Electronic-grade hydrogen peroxide purification device
Through the double-layer structure reactor and membrane separation technology, combined with high-efficiency catalyst and cooling design, the problems of low efficiency and high cost of existing hydrogen peroxide purification are solved, and the effects of efficient removal of impurities and reduced energy consumption are achieved, meeting the requirements of electronic-grade products.
Patent Information
- Application Number
- CN202422519564.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-18
- Publication Date
- 2025-09-19
- Estimated Expiration
- 2034-10-18
AI Technical Summary
Existing hydrogen peroxide purification methods are inefficient, costly, difficult to remove trace impurities, and cannot meet electronic-grade purity requirements.
A double-layer structure reactor is adopted. The inner layer is the reaction zone equipped with catalyst and stirring device, and the outer layer is the cooling zone. Combining membrane separation technology and high-efficiency catalyst, the reaction temperature is controlled by coolant, insoluble precipitate is generated through catalytic reaction and impurities are separated by membrane components.
It achieves efficient removal of trace impurities in hydrogen peroxide, improves reaction rate, reduces energy consumption, meets electronic-grade product standards, and reduces operating costs.
Smart Images
Figure CN223351644U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an electronic-grade hydrogen peroxide purification device. Background Art
[0002] Electronic-grade hydrogen peroxide is widely used in industries such as semiconductors and optoelectronics, requiring extremely high purity. Existing hydrogen peroxide purification methods suffer from low efficiency, high costs, and difficulty removing trace impurities. There is an urgent need for an efficient and economical purification device. Utility Model Content
[0003] The purpose of the utility model is to solve the above deficiencies in the prior art and to provide an electronic grade hydrogen peroxide purification device.
[0004] An electronic-grade hydrogen peroxide purification device includes a raw material input port, a reactor, a separator and a storage tank. The raw material input port is provided on the reactor. The reactor adopts a double-layer structure design including an inner reaction zone and an outer cooling zone. The inner reaction zone is a reaction cavity. Catalyst particles are placed in the reaction cavity and a stirring device is provided. The outer cooling zone is provided with a coolant channel. The coolant channel is spirally distributed around the reaction cavity. The coolant channel is provided with a coolant inlet and a coolant outlet and is equipped with a coolant circulation pump. The reactor is connected to the separator. The separator includes a feed port provided at the top of the separator and a raw material discharge port and an impurity discharge port provided at the bottom of the separator. The separator is provided with stacked and stepped guide plates. A membrane assembly for removing impurities is provided between each layer of guide plates. Each membrane assembly includes a plurality of stacked membrane sheets. The impurity discharge port is connected to a sewage tank, and the raw material discharge port is connected to the storage tank.
[0005] As a further improvement, the catalyst includes a platinum metal catalyst, a palladium metal catalyst, a copper metal catalyst, a nickel metal catalyst, a sulfuric acid catalyst, and catalase.
[0006] As a further improvement, the catalyst is attached to a catalyst carrier, which includes an activated carbon carrier, an alumina carrier or a silica carrier.
[0007] As a further improvement, the stirring device includes a stirring paddle, which is connected to the drive motor via a transmission shaft.
[0008] As a further improvement, the reaction chamber is cylindrical or conical in shape.
[0009] As a further improvement, the material of the diaphragm is a polymer membrane or a ceramic membrane.
[0010] Beneficial effects:
[0011] The device can effectively remove trace impurities from hydrogen peroxide with a high removal rate, ensuring that the final product meets electronic-grade standards and meets the stringent requirements of industries such as semiconductors and optoelectronics. Through efficient catalysts and optimized reaction conditions, the reaction rate is significantly improved, shortening the purification process time. The optimized design of the cooling device and reactor can reduce energy consumption, improve overall equipment efficiency, and reduce operating costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 It is a schematic diagram of the overall structure of an electronic grade hydrogen peroxide purification device;
[0013] 1. Raw material inlet 2. Reactor 21. Reaction chamber 22. Catalyst carrier 23. Coolant channel 24. Coolant circulation pump 25. Stirring device 3. Separator 31. Raw material outlet 32. Impurity outlet 33. Guide plate 34. Diaphragm 4. Storage tank DETAILED DESCRIPTION
[0014] In order to deepen the understanding of the present invention, the present invention will be further described in detail below with reference to embodiments and drawings. The embodiments are only used to explain the present invention and do not constitute a limitation on the scope of protection of the present invention.
[0015] like Figure 1 As shown, an electronic-grade hydrogen peroxide purification device includes a raw material input port 1, a reactor 2, a reaction chamber 21, a catalyst carrier 22, a coolant channel 23, a coolant circulation pump 24, a stirring device 25, a separator 3, a raw material discharge port 31, an impurity discharge port 32, a guide plate 33, a diaphragm 34 and a storage tank 4.
[0016] An electronic-grade hydrogen peroxide purification device includes a raw material input port 1, a reactor 2, a separator 3 and a storage tank 4. The raw material input port 1 is provided on the reactor 2. The reactor 2 adopts a double-layer structure design including an inner reaction zone and an outer cooling zone. The inner reaction zone is a reaction chamber 21. The shape of the reaction chamber 21 is cylindrical or conical. Catalyst particles are placed in the reaction chamber 21 and a stirring device 25 is provided. The catalyst includes a platinum metal catalyst, a palladium metal catalyst, a copper metal catalyst, a nickel metal catalyst, a sulfuric acid catalyst, and a catalase. The catalyst is attached to a catalyst carrier 22. The catalyst carrier 22 includes an activated carbon carrier, an alumina carrier, or a silica carrier. The stirring device 25 includes a stirring paddle. The stirring paddle passes through the catalyst carrier 22. It is connected to the drive motor through a transmission shaft, and a coolant channel 23 is provided in the outer cooling zone. The coolant channel 23 is spirally distributed around the reaction chamber 21, and the coolant channel 23 is provided with a coolant inlet and a coolant outlet and is equipped with a coolant circulation pump 24. The reactor 2 is connected to the separator 3, and the separator 3 includes a feed port provided at the top of the separator 3 and a raw material discharge port 31 and an impurity discharge port 32 provided at the bottom of the separator 3. The separator 3 is provided with stacked stepped guide plates 33, and a membrane assembly for removing impurities is provided between each layer of the guide plates 33. Each membrane assembly includes several stacked diaphragms 34, and the material of the diaphragm 34 is a polymer membrane or a ceramic membrane. The impurity discharge port 32 is connected to the sewage tank, and the raw material discharge port 31 is connected to the storage tank 4.
[0017] Reactor 2, the core component of the electronic-grade hydrogen peroxide purification unit, features a double-layer design. The inner layer is the reaction zone, equipped with a highly efficient catalyst that promotes the reaction between hydrogen peroxide and impurities to form an insoluble precipitate. The outer layer is the cooling zone, where circulating coolant maintains the reaction temperature within a set range to prevent unnecessary decomposition reactions caused by high temperatures. Reactor 2 also features inlets and outlets and a stirring device 25 to ensure uniform mixing of the reactants and improve reaction efficiency.
[0018] The outer cooling zone is primarily used to control the temperature of Reactor 2, preventing excessive temperatures from affecting reaction efficiency. It operates by circulating coolant through the outer layer of Reactor 2, absorbing heat generated within. The cooling system is equipped with a temperature sensor and a regulating valve, enabling real-time monitoring and adjustment of the coolant flow and temperature to ensure stable reaction progress.
[0019] Separator 3 utilizes membrane separation technology, primarily for removing moisture and residual impurities from the post-reaction mixture. Its structure comprises multiple membrane modules with selective permeability, effectively separating hydrogen peroxide from impurities. The feed inlet of separator 3 is connected to reactor 2, while the raw material discharge port 31 leads to storage tank 4. Separator 3 also features a wastewater and impurity discharge port 32 for regularly discharging sediment and impurities during the separation process.
[0020] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. An electronic grade hydrogen peroxide purification device, characterized in that: It includes a raw material input port, a reactor, a separator and a storage tank. The raw material input port is arranged on the reactor. The reactor adopts a double-layer structure design including an inner reaction zone and an outer cooling zone. The inner reaction zone is a reaction cavity. Catalyst particles are placed in the reaction cavity and is equipped with a stirring device. The outer cooling zone is provided with a cooling liquid channel. The cooling liquid channel is spirally distributed around the reaction cavity. The cooling liquid channel is provided with a cooling liquid inlet and a cooling liquid outlet and is equipped with a cooling liquid circulation pump. The reactor is connected to the separator. The separator includes a feed port provided at the top of the separator and a raw material discharge port and an impurity discharge port provided at the bottom of the separator. The separator is provided with stacked and stepped guide plates. A membrane assembly for removing impurities is provided between each layer of guide plates. Each membrane assembly includes several stacked diaphragms. The impurity discharge port is connected to the sewage tank, and the raw material discharge port is connected to the storage tank.
2. An electronic grade hydrogen peroxide purification device according to claim 1, characterized in that, The catalyst includes a platinum metal catalyst, a palladium metal catalyst, a copper metal catalyst, a nickel metal catalyst, a sulfuric acid catalyst, and catalase.
3. An electronic grade hydrogen peroxide purification device according to claim 2, characterized in that, The catalyst is attached to a catalyst carrier, which includes an activated carbon carrier, an alumina carrier or a silica carrier.
4. An electronic grade hydrogen peroxide purification device according to claim 1, characterized in that, The stirring device includes a stirring paddle, which is connected to a driving motor through a transmission shaft.
5. An electronic grade hydrogen peroxide purification device according to claim 1, characterized in that, The reaction chamber is cylindrical or conical in shape.
6. An electronic grade hydrogen peroxide purification device according to claim 1, characterized in that: The material of the diaphragm is a polymer membrane or a ceramic membrane.