Mechanical arm airway detection device

Abstract

The utility model discloses a mechanical arm air passage detection device which comprises a base. A sliding groove is formed in the base, at least two sets of switching ventilation nozzles are arranged in the sliding groove, and the switching ventilation nozzles are used for being connected with a connector of an air channel to be detected; a cover plate is arranged above the switching ventilation nozzle, and the cover plate is used for fixing the switching ventilation nozzle and the interface of the to-be-detected air passage. According to the utility model, the two groups of switching ventilation nozzles can move towards each other or move back to back along the length direction of the chute, the relative distance between the two switching ventilation nozzles can be adjusted, and interfaces of air channels to be detected of mechanical arms with different sizes can be adapted by adjusting the relative distance between the two switching ventilation nozzles; and the applicability of the whole detection device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of airway detection, in particular to an airway detection device for a mechanical arm. Background Art

[0002] The application of semiconductor chips in various industries is becoming increasingly widespread. During the production of semiconductor chips, semiconductor wafers need to be transferred between various process links. The currently commonly used transfer method is to use a robotic arm to lift and transfer the wafer carrying the chip. The commonly used robotic arm is an adsorption-type robotic arm. When the airway of the adsorption-type robotic arm has unqualified ventilation or uneven ventilation, the wafer will slip during the transfer process. Therefore, the airway of the adsorption-type robotic arm needs to be inspected. However, due to the different size specifications of the adsorption robotic arm, the current detection device cannot fully meet the detection requirements. Different detection devices need to be replaced, which requires a higher hardware cost. Utility Model Content

[0003] The purpose of the present invention is to solve the above problems and provide a mechanical arm airway detection device.

[0004] In order to achieve the above-mentioned purpose, the present invention specifically adopts the following technical solutions:

[0005] A robotic arm airway detection device comprises a base;

[0006] The base is provided with a chute, in which at least two sets of transfer vent nozzles are arranged, and the transfer vent nozzles are used to connect to the interface of the airway to be tested;

[0007] A cover plate is provided above the adapter vent nozzle, and the cover plate is used to fix the adapter vent nozzle and the interface of the airway to be tested.

[0008] Optionally, a support frame is further included, which is arranged above the adapter vent nozzle and is used to fix the adapter vent nozzle on the base.

[0009] Optionally, a vent hole is provided on the surface of the adapter vent nozzle, and an air connection pipe is connected to one side of the adapter vent nozzle, and the air connection pipe is communicated with the vent hole.

[0010] Optionally, the adapter vent nozzle is connected to the air connection pipe via a pagoda connector.

[0011] Optionally, a boss is provided on one side of the base, and scale lines are provided on the surface of the boss along its length direction, and the scale lines are parallel to the sliding groove.

[0012] Optionally, a protrusion is formed on the bottom of the adapter vent nozzle, and the protrusion is adapted to the slide groove.

[0013] Optionally, a locking block is fixed to the bottom of the protrusion.

[0014] Optionally, a positioning hole is provided on the surface of the adapter vent nozzle where the vent hole is provided.

[0015] Optionally, the positioning hole is arranged diagonally on the surface of the adapter vent nozzle.

[0016] Optionally, the base is fixed to the support frame and the cover plate by hexagon socket bolts.

[0017] The beneficial effects of the utility model are as follows:

[0018] 1. In the present invention, the two sets of transfer vent nozzles can move toward or away from each other along the length of the slideway, and the relative distance between the two transfer vent nozzles can be adjusted. By adjusting the relative distance between the two transfer vent nozzles, an interface for the airway to be tested of a robotic arm of different sizes can be realized, thereby improving the applicability of the entire detection device.

[0019] In order to more clearly illustrate the structural features and functions of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is an exploded view of the mechanical arm airway detection device of the present invention.

[0021] Figure numerals: 1, base; 101, boss; 102, scale line; 2, slide groove; 3, adapter vent nozzle; 301, vent hole; 302, air pipe; 303, pagoda connector; 304, protrusion; 305, locking block; 306, positioning hole; 4, cover plate; 5, support frame; 6, air duct to be tested. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention.

[0023] like Figure 1As shown, in one embodiment, a robotic arm airway detection device includes a base 1, a through chute 2 is provided on the upper surface of the base 1, and at least two groups of transfer vent nozzles 3 are provided in the chute 2. Optionally, the transfer vent nozzles 3 are two groups, three groups, four groups or even more groups, which can be adjusted according to actual needs and are not limited here. The two groups of transfer vent nozzles 3 can slide in the chute 2. Specifically, the two groups of transfer vent nozzles 3 can move toward each other or back to back along the length direction of the chute 2. The relative distance between the two transfer vent nozzles 3 can be adjusted. By adjusting the relative distance between the two transfer vent nozzles 3, an interface for the airway 6 to be tested that is adapted to robotic arms of different sizes can be realized, thereby improving the applicability of the entire detection device.

[0024] A cover plate 4 is provided above the adapter vent nozzle 3 , through which the interface between the adapter vent nozzle 3 and the air duct to be tested 6 can be fixed on the base 1 , thereby ensuring stability and sealing when testing the air duct to be tested 6 .

[0025] Optionally, the detection device also includes a support frame 5, which is arranged above the adapter vent nozzle 3. The support frame 5 is used to fix the two adjusted adapter vent nozzles 3 on the base 1 to ensure that the adapter vent nozzle 3 will not move during the detection process, thereby affecting the adapter vent nozzle 3 to deliver gas to the airway 6 to be tested.

[0026] The specific structure of the adapter vent nozzle 3 includes: a vent hole 301 is provided on the surface of the adapter vent nozzle 3 that connects to the interface of the airway 6 to be tested, and the vent hole 301 is adapted to the interface of the airway 6 to be tested. An air connection pipe 302 is connected to one side of the adapter vent nozzle 3, and the air connection pipe 302 is connected to the vent hole 301. The air connection pipe 302 is connected to an external measuring instrument. The measurement data values ​​of the measuring instrument are used to determine whether the airway structure of the robot arm is reasonable, whether the ventilation volume is reasonable, and whether the air outlet of each vent is uniform. Optionally, the adapter vent nozzle 3 is connected to the air connection pipe 302 via a pagoda connector 303, wherein the pagoda connector 303 can be a copper pagoda connector 303.

[0027] Optionally, a boss 101 is provided on one side of the base 1, and a scale line 102 is provided on the surface of the boss 101 along its length direction. The scale line 102 is parallel to the slide groove 2. By referring to the scale line 102, the relative positions of the two sets of adapter ventilation nozzles 3 can be flexibly and accurately adjusted to achieve the effect of being suitable for robotic arms of different sizes.

[0028] Optionally, a protrusion 304 is formed at the bottom of the transfer vent nozzle 3. The protrusion 304 is adapted to fit within the chute 2. It should be noted that the adaptation herein refers to the width of the protrusion 304 being the same as the width of the chute 2, so that the protrusion 304 can slide relatively within the chute 2, thereby adjusting the relative positions of the two sets of transfer vent nozzles 3. A locking block 305 is fixed to the bottom of the protrusion 304. After the relative positions of the two sets of transfer vent nozzles 3 are adjusted, the locking block 305 can be fixed to the protrusion 304 via a fixing pin, and the locking block 305 is affixed to the lower surface of the base 1, thereby securing the transfer vent nozzle 3.

[0029] Optionally, a positioning hole 306 is provided on the surface where the vent hole 301 is provided at the adapter vent nozzle 3, and the positioning holes 306 are arranged diagonally. There are two positioning holes 306, and the positioning holes 306 correspond to the positions of the four through holes of the air duct 6 to be tested of the robotic arm. Since the air inlet of the arm is placed downward, the air inlet cannot be connected to the air duct of the adapter vent nozzle 3 below by blind visual operation. After placing two positioning pins in the positioning hole 306 first, the through hole is inserted into the positioning pin, and the air duct 6 to be tested of the robotic arm can be quickly connected with the vent hole 301 of the adapter vent nozzle 3, which is simpler, more convenient and more accurate.

[0030] Optionally, the base 1 is fixed to the support frame 5 and the cover plate 4 by hexagon socket bolts, so that the entire detection device can be assembled.

[0031] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A robotic arm airway detection device, characterized in that: Including base; The base is provided with a chute, in which at least two sets of transfer vent nozzles are arranged, and the transfer vent nozzles are used to connect to the interface of the airway to be tested; A cover plate is provided above the adapter vent nozzle, and the cover plate is used to fix the adapter vent nozzle and the interface of the airway to be tested.

2. The robotic arm airway detection device according to claim 1, characterized in that: It also includes a support frame, which is arranged above the adapter vent nozzle and is used to fix the adapter vent nozzle on the base.

3. The robotic arm airway detection device according to claim 1, characterized in that: A vent hole is provided on the surface of the adapter vent nozzle, and an air connection pipe is connected to one side of the adapter vent nozzle, and the air connection pipe is communicated with the vent hole.

4. The robotic arm airway detection device according to claim 3, characterized in that: The transfer vent nozzle is connected to the air connection pipe via a pagoda joint.

5. The robotic arm airway detection device according to claim 1, characterized in that: A boss is provided on one side of the base, and scale lines are provided on the surface of the boss along its length direction, and the scale lines are parallel to the sliding groove.

6. The robotic arm airway detection device according to claim 1, characterized in that: A protrusion is formed on the bottom of the adapter vent nozzle, and the protrusion is matched with the slide groove.

7. The robotic arm airway detection device according to claim 6, characterized in that: A locking block is fixed to the bottom of the protrusion.

8. The robotic arm airway detection device according to claim 1, characterized in that: The surface of the adapter vent nozzle where the vent hole is provided is provided with a positioning hole.

9. The robotic arm airway detection device according to claim 8, characterized in that: The positioning holes are arranged diagonally on the surface of the adapter vent nozzle.

10. The robotic arm airway detection device according to claim 2, characterized in that: The base is fixed to the support frame and the cover plate by hexagon socket bolts.

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