Conveying device for vacuum standard device

Abstract

The utility model provides a conveying device for a vacuum standard device, which comprises a containing part used for assembling a plurality of samples to be detected, the containing part and a detection chamber are transversely and movably arranged, the other end part of the containing part is provided with a gas blocking part, the gas blocking part is rotatably connected with a vertically arranged blocking piece part through a plurality of torsion springs, and the gas blocking piece part is provided with a gas inlet and a gas outlet; a plurality of pressing blocks which are driven by a telescopic driving device to stretch out and draw back and correspond to the blocking pieces are arranged in the side wall of the other end of the detection chamber; the gas blocking parts and the blocking pieces correspond to gaps of the inner wall of the detection chamber; the feeding mechanism is used for driving the containing piece to move transversely; after the feeding mechanism drives the accommodating piece to transversely move and feed into the detection chamber, the baffle piece is pressed by the extension of the plurality of pressing blocks; after the movable valve is opened, the pressing blocks retract to enable the blocking piece to be driven by the torsional spring to reset to be vertically arranged, and the air supply system supplies air to the detection chamber and pressurizes the detection chamber to push the blocking piece and the air blocking part to drive the containing piece to be discharged. The samples to be detected can be conveyed into the detection chamber in batches and output out of the detection chamber in batches.

Description

Technical Field

[0001] The utility model relates to the field of conveying devices, in particular to a conveying device used for a vacuum standard device. Background Art

[0002] Vacuum calibration technology is a key technology for ensuring accurate vacuum measurements and product quality. Currently, the static expansion method is the primary method used in vacuum calibration to verify the accuracy of vacuum gauge pressure detection. A vacuum gauge is an instrument used to measure gas pressure and vacuum level. The static expansion method is a widely used, precise method for generating standard pressures within low, medium, and high vacuum ranges. In the high vacuum range, it can be used to calibrate vacuum gauges such as magnetic levitation gauges, while in the low vacuum range, it can be used to calibrate vacuum gauges such as capacitance film gauges.

[0003] The existing vacuum standard device does not have a rapid batch detection standard solution that uses a detection chamber connected to a standard chamber for detection standards, and uses a container driven by a conveying device to send vacuum gauges to and from the detection chamber in batches. Instead, it is necessary to manually connect the vacuum gauges to be tested to the standard chamber one by one for detection standards. This makes the standard efficiency of the vacuum standard device very low, and it is difficult to meet the needs of semiconductor, aviation and other fields for rapid detection standards of large quantities of vacuum gauges.

[0004] The purpose of this utility model is to design a conveying device for a vacuum standard device in response to the problems existing in the above-mentioned prior art. Utility Model Content

[0005] In view of the problems existing in the above-mentioned prior art, the present invention provides a conveying device for a vacuum standard device, which can effectively solve the problems existing in the above-mentioned prior art.

[0006] The technical solution of the utility model is:

[0007] A conveying device for a vacuum standard device, the vacuum standard device comprising a detection chamber, one end of the detection chamber being provided with a movable valve and the other end being connected to an air supply system via an air inlet, the conveying device comprising:

[0008] A container for assembling a plurality of samples to be tested, wherein the container is arranged to be movable laterally between the container and the detection chamber, and the other end of the container is provided with an air blocking portion, which is rotatably connected to a vertically arranged blocking piece by a plurality of torsion springs, and a plurality of pressure blocks driven by a telescopic driving device and corresponding to the blocking piece are provided in the side wall of the other end of the detection chamber, and the air blocking portion and the blocking piece correspond to the gap between the inner wall of the detection chamber;

[0009] The feeding mechanism is used to drive the accommodating part to move horizontally; after the feeding mechanism drives the accommodating part to move horizontally and feed the material into the detection chamber, the baffle part is extended and pressed downward by the several pressure blocks; after the movable valve is opened, the several pressure blocks retract so that the baffle part is driven by the torsion spring to return to the vertical setting, and the air supply system pressurizes the air supply to the detection chamber to push the baffle part and the air blocking part to drive the accommodating part to discharge the material.

[0010] Furthermore, the detection chamber extends laterally and the inner bottom is laterally recessed with a plurality of limit grooves. The bottom of each of the accommodating parts is movably provided with a plurality of rows of rolling parts corresponding to the plurality of limit grooves, and the top is recessed with a plurality of accommodating areas for accommodating a plurality of samples to be tested. The bottom of the air-blocking part is convex corresponding to the inner wall gap of the plurality of limit grooves; the accommodating part slides into the detection chamber through the cooperation and limitation between the plurality of rows of rolling parts and the plurality of limit grooves.

[0011] Furthermore, the inner top of one end of the detection chamber is concave to form a limit area, and a limit portion corresponding to the limit area is convexly provided on one end of the accommodating member; after the accommodating member is fed into the corresponding detection chamber, the limit portion is laterally limited between the movable valve and the limit area.

[0012] Furthermore, the gas supplied by the gas supply system is dry nitrogen, the top of the other end of the accommodating part is concave to form a step portion located at the top of the air baffle portion, the lower end of the baffle portion is rotatably connected to the end of the step portion through a number of the torsion springs, and the bottom of the pressure block is inclined near one end of the accommodating part to form a guide surface corresponding to the baffle portion, and the telescopic drive device includes an electromagnet and a spring connected between the electromagnet and the pressure block, the height of the air inlet and the pressure block is lower than the height of the accommodating part, and the height of the detection chamber is 20mm-25mm; after the accommodating part is fed into the detection chamber, the baffle portion is pressed down by the pressure block and is laterally embedded in the step portion, and the air baffle portion and the air inlet are set at a distance.

[0013] Furthermore, there are a plurality of detection chambers and accommodating parts, and a plurality of drive grooves arranged at laterally intervals are recessed on the bottom of the accommodating part. The feeding mechanism includes a plurality of conveyor belts driven to rotate by the driving assembly, and the plurality of conveyor belts are spaced apart to correspond to the plurality of movable valves. The conveyor belt is provided with a push block corresponding to the end of the accommodating part and a drive block corresponding to the drive groove; when the conveyor belt drives the accommodating part to feed, the push block is used to push the accommodating part to feed into the detection chamber; when the baffle drives the accommodating part to discharge the material to one end docking with the corresponding conveyor belt, the drive block is used to rotate with the conveyor belt and be inserted into the corresponding drive groove to push the accommodating part to continue discharging the material.

[0014] Furthermore, the plurality of conveyor belts include a plurality of feed belts and a plurality of discharge belts distributed up and down, and the feed belts and the discharge belts are driven up and down by the lifting drive device together, the push block on the feed belt corresponds to the limiting part, and the push block on the discharge belt corresponds to the air blocking part, and the drive blocks are provided with a plurality of drive grooves at intervals along the horizontal direction, and at least two of them correspond to the drive groove together.

[0015] Therefore, the present invention provides the following effects and / or advantages:

[0016] 1. Under the premise of adding a detection chamber connected to the standard chamber to the vacuum standard device for batch testing of a number of samples to be tested to improve the testing efficiency, through the cooperation between the container, the air supply system and the feeding mechanism, it is realized that after the feeding mechanism drives the container to move horizontally and feed into the testing chamber, the blocking piece is extended and pressed down by the several pressure blocks to the lateral limit set between the top of the container and the bottom of the several pressure blocks, so that the container is automatically fed into the testing chamber by the addition of the feeding mechanism. At the same time, through the addition of the blocking piece and the pressure blocks, after the container enters the testing chamber, in addition to being restricted on one end by the limit part, the other end is also limited by the pressure of the several pressure blocks, which further improves the stability of the container in the testing chamber and improves the detection accuracy of the samples to be tested. Moreover, after the calibration is completed, the air supply system re-pressurizes the detection chamber. After the movable valve is opened, several pressure blocks retract so that the baffle member is driven by the torsion spring to reset to the vertical setting. The air baffle part and the baffle member are set with a gap between the inner wall of the detection chamber and several limit grooves. The air supply system continues to supply air to the detection chamber through the air inlet, and uses pressure to push the baffle member and the air baffle member to drive the container to be discharged to the feeding mechanism for output. Therefore, the air supply system not only has the function of re-pressurizing the air supply to the detection chamber, but also has the function of cooperating with the baffle member and the air baffle member to drive the container to be discharged out of the detection room. There is no need to design other mechanisms to realize automatic discharging of the container. On the premise of realizing automatic feeding and discharging of the container to improve the calibration efficiency of batch detection of samples to be tested, the driving cost is reduced.

[0017] 2. Through the cooperation between several rows of rolling parts and several limit grooves, the front and rear limit settings of the accommodating part are realized after it slides into the detection chamber. At the same time, the left and right limit of the limit part is realized through the movable valve and the limit area, and together the accommodating part fed into the detection chamber is limited in four directions of front, back, left and right, so as to improve the stability of the accommodating part in the detection chamber, and then improve the stability of the samples to be tested contained in several accommodating areas of the accommodating part, and avoid the situation in which the samples to be tested collide with the accommodating part or even fall off due to excessive sliding of the accommodating part when the detection chamber is evacuated or inflated during the static expansion method detection, thereby improving the stability and accuracy of the batch detection standard of the samples to be tested.

[0018] 3. After the accommodating part is fed into the detection chamber, the pressure block of the baffle is pressed down and horizontally embedded in the step portion, thereby reducing the height of the baffle by adding the step portion, and the other end of the accommodating part is arranged at a distance from the air inlet hole, so as to ensure that the air supply system can supply air to the detection chamber through the air inlet hole under the premise of reducing the height of the air inlet hole, thereby reducing the required height of the detection chamber, so as to reduce the air supply system's re-pressurization of the detection chamber and the air supply volume of the air pressurization to push the baffle and the air baffle to drive the accommodating part to discharge the material, thereby further reducing the driving cost of the automatic discharge of the accommodating part.

[0019] 4. When the conveyor belt drives the container to feed, the push block is used to push the container into the inspection chamber; when the baffle drives the container to discharge to one end and dock with the corresponding conveyor belt, the air supply system stops supplying air to the inspection chamber, and the drive block is used to rotate with the conveyor belt and insert into the corresponding drive groove to push the container to continue discharging. As a result, when the container is discharged, the air supply system only needs to supply air pressure to push the baffle and the air blocking part to drive the container to move a short distance so that one end of the container docks with the corresponding conveyor belt. The subsequent discharge action is completed by the drive block and the drive groove, which greatly reduces the air supply volume required by the air supply system to drive the container to discharge, and further reduces the air supply cost of the air supply system when the container is discharged.

[0020] 5. When the feed and discharge belts rise to the corresponding inspection chambers of the discharge belts, the feed belt is used to receive the second batch of containers, and the discharge belt is used to receive the first batch of containers in the inspection chamber. When the feed and discharge belts descend to the corresponding inspection chambers of the feed belts, the feed belt is used to feed the received second batch of containers into the inspection chamber, and the discharge belt is used to discharge the first batch of containers. Thus, by setting the feed and discharge belts up and down, the first batch of containers can be discharged to the discharge belt after inspection and calibration, and the second batch of containers can be loaded onto the feed belt simultaneously. The discharge belt can also discharge the first batch of containers and the feed belt can also feed the second batch of containers into the inspection chamber simultaneously. This improves the consistency and smoothness of the container loading and unloading actions, reduces the time difference between loading and unloading, improves the utilization rate of the feed and discharge belts, improves the loading and unloading efficiency of batch containers, and thus improves the efficiency of batch inspection and calibration.

[0021] It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a front view structural diagram of a conveying device used for a vacuum standard device.

[0023] Figure 2 This is a schematic diagram of the three-dimensional structure of the vacuum standard device after removing part of the shell.

[0024] Figure 3 for Figure 2 Schematic diagram of the side section structure of the left detection room.

[0025] Figure 4 for Figure 2 Schematic diagram of the front cross-section structure of the left detection room.

[0026] Figure 5 for Figure 4 Schematic diagram of the local structure on the left.

[0027] Figure 6 for Figure 4 Schematic diagram of the local structure on the right.

[0028] Figure 7 for Figure 6 Schematic diagram of the structure when the middle container is unloading.

[0029] Figure 8 It is a schematic diagram of the front cross-section structure of the feed belt, discharge belt and accommodating component.

[0030] Figure 9 for Figure 8 Schematic diagram of the local structure.

[0031] Figure 10 It is a schematic diagram of the three-dimensional structure of the container and the sample to be tested.

[0032] Figure 11 It is a schematic diagram of the three-dimensional structure of the accommodating component.

[0033] Figure 12 It is a bottom view of the structure of the accommodating component.

[0034] Figure 13 This is a schematic diagram of the module connection of the vacuum standard device. DETAILED DESCRIPTION

[0035] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the following embodiments and accompanying drawings:

[0036] refer to Figure 1-13 , a conveying device for a vacuum standard device, the vacuum standard device comprising:

[0037] Standard chamber 2, used to provide standard air pressure;

[0038] The detection chamber 3 is connected to the standard chamber 2 through a sealing valve 31. One end of the detection chamber 3 is provided with a movable valve 32, and the other end is connected to the gas supply system 5 through an air inlet 35. Specifically, in this embodiment, each detection chamber 3 can place 10 samples 9 to be tested. The volume of each detection chamber 3 is about 1.5L. The sealing valve 31 is a vacuum valve 43, and the movable valve 32 can be an automatic valve or a manual valve driven by a motor, a cylinder, etc. The sample 9 to be tested is a pressure sensor for measuring gas pressure and vacuum degree;

[0039] An exhaust system 4, used for evacuating the standard chamber 2 and the detection chamber 3;

[0040] The gas supply system 5 is used to supply gas and regulate pressure to the standard chamber 2 and the detection chamber 3;

[0041] Specifically, in this embodiment, the vacuum standard device adopts the static expansion method to test the standard of the sample 9 to be tested. Therefore, the gas supply system 5 is connected to the pressure stabilizing chamber 51 through the air inlet valve 52, and the pressure stabilizing chamber 51 is connected to the sampling chamber 1 through the air inlet valve 52. The sampling chamber 1 is connected to the standard chamber 2. The sampling chamber 1 belongs to the low vacuum and small volume side during the static expansion method test. In order to make the test accuracy of the sampling sensor device 511 in the pressure stabilizing chamber 51 within its optimal range, the volume of the sampling chamber 1 is designed to be 12mL or 120mL. The standard chamber 2 is an expansion chamber, which belongs to the high vacuum and large volume side during the static expansion method test. Its volume is designed to be 100L. The pressure stabilizing chamber 51 is connected to a number of sampling sensors 511. Specifically, the sampling sensors 511 are thin film gauges for detecting the volume of gas taken away by the sampling chamber 1 and Air pressure has the characteristics of high detection accuracy, thereby ensuring the accuracy of the static expansion method detection results; the exhaust system 4 includes a primary vacuum pump 41 and a secondary vacuum pump 42 connected by a vacuum valve 43, the primary vacuum pump 41 and the secondary vacuum pump 42 are connected to the standard chamber 2 through an exhaust valve 44 respectively, the pressure stabilizing chamber 51 is connected to the primary vacuum pump 41 through an exhaust valve 53, and the sampling chamber 1 is connected to the standard chamber 2 through an exhaust valve 54 and an intake valve 52 in turn. Specifically, the primary vacuum pump 41 is a roughing pump, the secondary vacuum pump 42 is a molecular pump, the intake valve 52, the exhaust valve 54, and the exhaust valve 53 are all stop valves, the vacuum valve 43 is a pneumatic baffle valve, the exhaust valve 44 between the primary vacuum pump 41 and the standard chamber 2 is a stop valve, and the exhaust valve 44 between the secondary vacuum pump 42 and the standard chamber 2 is a pneumatic plug-in valve.

[0042] The static expansion vacuum method is a method for obtaining the gas pressure after expansion based on Boyle's law. The formula for obtaining the equilibrium pressure P after expansion is:

[0043]

[0044] Among them, P0 is the pressure Pa in the small volume, which is specifically measured by the diaphragm gauge connected to the pressure stabilizing chamber 51, v is the small volume capacity L, specifically the volume of the sampling chamber 1, and V is the large volume capacity L, specifically the volume of the standard chamber 2.

[0045] The conveying device comprises:

[0046] The accommodating member 6 is used to accommodate a plurality of samples 9 to be tested. The accommodating member 6 is arranged to be movable laterally between the accommodating member 6 and the detection chamber 3. The other end of the accommodating member 6 is provided with an air blocking portion 64. The air blocking portion 64 is rotatably connected to a vertically arranged baffle member 65 via a plurality of torsion springs. The other end side wall of the detection chamber 3 is provided with a plurality of pressing blocks 36 driven by the telescopic driving device to extend and retract and corresponding to the baffle member 65. The air blocking portion 64 and the baffle member 65 correspond to the gap between the inner wall of the detection chamber 3.

[0047] A feeding mechanism 7, used for driving the accommodating member 6 to move laterally;

[0048] The arrangement of the above structure, under the premise that the vacuum standard device is additionally provided with a detection chamber 3 connected to the standard chamber 2 for batch detection standards of a plurality of samples to be tested 9 to improve the detection efficiency, the cooperation between the accommodating part 3, the air supply system 5 and the feeding mechanism 7 is realized, after the feeding mechanism 7 drives the accommodating part 6 to move horizontally and feed into the detection chamber 3, the blocking piece 65 is extended and pressed down by the plurality of pressing blocks 36 to the lateral limit set between the top of the accommodating part 6 and the bottom of the plurality of pressing blocks 36, thereby realizing the automatic feeding of the accommodating part 6 into the detection chamber 3 by the addition of the feeding mechanism 7. At the same time, by adding the blocking piece 65 and the pressing block 36, after the accommodating part 6 enters the detection chamber 3, in addition to being restricted on one end by the limiting part 63 to the left and right, the other end is also pressed and limited by the plurality of pressing blocks 36, further improving the stability of the accommodating part 6 in the detection chamber 3, improving the detection accuracy of the samples to be tested 9, and after the calibration is completed. After completion, the air supply system 5 supplies air to the detection chamber 3 and re-pressurizes it. After the movable valve 32 is opened, several of the pressure blocks 36 retract so that the baffle 65 is driven by the torsion spring to return to the vertical setting. The air baffle part 64 and the baffle 65 are set with a gap between the inner wall of the detection chamber 3 and several of the limit grooves 33. The air supply system 5 continues to supply air to the detection chamber 3 through the air inlet 35 to pressurize the baffle 65 and the air baffle part 64 to drive the accommodating part 6 to be discharged to the output of the feeding mechanism 7, so that the air supply system 5 not only has the function of supplying air to the detection chamber 3 and re-pressurizing it, but also has the function of cooperating with the baffle 65 and the air baffle part 64 to drive the accommodating part 6 to be discharged to the outside of the detection chamber 3. The automatic discharging of the accommodating part 6 can be realized without designing other mechanisms. On the premise of realizing automatic feeding and discharging of the accommodating part 6 and improving the batch detection and calibration efficiency of the samples 9 to be tested, the driving cost is reduced.

[0049] In order to improve the stability of the accommodating part 6 after feeding, the detection chamber 3 extends horizontally and the inner bottom is laterally recessed to provide a plurality of limit grooves 33. The bottom of each accommodating part 6 is movably provided with a plurality of rows of rolling members 62 corresponding to the plurality of limit grooves 33, and the top is recessed to provide a plurality of accommodating areas 61 for accommodating a plurality of samples 9 to be tested. Specifically, the rolling members 62 are ball bearings, and the shape of the accommodating area 61 can be adaptively changed according to the shape of the sample 9 to be tested. The bottom of the air-blocking part 64 is convex and corresponds to the inner wall gap of the plurality of limit grooves 33; the accommodating part 6 slides into the detection chamber 3 through the cooperation and limitation between the plurality of rows of rolling members 62 and the plurality of limit grooves 33; the inner top of one end of the detection chamber 3 is concave to form a limit area 34, and a limit part 63 corresponding to the limit area 34 is convex on one end of the accommodating part 6; after the accommodating part 6 is fed into the corresponding detection chamber 3, the limit part 63 is laterally limited and provided between the movable valve 32 and the limit area 34. Thus, through the cooperation between several rows of rolling elements 62 and several limiting grooves 33, the front and rear limiting settings of the accommodating element 6 after it slides into the detection chamber 3 are realized. At the same time, the left and right limiting parts 63 are realized by the movable valve 32 and the limiting area 34, and together the four-way limiting of the accommodating element 6 fed into the detection chamber 3 is realized, so as to improve the stability of the accommodating element 6 in the detection chamber 3, and further improve the stability of the sample 9 to be tested accommodated in several accommodating areas 61 of the accommodating element 6, and avoid the situation in which the sample 9 to be tested collides with the accommodating element 6 or even falls off when the detection chamber 3 is evacuated or inflated during the static expansion method detection, thereby improving the stability and accuracy of the batch detection standard of the sample 9 to be tested.

[0050] Since the gas supplied by the gas supply system 5 is dry nitrogen, in order to reduce the gas supply cost of the gas supply system 5 when the container 6 is discharged, the gas supplied by the gas supply system 5 is dry nitrogen, and the top of the other end of the container 6 is concave to form a step portion 66 located at the top of the air baffle 64, and the lower end of the baffle member 65 is rotatably connected to the end of the step portion 66 through a plurality of torsion springs. Specifically, the baffle member 65 is connected to the ear plates at both ends of the end of the step portion 66 by a rotating shaft, and the rotating shaft is provided with the torsion spring whose two ends are respectively connected to the ear plates and the baffle member 65. The bottom of the pressure block 36 is inclined near one end of the container 6 to form a guide surface 361 corresponding to the baffle member 65. The telescopic drive device includes an electromagnet and a spring connected between the electromagnet and the pressure block 36. The air inlet 35 and the pressure block 36 The height is lower than the height of the accommodating part 6, and the height of the detection chamber 3 is 20mm-25mm, specifically, the height of the detection chamber 3 is 22mm; after the accommodating part 6 is fed into the detection chamber 3, the baffle part 65 is pressed down by the pressure block 36 and is laterally embedded in the step portion 66, thereby reducing the height of the baffle part 65 by adding the step portion 66, and the other end of the accommodating part 6 is spaced apart from the air inlet 35, so as to ensure that the air supply system 5 can supply air to the detection chamber 3 through the air inlet 35 under the premise of reducing the height of the air inlet 35, thereby reducing the required height of the detection chamber 3, so as to reduce the air supply re-pressurization of the air supply system 5 to the detection chamber 3 and the air supply pressurization to push the baffle part 65 and the air baffle part 64 to drive the accommodating part 6 to discharge the material, and further reduce the driving cost of the automatic discharge of the accommodating part 6.

[0051] In order to improve the batch detection efficiency of the samples 9 to be tested, the number of the detection chambers 3 and the accommodating parts 6 is provided in a plurality. In order to further reduce the air supply cost of the air supply system 5 when the accommodating parts 6 are discharged, a plurality of drive grooves 67 arranged laterally at intervals are recessed on the bottom of the accommodating parts 6. The feeding mechanism 7 includes a plurality of conveyor belts driven to rotate by the driving assembly. The plurality of conveyor belts are spaced apart from each other to correspond to the plurality of movable valves 32. The conveyor belt is provided with a push block 71 corresponding to the end of the accommodating part 6 and a drive block 72 corresponding to the drive groove 67. When the conveyor belt drives the accommodating part 6 to feed, the push block 71 is used to push the accommodating part 6 to feed into the detection chamber 3. When the baffle 65 drives the accommodating part 6 to discharge to one end to dock with the corresponding conveyor belt, the air supply system 5 stops supplying air to the detection chamber 3. The drive block 72 is used to be inserted into the corresponding drive groove 67 as the conveyor belt rotates to push the accommodating part 6 to continue discharging. Therefore, when the container 6 is discharged, the air supply system 5 only needs to supply air pressure to push the baffle 65 and the air baffle 64 to drive the container 6 to move a short distance, so that one end of the container 6 can be docked with the corresponding conveyor belt. The subsequent discharge action is completed by the drive block 72 in cooperation with the drive groove 67, which greatly reduces the air supply volume required by the air supply system 5 to drive the container 6 to discharge the material, and further reduces the air supply cost of the air supply system 5 when the container 6 is discharged.

[0052] In order to improve the working efficiency of the feeding mechanism 7, the plurality of conveyor belts include a plurality of feed belts 73 and a plurality of discharge belts 74 distributed up and down. The feed belts 73 and the discharge belts 74 are driven up and down by the lifting drive device 75. The push block 71 on the feed belt 73 corresponds to the limit portion 63, and the push block 71 on the discharge belt 74 corresponds to the air blocking portion 64. The drive block 72 is provided with a plurality of drive grooves 67 at intervals in the horizontal direction, and at least two of them correspond to the drive grooves 67 together, so that the feed belt 73 or the discharge belt 74 is pushed up and down by at least two drive blocks 72 corresponding to the drive grooves 67 together. The accommodating parts 6 are laterally limited to improve the stability of the conveying belt; when the feed belt 73 and the discharge belt 74 rise to the point where the discharge belt 74 corresponds to the detection chamber 3, the feed belt 73 is used to receive the second batch of accommodating parts 6, and the discharge belt 74 is used to receive the first batch of accommodating parts 6 in the detection chamber 3; when the feed belt 73 and the discharge belt 74 descend to the point where the feed belt 73 corresponds to the detection chamber 3, the feed belt 73 is used to feed the received second batch of accommodating parts 6 into the detection chamber 3, and the discharge belt 74 is used to output the first batch of accommodating parts 6. Thus, by setting the lifting of the feed belt 73 and the discharge belt 74, the first batch of containers 6 can be discharged to the discharge belt 74 after inspection and calibration, and the second batch of containers 6 can be loaded onto the feed belt 73 simultaneously. The discharge belt 74 can output the first batch of containers 6 and the feed belt 73 can feed the second batch of containers 6 to the detection chamber 3 simultaneously, which improves the continuity and smoothness of the feeding and unloading actions of the containers 6, reduces the time difference between feeding and unloading, improves the utilization rate of the feed belt 73 and the discharge belt 74, improves the feeding and unloading efficiency of batch containers 6, and thereby improves the efficiency of batch inspection and calibration.

[0053] Specifically, in order to improve the overall structural compactness of the standard device, the vacuum standard device also includes a body 8, the number of the sampling chamber 1 and the standard chamber 2 are both two, and the two standard chambers 2 are symmetrically distributed in the upper part of the body 8, the sampling chamber 1 and the standard chamber 2 are connected one by one, and the left and right sides of the top of the body 8 are respectively provided with a plurality of detection chambers 3 arranged side by side on the top of the corresponding standard chamber 2, and the far ends of the two standard chambers 2 are respectively connected to the corresponding plurality of detection chambers 3, and the two standard chambers 2 are respectively connected to a vacuum sensor device The device 21 is specifically configured as a vacuum sensor 21 configured as a compound pressure sensor for detecting the vacuum degree of the standard chamber 2. The air supply system 5 is connected to the plurality of detection chambers 3 and the two standard chambers 2 on the left and right sides respectively through a plurality of pressure-recombining valves 55. Specifically, the pressure-recombining valves 55 are configured as stop valves. The feeding mechanism 7 is configured with two sets of detection chambers 3 symmetrically corresponding to the left and right sides. Specifically, three detection chambers 3 are configured on the left and right sides, respectively, so that the standard device can simultaneously detect 30 samples 9 to be tested. The standard device has a 10 -2-10 -1 Pa, 10 -1 -1Pa, 1-10Pa, 10-100Pa four vacuum ranges with an accuracy requirement of 10% standard function, the test time of 10 samples in each detection chamber 3 is 30min, the working pressure is 2×10 -2 Pa, the lower standard deviation is allowed to be 10%, that is, the absolute pressure rise within 30 minutes shall not exceed 2×10 -3 Pa.

[0054] In order to improve the stability of gas extraction in the sampling chamber 1 and the standard chamber 2, the gas supply system 5 is connected to a pressure stabilizing chamber 51 through an air inlet valve 52, and the pressure stabilizing chamber 51 is connected to the sampling chamber 1 through the air inlet valve 52. The pressure stabilizing chamber 51 is connected to a number of sampling sensor devices 511. Specifically, the sampling sensor device 511 is a thin film gauge, which is used to detect the volume and pressure of the gas taken away from the sampling chamber 1. It has the characteristics of high detection accuracy, thereby ensuring the accuracy of the static expansion method test results. The gas extraction system 4 includes a primary vacuum pump 41 and a secondary vacuum pump 42 connected by a vacuum valve 43. The primary vacuum pump 41 and the secondary vacuum pump 42 are connected. The vacuum pump 42 is connected to the standard chamber 2 through the exhaust valve 44, the pressure-stabilizing chamber 51 is connected to the first-level vacuum pump 41 through the exhaust valve 53, and the sampling chamber 1 is connected to the standard chamber 2 through the exhaust valve 54 and the intake valve 52 in sequence. Specifically, the first-level vacuum pump 41 is a roughing pump, the second-level vacuum pump 42 is a molecular pump, the intake valve 52, the exhaust valve 54, and the exhaust valve 53 are all stop valves, the vacuum valve 43 is a pneumatic baffle valve, the exhaust valve 44 between the first-level vacuum pump 41 and the standard chamber 2 is a stop valve, and the exhaust valve 44 between the second-level vacuum pump 42 and the standard chamber 2 is a pneumatic plug-in valve.

[0055] In order to achieve the heating and exhaust effect, the standard device also includes a baking system for heating the standard chamber 2, the pressure-stabilizing chamber 51, and the detection chamber 3. Specifically, the baking system can bake the standard chamber 2, the pressure-stabilizing chamber 51, and the detection chamber 3 to 150°C. The baking system includes a baking jacket and a baking control system, wherein the baking jacket is sewn together by a nickel-chromium wire heater and a glass fiber insulation layer, and its shape and size are sewn according to the shape of the constant volume chamber. The heating wire is evenly distributed in the heating jacket according to the required power, which can ensure uniform temperature distribution on the wall of the entire constant volume chamber, with a baking temperature range of 25°C to 200°C, an overshoot temperature of no more than 10°C during heating, and a control accuracy of ±5°C after stabilization. The specific structure of the baking system is prior art and is not the main invention of this application, so it will not be described here.

[0056] Working principle:

[0057] The feed belt 73 and the discharge belt 74 rise, so that the feed belt 73 receives the first batch of accommodating parts 6 output by the previous process flow, and then the feed belt 73 and the discharge belt 74 descend to the detection chamber 3 corresponding to the feed belt 73. The feed belt 73 pushes the first batch of accommodating parts 6 into the detection chamber 3 through the push block 71 and the drive block 72, and then the movable valve 32 is closed. The baffle 65 at the other end of the accommodating part 6 is pressed down by the extended plurality of pressure blocks 36 and is laterally embedded in the step portion 66.

[0058] After the exhaust system 4 evacuates the sampling chamber 1, standard chamber 2, and test chamber 3, the air supply system 5 supplies air to the sampling chamber 1, standard chamber 2, and test chamber 3 until the internal air pressure stabilizes and reaches the set pressure, and then begins to test the standard for 30 minutes;

[0059] After the standard is completed, the feed belt 73 and the discharge belt 74 rise to the detection chamber 3 corresponding to the discharge belt 74, the air supply system 5 supplies air to the detection chamber 3 and re-pressurizes the detection chamber 3. After the movable valve 32 is opened, the plurality of pressure blocks 36 retract so that the baffle member 65 is driven by the torsion spring to return to the vertical setting. The air baffle portion 64 and the baffle member 65 are set at a gap with the inner wall of the detection chamber 3 and the plurality of limit grooves 33. The air supply system 5 continues to supply air to the detection chamber 3 through the air inlet hole 35 to push the baffle member 65 and the air baffle portion 64 to drive the accommodating part 6 to discharge to the corresponding discharge belt 74 at one end. After the air supply system 5 stops supplying air to the detection chamber 3, the drive block 72 rotates with the discharge belt 74 and is inserted into the corresponding drive groove 67 to push the first batch of accommodating parts 6 to continue discharging. At the same time, the feed belt 73 synchronously takes over the second batch of accommodating parts 6 output by the previous level work process;

[0060] After the first batch of accommodating parts 6 and the second batch of accommodating parts 6 enter the discharge belt 74 and the feed belt 73 respectively, the feed belt 73 and the discharge belt 74 descend to the detection chamber 3 corresponding to the feed belt 73, and the feed belt 73 continues to feed the second batch of accommodating parts 6 into the detection chamber 3, and the discharge belt 74 outputs the first batch of accommodating parts 6 to the next level process.

[0061] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A conveying device for a vacuum standard device, the vacuum standard device comprising a detection chamber (3), one end of the detection chamber (3) is provided with a movable valve (32), and the other end is connected to the air supply system (5) through an air inlet (35), characterized in that: The conveying device comprises: A container (6) is used to assemble a plurality of samples to be tested (9), the container (6) and the detection chamber (3) are arranged to be movable horizontally, the other end of the container (6) is set as an air blocking portion (64), the air blocking portion (64) is rotatably connected to a vertically arranged blocking piece (65) through a plurality of torsion springs, and a plurality of pressing blocks (36) driven by a telescopic driving device to extend and retract and corresponding to the blocking piece (65) are provided in the side wall of the other end of the detection chamber (3), and the air blocking portion (64) and the blocking piece (65) correspond to the gap between the inner wall of the detection chamber (3); The feeding mechanism (7) is used to drive the accommodating part (6) to move horizontally; after the feeding mechanism (7) drives the accommodating part (6) to move horizontally and feed the material into the detection chamber (3), the baffle member (65) is extended and pressed downward by the plurality of pressure blocks (36); after the movable valve (32) is opened, the plurality of pressure blocks (36) retract so that the baffle member (65) is driven by the torsion spring to return to the vertical setting, and the air supply system (5) supplies air to the detection chamber (3) and pressurizes the baffle member (65) and the air blocking portion (64) to drive the accommodating part (6) to discharge the material.

2. A conveying device for a vacuum standard device according to claim 1, characterized in that: The detection chamber (3) extends laterally and has a plurality of limit grooves (33) formed in a transverse recess on the inner bottom. The bottom of each accommodating member (6) is provided with a plurality of rows of rolling members (62) corresponding to the plurality of limit grooves (33), and the top is recessed with a plurality of accommodating areas (61) for accommodating a plurality of samples (9) to be tested. The bottom of the air-blocking portion (64) is convex downward and corresponds to the inner wall gaps of the plurality of limit grooves (33). The accommodating member (6) slides into the detection chamber (3) through the cooperation and limiting between the plurality of rows of rolling members (62) and the plurality of limit grooves (33).

3. The conveying device for a vacuum standard device according to claim 1, characterized in that: The inner top of one end of the detection chamber (3) is concave to form a limiting area (34), and a limiting portion (63) corresponding to the limiting area (34) is convexly provided on one end of the accommodating member (6); after the accommodating member (6) is fed into the corresponding detection chamber (3), the limiting portion (63) is laterally limited and arranged between the movable valve (32) and the limiting area (34).

4. The conveying device for a vacuum standard device according to claim 2, characterized in that: The gas supplied by the gas supply system (5) is dry nitrogen. The top of the other end of the accommodating member (6) is concave to form a step portion (66) located at the top of the air blocking portion (64). The lower end of the blocking piece (65) is rotatably connected to the end of the step portion (66) through a plurality of torsion springs. The bottom of the pressing block (36) is inclined near one end of the accommodating member (6) to form a guide surface (361) corresponding to the blocking piece (65). The telescopic driving device includes an electromagnet. and a spring connected between the electromagnet and the pressure block (36), the heights of the air inlet (35) and the pressure block (36) are lower than the height of the accommodating part (6), and the height of the detection chamber (3) is 20mm-25mm; after the accommodating part (6) is fed into the detection chamber (3), the blocking piece (65) is pressed downward by the pressure block (36) and is laterally embedded in the step portion (66), and the air blocking portion (64) is spaced apart from the air inlet (35).

5. The conveying device for a vacuum standard device according to claim 3, characterized in that: The number of the detection chamber (3) and the accommodating member (6) is set to be several, and the bottom of the accommodating member (6) is recessed with several drive grooves (67) arranged at intervals in the transverse direction. The feeding mechanism (7) includes several conveyor belts driven to rotate by the driving component, and the several conveyor belts are spaced apart from each other to correspond to the several movable valves (32). The conveyor belt is provided with a push block (71) corresponding to the end of the accommodating member (6) and a drive block (72) corresponding to the drive groove (67); when the conveyor belt drives the accommodating member (6) to feed, the push block (71) is used to push the accommodating member (6) to feed into the detection chamber (3); when the blocking piece (65) drives the accommodating member (6) to discharge to one end of the corresponding conveyor belt, the drive block (72) is used to rotate with the conveyor belt and be inserted into the corresponding drive groove (67) to push the accommodating member (6) to continue discharging.

6. The conveying device for a vacuum standard device according to claim 5, characterized in that: The plurality of conveyor belts include a plurality of feed belts (73) and a plurality of discharge belts (74) distributed vertically. The feed belts (73) and the discharge belts (74) are driven to move up and down by a lifting drive device (75). The push block (71) on the feed belt (73) corresponds to the limiting portion (63), and the push block (71) on the discharge belt (74) corresponds to the air blocking portion (64). The drive block (72) is provided with a plurality of drive grooves (67) at intervals along the transverse direction, and at least two of the drive blocks correspond to one drive groove (67).

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