Two-dimensional scanning galvanometer performance testing device

Abstract

The utility model relates to the technical field of galvanometer detection, in particular to a two-dimensional scanning galvanometer performance testing device which comprises a Y-direction horizontal adjusting plate arranged on the upper side of a testing frame, an X-direction horizontal adjusting plate arranged on the upper side of the middle position of the Y-direction horizontal adjusting plate, a light source support arranged on the X-direction horizontal adjusting plate, and a collimation light source optically coaxial with the light source support. A vibrating mirror is arranged on the upper side of the light source support, a vibrating mirror adapter ring is further arranged on the lower side of the vibrating mirror, the camera is arranged on the Y-direction horizontal adjusting plate, the optical plate with the grid scales is arranged in the middle of the bottom of the testing frame, and the Y-direction horizontal adjusting plate is arranged on the upper side of the testing frame so that the Y-direction position of the light source support can be adjusted during detection. The X-direction horizontal adjusting plate is arranged on the upper side of the middle position of the Y-direction horizontal adjusting plate, the X-direction position of the light source support during detection can be adjusted, so that the light source support can be kept in a standard horizontal state, and the axis of a light outlet of the galvanometer is located at the center original point of the grid scale optical plate.

Description

Technical Field

[0001] The utility model relates to the technical field of galvanometer detection, in particular to a two-dimensional scanning galvanometer performance testing device. Background Art

[0002] With the development of science and technology and social progress, the application areas of scanning galvanometers have expanded extremely widely. Currently, scanning galvanometers are mainly used in marking, rapid prototyping (additive manufacturing), 3D projection and other fields on the market. However, industrial applications in different fields have different performance requirements for galvanometer products. Traditional galvanometer detection instruments are expensive, the equipment is too large, the operation is cumbersome, the inspection process is complicated, and it is not possible to quickly detect the optical characteristics and quality of the galvanometer motor. Therefore, how to quickly and effectively identify the performance differences of different models of galvanometer products will help to accurately position the market positioning of various galvanometer products, improve product added value, and verify the stability of galvanometer products. This requires a two-dimensional scanning galvanometer performance test device that can test the galvanometer gain characteristics, the concentricity of the galvanometer center optical axis, the linear symmetry of the galvanometer motor movement, and other performance tests, as well as a detection device for detecting and quantitatively feedback the quality of the galvanometer performance. Utility Model Content

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a two-dimensional scanning galvanometer performance testing device to solve the problem of how to quickly detect the performance of the galvanometer in the prior art.

[0004] To achieve the above-mentioned and other related purposes, the present invention provides the following technical solutions:

[0005] A two-dimensional scanning galvanometer performance testing device, comprising:

[0006] A test frame, wherein a Y-axis horizontal adjustment plate is provided on the upper side of the test frame, an X-axis horizontal adjustment plate is provided on the upper side of the center of the Y-axis horizontal adjustment plate, and a light source bracket is provided on the X-axis horizontal adjustment plate;

[0007] A collimated light source, the collimated light source being disposed on one side of a light source bracket and being optically coaxial with the light source bracket. A galvanometer is disposed on the upper side of the light source bracket, and the light input hole of the galvanometer is optically coaxial with the light source bracket. A galvanometer adapter is further disposed on the lower side of the galvanometer, and the galvanometer adapter is optically coaxial with the light output port of the galvanometer.

[0008] A camera is disposed on the Y-axis horizontal adjustment plate and close to the galvanometer;

[0009] An optical plate with a grid scale is arranged at the center of the bottom of the test frame.

[0010] To implement the above technical solution, a Y-axis horizontal adjustment plate is set on the upper side of the test frame to adjust the Y-axis position of the light source bracket during detection. An X-axis horizontal adjustment plate is set on the upper side of the center position of the Y-axis horizontal adjustment plate to adjust the X-axis position of the light source bracket during detection, so that the light source bracket can maintain a standard horizontal state, and the axis center of the light outlet of the galvanometer is at the center origin of the grid scale optical plate.

[0011] The height of the axial center of the galvanometer's light entrance hole from the center origin of the grid-scaled optical plate is h. The camera records the test process in real time, and visually assists in capturing the light spot trajectory to generate (x, y) coordinate data and save it. At the same time, the auxiliary use of the camera can reduce external operation interference and improve the stability of the test environment. The center of the grid-scaled optical plate is provided with a coordinate origin (0, 0), and the grid-scaled optical plate is designed with an equidistant scale grid, which can be used as a relative reference system for the camera's poetry function. The actual deflection angle of the galvanometer can be calculated by the trigonometric function formula, that is, θ x =arctan(x / h) is the actual deflection angle in the X direction, θ y =arctan(y / h) is the actual deflection angle in the Y direction.

[0012] The light source bracket can adapt to most positioning and mounting holes on the market, and the galvanometer adapter ring is used to quickly disassemble and locate the axis of the galvanometer's light outlet.

[0013] In one embodiment of the present invention, an X-direction adjustment slot is provided in the center position of the Y-direction horizontal adjustment plate, the X-direction horizontal adjustment plate is slidably connected in the X-direction adjustment slot, and a fine-tuning bolt is provided on the side wall of the X-direction adjustment slot, the fine-tuning bolt passes through the side wall of the adjustment slot and is connected to the X-direction horizontal adjustment plate.

[0014] To implement the above technical solution, a fine-tuning bolt is set, and the fine-tuning bolt is passed through the side wall of the adjustment slot and connected to the X-direction horizontal adjustment plate. By rotating the fine-tuning bolt, the position of the X-direction horizontal adjustment plate in the X direction can be adjusted, thereby adjusting the position of the light source bracket along the X direction.

[0015] In one embodiment of the present invention, a vacuum aperture is disposed between the light source bracket and the galvanometer.

[0016] To implement the above technical solution, the vacuum aperture is used to filter the collimated light source to form a light spot with a smaller diameter, so as to improve the resolution of the light spot trajectory.

[0017] In one embodiment of the present invention, a light-through hole is provided in the X-axis horizontal adjustment plate, the galvanometer adapter ring is located in the light-through hole, and a gap between the galvanometer adapter ring and the light-through hole is tightly fitted.

[0018] To implement the above technical solution and match the gap between the galvanometer adapter ring and the light-through hole, the position of the galvanometer adapter ring in the light-through hole can be easily adjusted, and the galvanometer adapter ring and the light outlet of the galvanometer product can be kept optically coaxial.

[0019] Rotate the galvanometer with the galvanometer adapter as the axis, observe whether the light spot trajectory on the optical plate with grid scale deviates from the center coordinate origin (0, 0), and record the maximum deviation coordinate (X0, Y0), which corresponds to the galvanometer axis deviation angle θx0 = arctan (X0 / h) for the X-direction deviation angle, and θy0 = arctan (Y0 / h) for the Y-direction deviation angle.

[0020] In one embodiment of the present invention, both ends of the Y-axis horizontal adjustment plate are connected to the top of the test frame by bolts.

[0021] By implementing the above technical solution and utilizing bolt connection, the Y-direction position of the Y-direction horizontal adjustment plate on the top of the test frame can be easily adjusted.

[0022] In one embodiment of the present invention, shock-absorbing feet supporting the test clamp are provided at the bottom of the test frame, an electrical control cabinet and an industrial computer are provided on the left and right sides of the test frame respectively, and a display is also provided on the upper side of the test frame.

[0023] To implement the above technical solution, the optical plate with grid scale is kept in a standard horizontal state by adjusting the shock-absorbing feet.

[0024] In one embodiment of the present invention, sensors are further provided around the upper side of the grid scale optical plate.

[0025] To implement the above technical solution, the sensors are PSD sensors, which are distributed around the optical plate with grid scale. The coordinates (a, b) of the center point of the PSD sensor on the optical plate with grid scale are recorded. The galvanometer is controlled to move the light spot track to the center of each of the four PSD sensors. The position difference distance ω of the light spot track repeated twice for each PSD sensor is recorded, that is, the repeatability error of the galvanometer product is θω=arctan((ω+(a 2 +b 2 ) 0.5 ) / h)-arctan((a 2 +b 2 ) 0.5 / h).

[0026] As described above, the utility model provides a two-dimensional scanning galvanometer performance testing device, which has the following beneficial effects: by setting a Y-axis horizontal adjustment plate on the upper side of the test frame, the Y-axis position of the light source bracket during detection can be adjusted; an X-axis horizontal adjustment plate is set on the upper side of the center position of the Y-axis horizontal adjustment plate, which can adjust the X-axis position of the light source bracket during detection, so that the light source bracket can maintain a standard horizontal state, and the axis center of the light outlet of the galvanometer is at the center origin of the grid scale optical plate.

[0027] The height of the axial center of the galvanometer's light entrance hole from the center origin of the grid-scaled optical plate is h. The camera records the test process in real time, and visually assists in capturing the light spot trajectory to generate (x, y) coordinate data and save it. At the same time, the auxiliary use of the camera can reduce external operation interference and improve the stability of the test environment. The center of the grid-scaled optical plate is provided with a coordinate origin (0, 0), and the grid-scaled optical plate is designed with an equidistant scale grid, which can be used as a relative reference system for the camera's poetry function. The actual deflection angle of the galvanometer can be calculated by the trigonometric function formula, that is, θ x =arctan(x / h) is the actual deflection angle in the X direction, θ y =arctan(y / h) is the actual deflection angle in the Y direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Shown is a structural schematic diagram of a two-dimensional scanning galvanometer performance testing device disclosed in an embodiment of the present utility model.

[0029] Figure 2 Shown is a schematic diagram of the light source bracket structure of the two-dimensional scanning galvanometer performance testing device disclosed in an embodiment of the present utility model.

[0030] Figure 3 Shown is a schematic diagram of the vacuum aperture structure of the two-dimensional scanning galvanometer performance testing device disclosed in an embodiment of the present utility model.

[0031] Figure 4 Shown is a schematic diagram of the X-axis horizontal adjustment plate structure of the two-dimensional scanning galvanometer performance testing device disclosed in an embodiment of the present utility model.

[0032] Component number description

[0033] 1. Test frame; 2. Y-axis horizontal adjustment plate; 3. X-axis horizontal adjustment plate; 4. Light source bracket; 5. Collimated light source; 6. Galvanometer; 7. Galvanometer adapter ring; 8. Camera; 9. Optical plate with grid scale; 10. Fine-tuning bolts; 11. Vacuum aperture; 12. Light aperture; 13. Shock-absorbing feet; 14. Electrical control cabinet; 15. Industrial computer; 16. Sensor. DETAILED DESCRIPTION

[0034] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand the other advantages and functions of the present invention from the contents disclosed in this specification. It should be noted that the following embodiments and features in the embodiments can be combined with each other unless there is a conflict.

[0035] See also Figures 1 to 4 The utility model provides a two-dimensional scanning galvanometer performance testing device, including a Y-axis horizontal adjustment plate 2 arranged on the upper side of a test frame 1, an X-axis horizontal adjustment plate 3 arranged on the upper side of the center position of the Y-axis horizontal adjustment plate 2, a light source bracket 4 arranged on the X-axis horizontal adjustment plate 3, a collimated light source 5 arranged on one side of the light source bracket 4, and the collimated light source 5 and the light source bracket 4 are optically coaxial, a galvanometer 6 is arranged on the upper side of the light source bracket 4, the light source bracket 4 and the light entrance hole of the galvanometer 6 remain optically coaxial, a galvanometer adapter ring 7 is further arranged on the lower side of the galvanometer 6, the galvanometer adapter ring 7 and the light exit port of the galvanometer 6 remain optically coaxial, a camera 8 is arranged on the Y-axis horizontal adjustment plate 2, and is arranged close to the galvanometer 6, and an optical plate 9 with a grid scale is arranged at the bottom center of the test frame 1.

[0036] By setting a Y-axis horizontal adjustment plate 2 on the upper side of the test frame 1, the Y-axis position of the light source bracket 4 during detection can be adjusted. An X-axis horizontal adjustment plate 3 is set on the upper side of the center position of the Y-axis horizontal adjustment plate 2, which can adjust the X-axis position of the light source bracket 4 during detection, so that the light source bracket 4 can maintain a standard horizontal state, and the axis center of the light outlet of the galvanometer 6 is at the center origin of the grid scale optical plate.

[0037] The height of the axial center of the light entrance hole of the galvanometer 6 from the center origin of the grid-scaled optical plate 9 is h. The camera 8 records the test process in real time and visually assists in capturing the light spot trajectory to generate (x, y) coordinate data and save it. At the same time, the auxiliary use of the camera 8 can reduce external operation interference and improve the stability of the test environment. The coordinate origin (0, 0) is set in the center of the grid-scaled optical plate 9, and the grid-scaled optical plate 9 is designed with an equally spaced scale grid, which can be used as a relative reference system for the poem function of the camera 8. The actual deflection angle of the galvanometer 6 can be calculated by the trigonometric function formula, that is, θx = arctan (x / h) is the actual deflection angle in the X direction, and θy = arctan (y / h) is the actual deflection angle in the Y direction.

[0038] The light source bracket 4 can be adapted to most positioning and mounting holes on the market, and the galvanometer adapter ring 7 is used for quickly disassembling and assembling the axis of the light outlet of the positioning galvanometer 6 .

[0039] The galvanometer 6 is controlled to run a standard circular pattern so that the light spot track forms a circular track on the optical plate 9 with a grid scale, and the maximum coordinates of the positive and negative tracks in the X and Y directions are recorded respectively. The linear symmetry difference of the galvanometer 6 product can be calculated by the same method.

[0040] Control the galvanometer 6 to run the rectangular pattern to the maximum extent so that the light spot trajectory forms a rectangular trajectory on the optical plate 9 with grid scale, and record the format size W*L of the X-center axis and the Y-center axis respectively. The maximum scanning angle of the galvanometer 6 can be calculated as θW=2*arctan(W / 2 / h) and θL=2*arctan(L / 2 / h).

[0041] In one embodiment of the present invention, an X-direction adjustment slot is provided in the center position of the Y-direction horizontal adjustment plate 2, the X-direction horizontal adjustment plate 3 is slidably connected in the X-direction adjustment slot, and a fine-tuning bolt 10 is provided on the side wall of the X-direction adjustment slot, the fine-tuning bolt 10 passes through the side wall of the adjustment slot and is connected to the X-direction horizontal adjustment plate 3.

[0042] By providing a fine-tuning bolt 10, and passing the fine-tuning bolt 10 through the side wall of the adjustment slot and connected to the X-direction horizontal adjustment plate 3, the fine-tuning bolt 10 is rotated to adjust the position of the X-direction horizontal adjustment plate 3 in the X direction, thereby adjusting the position of the light source bracket 4 in the X direction. A vacuum aperture 11 is configured between the light source bracket 4 and the galvanometer 6. The vacuum aperture 11 is used to filter the collimated light source 5 to form a light spot with a smaller diameter, thereby improving the resolution of the light spot trajectory.

[0043] A light-through hole 12 is set in the X-axis horizontal adjustment plate 3, and the galvanometer adapter ring 7 is located in the light-through hole 12, and the gap between the galvanometer adapter ring 7 and the light-through hole 12 is tightly matched. By matching the gap between the galvanometer adapter ring 7 and the light-through hole 12, the position of the galvanometer adapter ring 7 in the light-through hole 12 can be easily adjusted, and the light outlet of the galvanometer adapter ring 7 and the galvanometer 6 product are kept optically coaxial.

[0044] Rotate the galvanometer 6 with the galvanometer adapter ring 7 as the axis, observe whether the light spot trajectory on the grid-scaled optical plate 9 deviates from the center coordinate origin (0, 0), and record the maximum deviation coordinate (X0, Y0), which corresponds to the galvanometer 6 axis deviation angle θx0 = arctan (X0 / h) as the deviation angle in the X direction, and θy0 = arctan (Y0 / h) as the deviation angle in the Y direction.

[0045] The two ends of the Y-direction horizontal adjustment plate 2 are connected to the top of the test frame 1 by bolts. The Y-direction position of the Y-direction horizontal adjustment plate 2 on the top of the test frame 1 can be easily adjusted by the bolt connection.

[0046] A shock-absorbing foot 13 supporting the test clamp is set at the bottom of the test frame 1. An electrical control cabinet 14 and an industrial computer 15 are respectively set on the left and right sides of the test frame 1. A display is also set on the upper side of the test frame 1. By adjusting the shock-absorbing foot 13, the optical plate 9 with grid scale is kept in a standard horizontal state.

[0047] Sensors 16 are also provided around the upper side of the grid-scale optical plate. The sensors 16 are PSD sensors 16. The PSD sensors 16 are distributed around the top of the grid-scale optical plate 9. The coordinates (a, b) of the center point of the PSD sensor 16 on the grid-scale optical plate 9 are recorded. The galvanometer 6 is controlled to move the light spot trajectory to the center of the four PSD sensors 16 respectively, and the position difference distance ω of the light spot trajectory repeated twice for each PSD sensor 16 is recorded respectively, that is, the repeated positioning error of the galvanometer 6 product θω=arctan((ω+(a2+b2)0.5) / h)-arctan((a2+b2)0.5 / h).

[0048] An optical plate with a grid scale is used to observe the scanning trajectory of the galvanometer, or high-precision position sensors and light detectors (such as PSD sensors, CCD cameras, etc.) are used to record and measure parameters such as the deflection angle, motion symmetry, and linearity change of the galvanometer. Equipped with data acquisition and processing software, the measurement data can be recorded, analyzed, and processed in real time.

[0049] The utility model has wide application value in the fields of laser processing, optical measurement, radar detection, etc.

[0050] By comprehensively and accurately testing the various performance indicators of the galvanometer, we can ensure its stability and reliability in actual applications, improve product quality and production efficiency. At the same time, this platform also provides important technical support and reference for the research and development and improvement of galvanometers.

[0051] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Any equivalent modifications or variations made by persons skilled in the art without departing from the spirit and technical concepts disclosed herein shall be encompassed by the claims of the present invention.

Claims

1. A two-dimensional scanning galvanometer performance testing device, characterized in that: include: A test frame, wherein a Y-axis horizontal adjustment plate is provided on the upper side of the test frame, an X-axis horizontal adjustment plate is provided on the upper side of the center of the Y-axis horizontal adjustment plate, and a light source bracket is provided on the X-axis horizontal adjustment plate; A collimated light source, the collimated light source being disposed on one side of a light source bracket and being optically coaxial with the light source bracket. A galvanometer is disposed on the upper side of the light source bracket, and the light input hole of the galvanometer is optically coaxial with the light source bracket. A galvanometer adapter is further disposed on the lower side of the galvanometer, and the galvanometer adapter is optically coaxial with the light output port of the galvanometer. A camera is disposed on the Y-axis horizontal adjustment plate and close to the galvanometer; An optical plate with a grid scale is arranged at the center of the bottom of the test frame.

2. The two-dimensional scanning galvanometer performance testing device according to claim 1, characterized in that: An X-direction adjustment slot is provided at the center of the Y-direction horizontal adjustment plate, the X-direction horizontal adjustment plate is slidably connected in the X-direction adjustment slot, and a fine-tuning bolt is provided on the side wall of the X-direction adjustment slot, the fine-tuning bolt passes through the side wall of the adjustment slot and is connected to the X-direction horizontal adjustment plate.

3. The two-dimensional scanning galvanometer performance testing device according to claim 1, characterized in that: A vacuum aperture is arranged between the light source bracket and the galvanometer.

4. The two-dimensional scanning galvanometer performance testing device according to claim 1, characterized in that: A light-through hole is provided in the X-axis horizontal adjustment plate, the galvanometer adapter ring is located in the light-through hole, and a gap between the galvanometer adapter ring and the light-through hole is tightly matched.

5. The two-dimensional scanning galvanometer performance testing device according to claim 1, characterized in that: The two ends of the Y-direction horizontal adjustment plate are connected to the top of the test frame by bolts.

6. The two-dimensional scanning galvanometer performance testing device according to claim 1, characterized in that: The bottom of the test frame is provided with shock-absorbing feet for supporting the test clamping. The left and right sides of the test frame are respectively provided with an electrical control cabinet and an industrial computer. The upper side of the test frame is also provided with a display.

7. The two-dimensional scanning galvanometer performance testing device according to claim 1, characterized in that: Sensors are also arranged around the upper side of the grid scale optical plate.

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