Cooling plate for vacuum pump

Abstract

The utility model relates to the technical field of vacuum pump cooling plates, in particular to a cooling plate for a vacuum pump, which comprises a plate body, a first sealing groove is arranged on one side of the plate body, a second sealing groove is arranged on the other side of the plate body, stress mechanisms are arranged at two ends of the plate body, through holes are arranged on the surface of the plate body, and a cooling mechanism is arranged on the plate body. The stress mechanism comprises a metal connector, the cooling mechanism comprises a water inlet, and by arranging the stress machine, when the vacuum pump needs to be connected with a shell of the vacuum pump, firstly, the metal connector of the stress mechanism is in threaded connection with a threaded connector through a threaded connector, and then two workers hold two handles to lift the plate body; at the moment, the handle serves as a stress point, so that the plate body is more easily lifted, all the through holes of the plate body are aligned with the butt joint holes of the vacuum pump shell, the plate body is more easily lifted, and the problem that an existing vacuum pump cooling plate is not easy to install at present is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pump cooling plates, in particular to a cooling plate for a vacuum pump. Background Art

[0002] In the modern industrial field, especially in the semiconductor manufacturing, chemical, pharmaceutical and other industries, vacuum pumps play an indispensable role as key equipment for obtaining and maintaining a vacuum environment. The stable operation and performance of vacuum pumps depend to a large extent on their effective cooling systems, of which the cooling plate is one of the core components of the cooling system.

[0003] Currently, most of the existing cooling plates use the following technologies:

[0004] Air cooling technology uses air flow to remove the heat generated by the vacuum pump cooling plate and the vacuum pump.

[0005] Water cooling technology sets up cooling water channels inside the cooling plate, and circulates cooling water in the channels through a water pump. After the cooling water absorbs the heat of the cooling plate, it takes the heat away, thereby achieving the purpose of cooling.

[0006] Oil cooling technology is similar to water cooling technology, but the cooling medium is cooling oil. The cooling oil circulates inside the cooling plate, absorbing heat and then carrying it away.

[0007] Heat pipe technology uses the working medium in the heat pipe to absorb heat in the evaporation section and evaporate into gas. The gas flows to the condensation section under the action of pressure difference, releases heat in the condensation section and condenses into liquid. The liquid then flows back to the evaporation section through the capillary structure, and this cycle is repeated to achieve heat transfer.

[0008] Semiconductor refrigeration technology is based on the Peltier effect. By applying a DC voltage across the semiconductor material, when current passes through the semiconductor material, heat transfer occurs at both ends, one end is heated and the other end is cooled. The cooling end is brought into contact with the vacuum pump cooling plate to achieve cooling.

[0009] However, during the implementation of the existing cooling plates using water cooling technology, at least the following technical problems were found: in order to achieve good thermal conductivity and stability, the existing cooling plates for vacuum pumps are mostly made of metal materials and have cooling water channels arranged inside. The cooling plates made of metal materials are heavy, and it is difficult for workers to align the mounting holes of the cooling plates with the docking bolts of the vacuum pump housing during installation or transportation, making it difficult to install the cooling plates and the vacuum pump housing. Utility Model Content

[0010] In response to the deficiencies in the prior art, the utility model provides a cooling plate for a vacuum pump, which solves the technical problem that the existing cooling plates for vacuum pumps are mostly made of metal materials and have cooling water channels inside in order to achieve good thermal conductivity and stability. The cooling plates made of metal materials are heavy, and it is difficult for workers to align the mounting holes of the cooling plates with the docking bolts of the vacuum pump casing during installation or transportation, resulting in the cooling plates being difficult to install.

[0011] (2) Technical solution

[0012] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0013] A cooling plate for a vacuum pump includes a plate body, a first sealing groove is provided on one side of the plate body, a second sealing groove is provided on the other side of the plate body, force-bearing mechanisms are provided at both ends of the plate body, a plurality of through holes are provided on the surface of the plate body, and the through holes are evenly distributed on the edge of the plate body, the plate body is provided with a cooling mechanism, the force-bearing mechanism includes a metal joint, and the cooling mechanism includes a water inlet.

[0014] Preferably, two threaded holes are provided on the edge of the plate body, and the two threaded holes are respectively provided on both sides of the plate body.

[0015] Preferably, the water inlet is provided on the surface of the plate body, a water outlet is provided on the surface of the plate body, a cooling water channel is provided inside the plate body, the cooling water channel is in a serpentine shape, and threads are provided on the inner sides of the water inlet and the water outlet.

[0016] Preferably, one end of the cooling water channel is connected to the water inlet, and the other end of the cooling water channel is connected to the water outlet.

[0017] Preferably, both ends of the plate body are fixedly connected with threaded joints.

[0018] Preferably, the metal joint is fixedly connected with a handle, the metal joint is provided with a threaded interface, and both metal joints are threadedly connected to the threaded joint via the threaded interface.

[0019] (3) Beneficial effects

[0020] 1. This application is provided with a force-bearing machine. When this application needs to be connected to the outer casing of a vacuum pump, the metal joint of the force-bearing mechanism is first threadedly connected to the threaded joint through a threaded interface. Then two staff members hold the two handles to lift the plate body. At this time, the handles serve as force points, making it easier to lift the plate body. The various through holes of the plate body are aligned with the docking holes of the vacuum pump outer casing, making it easier to lift the plate body of this application, thereby solving the problem that the existing vacuum pump cooling plate is difficult to install.

[0021] 2. The present application is provided with a water inlet and a water outlet, and a cooling water channel is connected between the water inlet and the water outlet. The cooling water channel is curved and covers the inside of the plate body. Water can be added to the cooling water channel through the water inlet and the water outlet, and then an appropriate heat dissipation device is installed to enable the present application to have a cooling effect. The main structures of the present application are made of metal, which makes the present application have higher stability and durability. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings.

[0023] Figure 1 This is a top view of the overall structure of the device of the present utility model;

[0024] Figure 2 This is a bottom view of the overall structure of the device of the present invention;

[0025] Figure 3 This is a cross-sectional structural diagram of the plate body of the present utility model;

[0026] Figure 4 This is a structural diagram of the force-bearing mechanism of the present utility model.

[0027] Legend: 1. Plate body; 2. First sealing groove; 3. Second sealing groove; 4. Threaded hole; 5. Force-bearing mechanism; 6. Water inlet; 7. Water outlet; Through hole 101, Through hole; Threaded joint 102, Threaded joint; 501, Metal joint; 502, Handle; 503, Threaded interface; 701, Cooling water channel. DETAILED DESCRIPTION

[0028] The embodiment of the present application provides a cooling plate for a vacuum pump, which effectively solves the problem that the existing cooling plates for vacuum pumps are mostly made of metal materials and have cooling water channels inside in order to achieve good thermal conductivity and stability. The cooling plates made of metal materials are heavy, and it is difficult for workers to align the mounting holes of the cooling plates with the docking bolts of the vacuum pump housing during installation or transportation, resulting in the problem that the cooling plates are difficult to install.

[0029] like Figure 1 、 Figure 2 、 Figure 3 and Figure 4As shown, the technical solution in the embodiment of the present application effectively solves the technical problem that the existing cooling plates for vacuum pumps are mostly made of metal materials to achieve good thermal conductivity and stability, and are provided with cooling water channels inside. The cooling plates made of metal materials are heavy, making it difficult for workers to align the mounting holes of the cooling plates with the docking bolts of the vacuum pump housing during installation or transportation, resulting in difficulty in installing the cooling plates. The overall concept is as follows:

[0030] In response to the problems existing in the prior art, the utility model provides a cooling plate for a vacuum pump, including a plate body 1, a first sealing groove 2 is opened on one side of the plate body 1, a second sealing groove 3 is opened on the other side of the plate body 1, force-bearing mechanisms 5 are provided at both ends of the plate body 1, a plurality of through holes 101 are provided on the surface of the plate body 1, and the through holes 101 are evenly distributed on the edge of the plate body 1, the plate body 1 is provided with a cooling mechanism, the force-bearing mechanism 5 includes a metal joint 501, and the cooling mechanism includes a water inlet 6.

[0031] Two threaded holes 4 are defined on the edge of the plate 1 , and the two threaded holes 4 are respectively disposed on both sides of the plate 1 .

[0032] The water inlet 6 is opened on the surface of the plate body 1, and the surface of the plate body 1 is also provided with a water outlet 7. A cooling water channel 701 is opened inside the plate body 1. The cooling water channel 701 is in a winding shape. The inner sides of the water inlet 6 and the water outlet 7 are both provided with threads.

[0033] One end of the cooling water channel 701 is connected to the water inlet 6 , and the other end of the cooling water channel 701 is connected to the water outlet 7 .

[0034] Both ends of the plate body 1 are fixedly connected with threaded joints 102 .

[0035] The metal joint 501 is fixedly connected to a handle 502 . The metal joint 501 is provided with a threaded interface 503 . Both metal joints 501 are threadedly connected to the threaded joint 102 via the threaded interface 503 .

[0036] By providing a force-bearing machine 5, when this application needs to be connected to the outer casing of the vacuum pump, the metal joint 501 of the force-bearing mechanism 5 is first threadedly connected to the threaded joint 102 through the threaded interface 503, and then two staff members hold the two handles 502 to lift the plate body 1. At this time, the handles 502 serve as force points, making it easier to lift the plate body 1, and aligning the various through holes 101 of the plate body 1 with the docking holes of the vacuum pump outer casing, making it easier to lift the plate body 1 of this application, thereby solving the problem that the existing vacuum pump cooling plate is difficult to install.

[0037] Working principle:

[0038] When this application needs to be connected to the housing of the vacuum pump, the metal joint 501 of the force-bearing mechanism 5 is first threadedly connected to the threaded joint 102 through the threaded interface 503, and then two staff members hold the two handles 502 to lift the plate body 1. At this time, the handles 502 serve as force points, making it easier to lift the plate body 1. The through holes 101 of the plate body 1 are aligned with the docking holes of the vacuum pump housing, and another person uses bolts to thread them with the threaded holes 4. The bolt is passed through one end of the threaded hole 4 and connected to the threaded hole of the housing. At this time, basic fixation is achieved, and then the bolt is passed through the through hole 101 and the docking hole, and fixed with a hexagonal nut to achieve fixed installation of the plate body 1 and the housing. After the installation is completed, the two force-bearing mechanisms 5 can be removed.

[0039] Finally, it should be noted that the above embodiments are merely examples for the purpose of illustrating the present invention and are not intended to limit the embodiments. Those skilled in the art will readily appreciate that other variations or modifications based on the above description are possible. It is not necessary and impossible to provide an exhaustive list of all possible embodiments. However, any obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A cooling plate for a vacuum pump, comprising a plate body (1), characterized in that: A first sealing groove (2) is provided on one side of the plate body (1), a second sealing groove (3) is provided on the other side of the plate body (1), force-bearing mechanisms (5) are provided at both ends of the plate body (1), a through hole (101) is provided on the surface of the plate body (1), and a cooling mechanism is provided on the plate body (1); Wherein, the force-bearing mechanism (5) includes a metal joint (501); Wherein, the cooling mechanism includes a water inlet (6).

2. A cooling plate for a vacuum pump according to claim 1, characterized in that: Two threaded holes (4) are provided on the edge of the plate body (1).

3. A cooling plate for a vacuum pump according to claim 2, characterized in that: The water inlet (6) is provided on the surface of the plate body (1), a water outlet (7) is also provided on the surface of the plate body (1), and a cooling water channel (701) is provided inside the plate body (1).

4. A cooling plate for a vacuum pump according to claim 3, characterized in that: One end of the cooling water channel (701) is in communication with the water inlet (6), and the other end of the cooling water channel (701) is in communication with the water outlet (7).

5. A cooling plate for a vacuum pump according to claim 4, characterized in that: Both ends of the plate body (1) are fixedly connected with threaded joints (102).

6. A cooling plate for a vacuum pump according to claim 5, characterized in that: The metal joint (501) is fixedly connected to a handle (502), and the metal joint (501) is provided with a threaded interface (503). Both of the metal joints (501) are threadedly connected to the threaded joint (102) via the threaded interface (503).

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