Filtering equipment for processing developing solution

Abstract

The utility model discloses a filtering device for processing developing liquid, which comprises a cabinet body, a filtering box is arranged on one side in the cabinet body, a stirring tank is arranged on the other side in the cabinet body, a stirrer is arranged in the stirring tank, a liquid outlet end at the bottom of the stirring tank is connected with a fine filtering box, and the bottom of the fine filtering box is connected with a filter screen. A filter screen, an ultrafiltration membrane and an activated carbon adsorption layer are arranged in the fine filtration box. Through the arrangement of the filter box, the stirring tank and the fine filter box, the filter box firstly performs preliminary filtration on the developing solution to remove large-particle impurities and suspended solids, then chemicals are added into the stirring tank for mixing, the chemical properties of the developing solution are further adjusted, and the chemical properties of the developing solution are further adjusted through multiple filtration in the fine filter box. According to the invention, impurities such as finer particles, colloids, organic matters, heavy metal ions, peculiar smell and the like can be removed, and the purity of the developing solution subjected to multi-stage filtration is obviously improved, so that the definition, resolution and reliability of a final product are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of developer filtering, in particular to filtering equipment for developer processing. Background Art

[0002] Developer is a chemical agent used in developing photographs or in microelectronics manufacturing. It is used to dissolve the soluble areas of the photoresist caused by exposure, allowing the exposed photosensitive material or photoresist pattern to appear. During the recycling process, the developer will gradually accumulate various impurities, such as suspended matter, colloidal substances, and unreacted developer. These impurities will affect the stability and development effect of the developer, resulting in a decrease in development quality. Therefore, filtration equipment is required to remove these impurities and improve the purity and quality of the developer.

[0003] Existing filtering equipment has poor filtering effect on developer and is difficult to effectively remove impurities such as tiny particles and colloids in the developer. As a result, the filtered developer still contains a lot of impurities, affecting the development effect. In addition, the existing developer filtration method often concentrates on filtering at a certain point on the filter screen, which will cause the filter screen at that point to bear a greater filtering burden, accelerating its wear and clogging.

[0004] For example, a PCB developer filtering device disclosed in announcement number CN202126568U filters the developer liquid only through a combination of an outer filter cylinder, an inner filter cylinder, and a filter cotton core. However, the composition of PCB developer liquid is often complex, containing a variety of chemical substances and particles. It is difficult to achieve high-precision filtration of the developer liquid by relying solely on the outer filter cylinder, the inner filter cylinder, and the filter cotton core.

[0005] Therefore, it is necessary to invent a developer processing filtering device to solve the above problems. Utility Model Content

[0006] The purpose of the utility model is to provide a filtering device for developing solution processing, so as to solve the problem of poor filtering effect in the technology.

[0007] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a filtering device for developer processing, comprising a cabinet, a filter box, a stirring tank and a fine filter box, a filter box being provided on one side of the interior of the cabinet, a liquid inlet being provided above the filter box and extending through the top of the cabinet, a stirring tank being provided on the other side of the interior of the cabinet, an agitator being provided inside the stirring tank, a feed hopper being provided on one side of the top of the stirring tank and extending through the top of the cabinet, a fine filter box being connected to the liquid outlet end at the bottom of the stirring tank, a filter screen, an ultrafiltration membrane and an activated carbon adsorption layer being provided inside the fine filter box.

[0008] Preferably, a drive motor is provided on the side wall of the cabinet, and a bevel gear set is provided above the drive motor. The bevel gear set consists of two meshing bevel gears, and one of the bevel gears is connected to the output end of the drive motor, and the output end of the other bevel gear is connected to a reciprocating screw. The drive motor provides power, and the bevel gear set is used to realize power conversion and transmission.

[0009] Preferably, the reciprocating screw is located on one side of the liquid inlet, and a sliding rod is provided on the other side of the liquid inlet. A No. 1 sliding sleeve is threadedly connected to the reciprocating screw, and a No. 2 sliding sleeve is slidably connected to the sliding rod. The combination of the reciprocating screw and the sliding rod is designed to achieve precise reciprocating motion of the liquid inlet.

[0010] Preferably, there are two No. 1 and No. 2 slides, which are fixedly mounted on the side walls at the front and rear ends of the liquid inlet. The continuous position change of the liquid inlet enables the developer to be evenly distributed at different positions of the coarse filter.

[0011] Preferably, a coarse filter and a fine filter are provided inside the filter box, the fine filter is located below the coarse filter, and the coarse filter and the fine filter are parallel to each other. The combination of the coarse filter and the fine filter achieves preliminary filtration and fine filtration of the developer.

[0012] Preferably, a water pump is provided on one side of the filter box, and a stirring tank is provided on one side of the water pump. The water outlet end of the filter box is connected to the water inlet end of the water pump, and the water outlet end of the water pump is connected to the water inlet end of the stirring tank. The water pump is used to transport the filtered developer from the filter box to the stirring tank.

[0013] Preferably, a rotary motor is provided on the top of the cabinet, and the output end of the rotary motor is connected to the top end of the stirrer. The stirrer is driven by the rotary motor to achieve mixing and homogenization of the developer.

[0014] Preferably, the filter screen, ultrafiltration membrane and activated carbon adsorption layer are designed to be stacked in sequence from top to bottom. The filter screen, ultrafiltration membrane and activated carbon adsorption layer are parallel to each other. The filter screen, ultrafiltration membrane and activated carbon adsorption layer form a multi-layer filtration structure. This design can further improve the filtration accuracy and purification effect.

[0015] In the above technical solution, the technical effects and advantages provided by the utility model are:

[0016] 1. Through the configuration of the filter box, stirring tank and fine filter box, the filter box first performs preliminary filtration on the developer to remove large particles and suspended solids. Then, by adding reagents in the stirring tank for mixing, the chemical properties of the developer are further adjusted. The multiple filtration inside the fine filter box can remove even smaller particles, colloids, organic matter, heavy metal ions, odors and other impurities. After multi-stage filtration, the purity of the developer is significantly improved, thereby improving the clarity, resolution and reliability of the final product.

[0017] 2. By setting up the reciprocating screw and the sliding rod, the combined design of the reciprocating screw and the sliding rod enables the liquid inlet to reciprocate on the left and right sides of the filter box. This movement mode enables the developer to be evenly distributed in different positions of the coarse filter and the fine filter, reducing the situation of excessive local pressure on the coarse filter and the fine filter, avoiding the problem of local overload or underutilization, and helping to extend the service life of the coarse filter and the fine filter. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the cross-sectional three-dimensional structure of the cabinet and filter box of the present invention;

[0020] Figure 3 This is a schematic diagram of the three-dimensional structure of the reciprocating screw and the sliding rod of the utility model;

[0021] Figure 4 This is a schematic diagram of the cross-sectional three-dimensional structure of the stirring tank of the present invention;

[0022] Figure 5 This is a schematic diagram of the cross-sectional three-dimensional structure of the fine filter box of the present utility model.

[0023] Description of reference numerals:

[0024] 1. Cabinet; 2. Filter box; 3. Liquid inlet; 4. Drive motor; 5. Bevel gear set; 6. Reciprocating screw; 7. Slide sleeve No. 1; 8. Slide rod; 9. Slide sleeve No. 2; 10. Coarse filter screen; 11. Fine filter screen; 12. Water pump; 13. Mixing tank; 14. Feed hopper; 15. Rotating motor; 16. Agitator; 17. Fine filter box; 18. Filter screen; 19. Ultrafiltration membrane; 20. Activated carbon adsorption layer. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0026] The utility model provides Figure 1-5The shown filtering equipment for developer processing includes a cabinet 1, a filter box 2, a stirring tank 13 and a fine filter box 17. The filter box 2 is provided on one side of the interior of the cabinet 1, and a liquid inlet 3 is provided above the filter box 2 and extends through the top of the cabinet 1. The other side of the interior of the cabinet 1 is provided with a stirring tank 13, and an agitator 16 is provided inside the stirring tank 13. A feed hopper 14 is provided on one side of the top of the stirring tank 13 and extends through the top of the cabinet 1. The bottom liquid outlet end of the stirring tank 13 is connected to the fine filter box 17, and the interior of the fine filter box 17 is provided with a filter screen 18, an ultrafiltration membrane 19 and an activated carbon adsorption layer 20.

[0027] A driving motor 4 is provided on the side wall of the cabinet 1, and a bevel gear set 5 is provided above the driving motor 4. The bevel gear set 5 consists of two meshing bevel gears, and one of the bevel gears is connected to the output end of the driving motor 4, and the output end of the other bevel gear is connected to a reciprocating screw 6. The reciprocating screw 6 is located on one side of the liquid inlet 3, and a slide rod 8 is provided on the other side of the liquid inlet 3. A No. 1 slide sleeve 7 is threadedly connected to the reciprocating screw 6, and a No. 2 slide sleeve 9 is slidably connected to the slide rod 8. There are two No. 1 slide sleeves 7 and No. 2 slide sleeves 9, and the two No. 1 slide sleeves 7 and No. 2 slide sleeves 9 are fixedly mounted on the side walls at the front and rear ends of the liquid inlet 3.

[0028] The driving motor 4 provides power, and the bevel gear set 5 realizes the conversion and transmission of power, converting the rotational motion into the linear reciprocating motion of the reciprocating screw 6. This design enables the liquid inlet 3 to move back and forth along a specific path. When the reciprocating screw 6 rotates, the No. 1 slide 7 performs a linear reciprocating motion along the thread of the screw, and at the same time drives the No. 2 slide 9 to slide on the slide rod 8. This combined design ensures that the liquid inlet 3 can move back and forth smoothly, so that the developer can be evenly distributed on the coarse filter 10 of the filter box 2.

[0029] A coarse filter screen 10 and a fine filter screen 11 are provided inside the filter box 2. The fine filter screen 11 is located below the coarse filter screen 10. The coarse filter screen 10 and the fine filter screen 11 are parallel to each other. A water pump 12 is provided on one side of the filter box 2, and a stirring tank 13 is provided on one side of the water pump 12. The water outlet end of the filter box 2 is connected to the water inlet end of the water pump 12, and the water outlet end of the water pump 12 is connected to the water inlet end of the stirring tank 13. A rotating motor 15 is provided on the top of the cabinet 1, and the output end of the rotating motor 15 is connected to the top of the agitator 16. The filter screen 18, ultrafiltration membrane 19 and activated carbon adsorption layer 20 are stacked in sequence from top to bottom, and the filter screen 18, ultrafiltration membrane 19 and activated carbon adsorption layer 20 are parallel to each other.

[0030] The coarse filter 10 first removes large particles of impurities in the developer, and the fine filter 11 further removes smaller particles and suspended matter. The stirring tank 13 is used to receive and mix the filtered developer and reagent. The agitator 16 rotates under the drive of the rotary motor 15 to evenly mix the reagent into the developer and adjust its chemical properties and stability. At the same time, the fine filter box 17 can deeply filter the mixed developer, ensuring that the final discharged developer has extremely high purity and stability.

[0031] Working principle of this utility model:

[0032] Refer to the instruction manual Figure 1-3 When using the present invention, the developer first enters the filter box 2 through the liquid inlet 3. Before the developer enters the filter box 2 through the liquid inlet 3, the drive motor 4 drives the reciprocating screw 6 to rotate through the bevel gear set 5, and the reciprocating screw 6 drives the No. 1 sliding sleeve 7 to move on the screw, while the No. 2 sliding sleeve 9 slides on the slide rod 8. The two together drive the liquid inlet 3 to reciprocate, so as to optimize the uniform distribution of the developer liquid on the coarse filter 10 and the fine filter 11. When the developer enters the filter box 2, it first passes through the coarse filter 10 to remove large particles of impurities, and then passes through the fine filter 11 to further remove smaller particles and suspended matter.

[0033] Refer to the instruction manual Figure 4-5 When using the present invention, the filtered developer is sent to the stirring tank 13 through the water pump 12. In the stirring tank 13, the required reagents are added through the feed hopper 14 and mixed by the stirrer 16 to evenly mix the reagents and the developer, and adjust the chemical properties and stability of the developer. The mixed developer flows from the bottom of the stirring tank 13 into the fine filter box 17. In the fine filter box 17, the developer passes through the filter screen 18, the ultrafiltration membrane 19 and the activated carbon adsorption layer 20 in sequence to remove tiny particles, colloidal substances, odors and harmful substances, thereby achieving deep purification. The developer after deep filtration is then pumped out of the fine filter box 17 through the pump body for subsequent use or processing.

Claims

1. A filtering device for developer processing, comprising a cabinet (1), a filter box (2), a stirring tank (13) and a fine filter box (17), characterized in that: A filter box (2) is provided on one side of the interior of the cabinet (1), a liquid inlet (3) is provided above the filter box (2) and extends through the top of the cabinet (1), a stirring tank (13) is provided on the other side of the interior of the cabinet (1), a stirrer (16) is provided inside the stirring tank (13), a feed hopper (14) is provided on one side of the top of the stirring tank (13) and extends through the top of the cabinet (1), a fine filter box (17) is connected to the liquid outlet end at the bottom of the stirring tank (13), and a filter screen (18), an ultrafiltration membrane (19) and an activated carbon adsorption layer (20) are provided inside the fine filter box (17).

2. The filtering device for developer processing according to claim 1, characterized in that: A drive motor (4) is provided on the side wall of the cabinet (1), and a bevel gear set (5) is provided above the drive motor (4). The bevel gear set (5) is composed of two meshing bevel gears, one of which is connected to the output end of the drive motor (4), and the output end of the other bevel gear is connected to a reciprocating screw (6).

3. The filtering device for developer processing according to claim 2, characterized in that: The reciprocating screw (6) is located on one side of the liquid inlet (3), and a sliding rod (8) is provided on the other side of the liquid inlet (3). A first sliding sleeve (7) is threadedly connected to the reciprocating screw (6), and a second sliding sleeve (9) is slidably connected to the sliding rod (8).

4. The filtering device for developer processing according to claim 3, characterized in that: There are two No. 1 sliding sleeves (7) and No. 2 sliding sleeves (9), and the two No. 1 sliding sleeves (7) and No. 2 sliding sleeves (9) are fixedly mounted on the side walls at the front and rear ends of the liquid inlet (3).

5. The filtering device for developer processing according to claim 1, characterized in that: A coarse filter (10) and a fine filter (11) are provided inside the filter box (2); the fine filter (11) is located below the coarse filter (10); and the coarse filter (10) and the fine filter (11) are parallel to each other.

6. The filtering device for developer processing according to claim 5, characterized in that: A water pump (12) is provided on one side of the filter box (2), a stirring tank (13) is provided on one side of the water pump (12), a water outlet of the filter box (2) is connected to a water inlet of the water pump (12), and a water outlet of the water pump (12) is connected to a water inlet of the stirring tank (13).

7. The filtering device for developer processing according to claim 6, characterized in that: A rotating motor (15) is provided on the top of the cabinet (1), and an output end of the rotating motor (15) is connected to the top end of the stirrer (16).

8. The filtering device for developer processing according to claim 1, characterized in that: The filter screen (18), ultrafiltration membrane (19) and activated carbon adsorption layer (20) are designed to be stacked in sequence from top to bottom, and the filter screen (18), ultrafiltration membrane (19) and activated carbon adsorption layer (20) are parallel to each other.

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