Wafer box jig convenient to disassemble and assemble

Abstract

The utility model relates to a wafer box jig convenient to disassemble and assemble. The wafer box jig comprises a supporting platform; the wafer box is fixedly arranged on the supporting platform, and a wafer is loaded in the wafer box; a first pushing rod, a second pushing rod, a slid block, a sliding block, a first slid rod, a second slid rod, a first fixing supporting column, a second fixing supporting column, a third fixing supporting column and a fourth fixing supporting column are arranged on the supporting platform, and the first fixing supporting column, the second fixing supporting column, the third fixing supporting column and the fourth fixing supporting column are all fixedly installed on the supporting platform. All the supporting platforms are located below the supporting platform; the two ends of the first slid rod are fixedly connected to the first fixing supporting column, the two ends of the third fixing supporting column are fixedly connected to the second fixing supporting column, the two ends of the second slid rod are fixedly connected to the fourth fixing supporting column, and the first slid rod is parallel to the second slid rod.

Description

Technical Field

[0001] The utility model relates to the field of jigs, and in particular to a wafer box jig which is convenient for assembly and disassembly. Background Art

[0002] Wafer boxes mainly play the role of placing and transporting wafers in semiconductor production. In order to simplify transportation and minimize the risk of contamination, chip manufacturers use wafer boxes to move and store wafers.

[0003] In one existing technology, a wafer cassette jig consists solely of a wafer cassette with slots on its inner wall. Wafers are loaded into the cassette by placing the edges of the cassette into the slots. However, transporting wafer cassettes is typically done manually, which increases the risk of wafer damage and contamination, such as a cassette slipping and falling to the ground due to worker carelessness.

[0004] In another prior art, a wafer cassette fixture includes not only a wafer cassette but also a pushing mechanism that pushes the wafers inside the cassette to a preset position, thereby enabling wafer transfer. However, in this prior art, the wafer cassette is typically fastened to the support platform with fasteners such as bolts, making assembly and disassembly extremely difficult. Summary of the Invention

[0005] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a wafer box fixture that is easy to assemble and disassemble.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solution: a wafer box fixture that is easy to assemble and disassemble, comprising:

[0007] Support platform;

[0008] a wafer box, the wafer box being fixedly mounted on the supporting platform and containing wafers;

[0009] The first pushing rod, the second pushing rod, the sliding block, the sliding block, the first sliding rod, the second sliding rod, the first fixed support, the second fixed support, the third fixed support, and the fourth fixed support are all fixedly mounted on the support platform and are all located below the support platform; the two ends of the first sliding rod are respectively fixedly connected to the first fixed support and the third fixed support, the two ends of the second sliding rod are respectively fixedly connected to the second fixed support and the fourth fixed support, and the first sliding rod and the second sliding rod are parallel to each other; the sliding block is slidably connected to the first sliding rod and the second sliding rod, so that the sliding block slides on the first sliding rod and the second sliding rod; the sliding block is fixedly clamped between the first fixed support and the second fixed support, so that the sliding block is fixed relative to the first fixed support and the second fixed support; the second pushing rod is slidably connected to the sliding block, so that the second pushing rod slides relative to the sliding block; and one end of the second pushing rod is fixedly connected to the sliding block, and the other end of the second pushing rod is fixedly connected to the first pushing rod;

[0010] The sliding block slides on the first sliding rod and the sliding rod, thereby driving the second pushing rod forward or backward, and the second pushing rod synchronously drives the first pushing rod forward or backward, and the first pushing rod pushes the wafers in the wafer box when moving forward or backward.

[0011] Furthermore, the first push rod includes a first section, a second section, and a third section, the two ends of the second section are fixedly connected to the first section and the third section respectively, and the first section is perpendicular to the second section, and the third section is perpendicular to the second section; and the length extension direction of the first section is opposite to the length extension direction of the third section.

[0012] Furthermore, the first push rod also includes a connecting head, which is fixedly connected to the third section. A first plug hole is provided on the connecting head. The first plug hole is adapted to the second push rod, and the other end of the second push rod is inserted into the first plug hole, so that the second push rod and the first push rod are fixedly connected.

[0013] Furthermore, a second plug hole is provided on the sliding block, the second plug hole is adapted to the second push rod, and one end of the second push rod is inserted into the second plug hole, so that the second push rod and the sliding block are fixedly connected.

[0014] Furthermore, it also includes a third pushing rod, which is fixedly connected to the first section of the first pushing rod by screws / bolts, so that the first pushing rod drives the third pushing rod to move forward or backward synchronously, and the third pushing rod pushes the wafer in the wafer box to move.

[0015] Furthermore, the wafer box includes a first wafer box and a second wafer box, and the first wafer box and the second wafer box have the same structure; the first wafer box includes a first side panel, a second side panel, a top panel, and a bottom panel, and there is a preset distance between the first side panel and the second side panel, and the first side panel and the second side panel are provided with card slots, and the card slots on the first side panel and the card slots on the second side panel are parallel and have the same height; the two side edges of the top panel are fixedly connected to the top side edge of the first side panel and the top side edge of the second side panel, and the bottom panel is fixedly connected to the bottom side edge of the first side panel and the bottom side edge of the second side panel; the first side panel, the second side panel, the top panel and the bottom panel together form a wafer through-hole, and the wafer through-hole passes through the first wafer box.

[0016] Furthermore, the first wafer box includes a first docking plate and a second docking plate, the first docking plate is fixedly connected to the second side plate, and the second docking plate is fixedly connected to the first side plate; a preset number of docking columns are provided on the first docking plate, and a preset number of docking holes are provided on the second docking plate, and the docking holes pass through the second docking plate.

[0017] Furthermore, a first mounting bar and a second mounting bar are fixedly provided on the support platform, the first mounting bar is provided with a first mounting notch, and the second mounting bar is provided with a second mounting notch; a convex strip is fixedly installed on the bottom plate of the first wafer box, and the convex strip is located below the bottom plate; when the first wafer box is mounted on the support platform, the convex strip is stuck into the first mounting notch on the first mounting bar and the second mounting notch on the second mounting bar, so that the first wafer box can be detachably fixed to the support platform.

[0018] Furthermore, a first limiting member and a second limiting member are fixedly installed on the support platform, and the first mounting bar and the second mounting bar are located between the first limiting member and the second limiting member; a first limiting groove and a second limiting groove are provided on the first wafer box, and when the first wafer box is installed on the support platform, the first limiting member and the first limiting groove cooperate, and the second limiting member and the second limiting groove cooperate, so that the first wafer box is fixedly mounted on the support platform.

[0019] Furthermore, the first wafer box also includes a handle, and the handle is fixedly mounted on the top plate.

[0020] The beneficial effects of the present application are as follows: the wafer box fixture with easy assembly and disassembly provided by the present application has a simple structure and is easy to assemble. The wafers in the wafer box are pushed to a preset position by the first push rod, thereby reducing the risk of damage and contamination of the wafers; at the same time, the wafer box can be quickly assembled and disassembled, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a structural schematic diagram of a wafer box fixture that is easy to assemble and disassemble provided by the utility model.

[0022] Figure 2 This is another structural schematic diagram of a wafer box fixture that is easy to assemble and disassemble provided by the utility model.

[0023] Figure 3 This is another structural schematic diagram of a wafer box fixture that is easy to assemble and disassemble provided by the utility model.

[0024] Figure 4 The utility model provides a schematic structural diagram of a wafer box of a wafer box fixture that is easy to assemble and disassemble.

[0025] Figure 5 Another structural schematic diagram of a wafer box of a wafer box fixture that is easy to assemble and disassemble provided by the utility model.

[0026] Figure 6 Another structural schematic diagram of a wafer box of a wafer box fixture that is easy to assemble and disassemble provided by the utility model. DETAILED DESCRIPTION

[0027] The present application is further described in detail below by means of specific embodiments in conjunction with the accompanying drawings. Similar elements in different embodiments are numbered with associated similar elements. In the following embodiments, many detailed descriptions are provided to enable the present application to be better understood. However, those skilled in the art will readily appreciate that some of the features may be omitted in different circumstances, or may be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification. This is to avoid the core portion of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0028] In addition, the features, operations, or characteristics described in the specification may be combined in any appropriate manner to form various implementations, and the operational steps involved in each embodiment may be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a particular embodiment and do not imply a required composition and / or sequence.

[0029] The serial numbers assigned to components herein, such as "first," "second," etc., are used solely to distinguish the objects being described and do not convey any sequential or technical meaning. References to "connection" and "coupling" herein, unless otherwise specified, include both direct and indirect connections (couplings).

[0030] Please refer to Figure 1-6 The present application provides a wafer box fixture that is easy to assemble and disassemble (hereinafter referred to as the fixture), which includes:

[0031] Support platform 1;

[0032] a wafer box 3, the wafer box 3 being fixedly mounted on the supporting platform 1 and containing wafers;

[0033] The first pushing rod 2, the second pushing rod 5, the sliding block 6, the sliding block 7, the first sliding rod 91, the second sliding rod 92, the first fixed support 81, the second fixed support 82, the third fixed support 83, and the fourth fixed support 84. The first fixed support 81, the second fixed support 82, the third fixed support 83, and the fourth fixed support 84 are all fixedly mounted on the support platform 1 and are all located below the support platform 1. The two ends of the first sliding rod 91 are respectively fixedly connected to the first fixed support 81 and the third fixed support 83. The two ends of the second sliding rod 92 are respectively fixedly connected to the second fixed support 82 and the fourth fixed support 84. The first sliding rod 91 and the second The sliding rods 92 are parallel to each other; the sliding block 7 is slidably connected to the first sliding rod 91 and the second sliding rod 92, so that the sliding block 7 slides on the first sliding rod 91 and the second sliding rod 92; the sliding block 6 is fixedly clamped between the first fixed support 81 and the second fixed support 82, so that the sliding block 6 is fixed relative to the first fixed support 81 and the second fixed support 82; the second pushing rod 5 is slidably connected to the sliding block 6, so that the second pushing rod 5 slides relative to the sliding block 6; and one end of the second pushing rod 5 is fixedly connected to the sliding block 7, and the other end of the second pushing rod 5 is fixedly connected to the first pushing rod 2;

[0034] The sliding block 7 slides on the first sliding rod 91 and the sliding rod 92, thereby driving the second pushing rod 5 forward or backward, and the second pushing rod 5 simultaneously drives the first pushing rod 2 forward or backward, and the first pushing rod 2 pushes the wafer in the wafer box 3 when moving forward or backward.

[0035] In one embodiment of the present application, the first push rod 2 includes a first section 21, a second section 22, and a third section 23. The two ends of the second section 22 are fixedly connected to the first section 21 and the third section 23, respectively. The first section 21 is perpendicular to the second section 22, and the third section 23 is perpendicular to the second section 22; and the length extension direction of the first section 21 is opposite to the length extension direction of the third section 23.

[0036] In one embodiment of the present application, the first push rod 2 also includes a connecting head 24, which is fixedly connected to the third section 23. A first plug hole 240 is provided on the connecting head 24. The first plug hole 240 is adapted to the second push rod 5, and the other end of the second push rod 5 is inserted into the first plug hole 240, so that the second push rod 5 and the first push rod 2 are fixedly connected.

[0037] In one embodiment of the present application, a second plug-in hole (not shown) is provided on the sliding block 7, and the second plug-in hole is adapted to the second push rod 5, and one end of the second push rod 5 is inserted into the second plug-in hole, so that the second push rod 5 and the sliding block 7 are fixedly connected.

[0038] In one embodiment of the present application, the fixture also includes a third push rod 4, and the third push rod 4 and the first section 21 of the first push rod 2 are fixed together by screws / bolts, so that the first push rod 2 drives the third push rod 4 to move forward or backward synchronously, and the third push rod 4 pushes the wafer in the wafer box 3 to move.

[0039] In one embodiment of the present application, the wafer box 3 includes a first wafer box 31 and a second wafer box 32. The first wafer box 31 and the second wafer box 32 have the same structure. The first wafer box 31 includes a first side panel 311, a second side panel 312, a top panel 313, and a bottom panel 314. There is a preset distance between the first side panel 311 and the second side panel 312, and a card slot 315 is provided on the first side panel 311 and the second side panel 312. The card slot 315 on the first side panel 311 and the card slot 315 on the second side panel 312 are connected to each other. The card slots 315 on the second side panel 312 are parallel and have the same height; the two side edges of the top panel 313 are fixedly connected to the top side edges of the first side panel 311 and the top side edges of the second side panel 312, and the bottom panel 314 is fixedly connected to the bottom side edges of the first side panel 311 and the bottom side edges of the second side panel 312; the first side panel 311, the second side panel 312, the top panel 313 and the bottom panel 314 together form a wafer through-hole 310, and the wafer through-hole 310 passes through the first wafer box 31.

[0040] In one embodiment of the present application, the first wafer cassette 31 includes a first docking plate 317 and a second docking plate 318. The first docking plate 317 is fixedly connected to the second side plate 312, and the second docking plate 318 is fixedly connected to the first side plate 311. The first docking plate 317 is provided with a preset number of docking posts 319, and the second docking plate 318 is provided with a preset number of docking holes 3110, each of which extends through the second docking plate 318. Similarly, the second wafer cassette 32 is also provided with docking posts 319 and docking holes 3110. The docking posts 319 on the first wafer cassette 31 are inserted into the docking holes on the second wafer cassette 32, and the docking posts on the second wafer cassette 32 are inserted into the docking holes on the first wafer cassette 31, thereby securing the first and second wafer cassettes 31 and 32 to each other.

[0041] In one embodiment of the present application, a first mounting bar 11 and a second mounting bar 12 are fixedly provided on the support platform 1, the first mounting bar 11 is provided with a first mounting notch 110, and the second mounting bar 12 is provided with a second mounting notch 120; a convex strip 3111 is fixedly installed on the bottom plate 314 of the first wafer box 31, and the convex strip 3111 is located below the bottom plate 314; when the first wafer box 31 is installed on the support platform 1, the boss 3111 is stuck into the first mounting notch 110 on the first mounting bar 11 and the second mounting notch 120 on the second mounting bar 12, so that the first wafer box 31 can be detachably fixed to the support platform 1.

[0042] In one embodiment of the present application, a first limiting member 13 and a second limiting member 14 are fixedly installed on the support platform 1, and the first mounting bar 11 and the second mounting bar 12 are located between the first limiting member 13 and the second limiting member 14; a first limiting groove 320 and a second limiting groove 321 are provided on the first wafer box 31. When the first wafer box 31 is installed on the support platform, the first limiting member 13 and the first limiting groove 320 cooperate, and the second limiting member 14 and the second limiting groove 321 cooperate, so that the first wafer box 31 is fixedly installed on the support platform 1.

[0043] In one embodiment of the present application, the first wafer box 31 further includes a handle 316 , and the handle 316 is fixedly mounted on the top plate 313 .

[0044] The wafer box fixture with easy assembly and disassembly provided in the present application has a simple structure and is easy to assemble. The wafers in the wafer box are pushed to a preset position by a first push rod, thereby reducing the risk of damage and contamination of the wafers. At the same time, the wafer box can be quickly assembled and disassembled, thereby improving work efficiency.

[0045] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those familiar with the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications based on the spirit of the present invention are intended to be included in the scope of protection of the present invention.

Claims

1. A wafer box fixture that is easy to assemble and disassemble, characterized in that: include: Support platform; a wafer box, the wafer box being fixedly mounted on the supporting platform and containing wafers; The first pushing rod, the second pushing rod, the sliding block, the sliding block, the first sliding rod, the second sliding rod, the first fixed support, the second fixed support, the third fixed support, and the fourth fixed support are all fixedly mounted on the support platform and are all located below the support platform; both ends of the first sliding rod are respectively fixedly connected to the first fixed support and the third fixed support, and both ends of the second sliding rod are respectively fixedly connected to the second fixed support and the fourth fixed support, and the first sliding rod and the second sliding rod are parallel to each other; the sliding block is slidably connected to the first sliding rod and the second sliding rod, so that the sliding block slides on the first sliding rod and the second sliding rod; The sliding block is fixedly clamped between the first fixed support and the second fixed support, so that the sliding block is fixed relative to the first fixed support and the second fixed support; the second pushing rod is slidably connected to the sliding block, so that the second pushing rod slides relative to the sliding block; and one end of the second pushing rod is fixedly connected to the sliding block, and the other end of the second pushing rod is fixedly connected to the first pushing rod; The sliding block slides on the first sliding rod and the sliding rod, thereby driving the second pushing rod forward or backward, and the second pushing rod synchronously drives the first pushing rod forward or backward, and the first pushing rod pushes the wafers in the wafer box when moving forward or backward.

2. The wafer box fixture with easy assembly and disassembly according to claim 1, characterized in that: The first push rod includes a first section, a second section, and a third section. The two ends of the second section are fixedly connected to the first section and the third section respectively, and the first section is perpendicular to the second section, and the third section is perpendicular to the second section; and the length extension direction of the first section is opposite to the length extension direction of the third section.

3. The wafer box fixture with easy assembly and disassembly according to claim 2, characterized in that: The first push rod also includes a connecting head, which is fixedly connected to the third section. A first plug hole is provided on the connecting head. The first plug hole is adapted to the second push rod, and the other end of the second push rod is inserted into the first plug hole, so that the second push rod and the first push rod are fixedly connected.

4. The wafer box fixture with easy assembly and disassembly according to claim 3, characterized in that: The sliding block is provided with a second plugging hole, the second plugging hole is adapted to the second push rod, and one end of the second push rod is inserted into the second plugging hole, so that the second push rod and the sliding block are fixedly connected.

5. The wafer box fixture with easy assembly and disassembly according to claim 4, characterized in that: It also includes a third pushing rod, which is fixedly connected to the first section of the first pushing rod by screws / bolts, so that the first pushing rod drives the third pushing rod to move forward or backward synchronously, and the third pushing rod pushes the wafer in the wafer box to move.

6. The wafer box fixture with easy assembly and disassembly according to claim 5, characterized in that: The wafer box includes a first wafer box and a second wafer box, and the first wafer box and the second wafer box have the same structure; the first wafer box includes a first side panel, a second side panel, a top panel, and a bottom panel, and there is a preset distance between the first side panel and the second side panel, and the first side panel and the second side panel are provided with card slots, and the card slots on the first side panel and the card slots on the second side panel are parallel and have the same height; the two side edges of the top panel are fixedly connected to the top side edge of the first side panel and the top side edge of the second side panel, and the bottom panel is fixedly connected to the bottom side edge of the first side panel and the bottom side edge of the second side panel; the first side panel, the second side panel, the top panel and the bottom panel together form a wafer through-hole, and the wafer through-hole passes through the first wafer box.

7. The wafer box fixture with convenient assembly and disassembly according to claim 6, characterized in that: The first wafer box includes a first docking plate and a second docking plate. The first docking plate is fixedly connected to the second side plate, and the second docking plate is fixedly connected to the first side plate. A preset number of docking columns are provided on the first docking plate, and a preset number of docking holes are provided on the second docking plate. The docking holes pass through the second docking plate.

8. The wafer box fixture with easy assembly and disassembly according to claim 7, characterized in that: A first mounting bar and a second mounting bar are also fixedly provided on the support platform, the first mounting bar is provided with a first mounting notch, and the second mounting bar is provided with a second mounting notch; a convex bar is fixedly installed on the bottom plate of the first wafer box, and the convex bar is located below the bottom plate; when the first wafer box is installed on the support platform, the convex bar is stuck into the first mounting notch on the first mounting bar and the second mounting notch on the second mounting bar, so that the first wafer box can be detachably fixed to the support platform.

9. The wafer box fixture with easy assembly and disassembly according to claim 8, characterized in that: A first limiting member and a second limiting member are also fixedly installed on the support platform, and the first mounting bar and the second mounting bar are located between the first limiting member and the second limiting member; a first limiting groove and a second limiting groove are provided on the first wafer box. When the first wafer box is installed on the support platform, the first limiting member cooperates with the first limiting groove, and the second limiting member cooperates with the second limiting groove, so that the first wafer box is fixedly mounted on the support platform.

10. The wafer box fixture with easy assembly and disassembly according to claim 9, characterized in that: The first wafer box further includes a handle, which is fixedly mounted on the top plate.

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