Translation mechanical arm and vertical furnace front-loading conveying device

Abstract

The translation manipulator comprises a lifting device, a large arm, a small arm and a tail end executing device, one end of the large arm is rotationally connected to the lifting device, and one end of the small arm is rotationally connected to the end, away from the lifting device, of the large arm; the lifting device is rotatably arranged at the end, away from the large arm, of the small arm, the small arm is arranged on the face, opposite to the lifting device, of the large arm, the tail end executing device is rotatably arranged at the end, away from the large arm, of the small arm, and the tail end executing device is arranged on the face, opposite to the large arm, of the small arm. The tail end executing device is arranged under the lifting device. The tail end executing device can be moved to a preset position through running fit of the large arm and the small arm in a limited operation space, the space occupied by the whole translation manipulator is effectively reduced, and then the practicability and the application range of the whole device are effectively optimized.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a translation manipulator and a front transport device for a vertical furnace. Background Art

[0002] With the continuous improvement of semiconductor process technology, front-end and back-end process equipment manufacturers have put forward higher and more complex requirements for semiconductor automated transmission technology. Most of them use robots to realize the transportation and handling of wafers and wafer boxes in the semiconductor production process.

[0003] However, in certain specific application scenarios, such as the wafer box transfer scenario in a vertical furnace, the robot has a large structure or requires a large space for its extended activities, resulting in a large volume of the entire device or a large working space required for the device. This also causes the robot device to need to be set up separately and cannot be integrated into the same device, resulting in the entire device having poor practicality and a small scope of application.

[0004] In view of the problems existing in the above-mentioned prior art, it is urgent to design a new type of translation manipulator to solve the above-mentioned problems. Utility Model Content

[0005] In order to overcome the technical problems existing in the prior art, the present application provides a translation manipulator, which can solve the problems raised in the above background technology.

[0006] The present application provides a translation manipulator, comprising:

[0007] A lifting device, the lifting device is used to drive the translation manipulator to move up and down;

[0008] A boom, wherein one end of the boom is rotatably connected to the lifting device, and the rotation direction of the boom and the lifting direction of the lifting device are perpendicular to each other;

[0009] A small arm, one end of which is rotatably connected to an end of the large arm away from the lifting device, and the small arm is provided on a side of the large arm opposite to the lifting device;

[0010] An end effector is rotatably mounted on an end of the forearm away from the upper arm, and is disposed on a surface of the forearm opposite to the upper arm, so that the end effector can move horizontally under the cooperation of the upper arm and the forearm;

[0011] When the translation manipulator is in an initial static state, the long axis center line of the upper arm is arranged in parallel with the long axis center line of the lower arm, and the end effector is arranged directly below the lifting device.

[0012] In some embodiments, the upper arm includes a first pulley, a second pulley and a first tensioning device, the first pulley is connected to the lifting device in a corresponding rotational manner, the second pulley is connected to the lower arm in a corresponding rotational manner, the first pulley and the second pulley are connected by a first transmission belt, and the first tensioning device is arranged between the first pulley and the second pulley to enable adjustment of the tension of the first transmission belt.

[0013] By arranging a first tensioning device on the side of the first transmission belt, the first transmission belt is tensioned, and the tension of the first transmission belt can be adjusted to ensure that there is always sufficient friction between the first transmission belt and the first pulley and the second pulley, thereby further ensuring effective power transmission.

[0014] In some embodiments, the first tensioning device includes two first tensioning wheels, and the two first tensioning wheels are correspondingly arranged on the outside of the first transmission belt and are in contact with the first transmission belt.

[0015] By setting up two first tensioning wheels, it is ensured that the contact forces on both sides of the belt are the same during the reciprocating motion of the belt, and that the wear of the belt is within the normal wear range, thereby effectively extending the service life of the device.

[0016] In some embodiments, the forearm includes a third pulley and a second tensioning device, the third pulley is correspondingly connected to the second pulley through a second transmission belt, the third pulley is correspondingly connected to the end effector, and the second tensioning device is arranged between the first pulley and the second pulley to achieve the ability to adjust the tension of the second transmission belt.

[0017] In some embodiments, the second tensioning device includes a second tensioning wheel and an adjusting member, and the two second tensioning wheels are both arranged on the outside of the second transmission belt and in contact with the second transmission belt. The adjusting member is correspondingly arranged on the outside of the second transmission belt and is adjustably in contact with the second transmission belt.

[0018] By setting up a second tensioning wheel and an adjusting piece, when adjusting the belt tension, it is only necessary to adjust the adjusting piece and adjust the distance between the adjusting wheel and the connecting line between the third pulley and the second pulley to control the tightening and loosening of the second conveyor belt.

[0019] In some embodiments, the end effector includes a connecting portion, with claw portions provided on both sides of the connecting portion, a receiving space capable of accommodating the wafer box being formed between the two claw portions, and a supporting portion provided on one end of the claw portion away from the connecting portion, the two supporting portions being arranged opposite to each other, and a limiting protrusion being provided on each supporting portion;

[0020] The limiting protrusion limits the wafer box in the horizontal direction when grabbing the wafer box.

[0021] By setting a limiting protrusion and a supporting part, the clamping part can move to the bottom of the supporting protrusion under the cooperation of the upper arm and the lower arm to support the wafer box, so that the wafer box is separated from the cache fixing device, thereby driving the wafer box to be lifted up and down and moved horizontally.

[0022] In some embodiments, the lifting device includes a lifting track and a lifting drive motor. The lifting track is arranged in a vertical direction. The translation manipulator is slidably set on the lifting track and is electrically connected to the lifting drive motor, thereby enabling the translation manipulator to be lifted and lowered along the lifting track under the drive of the lifting drive motor.

[0023] By setting up a lifting track and a lifting drive motor, the translation robot can be lifted and lowered along the lifting track under the drive of the lifting drive motor, so that the translation robot can lift or put down the corresponding wafer box, effectively improving the stability of the wafer box lifting.

[0024] In some embodiments, the present application also provides a vertical furnace system, comprising:

[0025] The vertical furnace body and the translation manipulator described in any of the above embodiments, the translation manipulator is correspondingly arranged at the entrance of the vertical furnace body, so that the translation manipulator can be translated into the vertical furnace body.

[0026] The utility model has at least the following beneficial effects:

[0027] 1. By arranging the boom and arm to overlap in the vertical direction and setting up rotating connections at different ends between the lifting device, boom, arm and end effector, the end effector can be moved to a preset position through the rotation of the boom and arm within a limited working space, effectively reducing the space required for the entire translation manipulator, thereby effectively optimizing the practicality and applicability of the entire device;

[0028] 2. By providing a lifting device and a clamping claw, the clamping member can move parallel to the support protrusion of a specific object under the cooperation of the upper arm and the lower arm. Then, the lifting device can lift the specific object and move it out of its original position, thereby achieving the ability to drive the specific object to move up and down and horizontally. The fixed spacing of the clamping claw effectively improves the stability and reliability of grasping the specific object.

[0029] 2. By setting up a structure in which the limiting groove and the limiting protrusion cooperate, the cooperation between the limiting groove and the limiting protrusion can constrain the object in multiple directions to prevent it from unnecessary movement, thereby effectively enhancing the stability of the wafer box during movement. In addition, it can also achieve rapid docking between the wafer box and the robot during the clamping process, that is, rapid positioning of the cooperating structure, effectively improving the overall work efficiency, and has the advantages of accuracy, reliability, simplicity and speed of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a three-dimensional schematic diagram of the overall structure of the translation manipulator of the present application;

[0031] Figure 2 This is a schematic diagram of the structure of the lifting device in the translation manipulator of this application;

[0032] Figure 3 This is a structural diagram of the upper arm in the translation manipulator of the present application;

[0033] Figure 4 This is a schematic structural diagram of the forearm in the translation manipulator of the present application;

[0034] Figure 5 This is a schematic structural diagram of the end effector in the translation manipulator of the present application;

[0035] Description of reference numerals:

[0036] 10: lifting device; 11: lifting drive motor; 12: lifting track; 13: integrated box;

[0037] 20: Upper arm; 21: First pulley; 22: Second pulley; 23: First transmission belt; 24: First tensioning device;

[0038] 30: small arm; 31: third pulley; 32: second transmission belt; 33: second tensioning pulley; 34: adjustment member;

[0039] 40: end effector; 41: connecting portion; 42: clamping portion; 43: lifting portion; 44: limiting protrusion;

[0040] 50: Rotation drive mechanism. DETAILED DESCRIPTION

[0041] The following specific embodiments illustrate the implementation of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with some embodiments, this does not mean that the features of this application are limited to the implementation. On the contrary, the purpose of introducing the application in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present application. In order to provide an in-depth understanding of the present application, the following description will contain many specific details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other unless there is a conflict.

[0042] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0043] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0044] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0045] This application provides a translation manipulator, see Figures 1 to 5, including a lifting device 10, a boom, a forearm 30 and an end effector 40, wherein the lifting device 10 is used to drive the translation manipulator to lift and lower, wherein one end of the boom 20 is rotatably connected to the lifting device 10, and the rotation direction of the boom 20 and the lifting direction of the lifting device 10 are perpendicular to each other, one end of the forearm 30 is rotatably connected to the end of the boom 20 away from the lifting device 10, and the forearm 30 is arranged on a side of the boom 20 opposite to the lifting device 10, and the end effector 40 is rotatably arranged on the end of the forearm 30 away from the boom 20, and the end effector 40 is arranged on a side of the forearm 30 opposite to the boom 20, so that the end effector 40 can achieve horizontal movement under the cooperation of the boom 20 and the forearm 30. When the translation manipulator is in the initial stationary state, the long axis centerline of the boom 20 is arranged parallel to the long axis centerline of the forearm 30, and the end effector 40 is arranged directly below the lifting device 10.

[0046] Specifically, the translation manipulator is mainly composed of a lifting device 10, a large arm 20, a small arm 30 and an end effector 40. The lifting device 10 not only includes the parts of the lifting device 10 itself, but also a rotation drive mechanism 50 that drives the large arm 20 to rotate is integrated into the lifting device 10, that is, one end of the large arm 20 is rotatably connected to the rotation drive mechanism 50, and then the rotation drive mechanism 50 is slidably set on the lifting track 12 in the lifting device 10, so that the lifting device 10 can drive the large arm 20 to move up and down, and the other end of the large arm 20 is rotatably connected to the small arm 30. The end of the forearm 30 away from the upper arm 20 is rotatably connected to the end effector 40. The end effector 40 is used to clamp the wafer box. Driven by the rotation drive mechanism 50, the upper arm 20 can rotate relative to the lifting device 10, and the forearm 30 can rotate relative to the upper arm 20, so that the end effector 40 at the end of the forearm 30 can move in the horizontal direction under the joint action of the upper arm 20 and the forearm 30, thereby realizing that the end effector 40 can drive the specific object from the initial device to the preset target position in the horizontal direction.

[0047] In addition, when the translation manipulator is in the initial stationary state, the long axis centerline of the upper arm 20 is arranged parallel to the long axis centerline of the lower arm 30, that is, looking at the upper arm 20 or the lower arm 30 from the lifting direction of the lifting device 10, the upper arm 20 and the lower arm 30 are overlapping, and the end effector 40 is arranged directly below the lifting device 10. The gap between the upper arm 20 and the lower arm 30 is small enough to reduce the installation space requirement of the entire translation device much compared with the manipulator structure in the prior art, so that the translation manipulator provided by this application can be applied to some work scenarios with limited available space, thereby effectively expanding the scope of application and practicality of the translation manipulator provided by this application.

[0048] In some embodiments, see Figure 1 and Figure 3 The upper arm 20 includes a first pulley 21, a second pulley 22 and a first tensioning device 24. The first pulley 21 is connected to the lifting device 10 for corresponding rotation, and the second pulley 22 is connected to the lower arm 30 for corresponding rotation. The first pulley 21 and the second pulley 22 are connected by a first transmission belt 23. The first tensioning device 24 is arranged between the first pulley 21 and the second pulley 22 to achieve the ability to adjust the tension of the first transmission belt 23.

[0049] Specifically, the first pulley 21 and the second pulley 22 can both be bearing rotation structures, and the first pulley 21 and the second pulley 22 are both provided with gear teeth adapted to the first transmission belt 23. The first pulley 21 is directly connected to the lifting drive mechanism, and the first transmission belt 23 is a closed belt, one end of which is sleeved on the first pulley 21, and the other end is correspondingly sleeved on the second pulley 22, so that the second pulley 22 can rotate with the first pulley 21. In addition, a first tensioning device 24 is provided on the side of the belt, which can serve the purpose of tensioning the belt, thereby achieving the ability to adjust the tension of the first transmission belt 23 to ensure that there is always sufficient friction between the first transmission belt 23 and the first pulley 21 and the second pulley 22, thereby further ensuring the effective transmission of power.

[0050] In some embodiments, see Figure 3 The first tensioning device 24 includes two first tensioning wheels, and the two first tensioning wheels are correspondingly arranged on the outside of the first transmission belt 23 and in contact with the first transmission belt 23.

[0051] Specifically, the two first tensioning pulleys are both arranged on the outside of the belt, so that the belt can be tensioned. Moreover, the two first tensioning pulleys are symmetrically arranged with the connecting line between the first pulley 21 and the second pulley 22 as the center line. By setting up two first tensioning pulleys, it is ensured that the contact force on both sides of the belt is the same during the reciprocating movement of the belt, and that the wear of the belt is within the normal wear range, thereby effectively extending the service life of the device.

[0052] It should be noted that the first tensioning pulley can be set on the inner side of the belt, or on both the inner and outer sides of the belt. The specific situation can be determined according to actual factors such as space limitations, and is not limited here.

[0053] In some embodiments, see Figure 1 and Figure 4The forearm 30 includes a third pulley 31 and a second tensioning device. The third pulley 31 is correspondingly connected to the second pulley 22 through the second transmission belt 32. The third pulley 31 is correspondingly connected to the end effector 40. The second tensioning device is arranged between the first pulley 21 and the second pulley 22 to achieve the ability to adjust the tension of the second transmission belt 32.

[0054] Specifically, the third pulley 31 can be a bearing rotation structure, and the second pulley 22 extends to one end of the forearm 30 and the third pulley 31 are both provided with gear teeth compatible with the second transmission belt 32. The second transmission belt 32 is also a closed belt, one end of which is sleeved on the second pulley 22, and the other end is correspondingly sleeved on the third pulley 31, so that the third pulley 31 can rotate with the rotation of the second pulley 22. In addition, a second tensioning device is provided on the side of the second transmission belt 32, so that the second transmission belt 32 can be tensioned, thereby achieving the purpose of adjusting the tension of the second transmission belt 32 to ensure that there is always sufficient friction between the second transmission belt 32 and the second pulley 22 and the third pulley 31, thereby further ensuring the effective transmission of power.

[0055] In some embodiments, see Figure 4 The second tensioning device includes a second tensioning wheel 33 and an adjusting member 34. The two second tensioning wheels 33 are both arranged on the outside of the second transmission belt 32 and in contact with the second transmission belt 32. The adjusting member 34 is correspondingly arranged on the outside of the second transmission belt 32 and is adjustably in contact with the second transmission belt 32.

[0056] Specifically, the two second tensioning wheels 33 are both arranged on the outside of the belt, so that the belt can be tensioned. Moreover, the two second tensioning wheels 33 are symmetrically arranged with the connecting line between the third pulley 31 and the second pulley 22 as the center line. The adjusting member 34 includes a movable member and an adjusting wheel. The adjusting wheel is movably arranged on the outside of the belt through the movable member. When adjusting the belt tension, it is only necessary to adjust the adjusting member 34 and adjust the distance between the adjusting wheel and the connecting line between the third pulley 31 and the second pulley 22 to control the tightening and loosening of the second conveyor belt.

[0057] In some embodiments, see Figure 5 The end effector 40 includes a connecting portion 41, and a clamping portion 42 is provided on both sides of the connecting portion 41. A receiving space that can accommodate a wafer box is formed between the two clamping portions 42, and a supporting portion 43 is provided on the end of the clamping portion 42 away from the connecting portion 41. The two supporting portions 43 are arranged opposite to each other, and a limiting protrusion 44 is provided on the supporting portion 43; the limiting protrusion 44 limits the wafer box in the horizontal direction when grabbing the wafer box.

[0058] Specifically, the designated object is usually a wafer box, and two supporting protrusions are provided on the wafer box, and the two supporting protrusions are correspondingly arranged on two symmetrical sides of the wafer box. The clamping part includes a connecting part 41, and claw parts 42 are provided on both sides of the connecting part 41. A receiving space that can accommodate the wafer box is formed between the two claw parts 42, and a supporting part 43 is provided on the end of the two claw parts 42 away from the connecting part 41. The two supporting parts 43 are arranged opposite to each other and extend toward the receiving space. The distance between the two supporting parts 43 is adapted to the width of the wafer box. At the same time, the two supporting parts 43 are adapted to the supporting protrusions on the wafer box, so that when the clamping part moves to the set position, the supporting part 43 can be just located below the supporting protrusion, and then under the action of the lifting device 10, the supporting part 43 correspondingly supports the supporting protrusion, and then supports the wafer box, thereby realizing the ability to drive the wafer box to move horizontally.

[0059] In addition, a limiting groove is provided on the support protrusion in the direction in which the clamp is raised and lowered. A corresponding limiting protrusion 44 is provided on the support portion 43 and extends toward the small arm 30. When the clamp is moved to the set position, the support portion 43 can be located below the support protrusion, and the limiting protrusion 44 just passes through the limiting groove, thereby achieving a relatively stable connection between the clamp and the support protrusion. The combination of the limiting groove and the limiting protrusion 44 can constrain the wafer box in multiple directions to prevent it from moving unnecessarily. Compared with a single-direction fixing method, this multi-directional constraint can greatly enhance the stability of the fixing, thereby ensuring the stability of the wafer box during movement.

[0060] It should be pointed out that the limiting groove can also be opened on the side of the supporting protrusion away from the forearm 30, and the corresponding limiting protrusion 44 is arranged on the clamping claw portion 42 and extends toward the forearm 30, and extends toward the receiving space. When the clamping member moves to the set position, the supporting portion 43 can be located below the supporting protrusion, and the limiting protrusion 44 just corresponds to the limiting groove and is inserted into the limiting groove, which can also achieve a relatively stable connection between the clamping member and the supporting protrusion. The specific matching of the limiting groove and the limiting protrusion 44 depends on actual needs and is not limited here.

[0061] In some embodiments, see Figure 1 and Figure 2 The lifting device 10 includes a lifting track 12 and a lifting drive motor 11. The lifting track 12 is arranged in a vertical direction. The translation manipulator is slidably arranged on the lifting track 12 and is electrically connected to the lifting drive motor 11, thereby enabling the translation manipulator to be lifted and lowered along the lifting track 12 under the drive of the lifting drive motor 11.

[0062] Specifically, the lifting module includes an integrated box 13 and a lifting drive motor 11. The lifting track 12 is arranged in the integrated box 13 in the vertical direction. The end of the translation manipulator close to the translation transmission device is slidably set on the lifting track, and is electrically connected to the lifting drive motor 11, so that the translation manipulator can be lifted and lowered along the lifting track 12 under the drive of the lifting drive motor 11, thereby enabling the translation manipulator to lift or put down the corresponding wafer box.

[0063] The present application also provides a front transport device for a vertical furnace, which includes not only a vertical furnace body, but also a translation manipulator in any of the above embodiments. The translation manipulator is correspondingly arranged at the entrance of the vertical furnace body so that the translation manipulator can be translated into the vertical furnace body.

[0064] Specifically, the vertical furnace front transport device equipped with the translation manipulator in any of the above-mentioned embodiments can move the end effector 40 to a preset position within a limited working space through the rotation coordination of the upper arm 20 and the lower arm 30, thereby effectively reducing the space required to be occupied by the entire translation manipulator, thereby effectively optimizing the practicality and applicability of the entire device.

[0065] Obviously, those skilled in the art may make various modifications and variations to this application without departing from the spirit and scope of this application. Thus, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application is intended to include such modifications and variations.

Claims

1. A translation manipulator, characterized in that: include: A lifting device, the lifting device is used to drive the translation manipulator to move up and down; A boom, one end of which is rotatably connected to the lifting device, wherein the rotation direction of the boom and the lifting direction of the lifting device are perpendicular to each other; A small arm, one end of which is rotatably connected to an end of the large arm away from the lifting device, and the small arm is provided on a side of the large arm opposite to the lifting device; An end effector is rotatably mounted on an end of the forearm away from the upper arm, and is disposed on a surface of the forearm opposite to the upper arm, so that the end effector can move horizontally under the cooperation of the upper arm and the forearm; When the translation manipulator is in an initial static state, the long axis center line of the upper arm is arranged in parallel with the long axis center line of the lower arm, and the end effector is arranged directly below the lifting device.

2. The translation manipulator according to claim 1, characterized in that: The upper arm includes a first pulley, a second pulley and a first elastic device. The first pulley is connected to the lifting device for corresponding rotation. The second pulley is connected to the lower arm for corresponding rotation. The first pulley and the second pulley are connected by a first transmission belt. The first elastic device is arranged between the first pulley and the second pulley to achieve the ability to adjust the tension of the first transmission belt.

3. The translation manipulator according to claim 2, characterized in that: The first tensioning device includes two first tensioning wheels, and the two first tensioning wheels are correspondingly arranged on the outside of the first transmission belt and are in contact with the first transmission belt.

4. The translation manipulator according to claim 3, wherein: The forearm includes a third pulley and a second tensioning device, the third pulley is correspondingly connected to the second pulley through a second transmission belt, the third pulley is correspondingly connected to the end effector, and the second tensioning device is arranged between the first pulley and the second pulley to achieve the ability to adjust the tension of the second transmission belt.

5. The translation manipulator according to claim 4, characterized in that: The second tensioning device includes a second tensioning wheel and an adjusting member. The two second tensioning wheels are both arranged on the outside of the second transmission belt and in contact with the second transmission belt. The adjusting member is correspondingly arranged on the outside of the second transmission belt and is adjustably in contact with the second transmission belt.

6. The translation manipulator according to any one of claims 1 to 5, characterized in that: The end effector comprises a connecting portion, with claw portions provided on both sides of the connecting portion, a receiving space capable of accommodating a wafer box being formed between the two claw portions, and a supporting portion provided on one end of the claw portion away from the connecting portion, the two supporting portions being arranged opposite to each other, and a limiting protrusion being provided on the supporting portion; The limiting protrusion limits the wafer box in the horizontal direction when grabbing the wafer box.

7. The translation manipulator according to claim 6, characterized in that: The lifting device includes a lifting track and a lifting drive motor. The lifting track is arranged in a vertical direction. The translation manipulator is slidably arranged on the lifting track and is electrically connected to the lifting drive motor, thereby enabling the translation manipulator to be lifted and lowered along the lifting track under the drive of the lifting drive motor.

8. A vertical furnace front transport device, characterized in that: include: A vertical furnace body and a translation manipulator as described in any one of claims 1 to 7 above, wherein the translation manipulator is correspondingly arranged at the entrance of the vertical furnace body so that the translation manipulator can be translated into the vertical furnace body.

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