Helium mass spectrum leak detection clamp

By designing the placement plate, hollow column, support legs and positioning blocks of the helium mass spectrometer leak detection fixture, the problems of clutter and inconvenience in material retrieval during multiple product testing were solved, and the effect of simultaneous multi-product testing and convenient material retrieval was achieved.

CN223361692UActive Publication Date: 2025-09-19HUACHEN XINGUANG (WUXI) SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202422720503.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-08
Publication Date
2025-09-19
Estimated Expiration
2034-11-08

AI Technical Summary

Technical Problem

When existing helium mass spectrometer leak detectors are used to detect multiple products, the products are placed in a messy manner and it is inconvenient to remove the materials.

Method used

A helium mass spectrometer leak detection fixture was designed, including a placement plate, a hollow column, a support leg, a positioning block, and a pipe clamp. The detection head cable was wrapped around the hollow column, the positioning block was used to limit the product, and the support leg raised the placement plate to ensure the helium diffusion efficiency. The cable was fixed with a pipe clamp to achieve orderly placement of multiple products and convenient material retrieval.

Benefits of technology

It enables simultaneous testing of multiple products, avoids spontaneous product movement and cable clutter, improves helium diffusion efficiency, and facilitates the material removal process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a helium mass spectrum leak detection clamp, and relates to the technical field of helium mass spectrums, the helium mass spectrum leak detection clamp comprises a placing plate, a hollow column for cable winding is fixed in the center of the top surface of the placing plate, a plurality of support legs are fixed at the bottom of the placing plate, a plurality of groups of positioning blocks are arranged on the placing plate, the lower end of the hollow column penetrates downwards, and a plurality of vent holes are formed in the outer wall of the hollow column. The vent holes communicate with the interior of the hollow column, and the placement plate is provided with a through hole communicating with the lower end of the hollow column. The helium mass spectrometer leak detection clamp can test a plurality of to-be-detected products at the same time, and the to-be-detected products are limited through the positioning blocks, so that spontaneous movement of the to-be-detected products is avoided; the cable of the detection head is wound through the hollow column, the orderliness is good, cable disorder is avoided, and material taking is convenient after detection is completed; the placing plate is heightened through the supporting feet, the situation that the placing plate shields the helium inlet is avoided, helium enters the hollow column through the through hole, then the helium is diffused to the space above the placing plate through the vent holes, and the helium diffusion efficiency is improved.
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Description

Technical Field

[0001] The present application relates to the technical field of helium mass spectrometry, and in particular to a helium mass spectrometry leak detection fixture. Background Art

[0002] Helium mass spectrometer leak detectors use helium or hydrogen as a leak detector gas, and a gas analyzer to detect helium. Helium has a low background noise, small molecular weight, and low viscosity, making it easy to pass through leaks and diffuse. Furthermore, helium is an inert gas and does not corrode equipment, making it a common leak detector. This gas is sprayed onto a container connected to a gas analyzer (set to react only to helium). If the container has a leak, the analyzer will react, indicating the leak's location and amount.

[0003] The existing utility model patent with announcement number CN213985566U discloses a helium mass spectrometer leak detector, including an outer wall, a base, an air pipe, a rotor and a closed door. The bottom end of the outer wall is fixedly mounted with a base, and the top corner of the bottom end of the base is symmetrically fixedly mounted with a rotor. An air pipe is provided inside the base, and the top end of the air pipe is fixedly connected to the bottom end of the outer wall. A closed door is symmetrically rotatably mounted at the opening of the outer wall. A rotating device for assisting material rotation is fixedly mounted on the top end of the inner part of the outer wall, the top end of the air pipe is fixedly connected to the bottom end of the rotating device, and an extraction device for extracting internal air is fixedly mounted on the bottom end of the inner part of the base. Compared with the container of the traditional helium mass spectrometer detector, this device can quickly extract the internal air when in use, and during the processing process, the internal material can be adjusted by rotating the internal device.

[0004] Regarding the above-mentioned related technologies, the inventors believe that when laser products are tested, the products will be placed in a test container and sent to the helium mass spectrometer leak detector, but usually only one can be tested at a time. When multiple products are tested at the same time, they are often placed in the test container in a messy manner, which makes it inconvenient to remove the materials after the test. Utility Model Content

[0005] The present application provides a helium mass spectrometer leak detection fixture, which is convenient for limiting the placement of multiple products to be tested, avoiding clutter, and making it easy to take out materials.

[0006] This application provides a helium mass spectrometer leak detection fixture, which adopts the following technical solutions:

[0007] A helium mass spectrometer leak detection fixture includes a placement plate, a hollow column for cable winding is fixed at the center of the top surface of the placement plate, a plurality of legs are fixed to the bottom of the placement plate, a plurality of positioning blocks are provided on the placement plate, the lower end of the hollow column passes downward, a plurality of ventilation holes are provided on the outer wall of the hollow column, the ventilation holes are connected to the interior of the hollow column, and the placement plate is provided with a through hole connected to the lower end of the hollow column.

[0008] By adopting the above technical solution, the cable of the equipment detection head is wrapped around the hollow column, and then the detection head is inserted into the product to be tested. The support legs raise the placement plate to prevent it from blocking the helium inlet. Helium enters the hollow column through the through-holes and then diffuses into the space above the placement plate through the vents, improving the efficiency of helium diffusion. This fixture can test multiple products simultaneously, and the positioning blocks limit the position of the products to be tested to prevent them from moving spontaneously. By wrapping the cable of the detection head around the hollow column, it is well organized, avoiding cable clutter and making it easy to remove the materials after testing.

[0009] Optionally, the through hole is a threaded hole, and the outer wall of the lower end of the hollow column is provided with an external thread, and the hollow column is threadedly connected to the through hole via the external thread.

[0010] By adopting the above technical solution, the disassembly and assembly of the hollow column and the placement plate are facilitated by the threaded connection.

[0011] Optionally, a plurality of pipe clamps are fixed to the outer wall of the hollow column, and the pipe clamps are distributed along the circumference of the hollow column.

[0012] By adopting the above technical solution, the cable of the equipment detection head is wrapped around the hollow column, the cable is then clamped into the pipe clamp, and the detection head is inserted into the product to be detected. This can better limit the cable and prevent the cable from loosening and becoming disordered.

[0013] Optionally, the opening direction of the pipe clamp is away from the hollow column, and the opening of the pipe clamp is a C-shaped shrinkage groove.

[0014] By adopting the above technical solution, the disassembly and assembly of the cable and the pipe clamp is relatively simple, and the cable can be directly inserted into the pipe clamp or pulled out of the pipe clamp with force.

[0015] Optionally, the positioning block is in the shape of a round rod, and is used to be inserted into a hole of the product to be tested.

[0016] By adopting the above technical solution, the round rod-shaped positioning block is used to adapt to the product to be inspected with its own hole position.

[0017] Optionally, a fixing bolt passes through the positioning block, and the lower end of the fixing bolt passes through the placement plate and is threadedly connected to a fixing nut.

[0018] By adopting the above technical solution, the positioning block can be disassembled and assembled by fixing bolts and nuts.

[0019] Optionally, a sliding groove is provided on the placement plate, and the fixing bolt is slidably arranged in the sliding groove and can rotate in the sliding groove.

[0020] By adopting the above technical solution, after loosening the fixing bolt, the personnel can drag the positioning block to move the positioning block along the slide groove, thereby adjusting the distance between the two positioning blocks to adapt to the width of the product to be inspected.

[0021] Optionally, a guide groove is provided on the bottom surface of the placement plate, and the fixing nut is slidably disposed in the guide groove but cannot rotate in the guide groove.

[0022] By adopting the above technical solution, the fixing nut cannot be rotated through a guide groove of a certain width. When tightening the fixing bolt, there is no need to limit the fixing nut with a wrench on the back side of the placement plate, which makes it more convenient to tighten the fixing bolt.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. It can test multiple products to be tested at the same time, and limit the position of the products to be tested by positioning blocks to prevent the products from moving spontaneously; the cables of the test head are wound around the hollow column, which is well organized and avoids cable clutter, making it easy to remove materials after testing;

[0025] 2. Use the support legs to raise the placement plate to prevent it from blocking the helium inlet. The helium enters the hollow column through the through hole and then diffuses to the space above the placement plate through the vent hole, thereby improving the efficiency of helium diffusion. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a three-dimensional diagram of the helium mass spectrometer leak detection fixture of Example 1;

[0027] Figure 2 is an exploded view of embodiment 1;

[0028] Figure 3 This is a usage state diagram of the first embodiment;

[0029] Figure 4 This is a usage state diagram of Example 2;

[0030] Figure 5 yes Figure 4 A magnified view of point A;

[0031] Figure 6 It is a partial view of the bottom surface of the placement plate of Example 2.

[0032] Explanation of the accompanying reference numerals: 1. Placement plate; 2. Hollow column; 3. Support leg; 4. Positioning block; 21. Vent hole; 11. Through hole; 22. Pipe clamp; 41. Fixing bolt; 42. Fixing nut; 12. Slide groove; 13. Guide groove. DETAILED DESCRIPTION

[0033] The present application is further described in detail below with reference to the accompanying drawings.

[0034] Example 1:

[0035] Reference Figure 1 This embodiment discloses a helium mass spectrometer leak detection fixture, including a placement plate 1, a hollow column 2 for cable winding is fixed at the center of the top surface of the placement plate 1, a plurality of legs 3 are fixed at the bottom of the placement plate 1, and a plurality of positioning blocks 4 are provided on the placement plate 1.

[0036] Reference Figure 2 The lower end of the hollow column 2 is downwardly penetrating, and the outer wall of the hollow column 2 is provided with a plurality of vent holes 21, which are connected to the interior of the hollow column 2. The placement plate 1 is provided with a through hole 11 connected to the lower end of the hollow column 2. Specifically, the through hole 11 is a threaded hole, and the outer wall of the lower end of the hollow column 2 is provided with an external thread. The hollow column 2 is threadedly connected to the through hole 11 via the external thread, which facilitates the assembly and disassembly of the hollow column 2 and the placement plate 1. The helium in the detection container can enter the hollow column 2 through the through hole 11, and then diffuse into the space above the placement plate 1 through the vent holes 21, thereby improving the efficiency of helium diffusion.

[0037] Reference Figure 1 and Figure 3 , a number of pipe clamps 22 are fixed to the outer wall of the hollow column 2, and the pipe clamps 22 are distributed along the circumference of the hollow column 2. The opening direction of the pipe clamp 22 is away from the hollow column 2, and the opening of the pipe clamp 22 is a C-shaped shrinkage groove. The pipe clamp 22 is made of plastic, and its C-shaped opening position can be expanded through elastic deformation. The pipe clamp 22 is located near the bottom of the hollow column 2. After the cable of the equipment detection head is wrapped around the hollow column 2, the cable is then clamped into the pipe clamp 22, and the detection head is inserted into the product to be detected. This can better limit the cable and prevent the cable from loosening and becoming disordered. The disassembly and assembly of the cable and the pipe clamp 22 is also relatively simple. You can directly use force to insert the cable into the pipe clamp 22 or pull out the pipe clamp 22.

[0038] The positioning blocks 4 of this embodiment are round rods and are inserted into the holes of the products to be tested. The positioning blocks 4 can be fixed to the placement plate 1 using various methods, such as threaded connections, bolted connections, plug-in connections, adhesive connections, and welding. Multiple groups of positioning blocks 4 are distributed circumferentially around the hollow column 2, allowing the products to be placed at different locations on the placement plate 1 while preventing overcrowding of adjacent products.

[0039] The helium mass spectrometer leak detection fixture of the present embodiment is designed to be placed in a test container, the bottom of which serves as the entry point for helium gas. The cable of the device's test head is wrapped around a hollow column 2, then clamped into a pipe clamp 22, and the test head is then inserted into the product to be tested.

[0040] The placement plate 1 is elevated by the support legs 3 to prevent the placement plate 1 from blocking the helium inlet. The helium enters the hollow column 2 through the through hole 11, and then diffuses to the space above the placement plate 1 through the vent hole 21, thereby improving the efficiency of helium diffusion.

[0041] During testing, if the product is leak-tight, external helium cannot enter the product, and the device's detection head cannot detect helium, indicating a pass. Conversely, if the device's detection head detects helium, it indicates a leak-tightness issue with the product, and the test fails.

[0042] Through the solution of the present application, multiple products to be tested can be tested at the same time. The positioning block 4 is used to limit the position of the products to be tested to prevent them from moving spontaneously. The cable of the test head is wrapped around the hollow column 2, which is well organized to avoid cable clutter and make it convenient to remove materials after testing.

[0043] Example 2:

[0044] Reference Figure 4 and Figure 5 A helium mass spectrometer leak detection fixture, the difference between Example 2 and Example 1 is that: in this embodiment, for the product to be tested that has no holes, the positioning block 4 is not a round rod. The positioning block 4 abuts against the side wall of the product to be tested by the side wall, thereby positioning, and the product to be tested is confined between the two positioning blocks 4.

[0045] Reference Figure 5 and Figure 6 The positioning block 4 is penetrated by a fixing bolt 41, and the lower end of the fixing bolt 41 passes through the placement plate 1 and is threadedly connected to a fixing nut 42. The placement plate 1 is provided with a chute 12, and the fixing bolt 41 is slidably set in the chute 12 and can rotate in the chute 12.

[0046] A guide groove 13 is provided on the bottom surface of the placement plate 1 , and the fixing nut 42 is slidably disposed in the guide groove 13 but cannot rotate in the guide groove 13 . This structure is achieved by the guide groove 13 having a certain width.

[0047] The working principle of Example 2 is as follows: After loosening the fixing bolt 41, the operator can drag the positioning block 4, causing it to move along the slide 12, thereby adjusting the spacing between the two positioning blocks 4 to adapt to the width of the product to be inspected. After tightening the fixing bolt 41, the positioning block 4 is fixed, and the guide groove 13 guides the sliding of the fixing nut 42 and prevents the fixing nut 42 from rotating. Therefore, when tightening the fixing bolt 41, there is no need to use a wrench to limit the fixing nut 42 on the back side of the placement plate 1, making it more convenient to tighten the fixing bolt 41.

[0048] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. Helium mass spectrometer leak detection fixture, characterized by: The utility model comprises a placement plate (1), wherein a hollow column (2) for winding cables is fixed at the center of the top surface of the placement plate (1), a plurality of legs (3) are fixed at the bottom of the placement plate (1), a plurality of positioning blocks (4) are provided on the placement plate (1), the lower end of the hollow column (2) is passed downward, the outer wall of the hollow column (2) is provided with a plurality of ventilation holes (21), the ventilation holes (21) are communicated with the interior of the hollow column (2), and the placement plate (1) is provided with a through hole (11) communicated with the lower end of the hollow column (2).

2. The helium mass spectrometer leak detection fixture according to claim 1, characterized in that: The through hole (11) is a threaded hole, and the outer wall of the lower end of the hollow column (2) is provided with an external thread, and the hollow column (2) is threadedly connected to the through hole (11) via the external thread.

3. The helium mass spectrometer leak detection fixture according to claim 1, characterized in that: A plurality of pipe clamps (22) are fixed to the outer wall of the hollow column (2), and the pipe clamps (22) are distributed along the circumference of the hollow column (2).

4. The helium mass spectrometer leak detection fixture according to claim 3, characterized in that: The opening direction of the pipe clamp (22) is away from the hollow column (2), and the opening of the pipe clamp (22) is a C-shaped shrinking groove.

5. The helium mass spectrometer leak detection fixture according to claim 1, characterized in that: The positioning block (4) is in the shape of a round rod and is used for inserting into the hole of the product to be tested.

6. The helium mass spectrometer leak detection fixture according to claim 1, characterized in that: A fixing bolt (41) passes through the positioning block (4), and the lower end of the fixing bolt (41) passes through the placement plate (1) and is threadedly connected to a fixing nut (42).

7. The helium mass spectrometer leak detection fixture according to claim 6, characterized in that: A sliding groove (12) is provided on the placement plate (1), and the fixing bolt (41) is slidably arranged in the sliding groove (12) and can rotate in the sliding groove (12).

8. The helium mass spectrometer leak detection fixture according to claim 6, characterized in that: A guide groove (13) is provided on the bottom surface of the placement plate (1), and the fixing nut (42) is slidably arranged in the guide groove (13) but cannot rotate in the guide groove (13).

Citation Information

Patent Citations

  • Helium mass spectrometer leak detector

    CN213985566U