Jig for mounting top cover of gas box

Abstract

The utility model provides a jig for mounting a top cover of a gas tank. The jig comprises a connecting plate, a gradienter, a positioning top seat, a positioning bolt and a positioning base, a plurality of grooves matched with the side surfaces of the gaskets are formed in the edge of the connecting plate; the gradienter is fixed on the connecting plate; the positioning top seat is connected with the edge of the connecting plate, and a third through hole is formed in the positioning top seat; a graphic mark is arranged on the positioning base; the positioning bolt penetrates through the third through hole, and the bottom surface of the positioning bolt coincides with the graphic mark. The gradienter can be placed on the top cover through the connecting plate, and whether the top cover is in a horizontal state or not can be rapidly judged through the gradienter. Through the positioning top seat, the positioning plug pin and the positioning base, the first through holes in the top cover can be quickly aligned with the threaded holes in the box body, so that when a plurality of bolts are screwed, the bolts are easily screwed in place and are not easy to slip, and the efficiency of installing the top cover is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a fixture for installing a top cover of a gas box. Background Art

[0002] During the semiconductor manufacturing process, wafers need to be placed in a coating machine for coating. The coating machine includes a gas box. During coating, the wafer needs to be placed in the gas box. The coating gas is input into the gas box and contacts the wafer surface to complete the coating.

[0003] refer to Figure 1 As shown, the gas box includes a box body and a top cover 11. Top cover 11 is provided with multiple first through-holes. Teflon gaskets 12 are inserted into the first through-holes. Gasket 12 is partially located inside and partially outside the first through-holes. A second through-hole is provided in the center of gasket 12. Multiple bolts pass through corresponding gaskets 12 to secure top cover 11 to the box body. Gas boxes require regular maintenance. During maintenance, top cover 11 must be removed, cleaned, and then reinstalled.

[0004] However, when installing the top cover 11, due to its heavy weight, the top cover 11 is not easy to move, and the multiple first through holes on the top cover 11 are difficult to align with the multiple threaded holes on the box body; in addition, when tightening multiple bolts, if the tightening degrees of the multiple bolts are different, the top cover 11 will be tilted relative to the horizontal plane, and even the bolts will be threaded, which will ultimately lead to low efficiency in installing the top cover 11. Utility Model Content

[0005] The utility model provides a jig for installing a top cover of a gas box, so as to solve the technical problem of low efficiency in installing the top cover.

[0006] To solve the above technical problems, the present invention provides a jig for installing a top cover of a gas box, wherein the top cover is provided with a plurality of first through holes, washers are plugged in the first through holes, a portion of the washers is located inside the first through holes and a portion is located outside the first through holes, a second through hole is provided in the middle of the washers, and a plurality of bolts pass through the corresponding washers to fix the top cover to the box body of the gas box, the jig comprising a connecting plate, a level, a positioning top seat, a positioning pin and a positioning base;

[0007] The edge of the connecting plate is provided with a plurality of grooves that match the side surfaces of the gasket;

[0008] The level is fixed on the connecting plate;

[0009] The positioning top seat is connected to the edge of the connecting plate, and a third through hole is provided on the positioning top seat;

[0010] A graphic mark is provided on the positioning base; the positioning pin passes through the third through hole, and the bottom surface of the positioning pin coincides with the graphic mark.

[0011] Optionally, the shape of the gasket is cylindrical, and the cross-section of the groove is semicircular.

[0012] Optionally, the number of the grooves and the number of the washers are both 6, and the grooves and the washers correspond one to one.

[0013] Optionally, the six grooves are evenly arranged on the edge of the connecting plate.

[0014] Optionally, the number of the positioning top seat, the positioning pin and the positioning base is 3 respectively, and each positioning top seat corresponds to 1 positioning pin and 1 positioning base.

[0015] Optionally, the three positioning seats are evenly arranged on the edge of the connecting plate.

[0016] Optionally, the bottom surface of the positioning pin and the shape of the graphic mark are both circular.

[0017] Optionally, the level is fixed to the middle position of the connecting plate by a suction cup.

[0018] Optionally, the spirit level is fixed to the middle position of the connecting plate through an adhesive layer.

[0019] Optionally, the positioning top seat is in the shape of a cuboid.

[0020] The utility model provides a jig for installing the top cover of a gas box, comprising a connecting plate, a spirit level, a positioning top seat, a positioning pin, and a positioning base. The spirit level can be placed on the top cover via the connecting plate, and the spirit level can be used to quickly determine whether the top cover is in a horizontal state. By using the positioning top seat, the positioning pin, and the positioning base, the multiple first through holes on the top cover can be quickly aligned with the multiple threaded holes on the box body. This allows the bolts to be easily screwed into place and are less likely to slip when tightening multiple bolts, thereby improving the efficiency of installing the top cover. The unexpected effect of this jig is that it can significantly improve the efficiency of installing the top cover and prevent the bolts from slipping or damaging the top cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 The present invention is a schematic structural diagram of a top cover of a gas box in the prior art.

[0022] Figure 2 The utility model is a front view of a fixture for installing a top cover of a gas box provided by one embodiment.

[0023] Figure 3 yes Figure 2 Corresponding side view schematic diagram.

[0024] Figure 4 yes Figure 2 The corresponding top view diagram, and Figure 4 in

[0025] [Description of reference numerals is as follows]:

[0026] Top cover-11, gasket-12;

[0027] Connecting plate 21, level 22, positioning top seat 23, positioning pin 24, positioning base 25;

[0028] Groove-211;

[0029] Third through hole-231;

[0030] Graphic mark-251. DETAILED DESCRIPTION

[0031] To make the purposes, advantages, and features of the present invention more clear, the following is a further detailed description of a jig for installing the top cover of a gas box proposed by the present invention, in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In the description of the present invention, the terms "first", "second", and other qualifiers are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined by qualifiers such as "first" and "second" may explicitly or implicitly include one or more of such features.

[0032] refer to Figure 1-Figure 4 As shown, this embodiment provides a fixture for installing the top cover 11 of the gas box. The top cover 11 is provided with a plurality of first through holes. The first through holes are plugged with washers 12. Part of the washers 12 are located inside the first through holes and part of the washers are located outside the first through holes. A second through hole is provided in the middle of the washers 12. A plurality of bolts pass through the corresponding washers 12 to fix the top cover 11 on the box body of the gas box. The fixture includes a connecting plate 21, a level 22, a positioning top seat 23, and a positioning pin. 24 and a positioning base 25; the edge of the connecting plate 21 is provided with a plurality of grooves 211 that cooperate with the side surfaces of the gasket 12; the spirit level 22 is fixed on the connecting plate 21; the positioning top seat 23 is connected to the edge of the connecting plate 21, and the positioning top seat 23 is provided with a third through hole 231; the positioning base 25 is provided with a graphic mark 251; the positioning pin 24 passes through the third through hole 231, and the bottom surface of the positioning pin 24 coincides with the graphic mark 251.

[0033] The level 22 can be a bubble level or an electronic level. When the bubble of the bubble level is in the middle, the level 22 is parallel to the horizontal plane. When the value of the electronic level is 0, the level 22 is parallel to the horizontal plane. The positioning pin 24 is preferably made of a transparent material to facilitate checking whether the bottom surface of the positioning pin 24 and the graphic mark 251 on the positioning base 25 coincide with each other.

[0034] The method of using the fixture for installing the top cover 11 of the gas box provided in this embodiment is as follows: when removing the top cover 11 of the gas box, first place the connecting plate 21 on the top cover 11 so that the groove 211 of the connecting plate 21 is stuck on the gasket 12, then unscrew the multiple bolts on the top cover 11, and then insert the positioning pin 24 into the third through hole 231 of the positioning top seat 23, so that the positioning pin 24 passes through the positioning top seat 23, move the positioning base 25 so that the bottom surface of the positioning pin 24 coincides with the image mark on the positioning base 25, and keep the positioning base 25 stationary, and finally remove the gasket 12 and the top cover 11. When installing the top cover 11 of the gas box, first place the top cover 11 on the box body, then insert the gasket 12 into the first through hole of the top cover 11, and then place the connecting plate 21 on the top cover 11 so that the groove 211 of the connecting plate 21 is stuck on the gasket 12. Insert the positioning pin 24 into the third through hole 231 of the positioning top seat 23, rotate the top cover 11 so that the bottom surface of the pin coincides with the image mark on the positioning base 25, remove the positioning pin 24, tighten the bolts, and make the spirit level 22 parallel to the horizontal plane. At this time, it indicates that the top cover 11 is parallel to the horizontal plane and has been installed in place.

[0035] The present embodiment provides a jig for installing the top cover 11 of a gas box, comprising a connecting plate 21, a spirit level 22, a positioning top seat 23, a positioning pin 24, and a positioning base 25. The spirit level 22 can be placed on the top cover 11 through the connecting plate 21, and the spirit level 22 can be used to quickly determine whether the top cover 11 is in a horizontal state. By positioning the top seat 23, the positioning pin 24, and the positioning base 25, the multiple first through holes on the top cover 11 can be quickly aligned with the multiple threaded holes on the box body. In this way, when tightening multiple bolts, the bolts are easy to screw into place and are not prone to slipping, thereby improving the efficiency of installing the top cover 11. The unexpected effect of this jig is that it can significantly improve the efficiency of installing the top cover 11 and prevent the bolts from slipping or damaging the top cover 11.

[0036] Optional, reference Figure 1 and Figure 4 As shown, the shape of the washer 12 is cylindrical, and the cross-sectional shape of the groove 211 is semicircular, so that the groove 211 can be firmly stuck on the side. In other embodiments, if the shape is prismatic, the cross-sectional shape of the groove 211 can be rectangular.

[0037] Optional, reference Figure 1 and Figure 4 As shown, there are six grooves 211 and six washers 12, each corresponding to one another. When the six grooves 211 are engaged with the corresponding washers 12, the connecting plate 21 can be securely placed on the top cover 11. In other embodiments, five or four grooves 211 may be provided.

[0038] Optional, reference Figure 1 and Figure 4 As shown, the six grooves 211 are evenly arranged on the edge of the connecting plate 21, so that the connecting plate 21 can be firmly placed on the top cover 11. In other embodiments, the six grooves 211 can also be unevenly arranged on the edge of the connecting plate 21.

[0039] Optional, reference Figure 1-Figure 4 As shown, the number of the positioning top seat 23, the positioning pin 24, and the positioning base 25 is three, respectively. Each positioning top seat 23 corresponds to one positioning pin 24 and one positioning base 25. With three sets of positioning top seats 23, positioning pins 24, and positioning bases 25, the top cover 11 can be more accurately placed in the correct installation position, facilitating alignment of the multiple first through holes on the top cover 11 with the multiple threaded holes on the box body. In other embodiments, the number of the positioning top seat 23, the positioning pin 24, and the positioning base 25 can each be two.

[0040] Optional, reference Figure 1-Figure 4 As shown, the three positioning top seats 23 are evenly arranged on the edge of the connecting plate 21, so that the top cover 11 can be placed in the correct installation position more accurately, and the multiple first through holes on the top cover 11 can be easily aligned with the multiple threaded holes on the box body.

[0041] Optional, reference Figure 1-Figure 4 As shown, the bottom surface of the positioning pin 24 and the graphic mark 251 are both circular, which facilitates the manufacture of the positioning pin 24 and the graphic mark 251. In other embodiments, the bottom surface of the positioning pin 24 and the graphic mark 251 can be rectangular or other shapes.

[0042] Optional, reference Figure 2 As shown, the level 22 is fixed to the middle position of the connecting plate 21 by a suction cup, which makes it easy to install and remove the level 22. In other embodiments, the level 22 can be directly placed in the middle position of the connecting plate 21.

[0043] Optional, reference Figure 2As shown, the spirit level 22 is fixed to the middle position of the connecting plate 21 by an adhesive layer, which makes it easy to install and remove the spirit level 22.

[0044] Optional, reference Figure 4 As shown, the positioning top seat 23 is in the shape of a cuboid, which facilitates the manufacture of the positioning top seat 23. In other embodiments, the positioning top seat 23 may be in the shape of a cube or other shapes.

[0045] In summary, the present invention provides a jig for installing the top cover 11 of a gas box, comprising a connecting plate 21, a spirit level 22, a positioning top seat 23, a positioning pin 24 and a positioning base 25. The spirit level 22 can be placed on the top cover 11 through the connecting plate 21, and the spirit level 22 can be used to quickly determine whether the top cover 11 is in a horizontal state. By positioning the top seat 23, the positioning pin 24 and the positioning base 25, the multiple first through holes on the top cover 11 can be quickly aligned with the multiple threaded holes on the box body, so that when tightening multiple bolts, the bolts are easy to screw into place and are not easy to slip, thereby improving the efficiency of installing the top cover 11. The unexpected effect of this jig is that it can significantly improve the efficiency of installing the top cover 11 and prevent the bolts from slipping or damaging the top cover 11.

[0046] The above description is only a description of the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art based on the above disclosure shall fall within the scope of protection of the present invention.

Claims

1. A fixture for installing a top cover of a gas box, wherein the top cover is provided with a plurality of first through holes, washers are inserted into the first through holes, a portion of the washers is located inside the first through holes and a portion is located outside the first through holes, a second through hole is provided in the middle of the washers, and a plurality of bolts are respectively passed through the corresponding washers to fix the top cover to the box body of the gas box, characterized in that: The fixture includes a connecting plate, a level, a positioning top seat, a positioning pin and a positioning base; The edge of the connecting plate is provided with a plurality of grooves that match the side surfaces of the gasket; The level is fixed on the connecting plate; The positioning top seat is connected to the edge of the connecting plate, and a third through hole is provided on the positioning top seat; A graphic mark is provided on the positioning base; the positioning pin passes through the third through hole, and the bottom surface of the positioning pin coincides with the graphic mark.

2. A jig for installing a top cover of a gas box according to claim 1, characterized in that: The washer is cylindrical in shape, and the cross-section of the groove is semicircular in shape.

3. A jig for installing a top cover of a gas box according to claim 1, characterized in that: The number of the grooves and the number of the washers are both 6, and the grooves and the washers correspond one to one.

4. A jig for installing a top cover of a gas box as claimed in claim 3, characterized in that: The six grooves are evenly arranged on the edge of the connecting plate.

5. A jig for installing a top cover of a gas box according to claim 1, characterized in that: The number of the positioning top seat, the positioning pin and the positioning base is 3 respectively, and each positioning top seat corresponds to 1 positioning pin and 1 positioning base.

6. A jig for installing a top cover of a gas box as claimed in claim 5, characterized in that: The three positioning seats are evenly arranged on the edge of the connecting plate.

7. A jig for installing a top cover of a gas box according to claim 1, characterized in that: The bottom surface of the positioning pin and the shape of the graphic mark are both circular.

8. The jig for installing the top cover of a gas box according to claim 1, characterized in that: The level is fixed to the middle position of the connecting plate through a suction cup.

9. The jig for installing the top cover of a gas box according to claim 1, characterized in that: The level is fixed to the middle position of the connecting plate through an adhesive layer.

10. The jig for installing the top cover of a gas box according to claim 1, characterized in that: The positioning top seat is in the shape of a cuboid.

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