Sealing flange and remote plasma cavity equipment

Abstract

The utility model is applicable to the semiconductor field, and discloses a sealing flange and remote plasma cavity equipment, the remote plasma cavity equipment comprises a remote plasma cavity device, a process cavity and a sealing flange, the male head and the female head of the sealing flange are provided, the male head comprises an inner cylinder and an outer cylinder which are coaxially arranged, the inner cylinder is installed in the outer cylinder, and the outer cylinder is installed in the process cavity. One end, exposed out of the outer cylinder, of the inner cylinder is sleeved with a sealing ring, the end face of the outer cylinder is provided with a magnetic part, the magnetic part is arranged on the peripheral side of the inner cylinder, the female head comprises a connecting section and a sealing section extending outwards from the connecting section, the end face of the connecting section is provided with an electromagnet and a wiring terminal, and the electromagnet and the magnetic part are arranged in a matched mode. The inner cylinder is inserted into the connecting section and extends into the sealing section, a sealing ring is arranged between the inner cylinder and the sealing section, one end, far away from the sealing section, of the inner cylinder is mounted on a remote plasma cavity device, the sealing section is mounted on a process cavity, and the sealing flange can be quickly assembled and disassembled and has good sealing performance.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a sealing flange and remote plasma cavity equipment. Background Art

[0002] In the field of plasma technology, the removal and installation of flange fixtures is a frequent and crucial operation. However, the limitations of existing technologies in this process are becoming increasingly apparent. These complex, time-consuming, and labor-intensive operations not only increase production costs but also limit efficiency and flexibility. This is especially true in applications requiring frequent chamber replacement or maintenance, such as scientific research, semiconductor manufacturing, and material processing. Traditional flange fixture removal and installation processes are particularly cumbersome and inefficient. Utility Model Content

[0003] The first purpose of the utility model is to provide a sealing flange, which aims to solve the technical problem that the existing flanges with good sealing performance cannot be quickly assembled and disassembled.

[0004] In order to achieve the above purpose, the solution provided by the utility model is:

[0005] A sealing flange comprises a male head and a female head, the male head comprises an inner cylinder and an outer cylinder arranged coaxially, the inner cylinder is installed in the outer cylinder, and a sealing ring is sleeved on the end of the inner cylinder exposed from the outer cylinder, and a magnetic part is provided on the end face of the outer cylinder, and the magnetic part is arranged on the circumference of the inner cylinder, the female head comprises a hollow connecting section and a sealing section extending outward from the connecting section, an electromagnet and a terminal electrically connected to the electromagnet are provided on the end face of the connecting section, the electromagnet is arranged in cooperation with the magnetic part, the inner cylinder is inserted into the connecting section and extends into the sealing section, and a sealing ring is provided between the inner cylinder and the sealing section, the end of the inner cylinder away from the sealing section is used for fixed connection with a remote plasma chamber device, and the sealing section is used for installation on the process chamber.

[0006] Preferably, the magnetic component includes at least two sub-magnetic components, and the two or more sub-magnetic components are arranged around the outside of the inner cylinder.

[0007] Preferably, the sealing ring is a fluororubber sealing ring.

[0008] Preferably, a sealing groove is provided at one end of the inner cylinder exposed from the outer cylinder, and the sealing ring is installed in the sealing groove.

[0009] Preferably, the end of the inner cylinder exposed from the outer cylinder is provided with a chamfer.

[0010] Preferably, the inner cavity of the connecting section is a tapered cavity that gradually shrinks in a direction away from the inner cylinder.

[0011] Preferably, the end of the sealing section close to the connecting section is configured to be conical, the inner cavity of the sealing section close to the connecting section is a conical cavity, and the maximum diameter of the inner cavity of the sealing section is equal to the minimum diameter of the inner cavity of the connecting section.

[0012] The second object of the present invention is to provide a remote plasma chamber device, including a remote plasma chamber device, a process chamber and the sealing flange as described above, wherein one end of the inner cylinder away from the sealing section is installed on the remote plasma chamber device, and the sealing section is installed on the process chamber.

[0013] The sealing flange provided by the utility model includes a male head and a female head, and the male head and the female head are respectively provided with a magnetic part and an electromagnet. The cooperation of the magnetic part and the electromagnet not only makes the connection between the male head and the female head faster and firmer, thereby improving the production efficiency of the microwave remote plasma cavity device, but also reduces the torque damage that may be caused by traditional bolt connections, thereby improving the safety of operation; and adopts an easy-to-disassemble magnetic connection structure, which makes the sealing flange more convenient during maintenance, reduces maintenance costs and time, and furthermore, a sealing ring is provided between the inner cylinder and the sealing section, thereby realizing double sealing, effectively preventing gas leakage and plasma escape, and ensuring the sealing and safety of the microwave remote plasma cavity device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0015] Figure 1 This is a schematic structural diagram of a remote plasma chamber device provided by an embodiment of the present utility model;

[0016] Figure 2 This is a schematic structural diagram of a sealing flange provided by an embodiment of the present utility model;

[0017] Figure 3 This is an exploded view of a sealing flange provided by an embodiment of the present utility model;

[0018] Figure 4 It is a cross-sectional view of a sealing flange provided in an embodiment of the present utility model.

[0019] Description of Figure Numbers:

[0020] 100, sealing flange; 10, male connector; 11, inner cylinder; 111, sealing groove; 112, chamfer; 12, outer cylinder; 20, female connector; 21, connecting section; 22, sealing section; 30, sub-magnetic component; 40, electromagnet; 50, terminal block; 200, remote plasma chamber device; 300, process chamber. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0023] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element.

[0024] In addition, the descriptions of "first," "second," etc. in this utility model are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this utility model.

[0025] like Figures 2 to 4 As shown, it is a sealing flange of an embodiment of the present invention.

[0026] See also Figure 2-Figure 4The sealing flange 100 of the utility model embodiment includes a male head 10 and a female head 20. The male head 10 includes an inner cylinder 11 and an outer cylinder 12 arranged coaxially. The inner cylinder 11 is installed in the outer cylinder 12. The end of the inner cylinder 11 exposed from the outer cylinder 12 is sleeved with a sealing ring. The end surface of the outer cylinder 12 is provided with a magnetic member. The magnetic member is arranged on the circumferential side of the inner cylinder 11. The female head 20 includes a hollow connecting section 21 and a sealing section 22 extending outward from the connecting section 21. The end surface of the connecting section 21 is provided with an electromagnet 40 and a terminal 50 electrically connected to the electromagnet 40. The electromagnet 40 is arranged in cooperation with the magnetic member. The inner cylinder 11 is inserted into the connecting section 21 and extends into the sealing section 22. A sealing ring (not shown) is provided between the inner cylinder 11 and the sealing section 22. The end of the inner cylinder 11 away from the sealing section 22 is used to connect with the remote plasma chamber device 200, and the sealing section 22 is used to be installed on the process chamber 300.

[0027] In this embodiment, the inner cylinder 11 and the outer cylinder 12 may be an integrated structure or a split structure.

[0028] It should be noted that the magnetic part can be an integral annular structure or a split annular structure. When the magnetic part is a split annular structure, the magnetic part includes at least two sub-magnetic parts 30, and the two or more sub-magnetic parts 30 are arranged around the outside of the inner cylinder 11.

[0029] In this embodiment, four sub-magnetic components 30 are provided, and the four sub-magnetic components 30 are distributed on the end surface of the outer cylinder 12 .

[0030] In this embodiment, the sub-magnetic component 30 is a magnet.

[0031] In this embodiment, the sealing ring is a fluororubber sealing ring that is resistant to high pressure and high temperature, ensuring good sealing performance even in extreme environments.

[0032] During installation, first install the outer cylinder 12 of the male connector 10 on the remote plasma chamber device 200, then install the sealing section 22 of the female connector 20 on the process chamber 300, and then insert the inner cylinder 11 of the male connector 10 into the connecting section 21 of the female connector 20, and then energize the electromagnet 40 so that the electromagnet 40 and the magnetic part produce an adsorption effect, thereby fixing the male connector 10 and the female connector 20 together.

[0033] The sealing flange 100 of this embodiment includes a male head 10 and a female head 20, and the male head 10 and the female head 20 are respectively provided with a magnetic part and an electromagnet 40. The cooperation between the magnetic part and the electromagnet 40 not only makes the connection between the male head 10 and the female head 20 faster and stronger, thereby improving the production efficiency of the microwave remote plasma cavity device 200, but also reduces the torque damage that may be caused by traditional bolt connections, thereby improving the safety of operation; and adopts an easy-to-disassemble magnetic connection structure, which makes the sealing flange 100 more convenient during maintenance, reduces maintenance costs and time, and furthermore, a sealing ring is provided between the inner cylinder 11 and the sealing section 22, thereby realizing double sealing, effectively preventing gas leakage and plasma escape, and ensuring the sealing and safety of the microwave remote plasma cavity device 200.

[0034] See also Figure 3 and Figure 4 As shown, in some embodiments, for example, a sealing groove 111 is provided at one end of the inner cylinder 11 exposed from the outer cylinder 12, and the sealing ring is installed in the sealing groove 111. The design of the sealing groove 111 enables the sealing ring to evenly distribute pressure when subjected to pressure, thereby avoiding damage or leakage of the sealing ring caused by excessive local pressure.

[0035] See also Figure 3 As shown, in some embodiments, illustratively, the end of the inner cylinder 11 exposed from the outer cylinder 12 is provided with a chamfer 112 . This design can ensure a smooth sealing surface, reduce wear, and extend the service life of the sealing flange 100 .

[0036] See also Figure 3 and Figure 4 As shown, in some embodiments, the inner cavity of the connecting section 21 is a tapered cavity that gradually shrinks away from the inner cylinder 11, so that the connecting section 21 forms a guiding structure, which facilitates the rapid positioning and insertion of the inner cylinder 11 into the interior of the connecting section 21.

[0037] It can be understood that the end of the sealing section 22 close to the connecting section 21 can be set to a conical shape. At the same time, the part of the inner cavity of the sealing section 22 close to the connecting section 21 is a conical cavity, and the maximum diameter of the inner cavity of the sealing section 22 is equal to the minimum diameter of the inner cavity of the connecting section 21. The conical transition between the connecting section 21 and the sealing section 22 reduces sudden dimensional changes, making the inner cylinder 11 smoother during the insertion process, reducing jamming and resistance.

[0038] See also Figures 1-4As shown, an embodiment of the present invention also provides a remote plasma chamber device, including a remote plasma chamber device 200, a process chamber 300 and a sealing flange 100. The sealing flange 100 adopts the sealing flange 100 described above, and the end of the inner cylinder 11 away from the sealing section 22 is installed on the remote plasma chamber device 200, and the sealing section 22 is installed on the process chamber 300.

[0039] The remote plasma cavity device of this embodiment adopts a magnetically connected sealing flange 100, which includes a male head 10 and a female head 20. The male head 10 and the female head 20 are respectively provided with a magnetic part and an electromagnet 40. The cooperation between the magnetic part and the electromagnet 40 not only makes the connection between the male head 10 and the female head 20 faster and stronger, thereby improving the production efficiency of the microwave remote plasma cavity device 200, but also reduces the torque damage that may be caused by traditional bolt connections, thereby improving the safety of operation; and adopts an easy-to-disassemble magnetic connection structure, which makes the sealing flange 100 more convenient during maintenance, reduces maintenance costs and time, and furthermore, a sealing ring is provided between the inner cylinder 11 and the sealing section 22, thereby realizing double sealing, effectively preventing gas leakage and plasma escape, and ensuring the sealing and safety of the microwave remote plasma cavity device 200.

[0040] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A sealing flange, characterized in that: It includes a male head and a female head, the male head includes an inner cylinder and an outer cylinder arranged coaxially, the inner cylinder is installed in the outer cylinder, and a sealing ring is provided at one end of the inner cylinder exposed from the outer cylinder, and a magnetic part is provided on the end face of the outer cylinder, and the magnetic part is provided on the peripheral side of the inner cylinder, the female head includes a hollow connecting section and a sealing section extending outward from the connecting section, an electromagnet and a terminal electrically connected to the electromagnet are provided on the end face of the connecting section, the electromagnet is arranged in cooperation with the magnetic part, the inner cylinder is inserted into the connecting section and extends into the sealing section, and a sealing ring is provided between the inner cylinder and the sealing section, the end of the inner cylinder away from the sealing section is used for fixed connection with a remote plasma chamber device, and the sealing section is used for installation on the process chamber.

2. The sealing flange according to claim 1, wherein: The magnetic component includes at least two sub-magnetic components, and the two or more sub-magnetic components are arranged around the outer side of the inner cylinder.

3. The sealing flange according to claim 1, wherein: The sealing ring is a fluororubber sealing ring.

4. The sealing flange according to claim 1, wherein: A sealing groove is provided at one end of the inner cylinder exposed from the outer cylinder, and the sealing ring is installed in the sealing groove.

5. The sealing flange according to claim 1, wherein: The end of the inner cylinder exposed from the outer cylinder is provided with a chamfer.

6. The sealing flange according to claim 1, wherein: The inner cavity of the connecting section is a tapered cavity that gradually shrinks in a direction away from the inner cylinder.

7. The sealing flange according to claim 1, wherein: One end of the sealing section close to the connecting section is configured to be conical, the inner cavity of the sealing section close to the connecting section is a conical cavity, and the maximum diameter of the inner cavity of the sealing section is equal to the minimum diameter of the inner cavity of the connecting section.

8. A remote plasma chamber device, characterized in that: It comprises a remote plasma chamber device, a process chamber and a sealing flange according to any one of claims 1 to 7, wherein one end of the inner cylinder away from the sealing section is mounted on the remote plasma chamber device, and the sealing section is mounted on the process chamber.

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