to as an ultrasonic device in the following.

[0033] 2) Several acoustic streaming phenomena caused by ultra-ultrasonic devices:

[0034] The jet phenomenon occurs when the sound waves of an ultra-sonic device act on a liquid. The regional vibrations generated by the working interface of the ultra-sonic device can form traveling waves in the liquid, exerting a continuous thrust on the liquid in the surrounding area, causing at least a portion of the liquid to move linearly along the direction of sound wave propagation. This linear motion is called a jet phenomenon.

[0035] Secondary flow phenomena, including eddies and heat recirculation, are another type of phenomenon generated when ultra-sonic devices act on liquids. These include eddies (or micro-vortices) caused by the local circulation of the liquid driven by the jet, and heat recirculation caused by the heat generated by the ultra-sonic device. In particular, eddies are generated when the jet direction is restricted by side walls (for example, when the jet is generated in a cavity or microchannel and is restricted by the inner walls of the cavity or microchannel).

[0036] Jet phenomena and secondary flow phenomena can be used to promote the mixing of liquids and capture particles in liquids (capture is mainly based on vortex). The jet phenomena and secondary flow phenomena can be found in Figure 1a The images and schematics are shown. Figure 1a Schematic diagram of particle capture using vortex flow is shown in FIG.

[0037] Acoustic fluid tunneling: Acoustic fluid tunneling is a unique type of micro-vortex formed by the ultra-ultrasonic device acting on the liquid. The phenomenon is that a number of tiny fluid vortices (or micro-vortices) can be generated in the fluid along the edge of the ultra-ultrasonic device chip. These fluid vortices can capture particles in the liquid. Combined with the position distribution of these fluid vortices, the particles in the liquid are distributed at the edge of the ultra-ultrasonic device chip. Since the particles in the fluid will flow through these fluid vortices distributed at the edge of the chip, the flow path of the particles formed by these fluid vortices is called an acoustic fluid tunnel in this application. See Figure 1b Schematic diagram shown.

[0038] Acoustic beam flow: In this application, acoustic beam flow is a unique type of jet phenomenon. Its characteristics are that the fluid moves at high speed along the direction of sound wave transmission and the jet is in the shape of a thin column within its travel. Before the acoustic beam flow is significantly attenuated, it is basically in a laminar state with the surrounding liquid and has a low degree of mixing with the surrounding liquid. Figure 1c Schematic diagram shown.

[0039] For an introduction to the jet, secondary flow and acoustic beam effects, please refer to the Chinese patent application with patent number CN202410832207.9.

[0040] 3) Driving device of ultra-ultrasonic device: such as Figure 2An embodiment is shown, comprising a control unit and a drive unit. The drive unit includes a signal generator and a power amplifier. The signal generator is used to generate a high-frequency signal. The frequency of the original high-frequency signal generated by the signal generator is the same as or similar to the operating frequency (or natural frequency) of the ultra-ultrasonic device serving as the load. The power amplifier is used to amplify the output signal to drive the ultra-ultrasonic device. The control unit is used to control the activation and deactivation of the drive unit and to generate an output signal with the desired power and signal shape (square wave, triangle wave, continuous wave, intermittent wave, etc.).

[0041] The acoustofluidic liquid flow module provided by this application includes a super-ultrasonic device portion and a microfluidic portion. It can be quickly assembled with the drive device, liquid supply device, etc. of the acoustofluidic microfluidic system through interfaces, liquid inlets, and liquid outlets. This allows for rapid replacement of different acoustofluidic liquid flow modules based on different functions, thus achieving multiple functions. This application is described in detail below in conjunction with the various figures and embodiments.

[0042] The first embodiment of the present application provides an acoustic flow module, which can be seen in FIG. Figure 3 and Figure 4 The schematic diagram shown in FIG. Figure 3 Schematic diagram of an explosion of an acoustic fluid flow module provided in one embodiment of the present application. Figure 4 is a schematic diagram of the combined state of the acoustic flow module, where Figure 4 Figures a and b are front and back views, respectively. The acoustic flow module includes:

[0043] The rear housing 1 has a first space for accommodating the circuit substrate 2 and a second space for accommodating the interface 3;

[0044] The circuit substrate 2 is mounted in the first space on the front of the rear housing 1; a supersonic device 4 is provided on the side of the circuit substrate 2 facing away from the rear housing 1;

[0045] A microfluidic chip 5 is closely attached to the side of the ultra-sonic device 4 facing away from the rear housing 1. The microfluidic chip 5 has a microchannel therein. A liquid inlet 51 and a liquid outlet 52 communicating with the microchannel are provided on the side or adjacent side of the microfluidic chip 5 facing away from the rear housing 1. The acoustic fluid range of the ultra-sonic device 4 includes at least a portion of the microchannel.

[0046] The interface 3 is provided in the second space on the front side of the rear housing 1. The interface 3 is electrically connected to the corresponding electrode 21 on the circuit substrate 2 and is electrically connected to the ultra-sonic device 4 through the circuit line on the circuit substrate 2. The interface 3 is used to connect to the driving signal provided by the external device that drives the ultra-sonic device 4.

[0047] The front housing 6 is assembled onto the rear housing 1 in a manner of shielding the interface 3 .

[0048] In some embodiments, the surface of the microfluidic chip 5 facing away from the rear housing 1 is made of transparent material so that the microchannel can be observed.

[0049] In some embodiments, the edge of the first space of the rear housing 1 has a flange, and the microfluidic chip 5 is snapped into the flange.

[0050] In some embodiments, the ends of the rear housing 1 and the front housing 6 corresponding to the interface 3 have an outwardly extending portion, and the extending portion forms a base 7 .

[0051] In some embodiments, the rear housing 1 and the front housing 6 have corresponding positioning grooves and positioning columns for positioning and engaging the rear housing 1 and the front housing 6 during assembly.

[0052] In some embodiments, the rear shell 1 and the front shell 6 have corresponding magnet slots and patch irons, and magnets are installed in the magnet slots to magnetically engage with the corresponding patch irons.

[0053] In some embodiments, the rear housing 1 and the front housing 6 have corresponding screw holes so that the two can be assembled together through the screw holes.

[0054] In some embodiments, the ultra-ultrasonic device 4 includes one or more ultra-ultrasonic devices, and the interface 3 includes one or more groups of pins corresponding to the one or more ultra-ultrasonic devices 4 .

[0055] In some embodiments, the microfluidic chip 5 is used to constrain the flux and flow rate of the cell sample, directing its flow through the bulk acoustic wave resonator. For example, the shape of the microchannels of the microfluidic chip 5, the number and location of the liquid inlets 51 connecting to the microchannels, the number and location of the liquid outlets 52 connecting to the microchannels, the position of the ultra-sonic device 4 relative to the microchannels, and / or the shape of the ultra-sonic device 4 are adapted to the desired functionality of the acoustofluidic flow module. In some embodiments, the microfluidic chip 5 is a rigid microfluidic chip 5.

[0056] In some embodiments, according to the function to be achieved by manipulating the liquid, the microchannel of the microfluidic chip 5 is designed to have a required shape, a required number of liquid inlets 51, and a required number of liquid outlets 52, and the liquid inlets 51 and liquid outlets 52 are located at required positions.

[0057] In some embodiments, according to the functions to be achieved, the ultra-ultrasonic devices 4 on the resonator are designed to have a desired shape, a desired number, and are located at a desired position in the microchannel.

[0058] In some embodiments, the desired function includes queuing particles in a liquid within a microfluidic channel. The microfluidic channel can be a linear channel having a single liquid inlet 51 and a single liquid outlet 52. The ultra-sonic device 4 can be leaf-shaped (or spindle-shaped), with at least the tip of the leaf near the downstream side positioned below the microfluidic channel. The fluid tunnel created by the leaf-shaped ultra-sonic device 4 captures particles within the microfluidic channel and sequentially releases them through the tip near the downstream side, achieving queued release of the particles.

[0059] In some embodiments, the functions to be achieved include capturing and releasing particles in liquid within a microfluidic channel. The microfluidic channel can be a linear channel with a single liquid inlet 51 and a single liquid outlet 52. The ultra-sonic device 4 can be pentagonal in shape and located below the microfluidic channel. Particles within the microfluidic channel are captured based on micro-vortices generated by the ultra-sonic device 4, and the captured particles are released when the ultra-sonic device 4 is deactivated.

[0060] In some embodiments, the function to be achieved includes screening particles in the liquid within the microchannel. The microchannel may adopt a flow channel that bifurcates downstream, having a liquid inlet 51 and two liquid outlets 52 corresponding to two bifurcations on the downstream side. The ultra-sonic device 4 may adopt a leaf shape (or spindle shape), with at least the tip of the leaf shape near the downstream side located within a bifurcated flow channel or facing a bifurcated flow channel. The fluid tunnel generated by the leaf-shaped ultra-sonic device 4 is used to capture particles within the microchannel. Based on the identification of target particles by an external optical signal acquisition device and a host computer, the particles are released into the target flow channel through the tip near the downstream side when they are identified as target particles. When the ultra-sonic device 4 is identified as a non-target particle, the non-target particles are directly discharged to another flow channel downstream.

[0061] In some embodiments, when the function to be achieved includes mixing two liquids, the microfluidic channel can be a bifurcated channel at the upstream, having two liquid inlets 51 and one liquid outlet 52. As shown, the ultra-sonic device 4 is located below the microfluidic channel. The mixing of the two liquids is achieved based on the micro-vortices generated by the ultra-sonic device 4.

[0062] In some embodiments, the ultra-sonic wave device 4 is a bulk acoustic wave device operating in a thickness stretching vibration mode. The device is made by growing a thin film of piezoelectric material in a vertical direction, and excites vibration by coupling a vertical electric field with the piezoelectric coefficient d33. In some embodiments, the bulk acoustic wave device includes, arranged in ascending order, an acoustic wave reflecting layer (e.g., a Bragg reflecting layer), a bottom electrode layer, a piezoelectric layer, and a top electrode layer. The overlapping region of the bottom electrode layer, piezoelectric layer, top electrode layer, and acoustic wave reflecting layer constitutes the ultra-sonic wave generating region. The thickness of the piezoelectric layer can range from approximately 1 nm to 2 μm.

[0063] The super-ultrasonic device 4 can be a polygon, in particular a polygon with an odd number of sides, for example, a regular pentagon, or a pentagon with unequal sides. In other embodiments, it can be a polygon of any size in the shape of a leaf, a triangle, an ellipse, a rhombus, a semicircle, or any combination of shapes. The area of ​​the super-ultrasonic device 4 (here refers to the radial dimension, non-thickness dimension, that is, the device interface dimension) is about 10-1000000 μm2, preferably about 100-40000 μm2, and more preferably 1000-10000 μm2. The size of the super-ultrasonic device 4 is negatively correlated with the achievable resonant frequency, so reducing the size can increase the resonant frequency. In other embodiments, the shape formed by changing the shape of the device, such as the number of sides of the polygon, the angle between two adjacent sides, and the length of each side, can also be used to change the resonant frequency of the super-ultrasonic device 4.

[0064] The second embodiment of the present application provides a microfluidic system based on acoustic fluidics, comprising: any of the above-mentioned acoustic fluidics liquid flow modules; a driving device for driving the ultra-ultrasonic device 4, which provides an interface for driving signals through a signal line, for realizing a detachable plug-in interface 3 of the acoustic fluidics liquid flow module; a liquid supply device, connected to the liquid flow inlet 51 of the acoustic fluidics liquid flow module through a pipeline; and a liquid collection device, connected to the liquid flow outlet 52 of the acoustic fluidics liquid flow module through a pipeline.

[0065] In some embodiments, the acoustofluidic microfluidic system further includes an optical signal acquisition device, the optical signal acquisition end of which can be adjusted to face the transparent material side of the microfluidic chip 5 of the acoustofluidic liquid flow module facing away from the rear housing 1 .

[0066] In some embodiments, the optical signal collection device has an optical signal collection end mounted on a three-dimensional translation stage, capable of being moved to a position where the microfluidic chip 5 of the acoustic fluidic module faces away from the transparent material of the rear housing 1 to collect optical signals. The optical signal collection device can collect information such as images, fluorescence, or scattered light.

[0067] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods are not limited to the above embodiments, and can also be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0068] The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0069] In addition, the words "first, second, third, etc." or module A, module B, module C and other similar terms in the specification and claims are only used to distinguish similar objects and do not represent a specific ordering of the objects. It can be understood that the specific order or sequence can be interchanged where permitted so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0070] In the above description, the numbers representing the steps, such as S10, S20, etc., do not necessarily mean that the steps must be executed in this manner. If permitted, the order of the steps can be interchanged or they can be executed simultaneously.

[0071] The term "comprising" as used in the specification and claims should not be construed as limiting to what is listed thereafter; it does not exclude other elements or steps. Thus, it should be interpreted as specifying the presence of the features, integers, steps, or components mentioned, but not excluding the presence or addition of one or more other features, integers, steps, or components, or groups thereof. Thus, the expression "a device comprising means A and B" should not be limited to a device consisting solely of components A and B.

[0072] References in this specification to "one embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Therefore, the phrases "in one embodiment" or "in an embodiment" appearing throughout this specification do not necessarily refer to the same embodiment, but may refer to the same embodiment. Furthermore, in one or more embodiments, the particular features, structures, or characteristics can be combined in any suitable manner, as would be apparent to one of ordinary skill in the art from this disclosure.

[0073] Note that the above are only preferred embodiments of the present application and the technical principles employed. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments and may include many other equivalent embodiments without departing from the scope of protection of the present application, all of which fall within the scope of protection of the present application.

Claims

1. An acoustic flow module, characterized in that: include: The rear housing has a first space for accommodating the circuit substrate and a second space for accommodating the interface; The circuit substrate is mounted in the first space on the front of the rear housing; a supersonic device is provided on the side of the circuit substrate facing away from the rear housing; A microfluidic chip is closely attached to a surface of the ultra-sonic device facing away from the rear housing, wherein the microfluidic chip has a microchannel therein, and a liquid inlet and a liquid outlet communicating with the microchannel are disposed on a surface or an adjacent surface of the microfluidic chip facing away from the rear housing; the acoustic fluid range of the ultra-sonic device includes at least a portion of the microchannel; The interface is provided in the second space on the front side of the rear housing, the interface is electrically connected to the circuit substrate, and is electrically connected to the ultra-ultrasonic device through the circuit line on the circuit substrate, and the interface is used to connect to the driving signal provided by the external device that drives the ultra-ultrasonic device; The front housing is assembled onto the rear housing in a manner of shielding the interface.

2. The module according to claim 1, characterized in that The side of the microfluidic chip facing away from the rear housing is made of transparent material so that the microchannel can be observed.

3. The module according to claim 1, characterized in that The first space edge of the rear housing has a flange, and the microfluidic chip is engaged with the flange.

4. The module according to claim 1, characterized in that The ends of the rear shell and the front shell corresponding to the interface have an extension portion facing outward, and the extension portion forms a base.

5. The module according to claim 1, characterized in that The rear shell and the front shell are provided with corresponding positioning grooves and positioning columns for positioning and locking during assembly of the rear shell and the front shell.

6. The module according to claim 1, characterized in that The rear shell and the front shell are provided with corresponding magnet slots and patch irons. Magnets are installed in the magnet slots and are magnetically engaged with the corresponding patch irons.

7. The module according to claim 1, characterized in that The ultra-ultrasonic device includes one or more, and the interface includes one or more groups of pins corresponding to the one or more ultra-ultrasonic devices.

8. The module according to claim 7, characterized in that The shape of the microchannel of the microfluidic chip, the number of liquid inlets and the positions of the liquid outlets connected to the microchannel, the number of liquid outlets and the positions of the liquid outlets connected to the microchannel, the position of the super-ultrasonic device relative to the microchannel, and / or the shape of the super-ultrasonic device match the function to be achieved by the acoustic fluid flow module.

9. A microfluidic system based on acoustic flow, characterized in that: include: The acoustic fluid flow module according to any one of claims 1 to 8; A driving device for driving the ultra-ultrasonic device, which provides an interface for driving signals through a signal line and is used for detachably plugging into the interface of the acoustic flow module; a liquid supply device connected to the liquid flow inlet of the acoustic flow module through a pipeline; The liquid collecting device is connected to the liquid flow outlet of the acoustic flow module through a pipeline.

10. The microfluidic system according to claim 9, characterized in that: Also includes: The optical signal collection device has an optical signal collection end that can be adjusted to face the transparent material side of the microfluidic chip of the acoustic fluid flow module that faces away from the rear housing.

Images