Single-degree-of-freedom linear sliding table and detection equipment

Abstract

The utility model relates to the technical field of sliding tables, in particular to a single-degree-of-freedom linear sliding table and detection equipment. The single-degree-of-freedom linear sliding table comprises a fixed seat, a driving assembly, a transmission assembly and an objective table; the driving assembly and the transmission assembly are both installed on the fixing base, and a damping structure is arranged between the driving assembly and the fixing base. The objective table is in sliding fit with the fixed seat, and a glass plate is arranged between the fixed seat and the objective table; the power output end of the driving assembly is connected with the input end of the transmission assembly, the output end of the transmission assembly is connected with the objective table, and the transmission assembly is used for converting power of the driving assembly into driving force for driving the objective table to move. The detection equipment comprises the single-degree-of-freedom linear sliding table. The single-degree-of-freedom linear sliding table and the detection equipment provided by the utility model are relatively high in overall modality, good in dynamic and static stability and high in motion precision, and meet the requirement of being expanded into a multi-dimensional space high-precision sliding table; in addition, the product is not easy to pollute, and the cost is lower.

Description

Technical Field

[0001] The utility model relates to the technical field of slides, in particular to a single-degree-of-freedom linear slide and detection equipment. Background Art

[0002] In the semiconductor industry, detecting defects or minor deformations on parts (such as wafers) requires motion devices that require high precision, good rigidity, smooth movement, precise positioning, and low start-stop vibration. In practical applications, motion devices mainly include magnetic levitation, air levitation, and mechanical structure platforms, guide rail and lead screw mechanical platforms, and platforms with robotic arm rotation and extension structures. Magnetic levitation platforms suffer from poor magnetic field stability, electromagnetic interference, poor braking system reliability, and complex structures; air levitation platforms require a relatively large space and a stable air source; guide rail and lead screw mechanical platforms drive feed via static friction, which generally has high friction resistance and different static and dynamic friction coefficients between mating materials, resulting in potential creep, and the wear caused by friction affects service life and generates particles; the robotic arm structure, whose cantilever affects precision, and its spatial structure is generally not suitable for installation within a precision system.

[0003] Among various forms of motion, linear slides are widely used in automated motion due to their simple structure, convenient multi-dimensional spatial structure combination, orthogonality control and low algorithm complexity. However, the dynamic and static stability of existing linear slides is poor, resulting in low stage motion accuracy. Utility Model Content

[0004] The purpose of the utility model is to provide a single-degree-of-freedom linear slide and a detection device to alleviate the technical problem of low motion accuracy of the single-degree-of-freedom linear slide in the prior art.

[0005] The single-degree-of-freedom linear slide provided by the utility model comprises a fixing seat, a driving component, a transmission component and an object carrying platform.

[0006] The driving assembly and the transmission assembly are both installed on the fixing seat, and a shock-absorbing structure is provided between the driving assembly and the fixing seat; the loading platform is slidably matched with the fixing seat, and a glass plate is provided between the fixing seat and the loading platform.

[0007] The power output end of the driving component is connected to the input end of the transmission component, and the output end of the transmission component is connected to the loading platform. The transmission component is used to convert the power of the driving component into a driving force for driving the loading platform to move.

[0008] Preferably, as an implementable embodiment, the shock absorbing structure includes a first shock absorbing pad;

[0009] And / or, the driving assembly is fixed to the fixing seat by a screw; the screw is a shoulder screw, and / or, a second shock-absorbing pad is provided between the head of the screw and the driving assembly;

[0010] And / or, the power output shaft of the drive assembly is connected to the input shaft of the transmission assembly via a flexible coupling.

[0011] Preferably, as an implementation method, the fixed seat includes a base and two limit plates, the limit plates are fixed to the base, the worktable slides with the top of the base, and the two limit plates slide with two back-to-back side surfaces of the worktable parallel to the moving direction.

[0012] Preferably, as an implementable embodiment, a spring is provided between the limiting plate and the loading platform.

[0013] Preferably, as an implementable embodiment, the spring piece is mounted on the stage, and the spring piece abuts against the limit plate, and a smooth layer is attached to the surface of the spring piece abutting against the limit plate;

[0014] And / or, a smooth layer is attached to the surface of the limiting plate that cooperates with the loading platform;

[0015] And / or, a smooth layer is attached to the surface of the loading platform that cooperates with the limiting plate;

[0016] And / or, the glass plate is mounted on the fixing seat, and a smooth layer is attached to the surface of the glass plate that is in contact with the stage.

[0017] Preferably, as an implementable embodiment, the single-degree-of-freedom linear slide also includes a detection component and a controller, the detection component is used to detect the position of the worktable, the detection component and the drive component are both communicatively connected to the controller, and the controller is used to control the action of the drive component.

[0018] Preferably, as an implementable embodiment, the detection component includes a baffle and a photoelectric sensor, one of the baffle and the photoelectric sensor is installed on the fixed seat, and the other is installed on the worktable; the baffle can trigger the photoelectric sensor when the worktable moves to a set position, and the photoelectric sensor is communicatively connected to the controller.

[0019] Preferably, as an implementable embodiment, the transmission assembly includes a synchronous belt, a synchronous pulley and a tensioning mechanism, the loading platform is fixedly connected to the synchronous belt, the power output end of the driving assembly is coaxially fixedly connected to the synchronous pulley, and the synchronous pulley and the tensioning mechanism both cooperate with the synchronous belt for tensioning the synchronous belt.

[0020] Preferably, as an implementable embodiment, the tensioning mechanism includes a tensioning seat, a tensioning arm, a first tensioning pulley, a second tensioning pulley, a tensioning rod, a first elastic component and a second elastic component, the tensioning seat is fixed to the fixed seat, the first tensioning pulley is installed on one end of the tensioning arm, the other end of the tensioning arm is fixedly connected to or coaxially rotated with the second tensioning pulley, the second tensioning pulley is installed on the tensioning seat, and the first tensioning pulley and the second tensioning pulley are both cooperated with the synchronous belt.

[0021] The tensioning seat is provided with a first sliding groove, the tensioning arm is provided with a second sliding groove, and the tensioning rod is passed through the first sliding groove and the second sliding groove; the two ends of the first elastic component are respectively connected to the tensioning seat and the tensioning arm, and can apply a positive torque to the tensioning arm; the two ends of the second elastic component are respectively connected to the tensioning seat and the tensioning rod, and can apply a reverse torque to the tensioning arm through the tensioning rod.

[0022] The utility model also provides a detection device, which comprises a detection device and the above-mentioned single-degree-of-freedom linear slide, wherein the detection device is used to detect the product on the loading platform.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] The utility model provides a single-degree-of-freedom linear slide, in which the driving component can drive the transmission component to operate, and the operation of the transmission component can drive the loading platform to slide along the fixed seat, thereby realizing linear drive of the loading platform.

[0025] It should be noted that the drive assembly vibrates during operation. Installing a shock-absorbing structure between the drive assembly and the mounting base can reduce the vibration energy transferred to other structures (mounting base, transmission assembly, stage, etc.) during the drive assembly's vibration, thereby controlling the vibration generated by the excitation within a reasonable required accuracy range, thereby reducing the impact of the drive assembly's vibration on the system. Furthermore, glass has a low coefficient of thermal expansion and high thermal stability, with temperature changes having little effect on its dimensions. It also has high precision, with flatness reaching the micron level and smoothness reaching the nanometer level. It also has excellent structural stability, with minimal impurities generated by relative motion and friction with other components. Therefore, installing a glass plate between the mounting base and the stage not only ensures high motion accuracy but also reduces the risk of product contamination. Furthermore, glass is inexpensive, which helps reduce costs.

[0026] Therefore, the single-degree-of-freedom linear slide provided by the present invention has a high overall modality, good dynamic and static stability, and high motion accuracy, meeting the needs of expansion into a multi-dimensional space high-precision slide; in addition, it is not easy to contaminate the product and has a low cost.

[0027] The detection equipment provided by the present invention includes the above-mentioned single-degree-of-freedom linear slide, so during the detection process, the product positioning accuracy is relatively high, which can reach tens of nanometers, the dynamic motion is stable, and the static vibration error is relatively low, which can be reduced to the nanometer level. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0029] Figure 1 A schematic structural diagram of a single-degree-of-freedom linear slide provided in an embodiment of the present utility model;

[0030] Figure 2 A schematic structural diagram of a single-degree-of-freedom linear slide from another perspective provided by an embodiment of the present invention;

[0031] Figure 3 A schematic diagram of the assembly structure of the drive assembly and the motor base in the single-degree-of-freedom linear slide provided by an embodiment of the present utility model;

[0032] Figure 4 A schematic diagram of the assembly structure of the drive assembly and the synchronous pulley in the single-degree-of-freedom linear slide provided by an embodiment of the present utility model;

[0033] Figure 5 A schematic diagram of a partial structure of a single-degree-of-freedom linear slide provided in an embodiment of the present utility model;

[0034] Figure 6 This is a schematic diagram of the assembly structure of the tensioning mechanism in the single-degree-of-freedom linear slide provided in an embodiment of the utility model.

[0035] Description of reference numerals:

[0036] 100-fixed seat; 110-base; 120-limiting plate; 130-motor seat;

[0037] 200 - drive assembly; 210 - motor; 220 - motor mounting plate; 221 - first shock-absorbing pad; 222 - screw; 223 - second shock-absorbing pad; 230 - bearing;

[0038] 310-synchronous belt; 320-synchronous pulley; 330-tensioning mechanism; 331-tensioning seat; 332-tensioning arm; 333-first tensioning wheel; 334-second tensioning wheel; 335-tensioning rod; 336-first elastic component; 337-second elastic component;

[0039] 400- stage; 410- shrapnel;

[0040] 500-glass plate;

[0041] 600-flexible coupling;

[0042] 710-Block; 720-Photoelectric sensor. DETAILED DESCRIPTION

[0043] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0044] The present invention will be further described in detail below through specific implementation examples and in conjunction with the accompanying drawings.

[0045] See also Figure 1-Figure 4 , this embodiment provides a single-degree-of-freedom linear slide, which includes a fixed base 100, a driving component 200, a transmission component and a worktable 400; the driving component 200 and the transmission component are both installed on the fixed base 100, and a shock-absorbing structure is provided between the driving component 200 and the fixed base 100; the worktable 400 and the fixed base 100 are slidably matched, and a glass plate 500 is provided between the fixed base 100 and the worktable 400; the power output end of the driving component 200 is connected to the input end of the transmission component, and the output end of the transmission component is connected to the worktable 400, and the transmission component is used to convert the power of the driving component 200 into a driving force for driving the worktable 400 to move.

[0046] In the single-degree-of-freedom linear slide provided in this embodiment, the driving component 200 can drive the transmission component to operate, and the operation of the transmission component can drive the worktable 400 to slide along the fixed seat, thereby realizing linear drive of the worktable 400.

[0047] It should be noted that the drive assembly 200 vibrates during operation. Providing a shock-absorbing structure between the drive assembly 200 and the fixed base 100 can reduce the vibration energy transmitted to other structures (fixed base 100, transmission assembly, stage 400, etc.) during the drive assembly 200's vibration, thereby controlling the vibration generated by the excitation within a reasonable required accuracy range, thereby reducing the impact of the drive assembly 200's vibration on the system. Furthermore, glass has a low coefficient of thermal expansion and high thermal stability, and temperature changes have little effect on its dimensions. It also has high precision, with flatness reaching the micron level and smoothness reaching the nanometer level. It also has excellent structural stability, and relatively few impurities are generated by friction with other components. Therefore, providing a glass plate 500 between the fixed base 100 and the stage 400 not only ensures high movement accuracy but also reduces the risk of product contamination. Furthermore, glass is inexpensive, which helps reduce costs.

[0048] Therefore, the single-degree-of-freedom linear slide provided in this embodiment has a high overall modality, good dynamic and static stability, and high motion accuracy, meeting the needs of expansion into a multi-dimensional space high-precision slide; in addition, it is not easy to contaminate the product and has a low cost.

[0049] See also Figure 3 and Figure 4 The above-mentioned shock-absorbing structure may specifically include a first shock-absorbing pad 221. The shock-absorbing pad has a better shock-absorbing effect, a simple structure, and is easy to assemble.

[0050] Specifically, the driving component 200 can be fixed to the fixing base 100 by a screw 222. The screw 222 is preferably a shoulder screw, which can prevent it from becoming a bridge for transmitting vibration and reduce the vibration energy transmitted to the fixing base 100 when the driving component 200 vibrates; a second shock-absorbing pad 223 can be arranged between the head of the screw 222 and the driving component 200, and the second shock-absorbing pad 223 is used to achieve indirect contact between the screw 222 and the driving component 200, thereby further reducing the vibration energy transmitted to the fixing base 100 when the driving component 200 vibrates, thereby improving the movement accuracy of the slide.

[0051] The drive assembly 200 may specifically include a motor 210 and a motor mounting plate 220. The fixed base 100 may include a motor base 130. The motor 210 is mounted on the motor mounting plate 220, and the motor mounting plate 220 is fixed to the motor base 130 via the shoulder screws. The motor 210 provides power for the slide movement, and the transmission assembly converts the rotational motion or torque input by the motor 210 into linear motion and linear driving force.

[0052] Specifically, simulation calculations can be performed based on the rotational frequency of the motor 210 and the radial accuracy requirements of the motor shaft, and a material with certain strength and elasticity can be selected as the material of the first shock-absorbing pad 221 and the second shock-absorbing pad 223. For example, a nylon material with a small elastic modulus can be selected.

[0053] Preferably, the power output shaft of the drive component 200 can be connected to the input shaft of the transmission component through a flexible coupling 600. The power and torque output by the drive component 200 can be transmitted to the transmission component through the flexible coupling 600. The flexible coupling 600 can compensate for the assembly displacement between the power output shaft of the drive component 200 and the input shaft of the transmission component, while absorbing impact and vibration, thereby further improving the movement accuracy of the slide.

[0054] See also Figure 1 、 Figure 2 and Figure 4 The above-mentioned fixed seat 100 may specifically include a base 110 and two limit plates 120. The limit plates 120 are fixed on the base 110. The loading platform 400 is slidably matched with the top of the base 110, and the limit plates 120 are slidably matched with the two back-to-back side surfaces of the loading platform 400 that are parallel to the moving direction. In this way, the base 110 and the limit plates 120 cooperate to limit the moving direction of the loading platform 400, so that the loading platform 400 can move in a predetermined direction. In actual applications, the flatness of the two side surfaces of the loading platform 400 and the side surfaces of the limit plates 120 facing the loading platform 400 is improved as much as possible to improve the straightness of the movement of the loading platform 400. In actual use, it is horizontally arranged on the top surface of the base 110, and the loading platform 400 moves linearly in the horizontal direction.

[0055] Preferably, see Figure 1 and Figure 4 A spring 410 can be provided between the limiting plate 120 and the stage 400 to eliminate the structural gap between the stage 400 and the limiting plate 120, thereby further improving the linearity of the movement of the stage 400. With this simple structure, the linearity of the movement of the stage 400 can meet the requirement of approximately ten microns.

[0056] Specifically, the spring clip 410 can be installed on the stage 400 and brought into contact with the limit plate 120. Furthermore, a smooth layer can be applied to the surface of the spring clip 410 that contacts the limit plate 120 to reduce the coefficient of static and dynamic friction between the spring clip 410 and the limit plate 120. This can reduce the resistance to movement of the stage 400, minimize start-stop vibration, and improve smoothness of movement. Alternatively, the spring clip 410 can be installed on the limit plate 120 and brought into contact with the stage 400. Furthermore, a smooth layer can be applied to the surface of the spring clip 410 that contacts the stage 400 to reduce the coefficient of static and dynamic friction between the spring clip 410 and the stage 400, and similarly improve smoothness of movement.

[0057] The surface of the limiting plate 120 that cooperates with the loading platform 400 may be optionally coated with a smooth layer to reduce the dynamic and static friction coefficients between the limiting plate 120 and the loading platform 400, thereby further reducing the movement resistance of the loading platform 400 and improving the smoothness of movement.

[0058] The surface of the stage 400 that cooperates with the limiting plate 120 may be optionally coated with a smooth layer to reduce the dynamic and static friction coefficients between the stage 400 and the limiting plate 120 , thereby further reducing the movement resistance of the stage 400 and improving the smoothness of movement.

[0059] The glass plate 500 can be optionally installed on the fixing seat 100, and a smooth layer can be attached to the surface of the glass plate 500 that contacts the stage 400 to reduce the dynamic and static friction coefficients between the stage 400 and the glass plate 500, which can further reduce the movement resistance of the stage 400 and improve the smoothness of movement.

[0060] The above-mentioned smooth layer can be attached to the surface of the corresponding structure by coating or bonding, preferably the bonding method with lower cost, and the material thereof can be Teflon.

[0061] This embodiment uses a friction pair consisting of a glass plate 500 and Teflon, which has smaller movement resistance, higher vibration mode, less likely to cause vibration, and higher movement accuracy than the solution consisting of a cross ball guide and a lead screw.

[0062] The specific structure of the single-degree-of-freedom linear slide provided in this embodiment may also include a detection component and a controller. During operation, the detection component can detect the position of the stage 400 and transmit the detection result to the controller. The detection component and the drive component 200 are both communicatively connected to the controller. The controller can control the operation of the drive component 200 based on the position of the stage 400 detected by the detection component. For example, when the detection component detects that the stage 400 has moved forward to the forward limit position, the controller can control the drive component 200 to stop or drive the stage 400 to move in the reverse direction based on the signal sent by the detection component. When the detection component detects that the stage 400 has moved backward to the reverse limit position, the controller can control the drive component 200 to stop or drive the stage 400 to move forward based on the signal sent by the detection component. In addition, the controller can also control the drive component 200 to perform corresponding actions based on instructions issued by the host computer.

[0063] See also Figure 1The above-mentioned detection component may specifically include a baffle 710 and a photoelectric sensor 720. One of the baffle 710 and the photoelectric sensor 720 is installed on the fixed base 100, and the other is installed on the worktable 400. When the worktable 400 moves along the fixed base 100, the baffle 710 and the photoelectric sensor 720 will move relative to each other accordingly. The specific installation positions of the baffle 710 and the photoelectric sensor 720 can be determined as needed, so that the baffle 710 can trigger the photoelectric sensor 720 when the worktable 400 moves to the set position; the photoelectric sensor 720 is communicatively connected to the controller so that the photoelectric sensor 720 can transmit a trigger signal to the controller. The controller can determine the position of the worktable 400 according to the trigger signal sent by the photoelectric sensor 720, and generate corresponding control instructions to control the driving component 200 to perform corresponding actions. Specifically, the baffle 710 can be installed on the stage 400, and the movement of the stage 400 can drive the baffle 710 to move; the photoelectric sensor 720 is installed on the fixing seat 100, and a groove is set on the photoelectric sensor 720. When the baffle 710 moves into the groove of the photoelectric sensor 720, its light beam can be cut off. After the light beam in the groove of the photoelectric sensor 720 is cut off, it is triggered. The photoelectric sensor 720 converts the optical signal into an electrical signal and transmits it to the controller. After judgment, the controller controls the action of the driving component 200.

[0064] The detection assembly composed of the baffle 710 and the photoelectric sensor 720 has a lower cost than the solution of combining a grating ruler and a reading head.

[0065] In addition to the motor 210, a driver may also be provided in the specific structure of the drive assembly 200. The controller and the motor 210 are both communicatively connected to the driver. The driver is mainly used to convert energy and signals, converting the received electrical energy into energy that can drive the motor 210, and decoding the signal sent by the controller and sending a specific number of pulse signals to control the angular displacement of the motor 210. The motor 210 receives a pulse and rotates a specific angle, thereby outputting the angular displacement and torque through the central axis. The encoder of the motor 210 can be incremental or absolute, preferably absolute. By transmitting the motor rotation angular displacement detected by the encoder to the controller and the host computer, and using the motion control algorithm to obtain the motion direction and displacement of the stage 400, the specific position of the slide can be obtained.

[0066] See also Figure 1 、 Figure 2 and Figure 5The transmission assembly comprises a synchronous belt 310, a synchronous pulley 320, and a tensioning mechanism 330. The loading platform 400 is fixedly coupled to the synchronous belt 310, and the power output end of the drive assembly 200 is coaxially fixedly coupled to the synchronous pulley 320, allowing the drive assembly 200 to drive the synchronous pulley 320 to rotate. Both the synchronous pulley 320 and the tensioning mechanism 330 cooperate with the synchronous belt 310, pressing the synchronous belt 310 against the synchronous pulley 320. This provides the synchronous belt 310 with appropriate tension during transmission, preventing slippage, loosening, or falling off. This allows the synchronous pulley 320 to smoothly transfer the angular displacement and torque received from the drive assembly 200 to the synchronous belt 310, enabling the synchronous belt 310 to drive the loading platform 400. The synchronous belt 310 is a flexible belt that not only transmits motion and power, but also has a simple structure, stable transmission, low noise, and vibration-absorbing capabilities. The side of the synchronous pulley 320 facing away from the driving assembly 200 can be mounted on the motor base 220 via a shaft and a bearing 230 .

[0067] See also Figure 6 The above-mentioned tensioning mechanism 330 may specifically include a tensioning seat 331, a tensioning arm 332, a first tensioning wheel 333, a second tensioning wheel 334, a tensioning rod 335, a first elastic component 336 and a second elastic component 337. The tensioning seat 331 is fixed to the fixed seat 100, the first tensioning wheel 333 is installed to one end of the tensioning arm 332, the other end of the tensioning arm 332 is fixedly connected or coaxially rotated with the second tensioning wheel 334, the second tensioning wheel 334 is installed to the tensioning seat 331, and the first tensioning wheel 333 and the second tensioning wheel 334 are both matched with the synchronous belt 310; a first sliding groove is provided on the tensioning seat 331, a second sliding groove is provided on the tensioning arm 332, the tensioning rod 335 passes through the first sliding groove and the second sliding groove, and the two ends of the first elastic component 336 are respectively connected to the tensioning seat 331 and the tensioning arm 332, so as to utilize the first elastic component 336 to tension The tensioning arm 332 applies a positive torque; the two ends of the second elastic component 337 are respectively connected to the tensioning seat 331 and the tensioning rod 335, so as to use the second elastic component 337 to apply a reverse torque to the tensioning arm 332, wherein the tensioning rod 335 can limit the angular displacement of the first tensioning wheel 333 rotating around the second tensioning wheel 334, and the tensioning arm 332 can rotate within a certain range around the axle of the second tensioning wheel 334 under the joint action of the tensioning rod 335, the first elastic component 336 and the second elastic component 337. The first elastic component 336 and the second elastic component 337 can adaptively deform according to the change of the tensioning force of the synchronous belt 310, thereby adjusting the distance between the first tensioning wheel 333, the second tensioning wheel 334 and the synchronous pulley 320, thereby adjusting the length of the synchronous belt 310, and then enabling the synchronous belt 310 to maintain a suitable tension.

[0068] Specifically, the synchronous belt 310 can be wrapped around the outer sides of the synchronous pulley 320, the first tensioning wheel 333 and the second tensioning wheel 334. During actual operation, if the synchronous belt 310 becomes loose, the first elastic component 336 and the second elastic component 337 can be adaptively deformed, causing the first tensioning wheel 333 to move around the axle of the second tensioning wheel 334 in the direction away from the synchronous pulley 320, thereby increasing the distance between the first tensioning wheel 333 and the synchronous pulley 320, extending the running length of the synchronous belt 310, and tensioning the synchronous belt 310; if the tensioning force of the synchronous belt 310 is too large, the first elastic component 336 and the second elastic component 337 can be adaptively deformed, causing the first tensioning wheel 333 to move around the axle of the second tensioning wheel 334 in the direction close to the synchronous pulley 320, thereby reducing the distance between the first tensioning wheel 333 and the synchronous pulley 320, shortening the running length of the synchronous belt 310, preventing the synchronous belt 310 from being overstretched, and controlling the tension.

[0069] The first tensioning wheel 333 can be mounted on the tensioning arm 332 at both ends via a rotating shaft and cam bearings. The second tensioning wheel 334 can be mounted on the tensioning seat 331 at both ends via a rotating shaft and cam bearings. A spacer pad can also be provided in the tensioning mechanism 330. Both the first elastic component 336 and the second elastic component 337 can be springs. Specifically, the first elastic component 336 can be a compression spring, and the second elastic component 337 can be a tension spring. The second elastic component 337 can be connected to the end of the tensioning rod 335 to limit the axial displacement of the tensioning rod 335. The first and second slide slots can be cross-shaped elongated holes.

[0070] The specific motion process of the single-degree-of-freedom linear slide provided in this embodiment is as follows: the host computer sends a moving position signal, the controller detects the current position of the slide, and transmits the movement amount signal to the driver. The driver sends a specific pulse amount to the motor 210, and the motor 210 rotates a specific angular displacement. The detection component measures the movement amount and feeds it back to the controller, and the host computer calculates the movement direction and displacement of the slide.

[0071] This embodiment also provides a detection device, which includes a detection device and a single-degree-of-freedom linear slide. The detection device is used to detect the product on the loading platform.

[0072] The detection equipment provided in this embodiment includes the above-mentioned single-degree-of-freedom linear slide. Therefore, during the detection process, the product positioning accuracy is relatively high, which can reach tens of nanometers, the dynamic motion is stable, and the static vibration error is relatively low, which can be reduced to the nanometer level.

[0073] The detection device provided in this embodiment can be used to detect the surface roughness, microscopic concavities and convexities, and macroscopic surface accuracy of a thin film.

[0074] In summary, the present invention discloses a single-degree-of-freedom linear slide and detection device that overcomes many of the technical drawbacks of conventional single-degree-of-freedom linear slides. The single-degree-of-freedom linear slide and detection device provided by the present invention have a high overall modal response, excellent dynamic and static stability, and high motion precision, meeting the requirements for expansion into multi-dimensional, high-precision slides. Furthermore, they are less likely to contaminate products and are relatively cost-effective.

[0075] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A single degree of freedom linear slide, characterized in that: It comprises a fixing seat (100), a driving assembly (200), a transmission assembly and a loading platform (400); The driving assembly (200) and the transmission assembly are both mounted on the fixing seat (100), and a shock-absorbing structure is provided between the driving assembly (200) and the fixing seat (100); the loading platform (400) is slidably engaged with the fixing seat (100), and a glass plate (500) is provided between the fixing seat (100) and the loading platform (400); The power output end of the driving component (200) is connected to the input end of the transmission component, and the output end of the transmission component is connected to the loading platform (400). The transmission component is used to convert the power of the driving component (200) into a driving force for driving the loading platform (400) to move; The shock-absorbing structure includes a first shock-absorbing pad (221); and / or, the driving assembly (200) is fixed to the fixing seat (100) via a screw (222), the screw (222) being a shoulder screw, and / or, a second shock-absorbing pad (223) is provided between the head of the screw (222) and the driving assembly (200); and / or, the power output shaft of the driving assembly (200) is connected to the input shaft of the transmission assembly via a flexible coupling (600); The fixing seat (100) comprises a base (110) and two limiting plates (120), wherein the limiting plates (120) are fixed to the base (110), the loading platform (400) is slidably engaged with the top of the base (110), and the two limiting plates (120) are slidably engaged with two opposite side surfaces of the loading platform (400) parallel to the moving direction; The single-degree-of-freedom linear slide further comprises a detection component and a controller, wherein the detection component is used to detect the position of the loading platform (400), the detection component and the drive component (200) are both communicatively connected to the controller, and the controller is used to control the action of the drive component (200).

2. The single-degree-of-freedom linear slide according to claim 1, characterized in that: A spring piece (410) is provided between the limiting plate (120) and the loading platform (400).

3. The single-degree-of-freedom linear slide according to claim 2, characterized in that: The spring piece (410) is mounted on the loading platform (400), and the spring piece (410) abuts against the limiting plate (120), and a smooth layer is attached to the surface of the spring piece (410) abutting against the limiting plate (120); and / or, a smooth layer is attached to the surface of the limiting plate (120) that cooperates with the loading platform (400); And / or, a smooth layer is attached to the surface of the loading platform (400) that cooperates with the limiting plate (120); And / or, the glass plate (500) is mounted on the fixing seat (100), and a smooth layer is attached to the surface of the glass plate (500) for contacting the stage (400).

4. The single-degree-of-freedom linear slide according to claim 1, characterized in that: The detection component includes a baffle (710) and a photoelectric sensor (720), one of which is mounted on the fixing seat (100) and the other is mounted on the loading platform (400); the baffle (710) can trigger the photoelectric sensor (720) when the loading platform (400) moves to a set position, and the photoelectric sensor (720) is communicatively connected to the controller.

5. The single-degree-of-freedom linear slide according to any one of claims 1 to 4, characterized in that: The transmission assembly comprises a synchronous belt (310), a synchronous pulley (320) and a tensioning mechanism (330); the loading platform (400) is fixedly connected to the synchronous belt (310); the power output end of the driving assembly (200) is coaxially fixedly connected to the synchronous pulley (320); the synchronous pulley (320) and the tensioning mechanism (330) both cooperate with the synchronous belt (310) to tension the synchronous belt (310).

6. The single-degree-of-freedom linear slide according to claim 5, characterized in that: The tensioning mechanism (330) includes a tensioning seat (331), a tensioning arm (332), a first tensioning wheel (333), a second tensioning wheel (334), a tensioning rod (335), a first elastic component (336) and a second elastic component (337); the tensioning seat (331) is fixed to the fixed seat (100); the first tensioning wheel (333) is mounted on one end of the tensioning arm (332); the other end of the tensioning arm (332) is fixedly connected to or coaxially rotated with the second tensioning wheel (334); the second tensioning wheel (334) is mounted on the tensioning seat (331); the first tensioning wheel (333) and the second tensioning wheel (334) are both matched with the synchronous belt (310); The tensioning seat (331) is provided with a first sliding groove, the tensioning arm (332) is provided with a second sliding groove, and the tensioning rod (335) is passed through the first sliding groove and the second sliding groove; the two ends of the first elastic component (336) are respectively connected to the tensioning seat (331) and the tensioning arm (332), and can apply a positive torque to the tensioning arm (332); the two ends of the second elastic component (337) are respectively connected to the tensioning seat (331) and the tensioning rod (335), and can apply a reverse torque to the tensioning arm (332) through the tensioning rod (335).

7. A detection device, characterized in that: It comprises a detection device and a single-degree-of-freedom linear slide as described in any one of claims 1 to 6, wherein the detection device is used to detect the product on the loading platform (400).

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